JP2022047943A - 半導体装置の製造方法及び半導体装置 - Google Patents
半導体装置の製造方法及び半導体装置 Download PDFInfo
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
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- 108091006146 Channels Proteins 0.000 description 1
- 229910002601 GaN Inorganic materials 0.000 description 1
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- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
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Abstract
Description
図1は、第1実施形態の半導体装置1の模式断面図である。
図2は、第1実施形態の半導体装置1の一部の構成の模式平面図である。
破線は、上記ベース領域13の突出量を0.050μmとした場合の特性を表す。
点線は、上記ベース領域13の突出量を0.020μmとした場合の特性を表す。
1点鎖線は、上記ベース領域13の突出量を0.010μmとした場合の特性を表す。
2点鎖線は、上記ベース領域13の突出量を0.001μmとした場合の特性を表す。
これら5つのケースにおいて、ベース領域13の下面における最も浅い部分の位置は同じとしている。
図14は、第2実施形態の半導体装置2の模式断面図である。
図15は、第3実施形態の半導体装置3の模式断面図である。
図17は、第4実施形態の半導体装置4の一部の構成の模式平面図である。
図18は、図17におけるA-A’断面図である。
図19は、図17におけるB-B’断面図である。
Claims (9)
- 第1導電型の第1半導体層にトレンチを形成する工程と、
前記トレンチ内に第1絶縁膜を埋め込む工程と、
前記第1絶縁膜をエッチングして、前記第1絶縁膜の上面を前記トレンチの開口よりも下方に後退させ、前記トレンチの上部の側壁を前記第1絶縁膜から露出させる工程と、
前記トレンチの前記上部の側壁から前記第1半導体層に第2導電型不純物を注入し、拡散させ、前記第1半導体層における前記トレンチの前記上部に隣接する領域に第2導電型半導体領域を形成する工程と、
前記第2導電型半導体領域を形成した後、前記トレンチの前記上部における前記第1絶縁膜上にゲート電極を形成する工程と、
を備える半導体装置の製造方法。 - 前記トレンチの前記上部の側壁に第2絶縁膜を形成する工程をさらに備え、
前記第2絶縁膜を通して前記第2導電型不純物を前記第1半導体層に注入する請求項1記載の半導体装置の製造方法。 - 前記トレンチ内に前記第1絶縁膜を埋め込む前に、前記トレンチ内に導電体を埋め込む工程をさらに備える請求項1または2に記載の半導体装置の製造方法。
- 前記第2導電型半導体領域を形成した後、前記ゲート電極を埋め込む前に、前記トレンチ内の前記第1絶縁膜をエッチングして、前記第1絶縁膜の前記上面を前記第2導電型半導体領域の下端よりも下方に後退させる工程をさらに備える請求項1~3のいずれか1つに記載の半導体装置の製造方法。
- 前記トレンチは、前記トレンチの深さ方向に直交する第1方向に延びる2つの側壁を有し、
前記2つの側壁のそれぞれから前記第2導電型不純物が前記第1半導体層に注入される請求項1~4のいずれか1つに記載の半導体装置の製造方法。 - 前記トレンチは3以上の側壁を含む角形の孔であり、前記3以上の側壁のそれぞれから前記第2導電型不純物が前記第1半導体層に注入される請求項1~4のいずれか1つに記載の半導体装置の製造方法。
- 第1導電型の第1半導体層を有する半導体部と、
前記半導体部に形成された第1絶縁膜と、
前記第1絶縁膜上に設けられたゲート電極と、
前記半導体部における前記ゲート電極に隣接する領域の前記第1半導体層上に設けられた第2導電型半導体領域と、
前記ゲート電極と前記第2導電型半導体領域との間に設けられた第2絶縁膜と、
前記第2導電型半導体領域上に設けられた第1導電型半導体領域と、
を備え、
前記第2導電型半導体領域は、第1部分と第2部分とを有し、前記第1部分は前記第2絶縁膜と前記第2部分との間に位置して前記第2絶縁膜に接し、前記第1部分の第2導電型不純物濃度は、前記第2部分の第2導電型不純物濃度よりも高い半導体装置。 - 前記第1部分と前記第2絶縁膜との境界は、前記第2部分よりも下方に突出している請求項7記載の半導体装置。
- 前記第2導電型半導体領域の下端は、前記ゲート電極の下端よりも下方に位置する請求項7または8に記載の半導体装置。
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