JP2021185353A - 物品搬送設備 - Google Patents
物品搬送設備 Download PDFInfo
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- 238000012423 maintenance Methods 0.000 abstract description 9
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- 230000032258 transport Effects 0.000 description 175
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
- B65G43/02—Control devices, e.g. for safety, warning or fault-correcting detecting dangerous physical condition of load carriers, e.g. for interrupting the drive in the event of overheating
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0492—Storage devices mechanical with cars adapted to travel in storage aisles
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- H—ELECTRICITY
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B61—RAILWAYS
- B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
- B61B3/00—Elevated railway systems with suspended vehicles
- B61B3/02—Elevated railway systems with suspended vehicles with self-propelled vehicles
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B65G1/02—Storage devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- H—ELECTRICITY
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
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- H01L21/67276—Production flow monitoring, e.g. for increasing throughput
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67288—Monitoring of warpage, curvature, damage, defects or the like
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67294—Apparatus for monitoring, sorting or marking using identification means, e.g. labels on substrates or labels on containers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67715—Changing the direction of the conveying path
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2203/00—Indexing code relating to control or detection of the articles or the load carriers during conveying
- B65G2203/02—Control or detection
- B65G2203/0208—Control or detection relating to the transported articles
- B65G2203/0258—Weight of the article
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2203/00—Indexing code relating to control or detection of the articles or the load carriers during conveying
- B65G2203/02—Control or detection
- B65G2203/0266—Control or detection relating to the load carrier(s)
- B65G2203/0275—Damage on the load carrier
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B65G2203/00—Indexing code relating to control or detection of the articles or the load carriers during conveying
- B65G2203/04—Detection means
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B65G2811/00—Indexing codes relating to common features for more than one conveyor kind or type
- B65G2811/09—Driving means for the conveyors
- B65G2811/095—Speed variation control means
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- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Automation & Control Theory (AREA)
- Transportation (AREA)
- Platform Screen Doors And Railroad Systems (AREA)
- Control Of Position, Course, Altitude, Or Attitude Of Moving Bodies (AREA)
- Testing Of Devices, Machine Parts, Or Other Structures Thereof (AREA)
Abstract
Description
以下、その他の実施形態について説明する。尚、以下に説明する各実施形態の構成は、それぞれ単独で適用されるものに限られず、矛盾が生じない限り、他の実施形態の構成と組み合わせて適用することも可能である。
以下、上記において説明し物品搬送設備の概要について簡単に説明する。
1a :直線経路(直線状の経路)
1b :曲線経路(曲線状の経路)
1c :分岐部
1d :合流部
3 :物品搬送車
3T :対象搬送車
14 :走行用モータ(対象搬送車を走行させるモータ)
15 :走行輪(対象搬送車の車輪)
32 :通信部(検査データ送信部)
100 :物品搬送設備
E :検査エリア
H :設備コントローラ(制御装置)
K :経路
S :センサ群(走行中の自車両の挙動を検出するセンサ)
S1 :振動センサ(走行中の自車両の挙動を検出するセンサ)
W :物品
Claims (6)
- 規定の走行経路に沿って走行して物品を搬送する複数の物品搬送車と、前記物品搬送車の運行を制御する制御装置とを備えた物品搬送設備であって、
前記走行経路は、複数の前記物品搬送車の中から検査対象として指定された対象搬送車を走行させるための検査エリアの中に設定された経路を含み、
前記対象搬送車は、走行中の自車両の挙動を検出するセンサを備え、
前記制御装置は、前記検査エリアの中に1台の前記対象搬送車のみが存在するように複数の前記物品搬送車を制御すると共に、前記検査エリアの中において当該対象搬送車を予め規定された検査走行パターンで走行させ、
前記制御装置は、前記検査走行パターンで走行中の前記対象搬送車から前記センサの検出結果に基づく検査データを取得する、物品搬送設備。 - 前記センサは、前記対象搬送車を走行させるモータのトルク、前記対象搬送車の車輪又は前記車輪に連動する回転部材の回転速度、前記対象搬送車の振動の少なくとも1つを検出する、請求項1に記載の物品搬送設備。
- 前記検査エリアには、直線状の経路、曲線状の経路、経路が複数に分岐する分岐部、複数の経路が合流する合流部が含まれ、
前記検査走行パターンは、加速、減速、定速走行を含む、請求項1又は2に記載の物品搬送設備。 - 前記検査エリアは、前記物品搬送車の進行方向が同方向且つ並行して配置された2つの経路の内の一方を含んで設定されている、請求項1から3の何れか一項に記載の物品搬送設備。
- 前記物品搬送車が搬送中の物品の重量を搬送重量として、
前記制御装置は、前記搬送重量が規定値であることを条件として、前記物品搬送車を前記対象搬送車として指定する、請求項1から4の何れか一項に記載の物品搬送設備。 - 前記対象搬送車は、前記検査データを取得する検出結果取得部と、前記検査データを送信する検査データ送信部と、を備え、
前記検査データ送信部は、前記制御装置へ前記検査データをワイヤレス送信する、請求項1から5の何れか一項に記載の物品搬送設備。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020090372A JP7318589B2 (ja) | 2020-05-25 | 2020-05-25 | 物品搬送設備 |
TW110117368A TW202212225A (zh) | 2020-05-25 | 2021-05-13 | 物品搬送設備 |
KR1020210065216A KR20210145681A (ko) | 2020-05-25 | 2021-05-21 | 물품 반송 설비 |
US17/328,111 US20210362957A1 (en) | 2020-05-25 | 2021-05-24 | Article Transport Facility |
CN202110570955.0A CN113716251A (zh) | 2020-05-25 | 2021-05-25 | 物品搬运设备 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020090372A JP7318589B2 (ja) | 2020-05-25 | 2020-05-25 | 物品搬送設備 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2021185353A true JP2021185353A (ja) | 2021-12-09 |
JP7318589B2 JP7318589B2 (ja) | 2023-08-01 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020090372A Active JP7318589B2 (ja) | 2020-05-25 | 2020-05-25 | 物品搬送設備 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20210362957A1 (ja) |
JP (1) | JP7318589B2 (ja) |
KR (1) | KR20210145681A (ja) |
CN (1) | CN113716251A (ja) |
TW (1) | TW202212225A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7518930B2 (ja) | 2022-01-24 | 2024-07-18 | 盟立自動化股▲フン▼有限公司 | 空中走行型自動搬送車システム、自動搬送車および移動キット |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP4389647A1 (de) * | 2022-12-22 | 2024-06-26 | BEUMER Group GmbH & Co. KG | Hängeförderersystem und verfahren zur überwachung eines hängeförderers |
EP4389646A1 (de) * | 2022-12-22 | 2024-06-26 | BEUMER Group GmbH & Co. KG | Überwachungscarrier und verfahren zum überwachen eines hängeförderers |
CN116453993B (zh) * | 2023-06-15 | 2023-09-08 | 上海果纳半导体技术有限公司 | 天车搬运***、搬运方法和可存储介质 |
Citations (9)
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CN113716251A (zh) | 2021-11-30 |
KR20210145681A (ko) | 2021-12-02 |
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