JP2738086B2 - Magnetic coupling device - Google Patents
Magnetic coupling deviceInfo
- Publication number
- JP2738086B2 JP2738086B2 JP1305342A JP30534289A JP2738086B2 JP 2738086 B2 JP2738086 B2 JP 2738086B2 JP 1305342 A JP1305342 A JP 1305342A JP 30534289 A JP30534289 A JP 30534289A JP 2738086 B2 JP2738086 B2 JP 2738086B2
- Authority
- JP
- Japan
- Prior art keywords
- magnet rotor
- coupling device
- magnetic coupling
- partition
- laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 この発明はレーザ装置に用いられる磁気カツプリング
装置に関し、特にレーザ媒質としてハロゲンを用いるレ
ーザ装置に適したものである。Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic coupling device used for a laser device, and is particularly suitable for a laser device using halogen as a laser medium.
第３図は、従来、一般に市販されているレーザで使用
されている磁気カツプリング装置を示す断面構成図であ
る。図において、（１）はレーザ容器壁、（２）はレー
ザ容器壁（１）の一部であつて、磁気カツプリング装置
のために設けられた、非磁性の導電体からなる隔壁、
（３）は内部磁石回転子、（４）は外部磁石回転子、
（５）は内部磁石回転子（３）に接続された回転翼、
（６）は外部磁石回転子（４）に接続された駆動用モー
タである。FIG. 3 is a sectional view showing a magnetic coupling device used in a conventional laser which is generally commercially available. In the drawing, (1) is a wall of the laser vessel, (2) is a part of the wall of the laser vessel (1), and is a partition made of a non-magnetic conductor provided for a magnetic coupling device;
(3) is an internal magnet rotor, (4) is an external magnet rotor,
(5) a rotor connected to the internal magnet rotor (3),
(6) is a driving motor connected to the external magnet rotor (4).
次に動作について説明する。磁気カツプリング装置は
駆動用モータ（６）と回転翼（５）のそれぞれに連結さ
れた内部磁石回転子（３）と外部磁石回転子（４）が、
隔壁（２）を挾むようにして相対向しており、磁石の吸
引力によつて回転を伝達するものである。Next, the operation will be described. The magnetic coupling device comprises an internal magnet rotor (3) and an external magnet rotor (4) connected to a driving motor (6) and a rotor (5), respectively.
They face each other across the partition wall (2), and transmit rotation by the attraction of a magnet.
隔壁（２）と内部磁石回転子（３）と外部磁石回転子
（４）との間隔はミリ単位で調整されており、隔壁
（２）は磁力を有効に伝えるためにミリオーダの厚みに
設定されている。The distance between the partition (2), the internal magnet rotor (3) and the external magnet rotor (4) is adjusted in millimeters, and the partition (2) is set to a thickness of the order of millimeters in order to transmit magnetic force effectively. ing.
従来の磁気カツプリング装置では、磁力線が導電体隔
壁（２）を貫いており、回転に比例した渦電流が導電体
隔壁（２）に流れる。必要伝達トルク強度が大きくなる
と、この渦電流による損失が無視できなくなる。In the conventional magnetic coupling device, the lines of magnetic force pass through the conductive partition (2), and an eddy current proportional to the rotation flows through the conductive partition (2). When the required transmission torque intensity increases, the loss due to the eddy current cannot be ignored.
また、レーザガスとしてハロゲンを用いる場合には、
ニツケルなどが最適の材料であるが、隔壁（２）は非磁
性材料である必要があり、これらの材料は使用すること
ができなかつた。When halogen is used as the laser gas,
Nickel or the like is the optimum material, but the partition wall (2) must be a non-magnetic material, and these materials cannot be used.
従来の磁気カツプリング装置は以上のように構成され
ているので、必要伝達トルク強度に対応する電力の何倍
ものモータ電力を必要とし伝達効率が低く、隔壁が熱膨
脹により変形しないように効果的な冷却手段を必要とし
構造が複雑である、またレーザ媒質としてハロゲンを用
いられないという問題点があつた。Since the conventional magnetic coupling device is configured as described above, it requires many times the motor power corresponding to the required transmission torque intensity, has a low transmission efficiency, and has an effective cooling to prevent the partition from being deformed by thermal expansion. There is a problem in that it requires means and the structure is complicated, and halogen cannot be used as a laser medium.
この発明は上記のような問題点を解消するためになさ
れたもので、冷却手段を必要とせず、伝達効率が高く、
耐ハロゲン性に優れた磁気カツプリング装置を得ること
を目的とする。The present invention has been made in order to solve the above problems, does not require a cooling means, high transmission efficiency,
An object of the present invention is to obtain a magnetic coupling device having excellent halogen resistance.
この発明の磁気カツプリング装置は、外部磁石回転子
と内部磁石回転子との間の隔壁を、内部磁石回転子に対
向する内側は耐ハロゲン性絶縁物質から成り、外部磁石
回転子に対向する外側は機械的強度の高い絶縁物質から
成る二重構造としたものである。In the magnetic coupling device according to the present invention, the partition wall between the external magnet rotor and the internal magnet rotor is formed such that the inside facing the internal magnet rotor is made of a halogen-resistant insulating material, and the outside facing the external magnet rotor is formed of a halogen-resistant insulating material. It has a double structure made of an insulating material having high mechanical strength.
この発明における磁気カツプリング装置は、隔壁を絶
縁物としたため、渦電流の発生による電力損出がなく伝
達効率が高く、冷却手段を必要としない。In the magnetic coupling device according to the present invention, since the partition is made of an insulating material, there is no power loss due to the generation of eddy current, the transmission efficiency is high, and no cooling means is required.
また、絶縁物隔壁を２重構造とし耐ハロゲン性材料が
レーザガスと接するようにしたので、隔壁の腐食やレー
ザガスの劣化をもたらすことがない。Further, since the insulating partition has a double structure and the halogen-resistant material is in contact with the laser gas, corrosion of the partition and deterioration of the laser gas do not occur.
以下、この発明の一実施例を図について説明する。第
１図はこの考案の一実施例の磁気カツプリング装置を示
す断面構成図である。図において、（７）は内部磁石回
転子（３）に対向する内側は耐ハロゲン性絶縁物質から
成り、外部磁石回転子（４）に対向する外側は機械的強
度の高い絶縁物質から成る二重構造絶縁物隔壁であり、
他は従来例と同じ構成である。An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a sectional view showing a magnetic coupling device according to an embodiment of the present invention. In the drawing, (7) is a double-sided structure made of a halogen-resistant insulating material on the inner side facing the inner magnet rotor (3) and made of an insulating material having high mechanical strength on the outer side facing the outer magnet rotor (4). Structural insulation partition,
The other configuration is the same as that of the conventional example.
先述のように、磁力をできるだけ有効に伝えるために
は隔壁をできるだけ薄くし、磁石、即ち内部磁石回転子
（３）と外部磁石回転子（４）間の距離をできるだけ近
づけた方が望ましい。一方、エキシマレーザなどのよう
にレーザガス圧力が高い場合には、構造上、機械的強度
を保つようにする必要がある。この実施例では、磁気カ
ツプリング装置を円筒形とし、耐圧性を増すように工夫
している。かつ、円筒形隔壁（７）の外側は、FRPや機
械強度の高いセラミツク（チツ化シリコンなど）を用い
その内側にテフロンコーテイング、テフロンの内張、ア
ルミナセラミツクの内張など耐ハロゲン性材料を配設し
てある。As described above, in order to transmit the magnetic force as effectively as possible, it is desirable that the partition wall be as thin as possible and the distance between the magnets, that is, the inner magnet rotor (3) and the outer magnet rotor (4) be as short as possible. On the other hand, when the laser gas pressure is high as in an excimer laser or the like, it is necessary to keep the mechanical strength structurally. In this embodiment, the magnetic coupling device is formed in a cylindrical shape so as to increase the pressure resistance. The outside of the cylindrical partition (7) is made of FRP or ceramics having high mechanical strength (silicon nitride, etc.), and a halogen-resistant material such as Teflon coating, Teflon lining, alumina ceramic lining is placed inside. It is set up.
第２図は円筒形隔壁に、従来の導電体隔壁（実験例で
はステンレス、SUS316）を用いた場合（ａ）と、この考
案による絶縁物隔壁を用いた場合（ｂ）の伝達効率をモ
ータ回転数の関数として示した特性図である。図より明
かなようにこの考案の場合、90％ほどの伝達効率が得ら
れているのに対し、従来方式では70％ほどが渦電流によ
る損失として失われ、伝達効率は僅かに30％程にすぎな
い。Fig. 2 shows the transmission efficiency of the case where a conventional conductive partition (stainless steel, SUS316 in the experimental example) is used for the cylindrical partition (a) and the case where the insulating partition according to the present invention is used (b). FIG. 4 is a characteristic diagram shown as a function of a number. As is clear from the figure, in the case of this invention, about 90% of the transmission efficiency is obtained, whereas in the conventional method, about 70% is lost as the loss due to the eddy current, and the transmission efficiency is only about 30%. Only.
以上のように、この発明によれば、レーザ媒質のガス
循環を行い、レーザ容器内部に配設される回転翼に、上
記容器外部に配設される駆動用モータの回転を伝える外
部磁石回転子と内部磁石回転子、及び上記磁石回転子間
に配設され、上記レーザ媒質と外気とを遮断する隔壁を
備えるレーザ装置の磁気カツプリング装置において、上
記隔壁を上記内部磁石回転子に対向する内側は耐ハロゲ
ン性絶縁物質から成り、上記外部磁石回転子に対向する
外側は機械的強度の高い絶縁物質から成る二重構造とし
たので、伝達効率が高く、冷却手段を必要とせずかつ耐
ハロゲン性に優れた磁気カツプリング装置が得られる効
果がある。As described above, according to the present invention, the external magnet rotor that circulates the gas of the laser medium and transmits the rotation of the driving motor disposed outside the container to the rotating wing disposed inside the laser container. And an internal magnet rotor, and a magnetic coupling device of a laser device having a partition disposed between the magnet rotor and blocking the laser medium and the outside air. The outer side facing the external magnet rotor is made of a halogen-resistant insulating material and has a double structure made of an insulating material with high mechanical strength, so it has high transmission efficiency, does not require cooling means, and has a halogen-resistant property. There is an effect that an excellent magnetic coupling device can be obtained.
第一図はこの発明の一実施例のレーザ装置の磁気カツプ
リング装置を示す断面構成図であり、第２図は従来例と
この発明との伝達効率を比較した特性図であり、第３図
は従来例を示す断面構成図である。 図において、（１）はレーザ容器壁、（２）は隔壁、
（３）は内部磁石回転子、（４）は外部磁石回転子、
（５）は回転翼、（６）は駆動モータ、（７）は２重構
造絶縁物隔壁である。 なお、図中、同一符号は同一または相当部分を示す。FIG. 1 is a sectional view showing a magnetic coupling device of a laser device according to an embodiment of the present invention, FIG. 2 is a characteristic diagram comparing the transmission efficiency of a conventional example and the present invention, and FIG. It is sectional drawing which shows a prior art example. In the figure, (1) is a laser vessel wall, (2) is a partition,
(3) is an internal magnet rotor, (4) is an external magnet rotor,
(5) is a rotary blade, (6) is a drive motor, and (7) is a double-structure insulating partition. In the drawings, the same reference numerals indicate the same or corresponding parts.
Claims (1)
内部に配設される回転翼に、上記容器外部に配設される
駆動用モータの回転を伝える外部磁石回転子と内部磁石
回転子、及び上記両磁石回転子間に配設され、上記レー
ザ媒質と外気とを遮断する隔壁を備えるレーザ装置の磁
気カツプリング装置において、上記隔壁を上記内部磁石
回転子に対向する内側は耐ハロゲン性絶縁物質から成
り、上記外部磁石回転子に対向する外側は機械的強度の
高い絶縁物質から成る二重構造としたことを特徴とする
磁気カツプリング装置。An external magnet rotor and an internal magnet rotor that circulate gas of a laser medium and transmit rotation of a driving motor disposed outside the container to rotating blades disposed inside the laser container. And a magnetic coupling device of a laser device, which is provided between the two magnet rotors and has a partition for blocking the laser medium and the outside air, wherein the inside of the partition facing the internal magnet rotor has a halogen-resistant insulating material. A magnetic coupling device having an outer surface facing the external magnet rotor and having a double structure made of an insulating material having high mechanical strength.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1305342A JP2738086B2 (en) | 1989-11-22 | 1989-11-22 | Magnetic coupling device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1305342A JP2738086B2 (en) | 1989-11-22 | 1989-11-22 | Magnetic coupling device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03165084A JPH03165084A (en) | 1991-07-17 |
| JP2738086B2 true JP2738086B2 (en) | 1998-04-08 |
Family
ID=17943959
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1305342A Expired - Fee Related JP2738086B2 (en) | 1989-11-22 | 1989-11-22 | Magnetic coupling device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2738086B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4816445A (en) * | 1984-06-21 | 1989-03-28 | Kabushiki Kaisha Hayashibara Seibutsu Kagaku Kenkyujo | Crystalline alpha-maltose |
| JPH0538930U (en) * | 1991-10-30 | 1993-05-25 | 三菱重工業株式会社 | Gas laser oscillator |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6069363A (en) * | 1983-09-26 | 1985-04-20 | Teikoku Denki Seisakusho:Kk | Barrier wall of magnet coupling |
| JPS63184381A (en) * | 1987-01-27 | 1988-07-29 | Toshiba Corp | Gas laser oscillator |
-
1989
- 1989-11-22 JP JP1305342A patent/JP2738086B2/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6069363A (en) * | 1983-09-26 | 1985-04-20 | Teikoku Denki Seisakusho:Kk | Barrier wall of magnet coupling |
| JPS63184381A (en) * | 1987-01-27 | 1988-07-29 | Toshiba Corp | Gas laser oscillator |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH03165084A (en) | 1991-07-17 |
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Legal Events
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|---|---|---|---|
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313115 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
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| LAPS | Cancellation because of no payment of annual fees |