JPH1038551A - Method and device for measuring dimension - Google Patents
Method and device for measuring dimensionInfo
- Publication number
- JPH1038551A JPH1038551A JP20885296A JP20885296A JPH1038551A JP H1038551 A JPH1038551 A JP H1038551A JP 20885296 A JP20885296 A JP 20885296A JP 20885296 A JP20885296 A JP 20885296A JP H1038551 A JPH1038551 A JP H1038551A
- Authority
- JP
- Japan
- Prior art keywords
- contact
- displacement
- displacement sensor
- dimension measuring
- measurement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- A Measuring Device Byusing Mechanical Method (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は厚さや幅などの寸法
を測定する寸法測定方法および寸法測定装置に関する。
さらに詳しくは、雰囲気温度が変化しても精度よく寸法
測定がなし得る、複数の変位センサを用いた寸法測定方
法および寸法測定装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for measuring dimensions such as thickness and width.
More specifically, the present invention relates to a dimension measuring method and a dimension measuring apparatus using a plurality of displacement sensors, which can accurately measure a dimension even when an ambient temperature changes.
【０００２】[0002]
【従来の技術】従来より、鋼板等の厚さ測定において
は、図１３に示すように、変位センサａ，ａを変位セン
サ保持部材ｂに対向保持させるとともにその間に鋼板ｃ
を配置し、そして各変位センサａ，ａからの鋼板ｃ表面
までの距離を測定し、ついでその測定量を演算処理して
鋼板ｃの板厚を測定する方法および装置が知られてい
る。あるいは、図１４に示すように、放射線源ｄと放射
線検出器ｅとを対向配置させるとともにその間に鋼板ｃ
を配置し、そして放射線検出器ｅにより鋼板ｃを透過し
てくる放射線量を検出して鋼板ｃの板厚を測定する方法
および装置が知られている。2. Description of the Related Art Conventionally, in measuring the thickness of a steel plate or the like, as shown in FIG.
A method and apparatus for measuring the distance from each of the displacement sensors a and a to the surface of the steel sheet c and then processing the measured amount to measure the thickness of the steel sheet c are known. Alternatively, as shown in FIG. 14, a radiation source d and a radiation detector e are arranged to face each other and a steel plate c
There is known a method and apparatus for measuring the thickness of the steel sheet c by detecting the amount of radiation transmitted through the steel sheet c by the radiation detector e.
【０００３】しかして、この図１３に示す方法および装
置において用いられる変位センサａとしては、レーザ変
位センサ、渦電流変位センサ、差動トランス式接触変位
センサ、パルスカウント式接触変位センサなどがある。
そして、高い測定精度が要求される場合、パルスカウン
ト式接触変位センサがよく用いられる。The displacement sensor a used in the method and apparatus shown in FIG. 13 includes a laser displacement sensor, an eddy current displacement sensor, a differential transformer type contact displacement sensor, a pulse counting type contact displacement sensor, and the like.
When high measurement accuracy is required, a pulse count type contact displacement sensor is often used.
【０００４】しかしながら、パルスカウント式接触変位
センサを用いた場合においても、雰囲気温度が変化した
場合、保持部材ｂや変位センサａの接触子が伸縮するた
めに測定値にバラツキが生ずるという問題がある。すな
わち、雰囲気温度が変化する場合には、精度よく寸法測
定がなし得ないという問題がある。However, even when a pulse count type contact displacement sensor is used, there is a problem that when the ambient temperature changes, the measured value varies because the contacts of the holding member b and the displacement sensor a expand and contract. . That is, when the ambient temperature changes, there is a problem that the dimension cannot be measured accurately.
【０００５】かかる雰囲気温度変化に伴う問題に対処す
べく、特開平５ー２２３５２６号公報には、図１５に示
すように、変位センサａ，ａを保持している保持部材ｂ
の適宜個所に温度センサｆ，ｆ，ｆ，ｆ，…を取付け、
それにより測定された温度により保持部材ｂの熱膨張量
を算出し、その算出された熱膨張量により測定値を補正
する測定装置が提案されている。In order to cope with the problem associated with the change in the ambient temperature, Japanese Patent Laid-Open No. Hei 5-223526 discloses a holding member b holding the displacement sensors a, a as shown in FIG.
Temperature sensors f, f, f, f,...
There has been proposed a measuring device that calculates the amount of thermal expansion of the holding member b based on the measured temperature and corrects the measured value based on the calculated amount of thermal expansion.
【０００６】しかしながら、特開平５ー２２３５２６号
の提案にかかわる測定装置にあっては、装置が大がかり
になり装置の高コスト化を招来するという問題の他に、
接触子の熱膨張による測定誤差が依然として解消されて
いないという問題もある。[0006] However, in the measuring device according to the proposal of JP-A-5-223526, in addition to the problem that the device becomes large and the cost of the device is increased,
There is also a problem that the measurement error due to the thermal expansion of the contact has not been eliminated yet.
【０００７】[0007]
【発明が解決しようとする課題】本発明はかかる従来技
術の課題に鑑みなされたものであって、測定装置の大型
化を招来させることなく、しかも雰囲気温度が変化した
場合にも、精度よく厚さや幅などの寸法測定がなし得る
寸法測定方法および寸法測定装置を提供することを目的
としている。SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems of the prior art, and does not increase the size of the measuring device, and can accurately measure the thickness even when the ambient temperature changes. It is an object of the present invention to provide a dimension measuring method and a dimension measuring device capable of measuring dimensions such as sheath width.
【０００８】[0008]
【課題を解決するための手段】本発明の寸法測定方法
は、複数の変位センサを用いる寸法測定方法において、
前記変位センサを温度変化率の小さい素材からなる保持
部材により保持させて寸法測定を行うことを特徴とす
る。According to the present invention, there is provided a dimension measuring method using a plurality of displacement sensors.
The dimensional measurement is performed by holding the displacement sensor by a holding member made of a material having a small temperature change rate.
【０００９】本発明の寸法測定方法においては、変位セ
ンサとして接触式変位センサを用いるとともに、変位の
測定を複数の変位センサを測定時期を同期させながら周
期的に行うのが好ましい。In the dimension measuring method of the present invention, it is preferable to use a contact type displacement sensor as the displacement sensor and to measure the displacement periodically by synchronizing a plurality of displacement sensors with the measurement timing.
【００１０】一方、本発明の寸法測定装置は、複数の変
位センサを用いる寸法測定装置において、前記変位セン
サを温度変化率の小さい素材からなる保持部材により保
持させて寸法測定を行うことを特徴とする。On the other hand, a dimension measuring apparatus according to the present invention is characterized in that, in a dimension measuring apparatus using a plurality of displacement sensors, the displacement sensor is held by a holding member made of a material having a small temperature change rate to perform the dimension measurement. I do.
【００１１】本発明の寸法測定装置においては、例えば
変位センサの接触子外周に配設された温度変化率の小さ
い素材からなる所定長さの円筒状の後退位置決定治具
と、該後退位置決定治具の先端に当接する接触子先端部
に配設されたストッパーとからなる変位センサの後退位
置を規制する後退位置規制手段を備えていたり、変位セ
ンサの接触子に付着した塵芥を除去するための清掃手段
を備えていたり、例えば押さえローラーと支えローラー
とを対向させることなく相互の位置をずらしたローラー
機構からなる被測定材の振動を抑制する振動抑制手段を
備えていたり、前記複数の測定時期を一致させる同期手
段を備えていたりするのが好ましい。In the dimension measuring apparatus according to the present invention, for example, a cylindrical retreat position determining jig of a predetermined length made of a material having a small temperature change rate and disposed on the outer periphery of the contact of the displacement sensor, It is provided with retreat position restricting means for restricting the retreat position of the displacement sensor consisting of a stopper disposed at the tip of the contact which abuts on the tip of the jig, and for removing dust attached to the contact of the displacement sensor. Or a vibration suppressing means for suppressing vibration of the material to be measured, which comprises a roller mechanism in which the pressing roller and the supporting roller are displaced from each other without facing each other, or It is preferable to provide a synchronization means for matching the timing.
【００１２】ここで、前記温度変化率の小さい素材は、
例えばインバー材とされる。Here, the material having a small temperature change rate is as follows:
For example, it is an invar material.
【００１３】[0013]
【作用】本発明は前記のごとく構成されているので、雰
囲気温度が変化してもそれに影響されることなく、精度
よく鋼板の板厚などの測定がなし得る。Since the present invention is constructed as described above, it is possible to accurately measure the thickness of a steel sheet without being affected by changes in the ambient temperature.
【００１４】例えば、変位センサの接触子外周に配設さ
れた温度変化率の小さい素材からなる所定長さの円筒状
の後退位置決定治具と、該後退位置決定治具の先端に当
接する接触子先端部に配設されたストッパーとからなる
変位センサの後退位置を規制する後退位置規制手段を備
えた本発明の好ましい形態にあっては、雰囲気温度によ
る影響が著しく低減されるので、測定精度のより一層の
向上が図られる。For example, a cylindrical retreat position determining jig of a predetermined length made of a material having a small temperature change rate and disposed on the outer periphery of the contact of the displacement sensor, and a contact contacting the tip of the retreat position determining jig. In a preferred embodiment of the present invention having the retreat position restricting means for restricting the retreat position of the displacement sensor including the stopper disposed at the tip end of the probe, the influence of the ambient temperature is significantly reduced, so that the measurement accuracy is improved. Is further improved.
【００１５】[0015]
【発明の実施の形態】以下、添付図面を参照しながら本
発明を実施の形態に基づいて説明するが、本発明はかか
る実施の形態のみに限定されるものではない。なお、以
下の各実施の形態において鋼板の板厚を測定する場合を
例に採り説明する。DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described based on embodiments with reference to the accompanying drawings, but the present invention is not limited to only such embodiments. In the following embodiments, a case where the thickness of a steel sheet is measured will be described as an example.
【００１６】実施の形態１ 本発明の実施の形態１の板厚測定方法に適用される板厚
測定装置の測定部１０を図１に示し、この測定部１０
は、鋼板Ｓの板厚を測定するために対向配置されている
一対の変位センサ１１，１２を、熱膨張率の小さな素
材、例えばインバー材（６４Ｆｅ，３６Ｎｉ）からなる
コの字状の保持部材１３により保持させて構成されてな
るものである。なお、この板厚測定装置のその余の構成
は、従来よりかかる板厚測定に用いられている板厚測定
装置と同様とされている。Embodiment 1 FIG. 1 shows a measuring section 10 of a sheet thickness measuring apparatus applied to a sheet thickness measuring method according to Embodiment 1 of the present invention.
A pair of displacement sensors 11 and 12 which are disposed to face each other to measure the thickness of the steel sheet S, are provided with a U-shaped holding member made of a material having a small coefficient of thermal expansion, for example, an invar material (64Fe, 36Ni). 13 to be held. The rest of the configuration of the thickness measuring apparatus is the same as that of a conventional thickness measuring apparatus used for measuring the thickness.
【００１７】このように、この実施の形態１の測定装置
によれば、変位センサ１１，１２が熱膨張率の小さな素
材よりなる保持部材１３に保持されているので、雰囲気
温度が変化しても精度よく鋼板Ｓの板厚を測定できる。As described above, according to the measuring apparatus of the first embodiment, since the displacement sensors 11 and 12 are held by the holding member 13 made of a material having a small coefficient of thermal expansion, even if the ambient temperature changes. The thickness of the steel sheet S can be accurately measured.
【００１８】実施の形態２ 本発明の実施の形態２の板厚測定方法に適用される板厚
測定装置の測定部１０Ａを図２〜図４に示し、この実施
の形態２は実施の形態１を改変したものであって、変位
センサ１１，１２の接触子１１ａ，１２ａの接触端近傍
に鍔（ストッパー）１４，１５を設けるとともに、接触
子１１ａ，１２ａの外周にこの鍔１４，１５の後退を規
制する、熱膨張率の小さな素材、例えばインバー材から
なる所定長さでかつ所定肉厚の円筒状部材（退避位置決
定治具）１６，１７を、その基端部を変位センサ１１，
１２を保持しているコの字状の保持部材１３の水平部内
側１３ａ，１３ａに固着して配設してなるものである。
そのため、接触子１１ａ，１２ａが後退する際、その先
端に後退してきた鍔１４，１５が当接してその退避位置
が決定される。すなわち、このストッパー１４，１５お
よび退避位置決定治具１６，１７により後退位置規制手
段が構成される。Second Embodiment FIGS. 2 to 4 show a measuring section 10A of a thickness measuring apparatus applied to a thickness measuring method according to a second embodiment of the present invention. In which the flanges (stoppers) 14 and 15 are provided near the contact ends of the contacts 11a and 12a of the displacement sensors 11 and 12, and the flanges 14 and 15 are set back on the outer periphery of the contacts 11a and 12a. The cylindrical members (evacuation position determination jigs) 16 and 17 having a predetermined length and a predetermined thickness made of a material having a small coefficient of thermal expansion, for example, an invar material, are fixed to the displacement sensors 11 and
The holding member 13 is provided with the U-shaped holding member 13 and fixed to the inner sides 13a and 13a of the horizontal portion.
Therefore, when the contacts 11a and 12a are retracted, the retreating flanges 14 and 15 abut against the tips thereof, and the retracted position is determined. That is, the stoppers 14 and 15 and the retreat position determining jigs 16 and 17 constitute a retreat position regulating means.
【００１９】しかして、この実施の形態２による鋼板Ｓ
の板厚の測定では、まず対向している接触子１１ａ，１
２ａを進出させ、その先端同士を当接させた状態におけ
る接触子１１ａ，１２ａの変位ｘ0，ｙ0を測定する（図
２参照）。ついで、ストッパー１４，１５を退避位置決
定治具１６，１７の先端に当接させた状態における接触
子１１ａ，１２ａの変位ｘ1，ｙ1を測定する（図３参
照）。しかる後、接触子１１ａ，１２ａの間に鋼板Ｓを
セットして接触子１１ａ，１２ａを鋼板Ｓ表面に接触さ
せた状態における接触子１１ａ，１２ａの変位ｘ2，ｙ2
を測定する（図４参照）。そして、これらの各測定され
た変位ｘ0，ｙ0，ｘ1，ｙ1，ｘ2，ｙ2を用いて下記式に
より鋼板Ｓの板厚ｔが算出される。つまり、板厚ｔが測
定される。Thus, the steel sheet S according to Embodiment 2
In the measurement of the plate thickness, first, the contacts 11a, 1
The displacement x 0 , y 0 of the contacts 11a, 12a in a state where the tip 2a is advanced and the tips thereof are in contact with each other is measured (see FIG. 2). Next, the displacements x 1 and y 1 of the contacts 11 a and 12 a in a state where the stoppers 14 and 15 are in contact with the tips of the evacuation position determination jigs 16 and 17 are measured (see FIG. 3). Thereafter, the contact 11a, the contact 11a is set to the steel sheet S between the 12a, contact 11a in a state contacting the 12a on the steel sheet S surface, 12a of the displacement x 2, y 2
Is measured (see FIG. 4). Then, the thickness t of the steel sheet S is calculated by the following equation using the measured displacements x 0 , y 0 , x 1 , y 1 , x 2 , and y 2 . That is, the plate thickness t is measured.
【００２０】[0020]
【数１】 (Equation 1)
【００２１】この実施の形態２においては、前述のよう
に接触子１１ａ，１２ａの接触端の近傍にストッパー１
４，１５を設けるとともに、熱膨張係数の小さな素材か
らなる退避位置決定治具１６，１７により接触子１１
ａ，１２ａの後退位置を決定し、ついでその位置から接
触子１１ａ，１２ａを変位させて鋼板Ｓの板厚ｔを測定
するようにしているので、接触子１１ａ，１２ａの雰囲
気温度に影響される部分はストッパー１４，１５から先
のごくわずかな部分となるため、雰囲気温度の変化にほ
とんど影響されずに鋼板Ｓの板厚ｔを測定できる。In the second embodiment, as described above, the stopper 1 is located near the contact ends of the contacts 11a and 12a.
4 and 15 are provided, and the contact 11
Since the contact positions of the contact members 11a and 12a are determined by determining the retreat position of the contact members 11a and 12a and then measuring the thickness t of the steel sheet S by displacing the contact members 11a and 12a from the determined positions. Since the portion is a very small portion ahead of the stoppers 14 and 15, the thickness t of the steel sheet S can be measured almost without being affected by changes in the ambient temperature.
【００２２】実施の形態３ 本発明の実施の形態３の板厚測定方法に適用される板厚
測定装置の測定部１０Ｂを図５〜図７に示し、この実施
の形態３は実施の形態２を改変したものであって、接触
子１１ａ，１２ａの近傍に清掃手段２０、例えばエアブ
ローノズル２１，２１を接触子１１ａ，１２ａの接触端
に臨ませて配置してなるものである。かかる構成とする
ことにより、測定中に接触子１１ａ，１２ａの接触端に
埃などが付着することによる測定誤差を回避できる。Third Embodiment FIGS. 5 to 7 show a measuring section 10B of a thickness measuring apparatus applied to a thickness measuring method according to a third embodiment of the present invention. The cleaning means 20, for example, the air blow nozzles 21, 21 is arranged near the contacts 11a, 12a so as to face the contact ends of the contacts 11a, 12a. With this configuration, it is possible to avoid a measurement error due to dust or the like adhering to the contact ends of the contacts 11a and 12a during measurement.
【００２３】次に、かかる構成とされている実施の形態
３による鋼板Ｓの板厚測定について説明する。Next, the measurement of the thickness of the steel sheet S according to the third embodiment having such a configuration will be described.
【００２４】（１）対向している接触子１１ａ，１２ａ
を進出させ、その先端同士を当接させた状態における接
触子の変位を測定する（図５参照）。(1) Contacts 11a and 12a facing each other
Is advanced, and the displacement of the contact in a state where the tips are brought into contact with each other is measured (see FIG. 5).
【００２５】（２）接触子１１ａ，１２ａを後退させて
ストッパー１４，１５を退避位置決定治具１６，１７の
先端に当接させる。(2) The contacts 11a and 12a are retracted to bring the stoppers 14 and 15 into contact with the tips of the retracting position determining jigs 16 and 17.
【００２６】（３）エアブローにより接触子１１ａ，１
２ａの接触端およびその近傍を清掃する（図６参照）。(3) The contacts 11a, 1
Clean the contact end of 2a and its vicinity (see FIG. 6).
【００２７】（４）ストッパー１４，１５を退避位置決
定治具１６，１７の先端に当接させた状態における接触
子１１ａ，１２ａの変位を測定する（図６参照）。(4) The displacement of the contacts 11a and 12a in a state where the stoppers 14 and 15 are in contact with the tips of the evacuation position determining jigs 16 and 17 is measured (see FIG. 6).
【００２８】（５）接触子１１ａ，１２ａの間に鋼板Ｓ
をセットする。(5) The steel sheet S is placed between the contacts 11a and 12a.
Is set.
【００２９】（６）接触子１１ａ，１２ａを進出させて
接触子１１ａ，１２ａを鋼板Ｓ表面に接触させる（図７
参照）。(6) The contacts 11a and 12a are advanced to bring the contacts 11a and 12a into contact with the surface of the steel sheet S (FIG. 7).
reference).
【００３０】（７）接触子１１ａ，１２ａを鋼板Ｓ表面
に接触させた状態における接触子１１ａ，１２ａの変位
を測定する（図７参照）。(7) The displacement of the contacts 11a and 12a in a state where the contacts 11a and 12a are in contact with the surface of the steel sheet S is measured (see FIG. 7).
【００３１】（８）これら測定された接触子１１ａ，１
２ａの変位を用いて前記式により鋼板Ｓの板厚を算出す
る。つまり、鋼板Ｓの板厚を測定する。(8) These measured contacts 11a, 1
The thickness of the steel sheet S is calculated by the above equation using the displacement 2a. That is, the thickness of the steel sheet S is measured.
【００３２】このようにして鋼板Ｓの板厚が測定される
と鋼板Ｓが所定量移動させられ、前記（２）〜（８）が
繰り返されて次の個所の板厚が測定される。When the thickness of the steel sheet S is measured in this way, the steel sheet S is moved by a predetermined amount, and the above (2) to (8) are repeated to measure the thickness of the next portion.
【００３３】このように、この実施の形態３によれば、
接触子１１ａ，１２ａの接触端に付着した塵芥が測定ご
とに除去されるので、塵芥が多い雰囲気中においても精
度よく鋼板Ｓの板厚が測定できる。As described above, according to the third embodiment,
Since dust adhering to the contact ends of the contacts 11a and 12a is removed for each measurement, the thickness of the steel sheet S can be accurately measured even in an atmosphere with much dust.
【００３４】実施の形態４ 本発明の実施の形態４の板厚測定方法に適用される板厚
測定装置の測定部１０Ｃを図８および図９に示し、この
実施の形態４は実施の形態２を改変してなるものであっ
て、移動している鋼板Ｓの上下振動を抑えて鋼板Ｓの板
厚を測定できるようにしてなるものである。具体的に
は、この実施の形態４の測定部１０Ｃは、変位センサ１
１，１２の前後に押さえローラー３１，３１，と支えロ
ーラー３２，３２とを有するローラー機構３０を備えて
なるものとされる。このローラー機構３０の押さえロー
ラー３１と支えローラー３２とは、通常のローラー機構
とは異なり押さえローラー３１と支えローラー３２とは
対向配置されておらず、図８に示すように、押さえロー
ラー３１が支えローラー３２の外側上方に位置させて設
けられている。押さえローラー３１と支えローラー３２
とをかかる位置関係に配置することにより、ローラー機
構３０により押さえられている鋼板Ｓに、曲げモーメン
トが作用し、その曲げモーメントにより鋼板Ｓ内面に発
生する曲げ応力により鋼板Ｓの上下振動が抑えられて精
度よく測定がなし得る。すなわち、このローラー機構３
０により振動抑制手段が構成される。Fourth Embodiment FIGS. 8 and 9 show a measuring section 10C of a thickness measuring apparatus applied to a thickness measuring method according to a fourth embodiment of the present invention. The thickness of the steel sheet S can be measured while suppressing the vertical vibration of the moving steel sheet S. More specifically, the measuring unit 10C according to the fourth embodiment includes the displacement sensor 1
A roller mechanism 30 having pressing rollers 31, 31 and support rollers 32, 32 before and after the rollers 1, 12 is provided. The pressing roller 31 and the supporting roller 32 of the roller mechanism 30 are not disposed opposite to the pressing roller 31 and the supporting roller 32 unlike a normal roller mechanism, and as shown in FIG. It is provided above and outside the roller 32. Holding roller 31 and support roller 32
With such a positional relationship, the bending moment acts on the steel sheet S being pressed by the roller mechanism 30, and the bending stress generated on the inner surface of the steel sheet S by the bending moment suppresses the vertical vibration of the steel sheet S. Measurement can be performed with high accuracy. That is, this roller mechanism 3
0 constitutes a vibration suppressing means.
【００３５】この場合、図１０および図１１に示すよう
に、同期手段４０、例えば同期回路４１を設け、それか
ら生成される同期パルスにより上側の第１変位センサ１
１と下側の第２変位センサ１２の測定タイミングを一致
させれば、測定定精度のより一層の向上が図られる。な
お、図１０においては、作図の簡略化のためにローラー
機構３０の図示は省略されている。In this case, as shown in FIG. 10 and FIG. 11, a synchronizing means 40, for example, a synchronizing circuit 41 is provided, and a synchronizing pulse generated from the synchronizing means 40 generates an upper first displacement sensor 1.
If the measurement timing of 1 and the lower second displacement sensor 12 are matched, the measurement accuracy can be further improved. In FIG. 10, illustration of the roller mechanism 30 is omitted for simplification of drawing.
【００３６】[0036]
【実施例】以下、より具体的な実施例により本発明をよ
り具体的に説明する。Hereinafter, the present invention will be described more specifically with reference to more specific examples.
【００３７】実施例および比較例 図２〜図４に示す本発明の実施の形態２により測定部１
０Ｂが構成された板厚測定装置により雰囲気温度を変化
させながら鋼板の板厚を測定し、その測定値の温度変化
を計測した。その結果を図１２に実線で示す（実施
例）。図１３に示す従来技術により測定部が構成された
板厚測定装置により実施例と同様に雰囲気温度を変化さ
せながら測定し、その測定値の温度変化を計測した。そ
の結果を図１２に点線で示す（比較例）。Example and Comparative Example The measuring unit 1 according to the second embodiment of the present invention shown in FIGS.
The sheet thickness of the steel sheet was measured while changing the ambient temperature by a sheet thickness measurement device configured as 0B, and the temperature change of the measured value was measured. The result is shown by a solid line in FIG. 12 (Example). The measurement was performed while changing the ambient temperature in the same manner as in the example by using a plate thickness measuring apparatus having a measuring unit according to the conventional technique shown in FIG. 13, and the temperature change of the measured value was measured. The result is shown by a dotted line in FIG. 12 (comparative example).
【００３８】図１２より、実施例における測定において
は雰囲気温度が変化しても測定値のバラツキがほとんど
認められないのに対し、比較例における測定値は雰囲気
温度変化にほぼ比例して増減しているのがわかる。この
ことにより、実施の形態２においては雰囲気温度が変化
しても安定して測定がなし得るのが確認された。すなわ
ち、雰囲気温度が変化しても精度よく寸法測定がなし得
るのが確認された。FIG. 12 shows that in the measurement in the example, there is almost no variation in the measured value even when the ambient temperature changes, whereas the measured value in the comparative example increases and decreases almost in proportion to the ambient temperature change. You can see that Thus, it was confirmed that the measurement could be stably performed in the second embodiment even when the ambient temperature changed. That is, it was confirmed that dimensional measurement could be performed accurately even when the ambient temperature changed.
【００３９】以上、本発明を実施の形態および実施例に
基づいて説明してきたが、本発明はかかる実施の形態お
よび実施例に限定されるものではなく、種々改変が可能
である。例えば、実施の形態および実施例においては測
定対象が鋼板とされたが、測定対象は鋼板に限定される
ものではなく、種々のものとすることができる。また、
後退位置規制手段を構成する後退位置決定治具は、円筒
状のものに限定されるものではなく、適宜形状とでき、
例えば棒状体や板状体とされてもよい。さらに、測定に
おける初期値決定は、必ずしも接触子同士を接触させて
決定する必要はなく、基準厚さとされている基準材を接
触子の間挿入し、ついでこの基準材に接触子を接触させ
て初期値を決定してもよい。Although the present invention has been described based on the embodiments and the examples, the present invention is not limited to the embodiments and the examples, and various modifications are possible. For example, in the embodiments and examples, the measurement target is a steel plate. However, the measurement target is not limited to a steel plate, and may be various types. Also,
The retreat position determining jig that constitutes the retreat position restricting means is not limited to a cylindrical one, and can be appropriately shaped,
For example, it may be a rod or a plate. Furthermore, the initial value determination in the measurement does not necessarily need to be determined by bringing the contacts into contact with each other, a reference material having a reference thickness is inserted between the contacts, and then the contact is made to contact the reference material. An initial value may be determined.
【００４０】[0040]
【発明の効果】以上詳述したように、本発明によれば、
雰囲気温度がかなり変化する環境にあっても精度よく鋼
板の板厚などの測定がなし得るという優れた効果が得ら
れる。As described in detail above, according to the present invention,
An excellent effect of accurately measuring the thickness of a steel sheet can be obtained even in an environment where the ambient temperature changes considerably.
【００４１】また、本発明の好ましい形態にあっては、
鋼板などの測定対象の上下振動が抑制され、測定対象が
移動している状態にあっても精度よく板厚などの測定が
なし得たり、あるいは塵芥が多い雰囲気にあってもその
塵芥に影響されることなく鋼板などの板厚などの測定が
精度よくなし得るという優れた効果が得られる。In a preferred embodiment of the present invention,
Vertical vibration of the measuring object such as a steel plate is suppressed, and it is possible to accurately measure the thickness of the measuring object even when the measuring object is moving. It is possible to obtain an excellent effect that measurement of the thickness of a steel plate or the like can be performed with high accuracy without any trouble.
【図１】本発明の実施の形態１の板厚測定装置の測定部
の概略図である。FIG. 1 is a schematic diagram of a measuring unit of a plate thickness measuring device according to a first embodiment of the present invention.
【図２】本発明の実施の形態２の板厚測定装置の測定部
の概略図であって、接触子同士を接触させた状態を示
す。FIG. 2 is a schematic view of a measuring unit of the plate thickness measuring device according to the second embodiment of the present invention, showing a state where the contacts are in contact with each other.
【図３】本発明の実施の形態２の板厚測定装置の測定部
の概略図であって、接触子のストッパーを後退位置決定
治具に当接させた状態を示す。FIG. 3 is a schematic view of a measuring unit of a plate thickness measuring device according to a second embodiment of the present invention, showing a state in which a stopper of a contact is brought into contact with a jig for determining a retreat position.
【図４】本発明の実施の形態２の板厚測定装置の測定部
の概略図であって、接触子を鋼板表面に接触させた状態
を示す。FIG. 4 is a schematic view of a measuring unit of a plate thickness measuring device according to a second embodiment of the present invention, showing a state where a contact is brought into contact with a steel plate surface.
【図５】本発明の実施の形態３の板厚測定装置の測定部
の概略図であって、接触子同士を接触させた状態を示
す。FIG. 5 is a schematic view of a measuring unit of the plate thickness measuring device according to the third embodiment of the present invention, showing a state where the contacts are in contact with each other.
【図６】本発明の実施の形態３の板厚測定装置の測定部
の概略図であって、接触子のストッパーを後退位置決定
治具に当接させてエアブローにより清掃している状態を
示す。FIG. 6 is a schematic diagram of a measuring unit of a plate thickness measuring apparatus according to a third embodiment of the present invention, showing a state in which a stopper of a contact is brought into contact with a jig for determining a retreat position and cleaning is performed by air blow. .
【図７】本発明の実施の形態３の板厚測定装置の測定部
の概略図であって、接触子を鋼板表面に接触させた状態
を示す。FIG. 7 is a schematic view of a measuring unit of a plate thickness measuring device according to a third embodiment of the present invention, showing a state where a contact is brought into contact with a steel plate surface.
【図８】本発明の実施の形態３の板厚測定装置の測定部
の概略正面図である。FIG. 8 is a schematic front view of a measuring unit of a plate thickness measuring device according to a third embodiment of the present invention.
【図９】同概略側面図である。FIG. 9 is a schematic side view of the same.
【図１０】本発明の実施の形態３の板厚測定装置の概略
図である。FIG. 10 is a schematic diagram of a plate thickness measuring device according to a third embodiment of the present invention.
【図１１】同測定装置における第１変位センサおよび第
２変位センサの同期信号のタイミングチャートである。FIG. 11 is a timing chart of a synchronization signal of a first displacement sensor and a second displacement sensor in the measuring device.
【図１２】実施例および比較例の温度ドリフトを示すグ
ラフである。FIG. 12 is a graph showing temperature drifts of the example and the comparative example.
【図１３】従来の板厚測定装置の測定部の一例の概略図
である。FIG. 13 is a schematic view of an example of a measuring section of a conventional plate thickness measuring device.
【図１４】従来の板厚測定装置の測定部の他の例の概略
図である。FIG. 14 is a schematic view of another example of the measuring unit of the conventional plate thickness measuring device.
【図１５】特開平５ー２２３５２６号の提案にかかわる
板厚測定装置の概略図である。FIG. 15 is a schematic view of a plate thickness measuring device according to the proposal of Japanese Patent Application Laid-Open No. 5-223526.
１０ 測定部 １１ 変位センサ（第１変位センサ） １２ 変位センサ（第２変位センサ） １１ａ，１２ａ 接触子 １３ 保持部材 １４，１５ 鍔（ストッパー） １６，１７ 円筒状部材（退避位置決定治具） ２０ 清掃手段 ２１ エアブローノズル ３０ ローラー機構 ３１ 押さえローラー ３２ 支えローラー ４０ 同期手段 ４１ 同期回路 Ｓ 鋼板 DESCRIPTION OF SYMBOLS 10 Measuring part 11 Displacement sensor (1st displacement sensor) 12 Displacement sensor (2nd displacement sensor) 11a, 12a Contact 13 Holding member 14, 15 Flange (stopper) 16, 17 Cylindrical member (evacuation position determination jig) 20 Cleaning means 21 Air blow nozzle 30 Roller mechanism 31 Holding roller 32 Supporting roller 40 Synchronizing means 41 Synchronous circuit S Steel plate
Claims (11)
において、前記変位センサを温度変化率の小さい素材か
らなる保持部材により保持させて寸法測定を行うことを
特徴とする寸法測定方法。1. A dimension measuring method using a plurality of displacement sensors, wherein the dimension measurement is performed by holding the displacement sensor by a holding member made of a material having a small temperature change rate.
いるとともに、変位の測定を複数の変位センサを測定時
期を同期させながら周期的に行うことを特徴とする請求
項１記載の寸法測定方法。2. The dimension measuring method according to claim 1, wherein a contact-type displacement sensor is used as the displacement sensor, and the displacement is measured periodically by synchronizing a plurality of displacement sensors with measurement timing.
材とされてなることを特徴とする請求項１記載の寸法測
定装置。3. The dimension measuring apparatus according to claim 1, wherein the material having a small temperature change rate is an invar material.
において、前記変位センサを温度変化率の小さい素材か
らなる保持部材により保持させて寸法測定を行うことを
特徴とする寸法測定装置。4. A dimension measuring device using a plurality of displacement sensors, wherein the displacement sensor is held by a holding member made of a material having a small rate of temperature change to perform dimension measurement.
置規制手段を備えてなることを特徴とする請求項４記載
の寸法測定装置。5. The dimension measuring device according to claim 4, further comprising a retreat position regulating means for regulating a retreat position of the displacement sensor.
接触子外周に配設された温度変化率の小さい素材からな
る所定長さの円筒状の後退位置決定治具と、該後退位置
決定治具の先端に当接する接触子先端部に配設されたス
トッパーとからなることを特徴とする請求項５記載の寸
法測定装置。6. A retracting position determining jig having a predetermined length and made of a material having a small temperature change rate and disposed on the outer periphery of a contact of a displacement sensor, said retracting position determining means comprising: 6. The dimension measuring device according to claim 5, further comprising a stopper disposed at a tip end portion of the contact that abuts on a tip end of the tool.
去するための清掃手段を備えてなることを特徴とする請
求項４記載の寸法測定装置。7. The dimension measuring device according to claim 4, further comprising cleaning means for removing dust attached to the contact of the displacement sensor.
を備えてなることを特徴とする請求項４記載の寸法測定
装置。8. The dimension measuring apparatus according to claim 4, further comprising vibration suppressing means for suppressing vibration of the material to be measured.
支えローラーとを対向させることなく相互の位置をずら
したローラー機構とされてなることを特徴とする請求項
８記載の寸法測定装置。9. The dimension measuring device according to claim 8, wherein the vibration suppressing means is a roller mechanism in which the pressing roller and the supporting roller are shifted from each other without facing each other.
手段を備えてなることを特徴とする請求項４記載の寸法
測定装置。10. The dimension measuring apparatus according to claim 4, further comprising a synchronization unit that matches the plurality of measurement times.
ー材とされてなることを特徴とする請求項４または６記
載の寸法測定装置。11. The dimension measuring device according to claim 4, wherein the material having a small temperature change rate is an invar material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20885296A JPH1038551A (en) | 1996-07-19 | 1996-07-19 | Method and device for measuring dimension |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20885296A JPH1038551A (en) | 1996-07-19 | 1996-07-19 | Method and device for measuring dimension |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH1038551A true JPH1038551A (en) | 1998-02-13 |
Family
ID=16563187
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20885296A Withdrawn JPH1038551A (en) | 1996-07-19 | 1996-07-19 | Method and device for measuring dimension |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH1038551A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4817232B2 (en) * | 2003-08-22 | 2011-11-16 | 学校法人日本大学 | Method and apparatus for measuring the three-dimensional shape of a plate-like irregularly shaped body |
| CN102798366A (en) * | 2012-03-12 | 2012-11-28 | 济南开思科技有限公司 | Tightening wire displacement sensor capable of separating measurement from winding |
| CN105203063A (en) * | 2015-10-23 | 2015-12-30 | 中国科学院长春光学精密机械与物理研究所 | Thickness measuring device and measuring method of optical distance adjusting ring |
| CN108351205A (en) * | 2016-03-03 | 2018-07-31 | 株式会社东芝 | Measuring device |
| CN109238090A (en) * | 2018-08-28 | 2019-01-18 | 郑州云海信息技术有限公司 | A kind of jig for examining PCB supplied materials quantity |
| JP2021019160A (en) * | 2019-07-23 | 2021-02-15 | 株式会社ディスコ | Processing method and resin applier |
-
1996
- 1996-07-19 JP JP20885296A patent/JPH1038551A/en not_active Withdrawn
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4817232B2 (en) * | 2003-08-22 | 2011-11-16 | 学校法人日本大学 | Method and apparatus for measuring the three-dimensional shape of a plate-like irregularly shaped body |
| CN102798366A (en) * | 2012-03-12 | 2012-11-28 | 济南开思科技有限公司 | Tightening wire displacement sensor capable of separating measurement from winding |
| CN105203063A (en) * | 2015-10-23 | 2015-12-30 | 中国科学院长春光学精密机械与物理研究所 | Thickness measuring device and measuring method of optical distance adjusting ring |
| CN108351205A (en) * | 2016-03-03 | 2018-07-31 | 株式会社东芝 | Measuring device |
| CN109238090A (en) * | 2018-08-28 | 2019-01-18 | 郑州云海信息技术有限公司 | A kind of jig for examining PCB supplied materials quantity |
| JP2021019160A (en) * | 2019-07-23 | 2021-02-15 | 株式会社ディスコ | Processing method and resin applier |
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