JP7327174B2 - 物品搬送設備 - Google Patents
物品搬送設備 Download PDFInfo
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- JP7327174B2 JP7327174B2 JP2020003832A JP2020003832A JP7327174B2 JP 7327174 B2 JP7327174 B2 JP 7327174B2 JP 2020003832 A JP2020003832 A JP 2020003832A JP 2020003832 A JP2020003832 A JP 2020003832A JP 7327174 B2 JP7327174 B2 JP 7327174B2
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- 230000032258 transport Effects 0.000 description 180
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- 238000012986 modification Methods 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B61—RAILWAYS
- B61L—GUIDING RAILWAY TRAFFIC; ENSURING THE SAFETY OF RAILWAY TRAFFIC
- B61L23/00—Control, warning or like safety means along the route or between vehicles or trains
- B61L23/04—Control, warning or like safety means along the route or between vehicles or trains for monitoring the mechanical state of the route
- B61L23/041—Obstacle detection
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0457—Storage devices mechanical with suspended load carriers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G35/00—Mechanical conveyors not otherwise provided for
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G35/00—Mechanical conveyors not otherwise provided for
- B65G35/06—Mechanical conveyors not otherwise provided for comprising a load-carrier moving along a path, e.g. a closed path, and adapted to be engaged by any one of a series of traction elements spaced along the path
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
- G01V8/00—Prospecting or detecting by optical means
- G01V8/10—Detecting, e.g. by using light barriers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67715—Changing the direction of the conveying path
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B61—RAILWAYS
- B61L—GUIDING RAILWAY TRAFFIC; ENSURING THE SAFETY OF RAILWAY TRAFFIC
- B61L2201/00—Control methods
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2203/00—Indexing code relating to control or detection of the articles or the load carriers during conveying
- B65G2203/02—Control or detection
- B65G2203/0266—Control or detection relating to the load carrier(s)
- B65G2203/0291—Speed of the load carrier
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2203/00—Indexing code relating to control or detection of the articles or the load carriers during conveying
- B65G2203/04—Detection means
- B65G2203/042—Sensors
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- Engineering & Computer Science (AREA)
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- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- Geophysics (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Control Of Position, Course, Altitude, Or Attitude Of Moving Bodies (AREA)
- Aviation & Aerospace Engineering (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Automation & Control Theory (AREA)
- Electromagnetism (AREA)
Description
前記物品搬送車は、当該物品搬送車の前方側の予定走行軌跡の形状に合わせて設定された検知エリアに存在する障害物を検知する障害物センサと、前記障害物センサの検知情報に基づいて前記物品搬送車の走行速度を制御する制御部と、を備え、前記障害物センサの検知可能エリア内であって前記予定走行軌跡から外れた領域に、前記障害物センサによる前記障害物の検知を行わない非検知エリアが設定され、前記検知エリアが湾曲しているために、前記検知エリアの一部と前記障害物センサとを結ぶ検出ライン上に前記非検知エリアが存在する状況を特定状況として、前記制御部は、前記物品搬送車を第1走行速度で走行させている状態において、前記特定状況であって、かつ、前記非検知エリアに遮蔽物が存在するために前記検知エリアの中に前記障害物を検知できない検知不可エリアが存在する状況になった場合には、前記物品搬送車を前記第1走行速度より低速の第2走行速度に減速させ、
前記物品搬送車から前記検知不可エリアまでの前記走行経路に沿った距離を検知不可距離として、前記制御部は、前記検知不可距離が短くなるに従って前記第2走行速度が低くなるように前記第2走行速度を設定する点にある。
また、本特徴構成によれば、検知不可距離が長い場合は物品搬送車が比較的高めの速度で走行し、物品搬送車の走行速度を必要以上に低くすることを回避できるため、物品搬送車を目的の箇所まで早期に到達させ易くなる。また、検知不可距離が短い場合は物品搬送車の走行速度を十分に低下させるため、もしも検知不可エリアに障害物が存在していた場合であっても、物品搬送車を適切に停止させることができる。
物品搬送設備の実施形態について図面に基づいて説明する。
図1から図3に示すように、物品搬送設備は、走行経路1に沿って走行する物品Wを搬送する物品搬送車3を備えている。本実施形態では、物品搬送設備は、物品搬送車3に加えて、走行経路1に沿って設置された走行レール2を備えており、物品搬送車3は、走行レール2に案内されながら走行レール2上を走行することで、走行経路1に沿って走行する。尚、本実施形態では、物品搬送車3は、半導体基板を収容するFOUP(Front Opening Unified Pod)を物品Wとして搬送する。
次に、物品搬送設備のその他の実施形態について説明する。
以下、上記において説明した物品搬送設備の概要について説明する。
前記物品搬送車は、当該物品搬送車の前方側の予定走行軌跡の形状に合わせて設定された検知エリアに存在する障害物を検知する障害物センサと、前記障害物センサの検知情報に基づいて前記物品搬送車の走行速度を制御する制御部と、を備え、前記障害物センサの検知可能エリア内であって前記予定走行軌跡から外れた領域に、前記障害物センサによる前記障害物の検知を行わない非検知エリアが設定され、前記検知エリアが湾曲しているために、前記検知エリアの一部と前記障害物センサとを結ぶ検出ライン上に前記非検知エリアが存在する状況を特定状況として、前記制御部は、前記物品搬送車を第1走行速度で走行させている状態において、前記特定状況であって、かつ、前記非検知エリアに遮蔽物が存在するために前記検知エリアの中に前記障害物を検知できない検知不可エリアが存在する状況になった場合には、前記物品搬送車を前記第1走行速度より低速の第2走行速度に減速させる。
3:物品搬送車
21:障害物センサ
C:予定走行軌跡
E1:検知可能エリア
E2:検知エリア
E3:非検知エリア
E4:検知不可エリア
H:制御部
L4:長さ
L5:障害検知距離
L6:検知不可距離
Q:検出ライン
S:障害物
U:遮蔽物
V:停止位置
W:物品
Claims (6)
- 走行経路に沿って走行して物品を搬送する物品搬送車を備えた物品搬送設備であって、
前記物品搬送車は、当該物品搬送車の前方側の予定走行軌跡の形状に合わせて設定された検知エリアに存在する障害物を検知する障害物センサと、前記障害物センサの検知情報に基づいて前記物品搬送車の走行速度を制御する制御部と、を備え、
前記障害物センサの検知可能エリア内であって前記予定走行軌跡から外れた領域に、前記障害物センサによる前記障害物の検知を行わない非検知エリアが設定され、
前記検知エリアが湾曲しているために、前記検知エリアの一部と前記障害物センサとを結ぶ検出ライン上に前記非検知エリアが存在する状況を特定状況として、
前記制御部は、
前記物品搬送車を第1走行速度で走行させている状態において、前記特定状況であって、かつ、前記非検知エリアに遮蔽物が存在するために前記検知エリアの中に前記障害物を検知できない検知不可エリアが存在する状況になった場合には、前記物品搬送車を前記第1走行速度より低速の第2走行速度に減速させ、
前記物品搬送車から前記検知不可エリアまでの前記走行経路に沿った距離を検知不可距離として、
前記制御部は、前記検知不可距離が短くなるに従って前記第2走行速度が低くなるように前記第2走行速度を設定する、物品搬送設備。 - 前記制御部は、前記検知エリアにおいて前記障害物が検知されない場合に、前記物品搬送車を前記第1走行速度で走行させ、前記検知エリアにおいて前記障害物が検知された場合には、前記物品搬送車を前記第1走行速度より低速の第3走行速度に減速させる、請求項1に記載の物品搬送設備。
- 前記物品搬送車から前記検知エリアにおいて検知された前記障害物までの前記走行経路に沿った距離を障害検知距離として、
前記制御部は、前記障害検知距離が短くなるに従って前記第3走行速度が低くなるように前記第3走行速度を設定する、請求項2に記載の物品搬送設備。 - 前記制御部は、前記物品搬送車の前方側の前記走行経路の形状に合わせて前記検知エリアの形状を随時変更させて前記検知エリアの設定を行う、請求項1から3のいずれか一項に記載の物品搬送設備。
- 前記制御部は、前記物品搬送車の走行速度が高くなるに従って前記検知エリアの前記走行経路に沿った長さが長くなるように前記検知エリアの設定を行う、請求項1から4のいずれか一項に記載の物品搬送設備。
- 前記制御部は、規定の停止位置に前記物品搬送車を停止させる場合に、前記検知エリアの前記走行経路に沿った長さを、前記障害物センサから前記停止位置までの長さに設定する、請求項1から5のいずれか一項に記載の物品搬送設備。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020003832A JP7327174B2 (ja) | 2020-01-14 | 2020-01-14 | 物品搬送設備 |
TW109141894A TW202126520A (zh) | 2020-01-14 | 2020-11-27 | 物品搬送設備 |
KR1020200186399A KR20210091656A (ko) | 2020-01-14 | 2020-12-29 | 물품 반송 설비 |
US17/147,795 US11904915B2 (en) | 2020-01-14 | 2021-01-13 | Article transport facility |
CN202110048582.0A CN113120535A (zh) | 2020-01-14 | 2021-01-14 | 物品输送设备 |
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JP2020003832A JP7327174B2 (ja) | 2020-01-14 | 2020-01-14 | 物品搬送設備 |
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JP2021111213A JP2021111213A (ja) | 2021-08-02 |
JP7327174B2 true JP7327174B2 (ja) | 2023-08-16 |
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JP2020003832A Active JP7327174B2 (ja) | 2020-01-14 | 2020-01-14 | 物品搬送設備 |
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US (1) | US11904915B2 (ja) |
JP (1) | JP7327174B2 (ja) |
KR (1) | KR20210091656A (ja) |
CN (1) | CN113120535A (ja) |
TW (1) | TW202126520A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7477464B2 (ja) | 2019-01-10 | 2024-05-01 | ソニーセミコンダクタソリューションズ株式会社 | 撮像装置およびキャリブレーション方法 |
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US11676841B2 (en) * | 2021-04-16 | 2023-06-13 | Taiwan Semiconductor Manufacturing Company, Ltd. | Overhead hoist transport device and method of using the same |
CN117316830B (zh) * | 2023-11-28 | 2024-02-02 | 成都高投芯未半导体有限公司 | 一种半导体封装***及控制方法 |
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