JP2915001B2 - Recording / reproducing sliding member - Google Patents
Recording / reproducing sliding memberInfo
- Publication number
- JP2915001B2 JP2915001B2 JP1145310A JP14531089A JP2915001B2 JP 2915001 B2 JP2915001 B2 JP 2915001B2 JP 1145310 A JP1145310 A JP 1145310A JP 14531089 A JP14531089 A JP 14531089A JP 2915001 B2 JP2915001 B2 JP 2915001B2
- Authority
- JP
- Japan
- Prior art keywords
- recording
- diamond
- reproducing
- sliding member
- disk
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
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- Crystals, And After-Treatments Of Crystals (AREA)
Description
【発明の詳細な説明】 （技術分野） 本発明は、磁気又は光記録再生用媒体を装着するため
の部材及び記録再生装置における摺動部材の改良に関す
る。Description: TECHNICAL FIELD The present invention relates to a member for mounting a magnetic or optical recording / reproducing medium and an improvement of a sliding member in a recording / reproducing apparatus.
さらに詳しくは、本発明は光又は磁気ディスクの回転
ハブの摺動部分の耐摩擦性で耐摩耗性の摺動部材に関す
る。More particularly, the present invention relates to a friction- and wear-resistant sliding member of a sliding portion of a rotating hub of an optical or magnetic disk.
（従来の技術） 光ディスクや磁気ディスクでは記録媒体を環状に構成
しこれを支持して駆動するためにその中央孔に金属製の
回転ハブを嵌合固定する。回転ハブは装置側からスピン
ドルピンを受けるための中央孔と偏心位置にある駆動ピ
ンを受けるための軸はずれの孔とを有し、駆動ピンはデ
ィスクを記録再生装置に装着すれば自動的にハブの面を
摺動して軸はずれの孔に嵌合する。このときハブの表面
には摩耗、擦り傷、粉落ちが発生する。(Prior Art) In the case of an optical disk or a magnetic disk, a recording medium is formed in an annular shape, and a metal rotating hub is fitted and fixed in a center hole thereof to support and drive the recording medium. The rotary hub has a central hole for receiving a spindle pin from the device side and an off-axis hole for receiving a drive pin located at an eccentric position, and the drive pin automatically becomes a hub when a disc is mounted on a recording / reproducing device. Slides over the surface and fits into the hole of the shaft. At this time, abrasion, abrasion, and powder fall occur on the surface of the hub.
第１図は磁気ディスク装置の分解構造の概要を示し、
上ケース11、下ケース12の間に、回転ハブ13を中央孔に
嵌合固定した磁気ディスク14、およびその両側のライナ
ーシート15、16を収納して成る。回転ハブ13は再生装置
側の中心スピンドルピン（図示せず）を受け入れるため
の四角形中央孔17と偏心位置にある駆動ピン（図示せ
ず）を受け入れる軸はずれの四角形の孔18を有する。デ
ィスク装置を記録再生装置に装着すれば自動的にスピン
ドルピンおよび駆動ピンはこれらの孔に侵入しようとす
るがこれらのピンは必ずしも孔17、18と正しく整列して
いないから、駆動ピンはハブ13の面を摺動しながら回転
して孔の位置を探して嵌合するに至る。回転ハブ13は通
常ステンレス鋼（SUS430）又はそれにめっき（例えば硬
質クロムめっき）をほどこしたものなどが使用されてい
るが、駆動ピンやスピンドルピンと接触する部分が何度
も使用している間に次第に摩耗して粉落ちを生じ、これ
がディスク面に付着すると擬記録やドロップアウトを生
じ、情報の記録読み取りにおける誤動作を生じることに
成る。シャッター等も使用毎に摺動するため耐久性にし
ないと上述の問題を発生する。FIG. 1 shows an outline of an exploded structure of a magnetic disk drive,
A magnetic disk 14 in which a rotating hub 13 is fitted and fixed in a central hole, and liner sheets 15 and 16 on both sides thereof are housed between an upper case 11 and a lower case 12. The rotary hub 13 has a square central hole 17 for receiving a center spindle pin (not shown) on the reproducing apparatus side and an off-axis square hole 18 for receiving a drive pin (not shown) in an eccentric position. When the disc device is mounted on the recording / reproducing device, the spindle pin and the drive pin automatically try to enter these holes, but since these pins are not always correctly aligned with the holes 17 and 18, the drive pin is It rotates while sliding on the surface of the hole and finds the position of the hole, leading to fitting. The rotating hub 13 is usually made of stainless steel (SUS430) or plated with it (for example, hard chrome plating). Wear causes powder drop, and if it adheres to the disk surface, false recording or dropout occurs, resulting in malfunction in recording and reading information. Since the shutter and the like also slide each time they are used, the above-described problem occurs unless durability is improved.
そのほか磁気テープとの接触による磁気ヘッドの摩擦
及び摩耗とその粉落ちによる同様な問題もある。一般
に、磁気記録再生装置、光ディスク記録再生装置等にお
ける摺動部材では、それが記録媒体に近接した位置にあ
る場合には摺動部材の摩耗による粉落ちで情報の記録又
は再生に誤差が生じる問題があり、出来るだけ耐摩耗性
の摺動部材が望まれ、実際摺動部材の素材を工夫するこ
とにより相当に耐摩耗性の良いものが得られているが、
費用の点で簡便に製造できることが更に望ましい。In addition, there are similar problems due to friction and abrasion of the magnetic head due to contact with the magnetic tape and the powder falling off. Generally, when a sliding member in a magnetic recording / reproducing device, an optical disk recording / reproducing device, or the like is located at a position close to a recording medium, an error occurs in recording or reproducing information due to powder drop due to abrasion of the sliding member. There is a need for a sliding member that is as wear-resistant as possible, and a material with considerably better wear resistance has been obtained by actually devising the material of the sliding member.
It is further desirable to be able to manufacture easily in terms of cost.
（発明の目的） 従って、本発明の目的は、光又は磁気ディスク等の磁
気又は光記録再生装置における、光又は磁気ディスクの
回転ハブの他の部分と摺動する部分の摺動部材の摩擦を
低下し又耐摩耗性を向上する安価な手段を提供すること
にある。(Object of the Invention) Accordingly, an object of the present invention is to reduce the friction of a sliding member of a portion of a magnetic or optical recording / reproducing apparatus such as an optical or magnetic disk that slides with another portion of a rotating hub of the optical or magnetic disk. It is an object of the present invention to provide an inexpensive means for reducing the wear and improving the wear resistance.
（発明の構成の概要） 本発明は記録再生用ディスクの回転ハブの、駆動ピン
が摺動する摺動部の表面上にダイヤモンド結晶構造では
ないダイヤモンド様被覆を形成して成ることを特徴とす
る記録再生媒体用摺動部材を提供する。(Summary of Configuration of the Invention) The present invention is characterized in that a rotating hub of a recording / reproducing disk has a diamond-like coating having no diamond crystal structure formed on a surface of a sliding portion on which a driving pin slides. Provided is a sliding member for a recording / reproducing medium.
本発明は又真空中に炭化水素原料ガス又は分解又は反
応により炭化水素を生成し得る原料ガスを導入し、これ
を熱及び電界によりイオン化させてイオンビームを形成
し、該イオンビームを記録再生用ディスクの回転ハブの
摺動部の表面上にダイヤモンド結晶構造ではないダイヤ
モンド様薄膜を形成させることを特徴とする摺動部材の
製造方法を提供する。The present invention also introduces a hydrocarbon raw material gas or a raw material gas capable of generating hydrocarbons by decomposition or reaction in a vacuum, ionizes the raw material gas with heat and an electric field to form an ion beam, and uses the ion beam for recording and reproduction. A method for manufacturing a sliding member, comprising forming a diamond-like thin film having no diamond crystal structure on a surface of a sliding portion of a rotating hub of a disk.
本発明の摺動部材は光ディスク又は磁気ディスク装置
のディスクを支持する回転ハブに適用される。上記の構
成によると、記録再生装置に使用する摺動部材は、生産
性良く、安価に低摩擦性及び耐摩耗性の良いダイヤモン
ド様膜で被覆することができる。The sliding member of the present invention is applied to a rotating hub that supports an optical disk or a disk of a magnetic disk device. According to the above configuration, the sliding member used in the recording / reproducing apparatus can be coated with a diamond-like film having good productivity and low friction and wear resistance at low cost.
本発明に適するダイヤモンド様膜は種々の方法で成膜
することが出来るが、好ましくはイオン化蒸着法が好適
に使用できる。すなわち、真空中に炭化水素原料ガス又
は分解又は反応により炭化水素を生成し得る原料ガスを
導入し、これをイオン化させ、これを摺動部材の表面部
分中基体となる金属の面に導いてそこに析出させてダイ
ヤモンド様薄膜を形成させる方法により、摺動部材を構
成出来る。この方法は低温度で実施でき、且つ結晶性の
良い膜を生成できる点及び量産がしやすい点で、他の方
法よりも好ましい。The diamond-like film suitable for the present invention can be formed by various methods, but preferably, an ionization vapor deposition method can be suitably used. That is, a hydrocarbon raw material gas or a raw material gas capable of generating hydrocarbons by decomposition or reaction is introduced into a vacuum, ionized, and led to a metal surface serving as a substrate in the surface portion of the sliding member. A sliding member can be formed by a method of forming a diamond-like thin film by depositing on a diamond. This method is preferable to other methods because it can be carried out at a low temperature, can form a film with good crystallinity, and can be easily mass-produced.
（発明の具体的な説明） 上に簡単に述べたように、本発明は記録再生装置用の
摺動部材の表面にダイヤモンド様膜を形成することを特
徴とする。成膜方法は特にイオン化蒸着法によるダイヤ
モンド様膜生成法が好適である。(Detailed Description of the Invention) As briefly described above, the present invention is characterized in that a diamond-like film is formed on the surface of a sliding member for a recording / reproducing device. As a film forming method, a diamond-like film forming method by ionization vapor deposition is particularly preferable.
イオン化蒸着法は炭化水素原料ガス又は分解又は反応
により炭化水素を生成し得る原料ガス（ここに炭化水素
とはメタン、エタン、プロパン等の飽和炭化水素、エチ
レン、プロピレン、アセチレン等の不飽和炭化水素等が
あり、分解して炭化水素を生成し得る原料ガスはメチル
アルコール、エチルアルコール等のアルコール類、アセ
トン、メチルエチルケトン等のケトン類などがあり、又
反応して炭化水素ガスを生成する原料ガスには一酸化炭
素、二酸化炭素と水素との混合ガス等がある。また前記
原料にはヘリウム、ネオン、アルゴン等の希ガスあるい
は水素、酸素、窒素、水、一酸化炭素、二酸化炭素、等
の少なくとも一種を含ませることができる）を陰極−対
陰極間のアーク放電、陰極熱フィラメント−対陰極間の
熱電子放出によるイオン化等の手段でイオン化してイオ
ン流とし、この流れを電場で加速して基板に差し向ける
ことによりダイヤモンド様薄膜を製膜する方法であり、
特開昭59-174507号、特願昭63-59376号、同63-59377号
等に記載されている通り、イオン化蒸着法は基体温度と
して従来のような700℃以上の高温度を用いる必要がな
く（例えば「表面化学」第５巻第108号（1984年）第108
-115頁の各種の方法参照）、製膜能率も良く、製膜され
たダイヤモンド様膜が良好な表面性、高硬度、高熱伝導
性、高屈折率を有し、仕上表面処理が不要である等、優
れた方法である。In the ionization deposition method, a hydrocarbon raw material gas or a raw material gas capable of generating a hydrocarbon by decomposition or reaction (here, hydrocarbon is a saturated hydrocarbon such as methane, ethane, and propane, and an unsaturated hydrocarbon such as ethylene, propylene, and acetylene) Source gases that can be decomposed to produce hydrocarbons include alcohols such as methyl alcohol and ethyl alcohol, and ketones such as acetone and methyl ethyl ketone. Is a mixed gas of carbon monoxide, carbon dioxide and hydrogen, etc. The raw material is a rare gas such as helium, neon, argon, or at least hydrogen, oxygen, nitrogen, water, carbon monoxide, carbon dioxide, etc. One kind can be included) by the arc discharge between the cathode and the cathode, and the bombardment due to thermionic emission between the cathode hot filament and the cathode. Ionized by means of emission and the like as an ion current, a method of forming a film of diamond-like carbon film by directing a substrate to accelerate the flow field,
As described in JP-A-59-174507, JP-A-63-59376, and JP-A-63-59377, the ionization vapor deposition method needs to use a high temperature of 700 ° C. or higher as a conventional substrate temperature. (For example, Surface Chemistry, Vol. 5, No. 108 (1984), No. 108)
-See various methods on page 115), the film forming efficiency is good, and the formed diamond-like film has good surface properties, high hardness, high thermal conductivity, and high refractive index, and does not require finishing surface treatment. It is an excellent method.
なおイオンビームを固定し基板を移動するか、逆に基
板を固定しイオン化された炭化水素のプラズマ状のイオ
ンビームを元の方向に対してほぼ直角な方向に偏向走査
することにより広い基板に対してダイヤモンド様薄膜の
成膜を実施できる。このような偏向磁界は、イオン流の
加速方向にたいして交差する方向の磁界を生じる永久磁
石又は電磁石を用いることにより形成することができ
る。本発明の基本技術であるイオン化蒸着法は、特願昭
63-59377号及び同63-59376号等に記載されており、本発
明の実施例ではこれらに記載された装置を基本とした方
法及び装置を用いる。A wide substrate can be fixed by moving the substrate while fixing the ion beam, or conversely by fixing the substrate and deflecting and scanning the ionized hydrocarbon plasma ion beam in a direction substantially perpendicular to the original direction. To form a diamond-like thin film. Such a deflection magnetic field can be formed by using a permanent magnet or an electromagnet that generates a magnetic field in a direction crossing the acceleration direction of the ion flow. The ionization deposition method, which is the basic technology of the present invention, is disclosed in
63-59377 and 63-59376, etc., and an embodiment of the present invention uses a method and an apparatus based on the apparatus described therein.
製膜装置の概要 第２図に製膜装置の好ましい例を示す。図中30は真空
容器、31はチャンバーであり、排気系38に接続されて10
-6Torr程度までの高真空に引かれる。32は適当な駆動手
段により一定方向に送られる基板Ｓの裏面に設けられた
電極であり、この場合電圧Vaが与えられている。33はグ
リッドでイオンの加速を行なうのに使用される。34は熱
陰極フィラメントであり、交流電源Ifによって加熱され
て熱電子を発生し、また負電位に維持されている。35は
原料である炭化水素ガスの供給口である。また、フィラ
メント34を取囲んで対電極36が配置され、フィラメント
との間に電圧Vdを与える。フィラメント34、対電極36及
び供給口35の周りを取り囲んでイオン化ガスの閉じ込め
用の磁界を発生する電磁コイル39が配置されている。従
ってVd、Va及びコイルの電流を調整することにより膜質
を変えることができる。Outline of Film Forming Apparatus FIG. 2 shows a preferred example of the film forming apparatus. In the figure, reference numeral 30 denotes a vacuum vessel, 31 denotes a chamber, which is connected to an exhaust system 38, and 10
It is drawn to a high vacuum of about -6 Torr. Reference numeral 32 denotes an electrode provided on the back surface of the substrate S which is sent in a predetermined direction by a suitable driving means. In this case, a voltage Va is applied. 33 is used to accelerate ions in the grid. Reference numeral 34 denotes a hot cathode filament, which is heated by an AC power supply If to generate thermoelectrons and is maintained at a negative potential. Reference numeral 35 denotes a supply port for a hydrocarbon gas as a raw material. Further, a counter electrode 36 is arranged so as to surround the filament 34, and a voltage Vd is applied between the filament 34 and the filament. An electromagnetic coil 39 that generates a magnetic field for confining the ionized gas is disposed around the filament 34, the counter electrode 36, and the supply port 35. Therefore, the film quality can be changed by adjusting Vd, Va and the current of the coil.
なお第３図においては、炭化水素ガスの原料導入通路
37にプラズマ励起室36が設けられており、これによりイ
オン化装置の効率を高めている。プラズマ励起は例えば
マイクロ波、高周波（RF波）、放射線、紫外線などが利
用できる。In addition, in FIG. 3, a raw material introduction passage for hydrocarbon gas is shown.
A plasma excitation chamber 36 is provided in 37, thereby increasing the efficiency of the ionizer. For the plasma excitation, for example, microwave, high frequency (RF wave), radiation, ultraviolet light and the like can be used.
また、第３図に示したように第２図の構成の一部を変
更して固定又は可変強度の磁石40をフィラメント34の上
部に配置してプラズマ状のイオンビームの偏向用に用い
ても良い。磁石40の磁界強度は固定又は可変にし、磁石
の磁界はイオン流の走行方向にたいして交差する方向に
する。このようにしてCH3 +、CH4 +イオン等の所望するイ
オンに対して偏向角度θを得る。固定の場合一方、質量
がこれらのイオンと大きく異なるイオン例えば水素イオ
ンはさらに大きく曲げられ、また中性粒子や重質の多量
体イオンは直進する。従って、直進方向にマスクを配置
すれば結晶性の高いイオンのみが基板Ｓに付着する。Also, as shown in FIG. 3, a part of the configuration of FIG. 2 may be modified so that a fixed or variable strength magnet 40 is disposed above the filament 34 and used for deflecting a plasma-like ion beam. good. The magnetic field strength of the magnet 40 is fixed or variable, and the magnetic field of the magnet is in a direction crossing the traveling direction of the ion flow. In this manner, the deflection angle θ is obtained with respect to desired ions such as CH 3 + and CH 4 + ions. On the other hand, in the case of fixation, ions whose masses are significantly different from these ions, for example, hydrogen ions, are further bent, and neutral particles and heavy multimeric ions go straight. Therefore, if the mask is arranged in the straight traveling direction, only ions having high crystallinity adhere to the substrate S.
製膜方法 第３図の装置によって製膜方法を詳しく説明する。先
ず、チャンバー31内を10-6Torrまで高真空とし、ガス供
給通路37のバルブを操作して所定流量のメタンガス、そ
れと水素との混合ガス、或いはそれとAr、He、Ne等のキ
ャリアガス等を各供給口35から導入しながら排気系38を
調整して所定のガス圧例えば10-1Torrとする。一方、複
数の熱陰極フイラメント34には交流電流Ifを流して加熱
し、フイラメント34と対陰極36の間には電位差Vdを印加
して放電を形成する。供給口35から供給されたメタンガ
スは熱分解されるとともにフィラメントからの熱電子と
衝突してプラスのイオンと電子を生じる。この電子は別
の熱分解粒子と衝突する。電磁コイルの磁界による閉じ
込め作用の下に、このような現象を繰り返すことにより
メタンガスは熱分解物質のプラスイオンと成る。Film Forming Method The film forming method will be described in detail using the apparatus shown in FIG. First, the inside of the chamber 31 is set to a high vacuum up to 10 -6 Torr, and a valve of the gas supply passage 37 is operated to supply a predetermined flow rate of methane gas, a mixed gas thereof and hydrogen, or a carrier gas such as Ar, He, Ne or the like. The exhaust system 38 is adjusted while being introduced from each supply port 35 to a predetermined gas pressure, for example, 10 -1 Torr. On the other hand, the plurality of hot cathode filaments 34 are heated by passing an alternating current If, and a discharge is formed by applying a potential difference Vd between the filaments 34 and the counter electrode 36. The methane gas supplied from the supply port 35 is thermally decomposed and collides with thermoelectrons from the filament to generate positive ions and electrons. This electron collides with another pyrolysis particle. By repeating such a phenomenon under the confinement effect of the magnetic field of the electromagnetic coil, methane gas becomes a positive ion of a pyrolysis substance.
プラスイオンは電極32、グリッド36に印加された負電
位Vaにより引き寄せられ、ゆっくりと移動している基体
Ｓの方へ向けて加速され、基板に衝突して製膜反応を行
ない、ダイヤモンド様薄膜を形成する。所望により、上
に述べた固定磁石を利用して更に品質の良い薄膜を得る
ことができる。The positive ions are attracted by the negative potential Va applied to the electrode 32 and the grid 36, accelerated toward the slowly moving substrate S, collide with the substrate and perform a film forming reaction, and form a diamond-like thin film. Form. If desired, a higher quality thin film can be obtained using the fixed magnet described above.
なお、各部の電位、電流、温度等の条件については先
に引用した特許出願や特許公報のほか公知の資料を参照
されたい。For the conditions such as the potential, current, temperature and the like of each part, please refer to publicly known materials in addition to the above-cited patent applications and patent publications.
形成する膜の厚さは好ましくは100〜10,000Åであ
り、厚さが上記の範囲よりも薄いと耐摩耗性が減じ又厚
すぎても効果が増大せず製造時間が長くなる。The thickness of the film to be formed is preferably 100 to 10,000 °, and if the thickness is smaller than the above range, the abrasion resistance is reduced, and if the thickness is too large, the effect is not increased and the production time is increased.
また、予め有機溶剤による超音波洗浄等によりダイヤ
モンド様膜を形成する基体を清浄化しても良い。Further, the substrate on which the diamond-like film is formed may be cleaned in advance by ultrasonic cleaning with an organic solvent or the like.
次に本発明の実施例を説明する。 Next, examples of the present invention will be described.
実施例１ 第２図に示した装置を使用し第１図に示したディスク
ハブを製作した。先ずディスクハブの形の基体をステン
レス鋼から製作し、この基体を第２図に示し上に説明し
た製膜装置に装入し、真空容器10内を10-6Torrに排気し
てからメタンガスを導入しガス圧を10-1Torrとして熱陰
極フィラメントに放電を起こさせた。電磁コイル19の磁
束密度は400ガウス、基板電圧−300V、基板温度200℃と
した。またフィラメント14には電流25Aを流した。Example 1 The disk hub shown in FIG. 1 was manufactured using the apparatus shown in FIG. First, a substrate in the form of a disk hub is made of stainless steel, and this substrate is loaded into the film forming apparatus shown in FIG. 2 and described above, and the inside of the vacuum vessel 10 is evacuated to 10 -6 Torr, and then methane gas is discharged. The gas was introduced and the gas pressure was set to 10 -1 Torr to cause discharge in the hot cathode filament. The magnetic flux density of the electromagnetic coil 19 was 400 gauss, the substrate voltage was -300 V, and the substrate temperature was 200 ° C. A current of 25 A was passed through the filament.
フィラメントはコイル状としその幅3mm、その周りを
取り囲む電極との隙間8mmとし、送り速度40mm/hrとし
た。The filament was coil-shaped, had a width of 3 mm, a gap of 8 mm between the electrode surrounding the filament, and a feed rate of 40 mm / hr.
If＝175A、Vc＝30V、Vd＝−30Vの条件で、膜厚約0.5
μｍの膜厚になるまでダイヤモンド様薄膜の製膜を行な
った。諸特性の測定結果を表１に示す。If = 175A, Vc = 30V, Vd = −30V, film thickness about 0.5
A diamond-like thin film was formed to a thickness of μm. Table 1 shows the measurement results of various characteristics.
なお、チャッキングトルクはディスク駆動ピンとの摺
動時に摩擦によって生じるトルクで１万回着脱試験を行
なった後の値を示す。振れ幅はチャッキングトルクの振
れ幅である。表面傷深さは１万回着脱試験を行なった後
の値を示す。ビッカース硬度は加重10gで測定した。Note that the chucking torque is a value after performing a detachment test 10,000 times with a torque generated by friction when sliding with a disk drive pin. The swing width is the swing width of the chucking torque. The surface scratch depth indicates a value after 10,000 times of the detachment test. Vickers hardness was measured at a weight of 10 g.
（作用効果） 本発明の摺動部材は光ディスク又は磁気ディスク装置
のディスクを支持する回転ハブ等に適用したとき、摺動
部材は、生産性良く、安価に耐摩擦性及び耐摩耗性の良
いダイヤモンド様薄膜で被覆することができる。 (Effects) When the sliding member of the present invention is applied to a rotating hub or the like for supporting an optical disk or a disk of a magnetic disk device, the sliding member has good productivity, is inexpensive, and has good friction resistance and abrasion resistance. Can be coated with a thin film.
第１図は、従来のディスクハブを備えた磁気ディスクケ
ースの分解斜視図、第２図は本発明のダイヤモンド様薄
膜の製造装置の一例を示す断面図、及び第３図はダイヤ
モンド様薄膜の製造装置の他の例を示す断面図である。FIG. 1 is an exploded perspective view of a magnetic disk case provided with a conventional disk hub, FIG. 2 is a cross-sectional view showing an example of the apparatus for producing a diamond-like thin film of the present invention, and FIG. It is sectional drawing which shows the other example of an apparatus.
フロントページの続き (72)発明者 中山 正俊 東京都中央区日本橋１丁目13番１号 テ ィーディーケイ株式会社内 (72)発明者 柴原 正典 東京都中央区日本橋１丁目13番１号 テ ィーディーケイ株式会社内 (56)参考文献 特開 平１−234397（ＪＰ，Ａ) 特開 平１−234396（ＪＰ，Ａ) 特開 平１−7391（ＪＰ，Ａ) 特開 昭60−193112（ＪＰ，Ａ) 実開 昭58−90533（ＪＰ，Ｕ) (58)調査した分野(Int.Cl.6，ＤＢ名) G11B 23/03 G11B 23/087 C30B 29/04 Continuing on the front page (72) Inventor Masatoshi Nakayama 1-13-1 Nihonbashi, Chuo-ku, Tokyo TDK Corporation (72) Inventor Masanori Shibahara 1-13-1 Nihonbashi, Chuo-ku, Tokyo TDK Corporation (56) References JP-A-1-234397 (JP, A) JP-A-1-234396 (JP, A) JP-A-1-7391 (JP, A) JP-A-60-193112 (JP, A) 58-90533 (JP, U) (58) Fields investigated (Int. Cl. 6 , DB name) G11B 23/03 G11B 23/087 C30B 29/04
Claims (2)
ンが摺動する摺動部の表面上にダイヤモンドとは結晶構
造の異なるダイヤモンド様被覆を形成して成ることを特
徴とする記録再生媒体用摺動部材。1. A recording / reproducing medium comprising a rotary hub of a recording / reproducing disk, on which a diamond-like coating having a different crystal structure from diamond is formed on a surface of a sliding portion on which a driving pin slides. For sliding members.
応により炭化水素を生成し得る原料ガスを導入し、これ
を熱及び電界によりイオン化させてイオンビームを形成
し、該イオンビームを記録再生用ディスクの回転ハブの
摺動部の表面上にダイヤモンドとは結晶構造の異なるダ
イヤモンド様薄膜を形成させることを特徴とする第１項
記載の摺動部材の製造方法。2. Introducing a hydrocarbon raw material gas or a raw material gas capable of generating a hydrocarbon by decomposition or reaction into a vacuum, ionizing the raw material gas with heat and an electric field to form an ion beam, and recording / reproducing the ion beam. 2. A method for manufacturing a sliding member according to claim 1, wherein a diamond-like thin film having a different crystal structure from diamond is formed on the surface of the sliding portion of the rotating hub of the disk.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1145310A JP2915001B2 (en) | 1989-06-09 | 1989-06-09 | Recording / reproducing sliding member |
| JP10236602A JPH11134838A (en) | 1989-06-09 | 1998-08-10 | Sliding member for recording/reproducing operation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1145310A JP2915001B2 (en) | 1989-06-09 | 1989-06-09 | Recording / reproducing sliding member |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10236602A Division JPH11134838A (en) | 1989-06-09 | 1998-08-10 | Sliding member for recording/reproducing operation |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0312886A JPH0312886A (en) | 1991-01-21 |
| JP2915001B2 true JP2915001B2 (en) | 1999-07-05 |
Family
ID=15382198
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1145310A Expired - Fee Related JP2915001B2 (en) | 1989-06-09 | 1989-06-09 | Recording / reproducing sliding member |
| JP10236602A Pending JPH11134838A (en) | 1989-06-09 | 1998-08-10 | Sliding member for recording/reproducing operation |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10236602A Pending JPH11134838A (en) | 1989-06-09 | 1998-08-10 | Sliding member for recording/reproducing operation |
Country Status (1)
| Country | Link |
|---|---|
| JP (2) | JP2915001B2 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR940022385A (en) * | 1993-03-31 | 1994-10-20 | 배순훈 | Head drum coating method of video cassette recorder and head drum coated by this method |
| JPH08171712A (en) * | 1994-08-26 | 1996-07-02 | Aiwa Co Ltd | Side face exposure type thin-film magnetic head and its production |
| JP2004310943A (en) | 2003-04-09 | 2004-11-04 | Nitto Denko Corp | Sliding member |
| JP6048829B2 (en) * | 2013-09-09 | 2016-12-21 | 日新イオン機器株式会社 | Ion source |
-
1989
- 1989-06-09 JP JP1145310A patent/JP2915001B2/en not_active Expired - Fee Related
-
1998
- 1998-08-10 JP JP10236602A patent/JPH11134838A/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| JPH11134838A (en) | 1999-05-21 |
| JPH0312886A (en) | 1991-01-21 |
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