JP2749249B2 - Sample holder for coefficient of thermal expansion measurement - Google Patents
Sample holder for coefficient of thermal expansion measurementInfo
- Publication number
- JP2749249B2 JP2749249B2 JP5186194A JP18619493A JP2749249B2 JP 2749249 B2 JP2749249 B2 JP 2749249B2 JP 5186194 A JP5186194 A JP 5186194A JP 18619493 A JP18619493 A JP 18619493A JP 2749249 B2 JP2749249 B2 JP 2749249B2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- thermal expansion
- coefficient
- holder
- measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は主に金属、セラミック等
の薄板試料の熱間線膨張率（以下単に、熱膨張率とい
う）を測定する接触式又は非接触式熱膨張率測定に使用
する試料ホルダーに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is mainly used for a contact type or non-contact type thermal expansion rate measurement for measuring a coefficient of linear thermal expansion (hereinafter, simply referred to as a thermal expansion coefficient) of a thin plate sample such as a metal and a ceramic. Regarding the sample holder.
【０００２】[0002]
【従来の技術】電子、半導体材料等に使用される薄板状
の金属、セラミック、ガラスまたはこれら複合材料にと
って熱膨張特性を予じめ知見することは欠くことのでき
ないものである。2. Description of the Related Art It is indispensable to know in advance the thermal expansion characteristics of a thin metal, ceramic, glass or composite material used for electronic and semiconductor materials.
【０００３】従来、熱膨張率測定は、ＪＩＳ Ｒ ２６
１７及びＲ ２２０７で規定されている如く接触式又は
非接触の方式で測定されており、接触式は、加熱炉内に
設置した試料受台に載せた試料に変位検出棒あるいは管
を接触させ、これにより試料の膨張収縮を検知し、この
変位をダイヤルゲージにより、読み取るか差動変圧器式
変位測定器等により読み取るか、又は記録計に記録し、
測定後曲線より変位を読み取り膨張率を計算するのが一
般的であった。Conventionally, measurement of the coefficient of thermal expansion has been carried out according to JIS R 26
17 and R 2207 are measured by a contact type or a non-contact type as defined by R 2207.The contact type is obtained by bringing a displacement detection rod or a tube into contact with a sample placed on a sample holder placed in a heating furnace, Thereby, the expansion and contraction of the sample is detected, and this displacement is read by a dial gauge or read by a differential transformer type displacement measuring device or the like, or recorded on a recorder,
It was common to read the displacement from the curve after measurement and calculate the expansion coefficient.
【０００４】しかし、この方法は、試料に検出棒を接触
させて測定圧を加えるため、高温で軟化状態を示す試料
の場合測定圧による圧縮力により、試料自体が変形し、
真の膨張率を測定することが困難である。また、この場
合、試料受台と変位検出棒の膨張量の相違による補正を
要する場合が多く、これが誤差の原因になっていた。However, in this method, since a detection rod is brought into contact with a sample to apply a measurement pressure, in the case of a sample showing a softened state at a high temperature, the sample itself is deformed by a compressive force due to the measurement pressure,
It is difficult to measure the true coefficient of expansion. In this case, correction is often required due to a difference in the amount of expansion between the sample receiving table and the displacement detection rod, and this has caused an error.
【０００５】従って測定試料に非接触で測定する方法が
採用されているのが現状である。非接触で測定する方法
としては、加熱炉中に設置した試料の両端の変位を目盛
付望遠鏡により、人為的に読み取るものがある。この非
接触方式では試料受台にスリッド状の溝を設け、この溝
に試料を配設して測定している。Therefore, at present, a method of measuring a sample in a non-contact manner is adopted. As a non-contact measurement method, there is a method in which displacements at both ends of a sample placed in a heating furnace are artificially read by a graduated telescope. In the non-contact method, a slit-like groove is provided in the sample receiving table, and the sample is disposed in the groove to perform measurement.
【０００６】[0006]
【発明が解決しようとする課題】図１７図示のように試
料をセットし、試料下部のみ遊嵌状に支持された状態で
は昇温すると試料が残留応力等の影響で歪を生じ、湾曲
して試料寸法が変化するため、真の膨張率が測定できな
いという問題があった。When a sample is set as shown in FIG. 17 and only the lower portion of the sample is supported in a loose fit state, the sample is distorted due to the influence of residual stress and the like when the temperature is raised, and the sample is bent. There is a problem that the true expansion coefficient cannot be measured because the sample size changes.
【０００７】本発明は前述した従来方式に鑑み、測定中
に薄板試料が湾曲しにくい試料ホルダーとすることによ
り高精度でかつ容易に測定できる試料ホルダーを提供す
ることを目的とする。The present invention has been made in view of the above-mentioned conventional method, and an object of the present invention is to provide a sample holder which can measure with high precision and easily by using a sample holder in which a thin plate sample does not easily bend during measurement.
【０００８】[0008]
【課題を解決するための手段】本発明者等は前述のよう
な従来方式の諸問題点を解決するために、種々検討、実
験の結果本発明を開発したものであり、本発明の技術的
構成は、金属、セラミック等の薄板試料の熱膨張率を測
定する装置に用いる試料ホルダーにおいて、該薄板試料
を遊嵌状に挾持する２分割型の試料ガイドからなること
を特徴とする熱膨張率測定装置用試料ホルダーにあり、
該２分割型の試料ガイドが何れもその断面形状が半円形
又は多角形でよく、また、該薄板試料の両側全面又は両
側の上下面又は両側の前後両端面を、遊嵌状に挾持する
２分割型の一対の試料ガイドでもよく、更に本発明は、
金属、セラミック等の薄板試料の熱膨張率を測定する装
置に用いる試料ホルダーにおいて、該ホルダーが断面円
柱状又は多角形状であり、薄板試料を遊嵌状に埋設支持
し得る溝を円柱状又は多角形状ホルダーの軸方向に穿設
し、該溝の両端部が開放状であることを特徴とする熱膨
張率測定用一体形試料ホルダーからもなり、この発明の
試料ホルダーは、該薄板試料の両側面全面又は両側の上
下面又は両側の前後両端面を、遊嵌状に挾持する一体状
の枠形試料ガイドとすることができる。Means for Solving the Problems The present inventors have developed the present invention as a result of various studies and experiments in order to solve the above-mentioned various problems of the conventional system. The thermal expansion coefficient is characterized in that a sample holder used in an apparatus for measuring the coefficient of thermal expansion of a thin plate sample such as a metal or a ceramic comprises a two-divided sample guide for holding the thin plate sample loosely. In the sample holder for the measuring device,
Each of the two-divided sample guides may have a semicircular or polygonal cross-sectional shape, and hold the entire surface of the thin plate sample, the upper and lower surfaces of both sides, or the front and rear end surfaces of both sides in a loose fit. A pair of split type sample guides may be used.
In a sample holder used for an apparatus for measuring the coefficient of thermal expansion of a thin plate sample such as a metal or a ceramic, the holder has a columnar or polygonal cross section, and a groove capable of burying and supporting the thin plate sample in a loose fitting shape has a columnar or polygonal shape. It also comprises an integral sample holder for measuring the coefficient of thermal expansion, characterized in that the shape holder is bored in the axial direction and both ends of the groove are open, and the sample holder of the present invention is provided on both sides of the thin plate sample. The entire sample surface, the upper and lower surfaces of both sides, or the front and rear end surfaces of both sides can be formed as an integral frame-shaped sample guide that is clamped loosely.
【０００９】前述の如き技術的構成とすることにより、
本発明では、従来方式より高精度の測定が可能となり、
従来全く測定不可能の０．１ｍｍ厚さ以下の薄板試料も
容易に精度よく、測定でき、更に加工時に歪を生じ湾曲
した試料も本発明ホルダーの使用により緩かに拘束され
るため、歪が矯正され、精度よく測定できる等種々の作
用、効果を達成しうる。By adopting the technical configuration as described above,
In the present invention, it is possible to measure with higher accuracy than the conventional method,
Thin plates with a thickness of 0.1 mm or less, which cannot be measured at all conventionally, can be measured easily and accurately, and even curved samples that are distorted during processing and are bent loosely by using the holder of the present invention. Various functions and effects can be achieved, such as being corrected and being able to measure accurately.
【００１０】本発明の種々の具体例を示す添付図面に基
づいて詳細に説明する。The present invention will be described in detail with reference to the accompanying drawings showing various embodiments.
【００１１】図１及び図２は本発明の一例を示し、図２
は図１のII−II線に沿った断面図である。図において、
１，１′は断面が半円柱状の試料ガイドであり、３は前
記両者の接合面間に配設するスペーサー、４はスペーサ
ー配設位置に設ける組立ネジ、５は熱膨張率を測定しよ
うとする試料である。FIGS. 1 and 2 show an example of the present invention.
FIG. 2 is a sectional view taken along the line II-II of FIG. In the figure,
Reference numerals 1 and 1 'denote sample guides having a semi-cylindrical cross section, 3 denotes a spacer provided between the joining surfaces of the two, 4 denotes an assembly screw provided at a position where the spacer is provided, and 5 denotes a thermal expansion coefficient. Sample.
【００１２】試料ガイド１，１′は図１に示す如く試料
の厚さを考慮して試料が遊嵌状となるようにスペーサー
３の厚さを選ぶこととなる。As shown in FIG. 1, the thicknesses of the spacers 3 of the sample guides 1 and 1 'are selected in consideration of the thickness of the sample so that the sample is loosely fitted.
【００１３】試料を遊嵌状に保持する間隙範囲は、試料
厚さの１１０〜２００％が好ましく、２００％を超える
と試料の変形が抑制されず測定精度が低下し、１１０％
未満では試料の膨張、収縮による動きを拘束し、正確な
熱膨張が測定できない。The gap range for holding the sample in a loose fit is preferably 110 to 200% of the sample thickness. If it exceeds 200%, the deformation of the sample is not suppressed and the measurement accuracy is reduced, and 110%.
If it is less than 1, the movement due to expansion and contraction of the sample is restricted, and accurate thermal expansion cannot be measured.
【００１４】図３及び図４は本発明の他の例を示し、図
３は図４の左側端面図、図４は図３の縦断面図であり、
試料５の膨張収縮変位伝達用の押棒６を付設した例を示
し、前述の例と同一符号は同一部材を示す。3 and 4 show another embodiment of the present invention. FIG. 3 is a left end view of FIG. 4, and FIG. 4 is a longitudinal sectional view of FIG.
An example is shown in which a push bar 6 for transmitting the expansion and contraction displacement of the sample 5 is provided, and the same reference numerals as those in the above-described example indicate the same members.
【００１５】図５及び図６は一対の試料ガイド１をスリ
ーブ７内に挿入、保持し、しかも試料５を遊嵌状に保持
する例を示し、図６は図５VI−VI線の縦断面図であり、
その他の符号は前述の例と同一部材を示す。FIGS. 5 and 6 show an example in which the pair of sample guides 1 are inserted and held in the sleeve 7 and the sample 5 is held loosely. FIG. 6 is a longitudinal sectional view taken along line VI-VI of FIG. And
Other symbols indicate the same members as in the above-described example.
【００１６】以上詳記した具体例は主として接触式熱膨
張率測定装置に用いられる試料ホルダーの例であるが、
非接触式熱膨張率測定装置用の試料ホルダーの具体例を
詳述する。The specific example described in detail above is an example of a sample holder mainly used in a contact-type coefficient of thermal expansion measuring device.
A specific example of a sample holder for a non-contact thermal expansion coefficient measuring device will be described in detail.
【００１７】図７は一対の断面Ｌ形の試料ガイドの組立
体端面であり、該Ｌ形試料ガイド８及び８′の長辺側間
に試料５を挾持、保持する（ブックエンドで書籍を挾持
するように）型式のものであり、一対の試料ガイド８及
び８′間の間隔は、前述の場合と同様に試料の膨張、収
縮による動きを拘束せず、また湾曲等の変形を抑制する
ようにスペーサー３を用いて遊嵌状態として挾持、保持
するものである。FIG. 7 shows an end face of a pair of sample guides having an L-shaped cross section. The sample 5 is held and held between the long sides of the L-shaped sample guides 8 and 8 '. The distance between the pair of sample guides 8 and 8 'is such that the movement due to the expansion and contraction of the sample is not restricted and the deformation such as bending is suppressed as in the case described above. Are held and held in a loosely fitted state using a spacer 3.
【００１８】図８は図７の試料ガイドの間隙の両端面間
にスペーサー３を配設した例を示し、図９は試料ガイド
８及び８′の長辺側の両側に対応して連通する窓１８を
設け、図示の如く試料５の両端面を測定可能なように露
出する構成とし、図１０に示す例はスペーサー３の配置
を両試料ガイドの上下及び左右のそれぞれの端面のみと
し、試料５の両端部を試料ガイド組立体の両端部より突
出させる構成とする例を示す正面図である。FIG. 8 shows an example in which spacers 3 are arranged between both end faces of the gap of the sample guide of FIG. 7, and FIG. 9 shows windows communicating with both sides of the long sides of the sample guides 8 and 8 '. 18 is provided to expose both end faces of the sample 5 so as to be measurable as shown in the figure. In the example shown in FIG. 10, the spacer 3 is arranged only at the upper and lower and left and right end faces of both sample guides. FIG. 5 is a front view showing an example in which both ends of the sample guide assembly are protruded from both ends of the sample guide assembly.
【００１９】図１１は試料ホルダー８，８′の変形例の
端面図であり、断面三角形の試料ガイド８，８′の各１
面間に試料５を挾持、保持し、試料ガイド台９に設けた
凹所内に嵌合、配置し、試料ガイド８、８′のクサビ作
用により試料をゆるやかに拘束、支持するものである。
なお、図１１の例では試料ガイド８，８′を三角形とし
たが、その他の多角形又は半円柱状としてもよい。FIG. 11 is an end view of a modified example of the sample holders 8 and 8 '.
The sample 5 is held and held between the surfaces, fitted and arranged in a recess provided in the sample guide table 9, and gently restrains and supports the sample by the wedge action of the sample guides 8 and 8 '.
Although the sample guides 8, 8 'are triangular in the example of FIG. 11, they may be other polygons or semi-cylindrical shapes.
【００２０】図１２は試料ガイド１を一体型円柱体と
し、試料支持用溝１０を設け、該溝１０内に遊嵌状に試
料を保持する機構の斜視図である。図１２では円柱状一
体型としてあるが、多角形一体型としてもよい。FIG. 12 is a perspective view of a mechanism in which the sample guide 1 is an integral cylindrical body, a sample supporting groove 10 is provided, and a sample is held in the groove 10 in a loosely fitted state. Although FIG. 12 shows a cylindrical integral type, it may be a polygonal integral type.
【００２１】図１３〜図１６分割型枠形の試料ガイドの
数例を示す何れも斜視図であって、図１３はほゞ２分割
型の試料ガイド８，８′からなり、試料５を図示のよう
に挾持、支持する機構であり、図１４及び図１５は図１
３の変形例である。図１６は一体枠形の支持ホルダーを
示し、前述の例と同一符号は同一部材を示す。なお、こ
れら変形例でも必要に応じスペーサーを用いることがで
きる。FIGS. 13 to 16 are perspective views showing several examples of the divided frame-shaped sample guides. FIG. 13 is composed of approximately two-divided sample guides 8 and 8 ', and the sample 5 is illustrated. FIGS. 14 and 15 show a holding and supporting mechanism as shown in FIG.
This is a modification of the third embodiment. FIG. 16 shows an integral frame type support holder, and the same reference numerals as those in the above-described example indicate the same members. Note that a spacer can be used as needed in these modified examples.
【００２２】本発明の試料ホルダーの材質は金属、セラ
ミック又は黒鉛等であり、測定温度、雰囲気等の測定機
構に応じて使い分ける。The material of the sample holder of the present invention is metal, ceramic, graphite, or the like, and is properly used according to the measuring mechanism such as the measuring temperature and the atmosphere.
【００２３】試料の巾は試料ガイドの内部空間窓の上下
巾以上が必要で、また試料の長さは試料ガイドの内部空
間窓の左右巾より短く、かつ、光学的に試料側端部のエ
ッヂが確認できるようになっていなければならない。The width of the sample must be equal to or greater than the vertical width of the internal space window of the sample guide. The length of the sample is shorter than the horizontal width of the internal space window of the sample guide. Must be visible.
【００２４】前述の如き機構の本発明試料ホルダーに試
料をセットし、接触式膨張計又は非接触式膨張計の加熱
炉の均熱帯に装着し、試料の端部の変化を差動変圧器式
変位測定器又は非接触式寸法測定器で測定する。上記非
接触式膨張計は例えば本出願人がさきに提案した特開昭
６１−７４５２号公報又は特開平３−７７０５３号公報
に開示された変位測定装置が好適である。A sample is set in the sample holder of the present invention having the above-described mechanism, and the sample is mounted on a contact dilatometer or a non-contact dilatometer in a heating furnace of a heating furnace. Measure with a displacement measuring instrument or a non-contact type dimension measuring instrument. As the non-contact dilatometer, for example, a displacement measuring device disclosed in Japanese Patent Application Laid-Open No. 61-7452 or Japanese Patent Application Laid-Open No. 3-77053, which was previously proposed by the present applicant, is preferable.
【００２５】[0025]
【実施例１】図２の試料ホルダーで、試料ガイド１をス
テンレスで長さ４９ｍｍとし、０．１５ｍｍ厚さのスペ
ーサー３を使い、ステンレスで厚さ０．１ｍｍ、幅８ｍ
ｍ、長さ５０ｍｍの試料を遊嵌状態にしたものを、接触
式熱膨張率測定装置にセットして、無酸化雰囲気下で毎
分４℃で８００℃まで熱膨張率を測定した。その結果従
来は測定できなかったものが正確に測定できた。EXAMPLE 1 In the sample holder shown in FIG. 2, the sample guide 1 was made of stainless steel with a length of 49 mm, and a spacer 3 having a thickness of 0.15 mm was used.
A sample having a length of 50 mm and a length of 50 mm in a loosely fitted state was set in a contact-type thermal expansion coefficient measuring apparatus, and the coefficient of thermal expansion was measured at 4 ° C. per minute up to 800 ° C. in a non-oxidizing atmosphere. As a result, what could not be measured conventionally could be accurately measured.
【００２６】[0026]
【実施例２】図６の試料ホルダーの試料ガイド基台６及
び試料ガイド１をステンレス製の一体構造とし、内部空
間開口部を高さ６ｍｍ、幅５０ｍｍにしたものを０．１
ｍｍのスペーサーを用いて、厚さ０．０７５ｍｍ×幅１
０ｍｍ×長さ４０ｍｍの特殊鋼の薄板試料を遊嵌状態に
セットし、レーザによる非接触式熱膨張率測定装置を使
い無酸化雰囲気とし、毎分５℃で８００℃まで熱膨張率
を測定した。その結果試料の変形もなく正確な測定がで
きた。Embodiment 2 The sample guide base 6 and the sample guide 1 of the sample holder shown in FIG. 6 are made of stainless steel and have an internal space opening having a height of 6 mm and a width of 50 mm.
0.075mm x width 1
A thin steel sample of 0 mm × 40 mm in length was set in a loose fit state, and a non-oxidizing atmosphere was measured using a non-contact type thermal expansion coefficient measuring device using a laser, and the coefficient of thermal expansion was measured at 5 ° C. per minute up to 800 ° C. . As a result, accurate measurement was possible without deformation of the sample.
【００２７】[0027]
【発明の効果】本発明の試料ホルダーを使用すること
で、従来の試料ホルダーでは精度良く測定できなかった
厚さ０．５ｍｍ程度の試料を高精度（正確）の測定がで
きるようになる。By using the sample holder of the present invention, a sample having a thickness of about 0.5 mm, which cannot be measured accurately with a conventional sample holder, can be measured with high accuracy (accurate).
【００２８】また従来全く測定できなかった０．１ｍｍ
厚さ以下の試料も容易に精度良く測定できる。また加工
時に歪を生じ、湾曲した試料も本発明の試料ホルダーを
使うことで、緩かに拘束されるため歪が矯正され精度良
く測定できる。Also, 0.1 mm which could not be measured at all
Samples less than the thickness can be easily and accurately measured. In addition, since a sample which is distorted during processing and is curved is loosely constrained by using the sample holder of the present invention, the distortion is corrected and accurate measurement can be performed.
【図１】本発明の一例を示す断面図FIG. 1 is a cross-sectional view illustrating an example of the present invention.
【図２】図１のII−II線に沿った断面図FIG. 2 is a sectional view taken along the line II-II in FIG.
【図３】本発明の他の例を示す端面図FIG. 3 is an end view showing another example of the present invention.
【図４】図３の縦断面図FIG. 4 is a longitudinal sectional view of FIG. 3;
【図５】一対の試料ガイドをスリーブ内に保持した本発
明の他の例FIG. 5 shows another example of the present invention in which a pair of sample guides is held in a sleeve.
【図６】図５のVI−VI線の縦断面図FIG. 6 is a longitudinal sectional view taken along line VI-VI of FIG. 5;
【図７】本発明の別の例で、一対の断面Ｌ形の試料ガイ
ドFIG. 7 shows another example of the present invention, in which a pair of L-shaped sample guides are provided.
【図８】図７と類似の例でスペーサーを有する側面図8 is a side view with spacers in an example similar to FIG.
【図９】Ｌ字形試料ガイドに窓を設けた例の側面図FIG. 9 is a side view of an example in which a window is provided in an L-shaped sample guide.
【図１０】スペーサーの配置の変形例を示す側面図FIG. 10 is a side view showing a modification of the arrangement of the spacers.
【図１１】断面三角形の試料ガイドの端面図FIG. 11 is an end view of a sample guide having a triangular cross section.
【図１２】一体型円柱体の試料ガイドの斜視図FIG. 12 is a perspective view of an integrated cylindrical sample guide.
【図１３】分割型枠形の試料ガイドの例の端面斜視図FIG. 13 is an end perspective view of an example of a divided frame type sample guide.
【図１４】分割型枠形の試料ガイドの例の端面斜視図FIG. 14 is an end perspective view of an example of a sample guide having a split mold shape.
【図１５】分割型枠形の試料ガイドの例の端面斜視図FIG. 15 is an end perspective view of an example of a divided frame-shaped sample guide.
【図１６】一体型枠形の試料ガイドの例の端面斜視図FIG. 16 is an end perspective view of an example of an integrated frame type sample guide.
【図１７】従来の試料ホルダーの斜視図FIG. 17 is a perspective view of a conventional sample holder.
１，１′ 試料ガイド ３ スペーサー ４ 組立ネジ ５ 試料 ６ 押棒 ７ スリーブ ８ Ｌ形試料ガイド ８′ Ｌ形試料ガイド ９ 試料ガイド台 １０ 試料支持用溝 1, 1 'Sample guide 3 Spacer 4 Assembly screw 5 Sample 6 Push rod 7 Sleeve 8 L-shaped sample guide 8' L-shaped sample guide 9 Sample guide table 10 Sample support groove
Claims (5)
率を測定する装置に用いる試料ホルダーにおいて、該薄
板試料を遊嵌状に挾持する２分割型の試料ガイドからな
ることを特徴とする熱膨張率測定装置用試料ホルダー。1. A sample holder for use in an apparatus for measuring the coefficient of thermal expansion of a thin plate sample of metal, ceramic, etc., comprising a two-part sample guide for holding the thin plate sample loosely. Sample holder for expansion rate measurement device.
断面形状が半円形又は多角形である請求項１記載の熱膨
張率測定装置用試料ホルダー。2. The sample holder for a thermal expansion coefficient measuring apparatus according to claim 1, wherein each of the two-divided sample guides has a semicircular or polygonal cross section.
率を測定する装置に用いる試料ホルダーにおいて、該薄
板試料の両側全面又は両側の上下面又は両側の前後両端
面を、遊嵌状に挾持する２分割型の一対の試料ガイドか
らなることを特徴とする熱膨張率測定装置用試料ホルダ
ー。3. A sample holder for use in an apparatus for measuring the coefficient of thermal expansion of a thin plate sample of metal, ceramic, or the like, wherein the entire surface of the thin plate sample, the upper and lower surfaces of both sides, or the front and rear end surfaces of both sides are loosely fitted. A sample holder for a thermal expansion coefficient measuring device, comprising a pair of two-divided sample guides.
率を測定する装置に用いる試料ホルダーにおいて、該ホ
ルダーが断面円柱状又は多角形状であり、薄板試料を遊
嵌状に埋設支持し得る溝を円柱状又は多角形状ホルダー
の軸方向に穿設し、該溝の両端部が開放状であることを
特徴とする熱膨張率測定用一体形試料ホルダー。4. A sample holder for use in an apparatus for measuring the coefficient of thermal expansion of a thin plate sample such as a metal or ceramic, wherein the holder has a columnar or polygonal cross section, and a groove capable of burying and supporting the thin plate sample in a free-fitting manner. Characterized in that a cylindrical or polygonal holder is bored in the axial direction of the holder, and both ends of the groove are open.
率を測定する装置に用いる試料ホルダーにおいて、該薄
板試料の両側面全面又は両側の上下面又は両側の前後両
端面を、遊嵌状に挾持する一体状の枠形試料ガイドから
なることを特徴とする熱膨張率測定装置用試料ホルダ
ー。5. A sample holder for use in an apparatus for measuring the coefficient of thermal expansion of a thin sample of metal, ceramic, or the like, wherein the entire surface of both sides of the thin sample, the upper and lower surfaces of both sides, or the front and rear ends of both sides are loosely fitted. A sample holder for a coefficient of thermal expansion measurement device, comprising a frame-shaped sample guide integrally held.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5186194A JP2749249B2 (en) | 1993-07-28 | 1993-07-28 | Sample holder for coefficient of thermal expansion measurement |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5186194A JP2749249B2 (en) | 1993-07-28 | 1993-07-28 | Sample holder for coefficient of thermal expansion measurement |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0743326A JPH0743326A (en) | 1995-02-14 |
| JP2749249B2 true JP2749249B2 (en) | 1998-05-13 |
Family
ID=16184034
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5186194A Expired - Lifetime JP2749249B2 (en) | 1993-07-28 | 1993-07-28 | Sample holder for coefficient of thermal expansion measurement |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2749249B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8328417B2 (en) * | 2009-08-20 | 2012-12-11 | Corning Incorporated | Photoelastic method for absolute determination of zero CTE crossover in low expansion silica-titania glass samples |
| DE102011051561A1 (en) * | 2011-07-05 | 2013-01-10 | BÄHR-Thermoanalyse GmbH | Dilatometer for the measurement of metallic samples |
| KR101717591B1 (en) * | 2015-12-07 | 2017-03-17 | 김민성 | Apparatus for measuring thermal expansion coefficient |
-
1993
- 1993-07-28 JP JP5186194A patent/JP2749249B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0743326A (en) | 1995-02-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2625333B2 (en) | Linear measuring device | |
| US5065525A (en) | Length or angle measuring device | |
| EP1180662B1 (en) | Position transducer | |
| JPS58113805A (en) | Method and device for detecting and compensating error of guide | |
| JPH11351857A (en) | Method and apparatus for measurement of surface shape of thin plate | |
| JPH02223801A (en) | Coordinate measuring apparatus with one or more guide members comprising aluminum and making of gauge therefor | |
| JP2749249B2 (en) | Sample holder for coefficient of thermal expansion measurement | |
| US20020019718A1 (en) | Dial indicator calibration apparatus | |
| JPH09500716A (en) | High temperature extensometer | |
| JPH03144343A (en) | Measuring system for hot displacement-load | |
| JP3609271B2 (en) | Displacement measuring device | |
| JPH1038551A (en) | Method and device for measuring dimension | |
| JP2582210B2 (en) | Displacement measuring device | |
| JP2005083920A (en) | Linear expansion coefficient measuring device | |
| KR100265985B1 (en) | Inspection method and apparatus of head unit | |
| KR20210096139A (en) | table | |
| JPH05149899A (en) | Dimension change measurement device | |
| JP4401847B2 (en) | Displacement measuring device | |
| JP2001235304A (en) | Method of measuring accuracy of straight motion using straightness measuring apparatus | |
| JPH0949721A (en) | Butting-type measuring device | |
| JPH0835801A (en) | Jig for measuring dimensions of elbow | |
| JP2627193B2 (en) | Scale equipment | |
| JP3031719U (en) | Glass flatness measuring device | |
| JP3163783B2 (en) | Thermal displacement compensator for measuring device | |
| JPH04279849A (en) | Measurement of coefficient of linear expansion and device therefor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A911 | Transfer of reconsideration by examiner before appeal (zenchi) |
Effective date: 20031125 Free format text: JAPANESE INTERMEDIATE CODE: A911 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20040302 |
|
| A61 | First payment of annual fees (during grant procedure) |
Effective date: 20040326 Free format text: JAPANESE INTERMEDIATE CODE: A61 |
|
| R150 | Certificate of patent (=grant) or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090409 Year of fee payment: 5 |
|
| S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Year of fee payment: 5 Free format text: PAYMENT UNTIL: 20090409 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Year of fee payment: 6 Free format text: PAYMENT UNTIL: 20100409 |
|
| LAPS | Cancellation because of no payment of annual fees |