JP3994847B2 - Method for producing rare earth based permanent magnet having copper plating film on its surface - Google Patents

Method for producing rare earth based permanent magnet having copper plating film on its surface Download PDF

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JP3994847B2
JP3994847B2 JP2002302088A JP2002302088A JP3994847B2 JP 3994847 B2 JP3994847 B2 JP 3994847B2 JP 2002302088 A JP2002302088 A JP 2002302088A JP 2002302088 A JP2002302088 A JP 2002302088A JP 3994847 B2 JP3994847 B2 JP 3994847B2
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plating film
copper plating
mol
copper
rare earth
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JP2004137533A (en
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稔展 新苗
一英 大島
幸光 宮尾
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Proterial Ltd
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Hitachi Metals Ltd
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Description

【0001】
【発明の属する技術分野】
本発明は、新規な電気銅めっき処理用めっき液を使用した、密着性に優れた銅めっき被膜を表面に有する希土類系永久磁石の製造方法に関する。
【0002】
【従来の技術】
Nd−Fe−B系永久磁石に代表されるR−Fe−B系永久磁石やSm−Fe−N系永久磁石に代表されるR−Fe−N系永久磁石などの希土類系永久磁石は、資源的に豊富で安価な材料が用いられ、かつ、高い磁気特性を有していることから、特にR−Fe−B系永久磁石は今日様々な分野で使用されている。
しかしながら、希土類系永久磁石は反応性の高い希土類元素:Rを含むため、大気中で酸化腐食されやすく、何の表面処理をも行わずに使用した場合には、わずかな酸やアルカリや水分などの存在によって表面から腐食が進行して錆が発生し、それに伴って、磁石特性の劣化やばらつきを招く。さらに、錆が発生した磁石を磁気回路などの装置に組み込んだ場合、錆が飛散して周辺部品を汚染する恐れがある。
上記の点に鑑み、希土類系永久磁石の表面に耐食性被膜である銅めっき被膜を形成することが従来から行われている。銅めっき被膜は優れた耐食性を有することに加え、被膜付き回り性や有機系接着剤との接着性などに優れるといった特性を有する。
一般に、銅めっき被膜を形成する方法は、電気銅めっき処理と無電解銅めっき処理に大別されるが、無電解銅めっき処理により希土類系永久磁石の表面に銅めっき被膜を形成する場合には、磁石の構成金属であるRやFeがめっき液中に溶出してめっき液に含まれている還元剤と反応し、めっき液中に溶出したRやFeの表面に銅めっき被膜の形成が進行するといった問題を防ぐためのめっき液の管理が重要である。しかしながら、これは必ずしも容易なことではない。また、無電解銅めっき処理用めっき液は一般に高価である。従って、希土類系永久磁石の表面に銅めっき被膜を形成する場合には、通常、簡易で低コストな電気銅めっき処理が採用される。
電気銅めっき処理により希土類系永久磁石の表面に銅めっき被膜を形成する場合、希土類系永久磁石の酸性条件下での強い腐食性に鑑みれば、使用するめっき液はアルカリ性であることが望ましいことから、これまでシアン化銅を含むめっき液(シアン化銅浴)が汎用されてきた。しかしながら、シアン化銅浴は形成される銅めっき被膜の特性に優れるとともに、めっき液の管理が容易であるといったことから利用価値が高いものの、毒性の強いシアンを含むので環境への影響を無視することができない。そこで、近年では、ピロリン酸銅を含むめっき液(ピロリン酸銅浴)がシアン化銅浴に替わって使用されることが多いが、ピロリン酸銅浴は浴中に遊離銅イオンを多く含むため、ピロリン酸銅浴を使用して希土類系永久磁石の表面に直接に銅めっき被膜を形成しようとすると、磁石の表面において置換めっき反応が起こるといった要因などにより、密着性に優れた銅めっき被膜を形成することができないという問題がある。また、希土類系永久磁石の表面に他の金属めっき被膜を介して銅めっき被膜を形成した場合においても、磁石の磁気特性が劣化するという現象を引き起こす。
上記の点に鑑み、本発明者らは希土類系永久磁石の表面に密着性に優れた銅めっき被膜を電気銅めっき処理により形成するための新たな方法を開発すべく、種々の検討を重ねる過程において、硫酸銅とエチレンジアミン四酢酸を含むめっき液に着目した。硫酸銅とエチレンジアミン四酢酸を含むめっき液は、無電解銅めっき処理用めっき液としては種々のめっき液が知られている。しかしながら、電気銅めっき処理用めっき液としては、硫酸銅とエチレンジアミン四酢酸とグリシンと塩化カリウムを含むめっき液が下記の非特許文献1において提案されているものの、このめっき液は、塩素イオンを含むので、腐食性の強い希土類系永久磁石の表面に銅めっき被膜を形成する際には適用しがたいものである。
【0003】
【非特許文献1】
水本省三 外4名,「EDTA錯体浴からの電気銅めっきおよびその皮膜物性」,表面技術,1990年(別冊),第41巻,第2号,p156−160
【0004】
【発明が解決しようとする課題】
そこで本発明は、新規な電気銅めっき処理用めっき液を使用した、密着性に優れた銅めっき被膜を表面に有する希土類系永久磁石の製造方法を提供することを目的とする。
【0005】
【課題を解決するための手段】
本発明者らは、上記の点に鑑みて検討を重ねた結果、硫酸銅とエチレンジアミン四酢酸と硫酸ナトリウムと酒石酸塩を所定の組成に調整するとともに、pHを所定の範囲に調整しためっき液を使用すれば、希土類系永久磁石の表面に電気銅めっき処理により密着性に優れた銅めっき被膜を形成することができることを見出した。
【0006】
本発明は、上記の知見に基づいてなされたものであり、本発明の銅めっき被膜を表面に有する希土類系永久磁石の製造方法は、請求項1記載の通り、硫酸銅を0.03mol/L〜0.5mol/L、エチレンジアミン四酢酸を0.05mol/L〜0.7mol/L、硫酸ナトリウムを0.02mol/L〜1.0mol/L、酒石酸塩を0.1mol/L〜1.0mol/L含有し、pHが11.0〜13.0に調整されためっき液を使用して電気銅めっき処理により、希土類系永久磁石の表面に直接にまたは他の金属めっき被膜を介して銅めっき被膜を形成することを特徴とする。
また、請求項2記載の製造方法は、請求項1記載の製造方法において、希土類系永久磁石の表面に直接に銅めっき被膜を形成することを特徴とする。
また、請求項3記載の製造方法は、請求項1記載の製造方法において、希土類系永久磁石の表面に他の金属めっき被膜を介して銅めっき被膜を形成することを特徴とする。
また、請求項4記載の製造方法は、請求項3記載の製造方法において、他の金属めっき被膜を有機カルボン酸含有水溶液で表面処理した後に銅めっき被膜を形成することを特徴とする。
また、請求項5記載の製造方法は、請求項4記載の製造方法において、有機カルボン酸がシュウ酸であることを特徴とする。
また、請求項6記載の製造方法は、請求項4記載の製造方法において、有機カルボン酸含有水溶液の有機カルボン酸濃度が0.002mol/L以上であることを特徴とする。
また、請求項7記載の製造方法は、請求項3記載の製造方法において、他の金属めっき被膜がニッケルめっき被膜であることを特徴とする。
また、請求項8記載の製造方法は、請求項7記載の製造方法において、ニッケルめっき被膜がpHが6.0〜8.0に調整されためっき液を使用して電気ニッケルめっき処理により形成されたものであることを特徴とする。
また、本発明の電気銅めっき処理用めっき液は、請求項9記載の通り、硫酸銅を0.03mol/L〜0.5mol/L、エチレンジアミン四酢酸を0.05mol/L〜0.7mol/L、硫酸ナトリウムを0.02mol/L〜1.0mol/L、酒石酸塩を0.1mol/L〜1.0mol/L含有し、pHが11.0〜13.0に調整されていることを特徴とする。
また、本発明の銅めっき被膜を表面に有する希土類系永久磁石は、請求項10記載の通り、請求項1記載の製造方法により製造されたことを特徴とする。
【0007】
【発明の実施の形態】
本発明の銅めっき被膜を表面に有する希土類系永久磁石の製造方法は、硫酸銅を0.03mol/L〜0.5mol/L、エチレンジアミン四酢酸を0.05mol/L〜0.7mol/L、硫酸ナトリウムを0.02mol/L〜1.0mol/L、酒石酸塩を0.1mol/L〜1.0mol/L含有し、pHが11.0〜13.0に調整されためっき液を使用して電気銅めっき処理により、希土類系永久磁石の表面に直接にまたは他の金属めっき被膜を介して銅めっき被膜を形成することを特徴とするものである。
【0008】
本発明の電気銅めっき処理用めっき液において、硫酸銅の含有濃度を0.03mol/L〜0.5mol/Lと規定するのは、0.03mol/L未満では銅の析出効率が悪くなる恐れがある一方、0.5mol/Lを超えると硫酸銅が沈殿しやすくなり、硫酸銅が希土類系永久磁石の表面に形成される銅めっき被膜に混入する恐れがあるからである。
【0009】
また、エチレンジアミン四酢酸の含有濃度を0.05mol/L〜0.7mol/Lと規定するのは、0.05mol/L未満ではめっき液中の遊離銅イオンを十分に錯体形成できず、銅が沈殿しやすくなる恐れがある一方、0.7mol/Lを越えるとエチレンジアミン四酢酸がめっき液中に溶解しにくくなる恐れや、形成される銅めっき被膜に形成むらが生じやすくなる恐れがあるからである。
【0010】
また、硫酸ナトリウムの含有濃度を0.02mol/L〜1.0mol/Lと規定するのは、0.02mol/L未満ではめっき液の導電率が低下することで銅の析出効率が悪くなる恐れがある一方、1.0mol/Lを越えると形成される銅めっき被膜に形成むらが生じやすくなる恐れがあるからである。
【0011】
本発明の電気銅めっき処理用めっき液において、酒石酸塩は、アルカリ性条件下における陽極の不働態化を効果的に抑制し、陽極からの銅の溶出を促す作用を発揮する。酒石酸塩としては、ナトリウム塩やカリウム塩やナトリウムカリウム塩などが例示される。その含有濃度を0.1mol/L〜1.0mol/Lと規定するのは、0.1mol/L未満ではその効果が十分に発揮されない恐れがある一方、1.0mol/Lを越えると陰極の電流効率が低下して銅の析出効率が悪くなる恐れがあるからである。
【0012】
本発明の電気銅めっき処理用めっき液のpHを11.0〜13.0と規定するのは、主として希土類系永久磁石の酸性条件下での強い腐食性を考慮したものであるが、11.0未満では上記の組成からなるめっき液においてエチレンジアミン四酢酸が遊離銅イオンと十分に錯体形成できず、その結果、希土類系永久磁石の表面に銅めっき被膜が形成されずに黒色の亜酸化銅膜が形成されてしまう恐れがある一方、13.0を越えると陽極の不働態化を抑制しきれない恐れがあるからである。なお、pHを調整するに際しては水酸化ナトリウムなどを使用すればよい。
【0013】
本発明の電気銅めっき処理用めっき液には、必要に応じて、モノエタノールアミン、ジエタノールアミン、トリエタノールアミン、グリシン、2,2−ピピリジン、オルトフェナントロニン、ポリエチレングリコールなどの錯化剤を添加してもよい。このような錯化剤を添加すれば、めっき液中に遊離1価銅イオンが生成しても当該錯化剤はこれと錯体形成するので、遊離1価銅イオンの存在による置換めっき反応を抑制することが可能となり、密着性に劣る銅めっき被膜が希土類系永久磁石の表面に形成されることを効果的に防止することができる。
【0014】
本発明の電気銅めっき処理用めっき液を使用して希土類系永久磁石の表面に直接に銅めっき被膜を形成した場合、形成される銅めっき被膜は磁石の表面に対して優れた密着性を有する。
【0015】
本発明の電気銅めっき処理用めっき液を使用して形成される銅めっき被膜は、希土類系永久磁石の表面にニッケルめっき被膜などの他の金属めっき被膜を介して形成されてもよい。
【0016】
例えば、希土類系永久磁石の表面にニッケルめっき被膜を介して銅めっき被膜を形成する場合、銅めっき被膜を形成する前に、ニッケルめっき被膜を有機カルボン酸含有水溶液で表面処理することが望ましい。このような処理を行うことで、ニッケルめっき被膜と銅めっき被膜との密着性不良によるニッケルめっき被膜からの銅めっき被膜の剥離を効果的に防止することができる。
【0017】
有機カルボン酸含有水溶液はニッケルめっき被膜に対するエッチング処理液として機能し、その表面に変質層が形成されている場合にこれを除去して当該表面を活性化し、その表面に形成される銅めっき被膜との密着性の向上に寄与する。ニッケルめっき被膜の表面をエッチングするという目的のもとでは、塩酸や硫酸や硝酸などの無機酸を含有する水溶液を使用することもできなくはない。しかしながら、無機酸含有水溶液を使用した場合、塩素イオン(Cl-)や硫酸イオン(SO4 2-)や硝酸イオン(NO3 -)などの腐食性の強い無機物イオンがニッケルめっき被膜の表面に残存すると、ニッケルめっき被膜やその表面に形成される銅めっき被膜の腐食の原因になることがある。また、銅めっき被膜を形成する際には、無機物イオンはニッケルめっき被膜の表面付近におけるめっき液特性に影響を及ぼして、密着性に優れた銅めっき被膜の形成を阻害することがある。有機カルボン酸は無機酸に比較してマイルドな酸であるので、有機カルボン酸含有水溶液を使用すれば、無機酸含有水溶液を使用した場合のように過度なエッチングが起こることなく、適度なエッチングが得られ、変質層のみをエッチングすることができるとともに、上記のような問題も軽減化できる。
【0018】
以上の効果は、pHが6.0〜8.0に調整されためっき液(例えば、特開平6−13218号公報に記載されためっき液)を使用して電気ニッケルめっき処理により形成されたニッケルめっき被膜に対してとりわけ有効である。このような中性のめっき浴を使用して電気ニッケルめっき処理により形成されたニッケルめっき被膜は、その表面にニッケル水酸化物やニッケル酸化物などからなる変質層を形成しやすく、その表面に形成される銅めっき被膜との密着性不良はこのような変質層の存在に因るものであることを本発明者らは見出している。従って、上記のような形成条件で形成されたニッケルめっき被膜の表面を有機カルボン酸含有水溶液で処理することにより、その表面に形成される銅めっき被膜との密着性向上を図ることができるのは、このようなニッケル水酸化物やニッケル酸化物などからなる変質層がニッケルめっき被膜の表面から除去されることで、当該表面が活性化されるためであると考えられる。
【0019】
有機カルボン酸としては、シュウ酸、酒石酸、クエン酸、コハク酸、リンゴ酸、マロン酸などが挙げられるが、中でもシュウ酸はニッケルめっき被膜に対して適度なエッチングレートを有していることから、好適な有機カルボン酸であるといえる。有機カルボン酸含有水溶液の有機カルボン酸濃度は、0.002mol/L以上であることが望ましい。当該濃度が0.002mol/Lを下回ると十分な効果が得られない恐れがあるからである。なお、シュウ酸は水溶性の固体物質であるので、水溶液中におけるその濃度の上限は飽和水溶液における濃度ということになる。
【0020】
有機カルボン酸含有水溶液のpHは、過度のエッチングを防止する観点からは1以上であることが望ましい。また、十分な効果を得るためには5以下であることが望ましく、3以下であることがより望ましい(ニッケルの溶解下限pHは3.5であるので、当該pHよりも酸性側にあることが好適であるため)。
【0021】
有機カルボン酸含有水溶液を使用したニッケルめっき被膜の表面処理は、通常の洗浄処理を行ったニッケルめっき被膜を表面に有する希土類系永久磁石を、例えば、20℃〜40℃に調整された有機カルボン酸含有水溶液中に60秒〜240秒浸漬することにより行えばよい。有機カルボン酸含有水溶液の温度を20℃〜40℃とするのは、20℃を下回ると十分な効果が得られない恐れがある一方、40℃を超えると過度のエッチングが起こることで、有機カルボン酸含有水溶液中に多量のエッチング成分が混入して有機カルボン酸含有水溶液の劣化を早めたり、混入成分がニッケルめっき被膜の表面に付着することで、その表面に密着性に優れた銅めっき被膜が形成されることを阻害したりする恐れがあるからである。なお、上記のような表面処理を行った後は、ニッケルめっき被膜の表面に残存する有機カルボン酸を除去するために超音波洗浄を行うことが望ましい。
【0022】
本発明におけるめっき液を使用した電気銅めっき処理は、銅めっき被膜を希土類系永久磁石の表面に直接に形成する場合でも他の金属めっき被膜を介して形成する場合でも、通常行われる電気銅めっき処理の条件に従って行えばよいが、良好な作業性の確保などの観点からは、処理温度(液温)は30℃〜70℃、望ましくは40℃〜60℃とし、処理時間は30分〜300分とするのがよい。銅めっき被膜の膜厚は、特段限定して設定されるものではないが、耐食性被膜としての機能を十分に発揮させるためには1μm以上が望ましく、3μm以上がより望ましい。一方、希土類系永久磁石の有効体積を確保するためには、磁石の表面に直接に形成する場合は50μm以下が望ましく、30μm以下がより望ましい。また、磁石の表面に他の金属めっき被膜を介して形成する場合は30μm以下が望ましく、20μm以下がより望ましい。
【0023】
なお、本発明におけるめっき液を使用した電気銅めっき処理により形成された銅めっき被膜の表面に、金属めっき被膜や樹脂被膜や化成処理被膜などを積層形成することで、さらなる耐食性の付与や機能性の付与を図ってもよい。
【0024】
希土類系永久磁石としては、例えば、R−Co系永久磁石、R−Fe−B系永久磁石、R−Fe−N系永久磁石などで、最大磁気エネルギー積が80kJ/m3以上の磁気特性を有する公知の希土類系永久磁石が挙げられる。中でも、R−Fe−B系永久磁石は、前述のように、特に磁気特性が高く、量産性や経済性に優れている上に、被膜との優れた密着性を有する点において望ましいものである。これらの希土類系永久磁石における希土類元素(R)は、Nd、Pr、Dy、Ho、Tb、Smのうち少なくとも1種、あるいはさらに、La、Ce、Gd、Er、Eu、Tm、Yb、Lu、Yのうち少なくとも1種を含むものが望ましい。
また、通常はRのうち1種をもって足りるが、実用上は2種以上の混合物(ミッシュメタルやジジムなど)を入手上の便宜などの理由によって使用することもできる。
さらに、Al、Ti、V、Cr、Mn、Bi、Nb、Ta、Mo、W、Sb、Ge、Sn、Zr、Ni、Si、Zn、Hf、Gaのうち少なくとも1種を添加することで、保磁力や減磁曲線の角型性の改善、製造性の改善、低価格化を図ることが可能となる。また、Feの一部をCoで置換することによって、得られる磁石の磁気特性を損なうことなしに温度特性を改善することができる。
【0025】
【実施例】
本発明を以下の実施例と比較例によってさらに詳細に説明するが、本発明は以下の記載に限定して解釈されるものではない。
【0026】
出発原料として、電解鉄、フェロボロン、RとしてのNdを所要の磁石組成に配合し、溶解鋳造後、機械的粉砕法にて粗粉砕してから微粉砕することで粒度が3μm〜10μmの微粉末を得、これを10kOeの磁界中で成形してからアルゴン雰囲気中で1100℃×1時間の焼結を行った後、得られた焼結体に対して600℃×2時間の時効処理を行い、15Nd−7B−78Feの組成を有する磁石体とした。この磁石体から3mm×20mm×40mm寸法の試験片Aと1mm×1.5mm×2mm寸法の試験片Bを切り出し、0.1mol/Lの硝酸溶液にて表面活性化を行った後、水洗して以下の実験に供した。
【0027】
実施例1:
硫酸銅五水和物0.1mol/L、エチレンジアミン四酢酸二ナトリウム塩0.16mol/L、硫酸ナトリウム0.4mol/L、酒石酸二ナトリウム塩0.2mol/Lを含有し、水酸化ナトリウムでpHを12.3に調整した銅めっき液を使用し、液温50℃、陰極電流密度0.2A/dm2で200分間、電気銅めっき処理を行い、試験片Aと試験片Bの表面に銅めっき被膜を形成した。銅めっき被膜を表面に有する試験片A,10サンプルについて銅めっき被膜の膜厚を測定したところ、その平均値は15μmであった。また、銅めっき被膜を表面に有する試験片A,10サンプルに対してJIS(K5400)に準拠したクロスカット後にテープで剥離を行う密着性試験を行ったところ、銅めっき被膜が試験片から剥離したサンプルは存在しなかった。銅めっき被膜を表面に有する試験片B,10サンプルについて磁気特性を評価したところ、その平均値は0.98iHc/Hkであり、優れた特性を有していた。
【0028】
比較例1:
ピロリン酸銅0.2mol/L、ピロリン酸カリウム1.1mol/L、硝酸カリウム0.1mol/Lを含有し、アンモニア水でpHを8.5に調整した銅めっき液を使用し、液温50℃、陰極電流密度0.2A/dm2で60分間、電気銅めっき処理を行い、試験片Aと試験片Bの表面に銅めっき被膜を形成したが、表面全体に銅めっき被膜は形成されなかった(故に銅めっき被膜の膜厚は未測定)。このような試験片A,10サンプルに対して実施例1と同様の密着性試験を行ったところ、すべてのサンプルにおいて、試験片の表面に部分的に形成されていた銅めっき被膜が試験片から剥離した。
【0029】
実施例2:
硫酸ニッケル六水和物0.5mol/L、クエン酸二アンモニウム0.1mol/L、ホウ酸0.2mol/L、塩化アンモニウム0.15mol/L、サッカリン0.5mol/Lを含有し、アンモニア水でpHを6.8に調整したニッケルめっき液を使用し、液温50℃、陰極電流密度0.25A/dm2で15分間、電気ニッケルめっき処理を行い、試験片Aと試験片Bの表面にニッケルめっき被膜を形成した。ニッケルめっき被膜を表面に有する試験片A,10サンプルについてニッケルめっき被膜の膜厚を測定したところ、その平均値は1μmであった。ニッケルめっき被膜を表面に有する試験片Aと試験片Bをシュウ酸0.033mol/Lを含む液温30℃の水溶液(pH1.5)に2分間浸漬してニッケルめっき被膜の表面処理を行ってからイオン交換水にて2分間超音波洗浄した後、実施例1に記載の銅めっき液を使用し、液温50℃、陰性電流密度0.2A/dm2で60分間、電気銅めっき処理を行い、ニッケルめっき被膜の表面に銅めっき被膜を形成した。ニッケルめっき被膜を介して銅めっき被膜を表面に有する試験片A,10サンプルについて銅めっき被膜の膜厚を測定したところ、その平均値は5μmであった。ニッケルめっき被膜を介して銅めっき被膜を表面に有する試験片A,10サンプルに対して実施例1と同様の密着性試験を行ったところ、銅めっき被膜がニッケルめっき被膜から剥離したサンプルは存在しなかった。ニッケルめっき被膜を介して銅めっき被膜を表面に有する試験片B,10サンプルについて磁気特性を評価したところ、その平均値は0.95iHc/Hkであり、優れた特性を有していた。
【0030】
比較例2:
実施例2に記載のニッケルめっき液を使用し、同様の条件で電気ニッケルめっき処理を行い、試験片Aと試験片Bの表面にニッケルめっき被膜を形成した。試験片Aと試験片Bの表面に形成されたニッケルめっき被膜に対して実施例2と同様の表面処理を行った後、比較例1に記載の銅めっき液を使用し、同様の条件で電気銅めっき処理を行い、ニッケルめっき被膜の表面に銅めっき被膜を形成した。ニッケルめっき被膜を介して銅めっき被膜を表面に有する試験片A,10サンプルについて銅めっき被膜の膜厚を測定したところ、その平均値は5μmであった。ニッケルめっき被膜を介して銅めっき被膜を表面に有する試験片A,10サンプルに対して実施例1と同様の密着性試験を行ったところ、1つのサンプルにおいて銅めっき被膜がニッケルめっき被膜から剥離した。ニッケルめっき被膜を介して銅めっき被膜を表面に有する試験片B,10サンプルについて磁気特性を評価したところ、その平均値は0.71iHc/Hkであり、磁気特性の劣化が顕著であった。
【0031】
【発明の効果】
本発明によれば、新規な電気銅めっき処理用めっき液を使用した、密着性に優れた銅めっき被膜を表面に有する希土類系永久磁石の製造方法が提供される。
[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a method for producing a rare earth-based permanent magnet having a copper plating film excellent in adhesiveness on the surface, using a novel plating solution for electrolytic copper plating.
[0002]
[Prior art]
Rare earth permanent magnets such as R—Fe—B permanent magnets represented by Nd—Fe—B permanent magnets and R—Fe—N permanent magnets represented by Sm—Fe—N permanent magnets are In particular, R-Fe-B based permanent magnets are used in various fields today because they use abundant and inexpensive materials and have high magnetic properties.
However, since rare earth permanent magnets contain a highly reactive rare earth element: R, they are easily oxidatively corroded in the atmosphere. When used without any surface treatment, a slight amount of acid, alkali, moisture, etc. Corrosion proceeds from the surface due to the presence of rust, and rust is generated, resulting in deterioration and variation in magnet characteristics. Furthermore, when a magnet in which rust is generated is incorporated in an apparatus such as a magnetic circuit, the rust may be scattered to contaminate peripheral components.
In view of the above points, a copper plating film, which is a corrosion-resistant film, is conventionally formed on the surface of a rare earth permanent magnet. In addition to having excellent corrosion resistance, the copper plating film has characteristics such as excellent rotation with a film and adhesion to an organic adhesive.
In general, the method of forming a copper plating film is roughly divided into an electrolytic copper plating process and an electroless copper plating process. When a copper plating film is formed on the surface of a rare earth-based permanent magnet by an electroless copper plating process, Then, R and Fe, which are constituent metals of the magnet, elute into the plating solution and react with the reducing agent contained in the plating solution, and the formation of a copper plating film on the surface of R and Fe eluted in the plating solution proceeds. It is important to manage the plating solution in order to prevent such problems. However, this is not always easy. Moreover, the electroless copper plating treatment plating solution is generally expensive. Therefore, when a copper plating film is formed on the surface of the rare earth permanent magnet, a simple and low cost electrolytic copper plating process is usually employed.
In the case of forming a copper plating film on the surface of a rare earth permanent magnet by electrolytic copper plating, it is desirable that the plating solution used be alkaline in view of the strong corrosivity under acidic conditions of the rare earth permanent magnet. So far, plating solutions containing copper cyanide (copper cyanide bath) have been widely used. However, although the copper cyanide bath is excellent in the properties of the copper plating film to be formed and is easy to manage the plating solution, it has high utility value, but it contains highly toxic cyan, so it ignores the environmental impact. I can't. Therefore, in recent years, a plating solution containing copper pyrophosphate (copper pyrophosphate bath) is often used instead of the copper cyanide bath, but since the copper pyrophosphate bath contains a large amount of free copper ions in the bath, When a copper plating film is formed directly on the surface of a rare earth-based permanent magnet using a copper pyrophosphate bath, a copper plating film with excellent adhesion is formed due to factors such as a displacement plating reaction occurring on the surface of the magnet. There is a problem that you can not. In addition, even when a copper plating film is formed on the surface of the rare earth permanent magnet via another metal plating film, a phenomenon occurs in which the magnetic properties of the magnet deteriorate.
In view of the above points, the present inventors have conducted various studies in order to develop a new method for forming a copper plating film having excellent adhesion on the surface of a rare earth-based permanent magnet by electrolytic copper plating. Attention was paid to a plating solution containing copper sulfate and ethylenediaminetetraacetic acid. As the plating solution containing copper sulfate and ethylenediaminetetraacetic acid, various plating solutions are known as electroless copper plating treatment plating solutions. However, although a plating solution containing copper sulfate, ethylenediaminetetraacetic acid, glycine and potassium chloride has been proposed in the following Non-Patent Document 1 as a plating solution for electrolytic copper plating, this plating solution contains chlorine ions. Therefore, it is difficult to apply when forming a copper plating film on the surface of a highly corrosive rare earth permanent magnet.
[0003]
[Non-Patent Document 1]
Ms. Mizumoto, 3 others, "Electro-copper plating from EDTA complex bath and its physical properties", Surface Technology, 1990 (separate volume), Vol. 41, No. 2, p156-160
[0004]
[Problems to be solved by the invention]
Then, this invention aims at providing the manufacturing method of the rare earth-type permanent magnet which has the copper plating film excellent in adhesiveness on the surface using the novel plating solution for copper electroplating processes.
[0005]
[Means for Solving the Problems]
As a result of repeated studies in view of the above points, the present inventors have adjusted a copper sulfate, ethylenediaminetetraacetic acid, sodium sulfate, and tartrate to a predetermined composition and a plating solution whose pH is adjusted to a predetermined range. It has been found that if used, a copper plating film having excellent adhesion can be formed on the surface of the rare earth-based permanent magnet by electrolytic copper plating.
[0006]
This invention is made | formed based on said knowledge, The manufacturing method of the rare earth-type permanent magnet which has the copper plating film of this invention on the surface is a copper sulfate 0.03 mol / L as described in Claim 1. ~0.5mol / L, ethylenediaminetetraacetate 0.05mol / L~0.7mol / L, 0.02mol sodium sulfate / L~1.0mol / L, tartrate 0.1mol / L~1.0mol / L content, copper plating directly on the surface of rare earth permanent magnets or via other metal plating films by electrolytic copper plating using a plating solution whose pH is adjusted to 11.0-13.0 A film is formed.
The manufacturing method according to claim 2 is characterized in that, in the manufacturing method according to claim 1, a copper plating film is directly formed on the surface of the rare earth-based permanent magnet.
A manufacturing method according to claim 3 is characterized in that, in the manufacturing method according to claim 1, a copper plating film is formed on the surface of the rare earth-based permanent magnet via another metal plating film.
The manufacturing method according to claim 4 is characterized in that, in the manufacturing method according to claim 3, a copper plating film is formed after surface-treating another metal plating film with an organic carboxylic acid-containing aqueous solution.
The manufacturing method according to claim 5 is characterized in that, in the manufacturing method according to claim 4, the organic carboxylic acid is oxalic acid.
The manufacturing method according to claim 6 is characterized in that, in the manufacturing method according to claim 4, the organic carboxylic acid concentration of the organic carboxylic acid-containing aqueous solution is 0.002 mol / L or more.
The manufacturing method according to claim 7 is the manufacturing method according to claim 3, wherein the other metal plating film is a nickel plating film.
The manufacturing method according to claim 8 is the manufacturing method according to claim 7, wherein the nickel plating film is formed by electro nickel plating using a plating solution whose pH is adjusted to 6.0 to 8.0. It is characterized by that.
Moreover, the plating solution for electrolytic copper plating treatment of the present invention is copper sulfate 0.03 mol / L to 0.5 mol / L and ethylenediaminetetraacetic acid 0.05 mol / L to 0.7 mol / L. L, 0.02 mol / L to 1.0 mol / L of sodium sulfate , 0.1 mol / L to 1.0 mol / L of tartrate, and pH adjusted to 11.0 to 13.0 Features.
Moreover, the rare earth-based permanent magnet having the copper plating film of the present invention on its surface is manufactured by the manufacturing method according to claim 1 as described in claim 10.
[0007]
DETAILED DESCRIPTION OF THE INVENTION
The manufacturing method of the rare earth-based permanent magnet having the copper plating film of the present invention on the surface is 0.03 mol / L to 0.5 mol / L of copper sulfate, 0.05 mol / L to 0.7 mol / L of ethylenediaminetetraacetic acid, Use a plating solution containing 0.02 mol / L to 1.0 mol / L sodium sulfate , 0.1 mol / L to 1.0 mol / L tartrate, and adjusted to a pH of 11.0 to 13.0. Then, a copper plating film is formed directly on the surface of the rare earth-based permanent magnet or via another metal plating film by an electrolytic copper plating process.
[0008]
In the plating solution for electrolytic copper plating treatment of the present invention, the copper sulfate content concentration is defined as 0.03 mol / L to 0.5 mol / L. If the concentration is less than 0.03 mol / L, the copper deposition efficiency may deteriorate. On the other hand, if it exceeds 0.5 mol / L, the copper sulfate is likely to precipitate, and the copper sulfate may be mixed into the copper plating film formed on the surface of the rare earth permanent magnet.
[0009]
Moreover, the content concentration of ethylenediaminetetraacetic acid is defined as 0.05 mol / L to 0.7 mol / L because if it is less than 0.05 mol / L, free copper ions in the plating solution cannot be sufficiently complexed, On the other hand, if it exceeds 0.7 mol / L, ethylenediaminetetraacetic acid may be difficult to dissolve in the plating solution and uneven formation of the formed copper plating film may occur. is there.
[0010]
Moreover, the content concentration of sodium sulfate is defined as 0.02 mol / L to 1.0 mol / L. If the concentration is less than 0.02 mol / L, the conductivity of the plating solution is lowered, and thus the copper deposition efficiency may be deteriorated. On the other hand, if the amount exceeds 1.0 mol / L, uneven formation tends to occur in the formed copper plating film.
[0011]
In the plating solution for electrolytic copper plating of the present invention, the tartrate salt effectively suppresses the passivation of the anode under alkaline conditions and promotes the elution of copper from the anode. Examples of tartrate include sodium salt, potassium salt, sodium potassium salt and the like . To define the concentration of the its the 0.1mol / L~1.0mol / L, while it is less than 0.1 mol / L there is a possibility that the effect is not sufficiently exhibited, and when it exceeds 1.0 mol / L-cathode This is because there is a possibility that the current efficiency of the copper is lowered and the copper deposition efficiency is deteriorated.
[0012]
The pH of the plating solution for electrolytic copper plating treatment of the present invention is defined as 11.0 to 13.0 mainly considering the strong corrosivity under the acidic conditions of rare earth permanent magnets. If it is less than 0, ethylenediaminetetraacetic acid cannot be sufficiently complexed with free copper ions in the plating solution having the above composition, and as a result, a copper plating film is not formed on the surface of the rare earth permanent magnet and the black cuprous oxide film On the other hand, if it exceeds 13.0, the passivation of the anode may not be suppressed. In adjusting the pH, sodium hydroxide or the like may be used.
[0013]
If necessary, a complexing agent such as monoethanolamine, diethanolamine, triethanolamine, glycine, 2,2-pipyridine, orthophenanthronin, or polyethylene glycol is added to the plating solution for electrolytic copper plating treatment of the present invention. May be. If such a complexing agent is added, even if free monovalent copper ions are generated in the plating solution, the complexing agent forms a complex with this, so that the displacement plating reaction due to the presence of free monovalent copper ions is suppressed. It is possible to effectively prevent the copper plating film having poor adhesion from being formed on the surface of the rare earth permanent magnet.
[0014]
When the copper plating film is formed directly on the surface of the rare earth-based permanent magnet using the plating solution for electrolytic copper plating of the present invention, the formed copper plating film has excellent adhesion to the surface of the magnet. .
[0015]
The copper plating film formed using the plating solution for electrolytic copper plating of the present invention may be formed on the surface of the rare earth permanent magnet via another metal plating film such as a nickel plating film.
[0016]
For example, when a copper plating film is formed on the surface of a rare earth permanent magnet via a nickel plating film, it is desirable to surface-treat the nickel plating film with an organic carboxylic acid-containing aqueous solution before forming the copper plating film. By performing such treatment, peeling of the copper plating film from the nickel plating film due to poor adhesion between the nickel plating film and the copper plating film can be effectively prevented.
[0017]
The organic carboxylic acid-containing aqueous solution functions as an etching treatment solution for the nickel plating film, and when a deteriorated layer is formed on the surface thereof, this is removed to activate the surface, and the copper plating film formed on the surface Contributes to improved adhesion. For the purpose of etching the surface of the nickel plating film, an aqueous solution containing an inorganic acid such as hydrochloric acid, sulfuric acid or nitric acid cannot be used. However, when an inorganic acid-containing aqueous solution is used, highly corrosive inorganic ions such as chlorine ions (Cl ), sulfate ions (SO 4 2− ), and nitrate ions (NO 3 ) remain on the surface of the nickel plating film. This may cause corrosion of the nickel plating film or the copper plating film formed on the surface thereof. Moreover, when forming a copper plating film, inorganic ions may affect the plating solution properties near the surface of the nickel plating film, and may inhibit the formation of a copper plating film having excellent adhesion. Since organic carboxylic acids are milder than inorganic acids, if an organic carboxylic acid-containing aqueous solution is used, an appropriate etching can be performed without excessive etching as in the case of using an inorganic acid-containing aqueous solution. As a result, only the deteriorated layer can be etched, and the above problems can be reduced.
[0018]
The above effects are obtained by performing nickel electroplating using a plating solution whose pH is adjusted to 6.0 to 8.0 (for example, a plating solution described in JP-A-6-13218). This is particularly effective for plating films. A nickel plating film formed by electro nickel plating using such a neutral plating bath is easy to form a denatured layer made of nickel hydroxide or nickel oxide on the surface, and is formed on the surface. The present inventors have found that poor adhesion to the copper plating film is due to the presence of such a deteriorated layer. Therefore, by treating the surface of the nickel plating film formed under the above formation conditions with an organic carboxylic acid-containing aqueous solution, it is possible to improve the adhesion with the copper plating film formed on the surface. It is considered that this is because the altered layer made of nickel hydroxide, nickel oxide or the like is removed from the surface of the nickel plating film to activate the surface.
[0019]
Examples of the organic carboxylic acid include oxalic acid, tartaric acid, citric acid, succinic acid, malic acid, malonic acid, and the like. Among them, oxalic acid has an appropriate etching rate for the nickel plating film. It can be said that it is a suitable organic carboxylic acid. The organic carboxylic acid concentration of the organic carboxylic acid-containing aqueous solution is desirably 0.002 mol / L or more. This is because if the concentration falls below 0.002 mol / L, a sufficient effect may not be obtained. Since oxalic acid is a water-soluble solid substance, the upper limit of its concentration in the aqueous solution is the concentration in the saturated aqueous solution.
[0020]
The pH of the organic carboxylic acid-containing aqueous solution is desirably 1 or more from the viewpoint of preventing excessive etching. Further, in order to obtain a sufficient effect, it is preferably 5 or less, and more preferably 3 or less (since the nickel dissolution lower limit pH is 3.5, it may be more acidic than the pH). Because it is preferred).
[0021]
The surface treatment of the nickel plating film using the organic carboxylic acid-containing aqueous solution is performed using, for example, an organic carboxylic acid adjusted to 20 to 40 ° C., for example, a rare earth permanent magnet having a nickel plating film subjected to a normal cleaning treatment on the surface. What is necessary is just to carry out by immersing in the aqueous solution containing 60 second-240 second. The temperature of the organic carboxylic acid-containing aqueous solution is set to 20 ° C. to 40 ° C. If the temperature is lower than 20 ° C., a sufficient effect may not be obtained. On the other hand, if the temperature exceeds 40 ° C., excessive etching occurs. A large amount of etching components are mixed into the acid-containing aqueous solution to accelerate the deterioration of the organic carboxylic acid-containing aqueous solution, or the mixed components adhere to the surface of the nickel plating film, so that a copper plating film with excellent adhesion can be formed on the surface. This is because there is a risk of inhibiting the formation. In addition, after performing the above surface treatment, it is desirable to perform ultrasonic cleaning in order to remove the organic carboxylic acid remaining on the surface of the nickel plating film.
[0022]
The electrolytic copper plating treatment using the plating solution in the present invention is usually performed regardless of whether the copper plating film is formed directly on the surface of the rare earth-based permanent magnet or through another metal plating film. However, from the viewpoint of ensuring good workability, the treatment temperature (liquid temperature) is 30 ° C. to 70 ° C., preferably 40 ° C. to 60 ° C., and the treatment time is 30 minutes to 300 ° C. It's better to use minutes. The film thickness of the copper plating film is not particularly limited, but is preferably 1 μm or more and more preferably 3 μm or more in order to sufficiently exhibit the function as a corrosion-resistant film. On the other hand, in order to ensure the effective volume of the rare earth-based permanent magnet, when it is formed directly on the surface of the magnet, it is preferably 50 μm or less, more preferably 30 μm or less. Moreover, when forming on the surface of a magnet through another metal plating film, 30 micrometers or less are desirable and 20 micrometers or less are more desirable.
[0023]
In addition, by providing a metal plating film, a resin film, a chemical conversion film, etc. on the surface of the copper plating film formed by the electrolytic copper plating process using the plating solution in the present invention, it is possible to provide further corrosion resistance and functionality. May be provided.
[0024]
Rare earth permanent magnets are, for example, R-Co permanent magnets, R-Fe-B permanent magnets, R-Fe-N permanent magnets, etc., and have a magnetic characteristic with a maximum magnetic energy product of 80 kJ / m 3 or more. Examples thereof include known rare earth permanent magnets. Among them, as described above, the R—Fe—B based permanent magnet is desirable in that it has particularly high magnetic properties, is excellent in mass productivity and economy, and has excellent adhesion to the coating film. . The rare earth element (R) in these rare earth based permanent magnets is at least one of Nd, Pr, Dy, Ho, Tb, Sm, or La, Ce, Gd, Er, Eu, Tm, Yb, Lu, What contains at least 1 sort (s) among Y is desirable.
Usually, one type of R is sufficient, but in practice, a mixture of two or more types (such as misch metal and didymium) may be used for reasons of convenience.
Furthermore, by adding at least one of Al, Ti, V, Cr, Mn, Bi, Nb, Ta, Mo, W, Sb, Ge, Sn, Zr, Ni, Si, Zn, Hf, and Ga, It becomes possible to improve the squareness of the coercive force and the demagnetization curve, improve the manufacturability, and reduce the price. Further, by replacing part of Fe with Co, the temperature characteristics can be improved without impairing the magnetic characteristics of the obtained magnet.
[0025]
【Example】
The present invention will be described in more detail with reference to the following examples and comparative examples, but the present invention should not be construed as being limited to the following descriptions.
[0026]
As a starting material, electrolytic iron, ferroboron, and Nd as R are blended into the required magnet composition, and after melt casting, finely pulverized by mechanical pulverization and then finely pulverized to obtain a fine powder having a particle size of 3 μm to 10 μm After being molded in a magnetic field of 10 kOe and sintered in an argon atmosphere at 1100 ° C. for 1 hour, the obtained sintered body was subjected to aging treatment at 600 ° C. for 2 hours. And a magnet body having a composition of 15Nd-7B-78Fe. A test piece A having a size of 3 mm × 20 mm × 40 mm and a test piece B having a size of 1 mm × 1.5 mm × 2 mm are cut out from the magnet body, surface-activated with a 0.1 mol / L nitric acid solution, and then washed with water. The following experiments were conducted.
[0027]
Example 1:
Containing 0.1 mol / L of copper sulfate pentahydrate, 0.16 mol / L of ethylenediaminetetraacetic acid disodium salt, 0.4 mol / L of sodium sulfate, 0.2 mol / L of disodium tartrate, pH with sodium hydroxide Using a copper plating solution adjusted to 12.3, electrolytic copper plating treatment was performed for 200 minutes at a liquid temperature of 50 ° C. and a cathode current density of 0.2 A / dm 2 , and copper was applied to the surfaces of test pieces A and B. A plating film was formed. When the film thickness of the copper plating film was measured about the test piece A and 10 samples which have a copper plating film on the surface, the average value was 15 micrometers. Moreover, when the adhesive test which peels with the tape after the crosscut based on JIS (K5400) was performed with respect to the test piece A and 10 samples which have a copper plating film on the surface, the copper plating film peeled from the test piece. There was no sample. When the magnetic properties of the test pieces B and 10 samples having a copper plating film on the surface were evaluated, the average value was 0.98 iHc / Hk, which was excellent.
[0028]
Comparative Example 1:
A copper plating solution containing 0.2 mol / L of copper pyrophosphate, 1.1 mol / L of potassium pyrophosphate, and 0.1 mol / L of potassium nitrate and adjusted to pH 8.5 with aqueous ammonia was used. The copper electroplating treatment was performed for 60 minutes at a cathode current density of 0.2 A / dm 2 to form a copper plating film on the surfaces of the test piece A and the test piece B, but no copper plating film was formed on the entire surface. (Thus, the thickness of the copper plating film is not measured). When the same adhesion test as in Example 1 was performed on such test pieces A and 10 samples, the copper plating film partially formed on the surface of the test pieces was observed from the test pieces in all the samples. It peeled.
[0029]
Example 2:
Contains nickel sulfate hexahydrate 0.5 mol / L, diammonium citrate 0.1 mol / L, boric acid 0.2 mol / L, ammonium chloride 0.15 mol / L, saccharin 0.5 mol / L, aqueous ammonia The nickel plating solution whose pH was adjusted to 6.8 was subjected to electro nickel plating at a liquid temperature of 50 ° C. and a cathode current density of 0.25 A / dm 2 for 15 minutes. A nickel plating film was formed on the substrate. When the film thickness of the nickel plating film was measured for the specimen A and 10 samples having the nickel plating film on the surface, the average value was 1 μm. The surface treatment of the nickel plating film is performed by immersing the test piece A and the test piece B having a nickel plating film on the surface for 2 minutes in an aqueous solution (pH 1.5) containing 0.033 mol / L of oxalic acid at a liquid temperature of 30 ° C. After ultrasonic cleaning with ion-exchanged water for 2 minutes, the copper plating solution described in Example 1 was used, and the electrolytic copper plating treatment was performed for 60 minutes at a liquid temperature of 50 ° C. and a negative current density of 0.2 A / dm 2. A copper plating film was formed on the surface of the nickel plating film. When the film thickness of the copper plating film was measured with respect to the specimen A and 10 samples having the copper plating film on the surface via the nickel plating film, the average value was 5 μm. When the same adhesion test as in Example 1 was performed on the test pieces A and 10 samples having the copper plating film on the surface through the nickel plating film, there was a sample in which the copper plating film was peeled off from the nickel plating film. There wasn't. When the magnetic properties of the test pieces B and 10 samples having a copper plating film on the surface through a nickel plating film were evaluated, the average value was 0.95 iHc / Hk, and the sample had excellent characteristics.
[0030]
Comparative Example 2:
The nickel plating solution described in Example 2 was used, and electronickel plating treatment was performed under the same conditions to form nickel plating films on the surfaces of the test piece A and the test piece B. After performing the same surface treatment as in Example 2 on the nickel plating films formed on the surfaces of the test piece A and the test piece B, the copper plating solution described in Comparative Example 1 was used, and the same conditions were applied. A copper plating treatment was performed to form a copper plating film on the surface of the nickel plating film. When the film thickness of the copper plating film was measured with respect to the specimen A and 10 samples having the copper plating film on the surface via the nickel plating film, the average value was 5 μm. When the same adhesion test as in Example 1 was performed on the specimens A and 10 samples having the copper plating film on the surface through the nickel plating film, the copper plating film was peeled off from the nickel plating film in one sample. . When the magnetic characteristics of the test pieces B and 10 samples having a copper plating film on the surface through the nickel plating film were evaluated, the average value was 0.71 iHc / Hk, and the deterioration of the magnetic characteristics was remarkable.
[0031]
【The invention's effect】
ADVANTAGE OF THE INVENTION According to this invention, the manufacturing method of the rare earth-type permanent magnet which has the copper plating film excellent in adhesiveness on the surface using the novel plating solution for electrolytic copper plating processing is provided.

Claims (10)

銅めっき被膜を表面に有する希土類系永久磁石の製造方法であって、硫酸銅を0.03mol/L〜0.5mol/L、エチレンジアミン四酢酸を0.05mol/L〜0.7mol/L、硫酸ナトリウムを0.02mol/L〜1.0mol/L、酒石酸塩を0.1mol/L〜1.0mol/L含有し、pHが11.0〜13.0に調整されためっき液を使用して電気銅めっき処理により、希土類系永久磁石の表面に直接にまたは他の金属めっき被膜を介して銅めっき被膜を形成することを特徴とする製造方法。A method for producing a rare earth-based permanent magnet having a copper plating film on its surface, wherein copper sulfate is 0.03 mol / L to 0.5 mol / L, ethylenediaminetetraacetic acid is 0.05 mol / L to 0.7 mol / L, sulfuric acid sodium 0.02mol / L~1.0mol / L, tartrate containing 0.1mol / L~1.0mol / L, using a plating solution pH is adjusted to 11.0 to 13.0 A manufacturing method comprising forming a copper plating film directly or via another metal plating film on a surface of a rare earth-based permanent magnet by an electrolytic copper plating process. 希土類系永久磁石の表面に直接に銅めっき被膜を形成することを特徴とする請求項1記載の製造方法。  2. The method according to claim 1, wherein a copper plating film is directly formed on the surface of the rare earth permanent magnet. 希土類系永久磁石の表面に他の金属めっき被膜を介して銅めっき被膜を形成することを特徴とする請求項1記載の製造方法。  The method according to claim 1, wherein a copper plating film is formed on the surface of the rare earth permanent magnet via another metal plating film. 他の金属めっき被膜を有機カルボン酸含有水溶液で表面処理した後に銅めっき被膜を形成することを特徴とする請求項3記載の製造方法。  4. The method according to claim 3, wherein the copper plating film is formed after the surface treatment of another metal plating film with an organic carboxylic acid-containing aqueous solution. 有機カルボン酸がシュウ酸であることを特徴とする請求項4記載の製造方法。  The method according to claim 4, wherein the organic carboxylic acid is oxalic acid. 有機カルボン酸含有水溶液の有機カルボン酸濃度が0.002mol/L以上であることを特徴とする請求項4記載の製造方法。  The manufacturing method according to claim 4, wherein the organic carboxylic acid concentration of the organic carboxylic acid-containing aqueous solution is 0.002 mol / L or more. 他の金属めっき被膜がニッケルめっき被膜であることを特徴とする請求項3記載の製造方法。  4. The method according to claim 3, wherein the other metal plating film is a nickel plating film. ニッケルめっき被膜がpHが6.0〜8.0に調整されためっき液を使用して電気ニッケルめっき処理により形成されたものであることを特徴とする請求項7記載の製造方法。  The manufacturing method according to claim 7, wherein the nickel plating film is formed by an electro nickel plating process using a plating solution whose pH is adjusted to 6.0 to 8.0. 硫酸銅を0.03mol/L〜0.5mol/L、エチレンジアミン四酢酸を0.05mol/L〜0.7mol/L、硫酸ナトリウムを0.02mol/L〜1.0mol/L、酒石酸塩を0.1mol/L〜1.0mol/L含有し、pHが11.0〜13.0に調整されていることを特徴とする電気銅めっき処理用めっき液。0.03mol copper sulfate / 0.5 mol / L, ethylenediaminetetraacetic acid and 0.05mol / L~0.7mol / L, sodium sulfate 0.02mol / L~1.0mol / L, tartrate 0 A plating solution for electrolytic copper plating, containing 1 mol / L to 1.0 mol / L and having a pH adjusted to 11.0 to 13.0. 請求項1記載の製造方法により製造されたことを特徴とする銅めっき被膜を表面に有する希土類系永久磁石。  A rare earth-based permanent magnet having a copper plating film on the surface produced by the production method according to claim 1.
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