JP3163783B2 - Thermal displacement compensator for measuring device - Google Patents
Thermal displacement compensator for measuring deviceInfo
- Publication number
- JP3163783B2 JP3163783B2 JP26007192A JP26007192A JP3163783B2 JP 3163783 B2 JP3163783 B2 JP 3163783B2 JP 26007192 A JP26007192 A JP 26007192A JP 26007192 A JP26007192 A JP 26007192A JP 3163783 B2 JP3163783 B2 JP 3163783B2
- Authority
- JP
- Japan
- Prior art keywords
- core
- measuring
- differential
- arm
- measuring device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Machine Tool Sensing Apparatuses (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は一対の測定腕の変位量を
測定することで、測定物の径を測定する測定装置の熱変
位補償装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thermal displacement compensator of a measuring device for measuring a diameter of a measured object by measuring a displacement of a pair of measuring arms.
【０００２】[0002]
【従来の技術】従来技術、測定物の外径等を測定する測
定装置は、図２に示すように固定ベース１に取り付けら
れたブランジ２に板ばね３を介して一対の測定腕４，５
を取り付け、この一対の測定腕の４，５の一端に測定物
Ｗの外周に接触する接触子６を設け、他端に差動トラン
ス７を設け、この差動トランス７のコア７ａが測定腕４
に取り付けられ、差動コイル７ｂが測定腕５に取り付け
た構成になっている。そして板バネ３を支点として測定
腕４，５が測定物の径に応じて揺動し、この揺動によっ
てコア７ａと差動コイル７ｂの相対的な位置が変化して
差動コイル７ｂにその揺動の量に応じた出力が現れる。
ここで、測定の基準となるマスタワークの径にて差動ト
ランス７の出力が零になるように調整しておけば、マス
タワークの径と測定物の径の差が差動トランス７の出力
になる。2. Description of the Related Art As shown in FIG. 2, a conventional measuring device for measuring the outer diameter of a measurement object includes a pair of measuring arms 4, 5 via a leaf spring 3 on a flange 2 mounted on a fixed base 1.
A contact 6 is provided at one end of each of the pair of measuring arms 4 and 5 to contact the outer periphery of the object W, and a differential transformer 7 is provided at the other end. 4
And the differential coil 7b is attached to the measurement arm 5. Then, the measuring arms 4 and 5 swing with the leaf spring 3 as a fulcrum according to the diameter of the object to be measured. This swing changes the relative position between the core 7a and the differential coil 7b, and the An output corresponding to the amount of swing appears.
Here, if the output of the differential transformer 7 is adjusted to be zero at the diameter of the master work serving as the measurement reference, the difference between the diameter of the master work and the diameter of the measured object will be the output of the differential transformer 7. become.
【０００３】[0003]
【発明が解決しようとする課題】このため、測定子６が
マスタワークの径にあたる位置にある状態では差動コイ
ル７ｂの出力は零となるように調整されていなければな
らない。ところが、周囲の温度の変化により測定装置は
熱変位を生じてしまう。このとき測定装置の各構成要素
が全て同一の線膨張係数を有する材質、例えば鉄によっ
て形成すれば、各構成要素が熱膨張しても膨張量が同一
であるため、熱変位は互いにキャンセルされ、差動コイ
ル７ｂの出力は零のままであるが、差動トランス７は、
磁気特性上、差動コア７ａと差動コイル７ｂの材質を同
じにすることおよび他の構成要素と同一の材質にするこ
とができない。このため、線膨張係数の差から熱変位量
に差が生じて差動コイル７ｂの出力が変化してしまい、
測定精度に影響を与えていた。Therefore, the output of the differential coil 7b must be adjusted to be zero when the tracing stylus 6 is at a position corresponding to the diameter of the master work. However, a change in ambient temperature causes a thermal displacement in the measuring device. At this time, if all the constituent elements of the measuring device are formed of a material having the same linear expansion coefficient, for example, iron, the expansion amount is the same even if the respective constituent elements thermally expand, so that the thermal displacements are canceled each other, The output of the differential coil 7b remains zero, but the differential transformer 7
Due to the magnetic characteristics, the materials of the differential core 7a and the differential coil 7b cannot be made the same and the same material as other components cannot be used. For this reason, a difference occurs in the amount of thermal displacement from the difference in the coefficient of linear expansion, and the output of the differential coil 7b changes,
This had an effect on the measurement accuracy.
【０００４】また、この差動コイル７ｂの熱変位による
誤差を温度補償回路を設けて補償することも考えられる
が、装置が高価となってしまう。It is also conceivable to provide a temperature compensation circuit to compensate for the error due to the thermal displacement of the differential coil 7b, but the apparatus becomes expensive.
【０００５】[0005]
【課題を解決するための手段】本発明は上述した問題を
解決するために成されたもので、一方の測定腕の他端に
前記他方の測定腕に向かって伸びる差動トランスのコア
を取付け、前記コアの外周を該コアの移動を検出する差
動トランスの差動コイルにて包囲し、この差動コイルと
前記他方の測定腕とを前記コアと伸びが同一となるよう
な線膨張係数を有する材質のスペーサを介して接続した
ものである。SUMMARY OF THE INVENTION The present invention has been made in order to solve the above-mentioned problem, and has a differential transformer core extending toward the other measuring arm at the other end of one measuring arm. , The outer circumference of the core is surrounded by a differential coil of a differential transformer for detecting the movement of the core, and the differential coil and the other measurement arm are linearly expanded so as to have the same expansion as the core. Are connected via a spacer made of a material having
【０００６】[0006]
【作用】本発明は上記構成により、コアが熱膨張にて伸
びた分だけ、スペーサが伸びるため、コアの伸び方向と
同一方向に差動トランスが移動してコアの伸びをキャン
セルする。According to the present invention, since the spacer is extended by an amount corresponding to the extension of the core due to the thermal expansion, the differential transformer moves in the same direction as the extension direction of the core to cancel the extension of the core.
【０００７】[0007]
【実施例】以下、本発明の実施例を図面に基づいて説明
する。図１において、１０，１１は一端に測定子１２，
１３を備えた測定腕であり、この測定腕１０，１１はほ
ぼ中央で偏平状の板ばね１４の両端に固定され、この板
ばね１４が取り付けられたフランジ１５にて支持されて
いる。そしてこの板バネ１４の測定腕１０とフランジ１
５の間、および測定腕１１とフランジ１５の間にそれぞ
れ薄肉わん曲部１４ａが形成されている。この薄肉わん
曲部１４ａに撓みが生じることにより、測定腕１０，１
１が揺動する。Embodiments of the present invention will be described below with reference to the drawings. In FIG. 1, reference numerals 10 and 11 denote measuring elements 12 and
The measuring arms 10 and 11 are fixed to both ends of a flat leaf spring 14 at substantially the center, and are supported by a flange 15 to which the leaf spring 14 is attached. The measuring arm 10 and the flange 1 of the leaf spring 14
5, and between the measurement arm 11 and the flange 15 are formed thin curved portions 14a. The bending of the thin curved portion 14a causes the measurement arms 10 and 1 to flex.
1 swings.
【０００８】前記フランジ１５は測定装置の外周をなす
ハジング１６に固定されており、このハウジング１６に
は前記測定腕１０，１１の揺動量を規制するストッパピ
ン１７が固定されている。前記測定腕１０，１１の測定
子１２，１３が取り付けられたのとは逆の一端には差動
トランス１８が取り付けられている。この差動トランス
１８はコア１９と、このコア１９を包囲する差動コイル
２０と、この差動コイル２０を保持するコイルボビン２
１にて構成されている。コア１９は測定子１２に螺合さ
れており、高周波数で磁気特性の良いパーマロイで形成
されている。差動コイル２０はコア１９の基準位置から
の動作量に応じた信号を出力し、図略の表示装置にその
値が出力される。コイルボビン２１は測定子１３にスペ
ーサ２２を介して固定されている。このスペーサ２２は
コア１９の軸線方向の熱膨張と同じなるようにアルミニ
ウム、ステンレス等にて形成されている。The flange 15 is fixed to a housing 16 which forms the outer periphery of the measuring device. A stopper pin 17 for restricting the amount of swing of the measuring arms 10 and 11 is fixed to the housing 16. A differential transformer 18 is attached to one end of the measuring arms 10 and 11 opposite to the end where the tracing styluses 12 and 13 are attached. The differential transformer 18 includes a core 19, a differential coil 20 surrounding the core 19, and a coil bobbin 2 holding the differential coil 20.
1. The core 19 is screwed to the tracing stylus 12 and is made of permalloy having high frequency and good magnetic properties. The differential coil 20 outputs a signal corresponding to the operation amount of the core 19 from the reference position, and the value is output to a display device (not shown). The coil bobbin 21 is fixed to the probe 13 via a spacer 22. The spacer 22 is formed of aluminum, stainless steel, or the like so as to have the same thermal expansion as the core 19 in the axial direction.
【０００９】以上のような構成で動作について説明す
る。始めに測定物Ｗを測定する前に測定物Ｗの基準値を
設定するためにマスタワークを接触子１２，１３の間に
挟み、差動トランスの出力が零になるように接触子１
２，１３の長さを調整する。次に測定物Ｗを接触子１
２，１３の間に挟むと、接触子１２，１３が測定物Ｗと
マスタワークとの径の差分だけ、測定腕１０，１１が揺
動する。この測定腕１０，１１の揺動によって差動トラ
ンス１８のコア１９と差動コイル２０が相対移動し、差
動コイル２０から相対移動量分の電圧出力が得られ、マ
スタワークとの径との差が検出されることで径測定が行
われる。The operation of the above configuration will be described. First, before measuring the workpiece W, a master work is sandwiched between the contacts 12 and 13 in order to set a reference value of the workpiece W, and the contact 1 is set so that the output of the differential transformer becomes zero.
Adjust the length of 2,13. Next, the object to be measured W is brought into contact 1
When the contact arms 12 and 13 are sandwiched between the measurement objects W and the master work, the measurement arms 10 and 11 swing by the difference in diameter between the workpiece W and the master work. Due to the swing of the measuring arms 10 and 11, the core 19 of the differential transformer 18 and the differential coil 20 move relatively, and a voltage output corresponding to the relative movement amount is obtained from the differential coil 20, and the voltage output relative to the master work diameter is obtained. The diameter is measured by detecting the difference.
【００１０】ここで、マスタワークにて差動トランス１
８の零点調整した後に周囲の温度または接触子１２，１
３等の構成部品の温度が変化すると、熱膨張が生じる。
そしてこの熱にてコア１９が固定されていない一端側に
伸びるが、同様にスペーサ２１が伸びて差動コイル２０
もコア１９が伸びた方向に同じ量だけ移動するため、コ
ア１９と差動コイル２０が相対移動はなく、熱膨張によ
る測定値の変化は生じないことになる。また、コア７ａ
と差動コイル７ｂの材質は磁気特性上、限られたものに
なってしまうが、スペーサの材質はコア７ａと同一の伸
び量となれば限定されることがないため、線膨張係数の
大きな材質のもので形成すれば、スペーサの厚みを小さ
くすることができ、測定装置の大きさを大きくすること
もない。Here, the differential transformer 1 is used in the master work.
8 after adjusting the zero point,
When the temperature of a component such as 3 changes, thermal expansion occurs.
Then, the core 19 is extended to one end side where the core 19 is not fixed by the heat.
Since the core 19 also moves by the same amount in the direction in which the core 19 extends, the core 19 and the differential coil 20 do not move relative to each other, and the measured value does not change due to thermal expansion. Also, the core 7a
The material of the differential coil 7b is limited in terms of magnetic properties, but the material of the spacer is not limited as long as it has the same elongation as that of the core 7a. If the spacer is formed of the above, the thickness of the spacer can be reduced, and the size of the measuring device is not increased.
【００１１】[0011]
【発明の効果】以上のように本発明は、コアの伸びと同
じ量だけ差動コイルがコアの伸びと同じ方向に移動する
ように同一の伸びとなるような熱膨張係数を有するスペ
ーサを測定腕と差動コイルの間に挿入したので、熱変位
による測定誤差の影響を簡単な構成にて防止できる利点
がある。As described above, the present invention measures a spacer having a thermal expansion coefficient such that the differential coil has the same elongation so that the differential coil moves in the same direction as the elongation of the core by the same amount as the elongation of the core. Since it is inserted between the arm and the differential coil, there is an advantage that the influence of measurement error due to thermal displacement can be prevented with a simple configuration.
【図１】従来の測定装置を示す断面図である。FIG. 1 is a sectional view showing a conventional measuring device.
【図２】本発明の実施例を示す断面図である。FIG. 2 is a sectional view showing an embodiment of the present invention.
１０，１１ 測定腕 １２，１３ 接触子 １８ 差動トランス １９ コア ２０ 差動コイル ２１ スペーサ 10, 11 measuring arm 12, 13 contact 18 differential transformer 19 core 20 differential coil 21 spacer
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭64−54717（ＪＰ，Ａ) 特開 平３−92703（ＪＰ，Ａ) 特開 昭50−157953（ＪＰ，Ａ) 特開 昭62−140321（ＪＰ，Ａ) (58)調査した分野(Int.Cl.7，ＤＢ名) G01B 5/00 - 7/34 102 G01B 21/00 - 21/32 ──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-64-54717 (JP, A) JP-A-3-92703 (JP, A) JP-A-50-155793 (JP, A) JP-A-62 140321 (JP, A) (58) Field surveyed (Int. Cl. 7 , DB name) G01B 5/00-7/34 102 G01B 21/00-21/32
Claims (1)
一対の測定腕を有し、この測定腕の変位量を測定するこ
とによって測定物の径を測定するようにした測定装置に
おいて、前記一方の測定腕の他端に前記他方の測定腕に
向かって伸びる差動トランスのコアを取付け、前記コア
の外周を該コアの移動を検出する差動トランスの差動コ
イルにて包囲し、この差動コイルと前記他方の測定腕と
を前記コアと軸線方向の伸びが同一となるような線膨張
係数を有する材質のスペーサを介して接続したことを特
徴とする測定装置の熱変位補償装置。1. A measuring apparatus comprising: a pair of measuring arms each having a measuring element at one end in contact with a measuring object; and measuring a displacement amount of the measuring arm to measure a diameter of the measuring object. At the other end of one measurement arm, a core of a differential transformer extending toward the other measurement arm is attached, and the outer periphery of the core is surrounded by a differential coil of the differential transformer that detects movement of the core. A thermal displacement compensator for a measuring apparatus, wherein a differential coil and the other measuring arm are connected via a spacer made of a material having a linear expansion coefficient such that the core and the core have the same elongation in the axial direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26007192A JP3163783B2 (en) | 1992-09-29 | 1992-09-29 | Thermal displacement compensator for measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26007192A JP3163783B2 (en) | 1992-09-29 | 1992-09-29 | Thermal displacement compensator for measuring device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH06229704A JPH06229704A (en) | 1994-08-19 |
| JP3163783B2 true JP3163783B2 (en) | 2001-05-08 |
Family
ID=17342905
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26007192A Expired - Fee Related JP3163783B2 (en) | 1992-09-29 | 1992-09-29 | Thermal displacement compensator for measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3163783B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1549906B1 (en) * | 2002-10-07 | 2013-09-11 | Inora Technologies, Inc. | Spatial reference system |
| CN103851996A (en) * | 2013-02-26 | 2014-06-11 | 洛阳量云精密仪器有限公司 | Device and method for measuring height of wedge block |
-
1992
- 1992-09-29 JP JP26007192A patent/JP3163783B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH06229704A (en) | 1994-08-19 |
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