JP3857692B2 - パターン形成方法 - Google Patents
パターン形成方法 Download PDFInfo
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- JP3857692B2 JP3857692B2 JP2004008290A JP2004008290A JP3857692B2 JP 3857692 B2 JP3857692 B2 JP 3857692B2 JP 2004008290 A JP2004008290 A JP 2004008290A JP 2004008290 A JP2004008290 A JP 2004008290A JP 3857692 B2 JP3857692 B2 JP 3857692B2
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- 238000000034 method Methods 0.000 title claims description 73
- 230000007261 regionalization Effects 0.000 title description 7
- 239000000758 substrate Substances 0.000 claims description 48
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 40
- 238000004140 cleaning Methods 0.000 claims description 36
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- 238000000576 coating method Methods 0.000 claims description 23
- 239000002344 surface layer Substances 0.000 claims description 16
- 239000004065 semiconductor Substances 0.000 claims description 11
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims description 9
- 239000007788 liquid Substances 0.000 claims description 9
- 238000007654 immersion Methods 0.000 claims description 7
- 230000001678 irradiating effect Effects 0.000 claims description 7
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims description 6
- 238000001035 drying Methods 0.000 claims description 6
- JEGUKCSWCFPDGT-UHFFFAOYSA-N h2o hydrate Chemical compound O.O JEGUKCSWCFPDGT-UHFFFAOYSA-N 0.000 claims description 5
- QOSATHPSBFQAML-UHFFFAOYSA-N hydrogen peroxide;hydrate Chemical compound O.OO QOSATHPSBFQAML-UHFFFAOYSA-N 0.000 claims description 5
- 230000003287 optical effect Effects 0.000 claims description 5
- 238000010894 electron beam technology Methods 0.000 claims description 4
- 239000005046 Chlorosilane Substances 0.000 claims description 2
- KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical group Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 claims description 2
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- 238000009501 film coating Methods 0.000 description 4
- 125000004836 hexamethylene group Chemical group [H]C([H])([*:2])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[*:1] 0.000 description 4
- 238000004528 spin coating Methods 0.000 description 4
- 206010010071 Coma Diseases 0.000 description 3
- 229920001665 Poly-4-vinylphenol Polymers 0.000 description 3
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 3
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- 150000001491 aromatic compounds Chemical class 0.000 description 3
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- FFUAGWLWBBFQJT-UHFFFAOYSA-N hexamethyldisilazane Chemical compound C[Si](C)(C)N[Si](C)(C)C FFUAGWLWBBFQJT-UHFFFAOYSA-N 0.000 description 2
- 230000002209 hydrophobic effect Effects 0.000 description 2
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- G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
- G03F7/2004—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image characterised by the use of a particular light source, e.g. fluorescent lamps or deep UV light
- G03F7/2006—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image characterised by the use of a particular light source, e.g. fluorescent lamps or deep UV light using coherent light; using polarised light
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- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
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- G03F7/38—Treatment before imagewise removal, e.g. prebaking
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
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- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
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- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
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- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Architecture (AREA)
- Structural Engineering (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Materials For Photolithography (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Description
本実施形態では、3層レジストプロセスにおけるパターン形成方法について説明する。この3層膜において、炭素からなる反射防止膜を下層膜、SOG膜(塗布型絶縁膜)を中間膜、また化学増幅型レジスト膜(感光性膜)を上層膜とする。以下、3層レジストプロセスにおいて、上層膜である化学増幅型レジスト膜のパターン形成方法について具体的に説明する。
本実施形態では、第1の実施形態と同様にSOG膜表層に偏析層が形成された状態であっても、レジストパターンを形成するパターン形成方法について説明する。被処理基板上には3層構造の多層膜を形成する。この多層膜において、炭素からなる反射防止膜を下層膜、SOG膜を中間膜、また化学増幅型レジスト膜を上層膜とする。以下、3層構造での上層膜である化学増幅型レジスト膜のパターン形成方法について具体的に説明する。
本実施形態では、液浸式の投影露光装置を用いてレジストパターンを形成する際のパターン形成方法について説明する。ここでは、上述の実施形態同様に3層レジストプロセスにおけるパターン形成方法について述べる。炭素からなる反射防止膜を下層膜、SOG膜を中間膜、また化学増幅型レジスト膜を上層膜とする。
Claims (10)
- 被処理基板上に塗布型絶縁膜を形成する工程と、
前記塗布型絶縁膜を洗浄するために、前記塗布型絶縁膜上に純水、オゾン水、及び過酸化水素水の何れか一つ以上を含む洗浄液を供給する工程と、
前記塗布型絶縁膜上に感光性膜を形成する工程と、
前記感光性膜に潜像を形成するために、前記感光性膜の所定の位置にエネルギー線を照射する工程と、
前記潜像に基づく感光性膜パターンを形成するために前記感光性膜を現像する工程と、
前記感光性膜パターンをマスクとして、前記塗布型絶縁膜を加工する工程とを含むことを特徴とするパターン形成方法。 - 前記洗浄液の供給後、前記塗布型絶縁膜表面を疎水化処理剤にさらす工程を更に含むことを特徴とする請求項1に記載のパターン形成方法。
- 前記疎水化処理剤は、クロロシラン類、シラザン類、またはアルコキシシラン類であることを特徴とする請求項2記載のパターン形成方法。
- 被処理基板上に化学増幅型レジスト膜を形成する工程と、
前記化学増幅型レジスト膜の表層に偏析している光酸発生剤を純水、オゾン水、及び過酸化水素水の何れか一つ以上を含む洗浄液により除去する洗浄工程と、
前記化学増幅型レジスト膜に潜像を形成するために、前記化学増幅型レジスト膜の所定の位置にエネルギー線を照射する工程と、
前記潜像に基づく化学増幅型レジスト膜パターンを形成するために前記化学増幅型レジスト膜を現像する工程と、
を含むことを特徴とするパターン形成方法。 - 前記化学増幅型レジスト膜パターンをマスクとして、更に前記被処理基板を加工する工程を有することを特徴とする請求項4記載のパターン形成方法。
- 半導体素子を形成するための被処理基板を用意する工程と、
前記被処理基板に対して、請求項1〜5の何れかのパターン形成方法を適用する工程とを含むことを特徴とする半導体装置の製造方法。 - 前記洗浄工程後に前記化学増幅型レジスト膜に吸着する水分を乾燥させる工程を有することを特徴とする請求項4記載のパターン形成方法。
- 前記エネルギー線を照射する工程は、化学増幅型レジスト膜と投影露光装置の光学系との間の光路中に形成した水層を介した液浸露光により行われることを特徴とする請求項4記載のパターン形成方法。
- 前記エネルギー線を照射する工程は、電子線による露光であることを特徴とする請求項4記載のパターン形成方法。
- 前記エネルギー線を照射する工程は、軟X線(EUV)による露光であることを特徴とする請求項4記載のパターン形成方法。
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