JP2021041502A - 切削ブレード、切削ブレードの製造方法、及び、ウェーハの切削方法 - Google Patents
切削ブレード、切削ブレードの製造方法、及び、ウェーハの切削方法 Download PDFInfo
- Publication number
- JP2021041502A JP2021041502A JP2019166094A JP2019166094A JP2021041502A JP 2021041502 A JP2021041502 A JP 2021041502A JP 2019166094 A JP2019166094 A JP 2019166094A JP 2019166094 A JP2019166094 A JP 2019166094A JP 2021041502 A JP2021041502 A JP 2021041502A
- Authority
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- Prior art keywords
- cutting
- cutting blade
- wafer
- abrasive grains
- binder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000005520 cutting process Methods 0.000 title claims abstract description 139
- 238000000034 method Methods 0.000 title claims description 19
- 238000004519 manufacturing process Methods 0.000 title claims description 12
- 239000006061 abrasive grain Substances 0.000 claims abstract description 42
- 239000002245 particle Substances 0.000 claims abstract description 30
- 229910021397 glassy carbon Inorganic materials 0.000 claims abstract description 15
- 239000011230 binding agent Substances 0.000 claims description 29
- 239000000203 mixture Substances 0.000 claims description 23
- 239000011347 resin Substances 0.000 claims description 22
- 229920005989 resin Polymers 0.000 claims description 22
- 238000010438 heat treatment Methods 0.000 claims description 20
- 238000010304 firing Methods 0.000 claims description 17
- 239000012298 atmosphere Substances 0.000 claims description 13
- 229920001187 thermosetting polymer Polymers 0.000 claims description 12
- 238000000465 moulding Methods 0.000 claims description 9
- 239000011261 inert gas Substances 0.000 claims description 6
- 239000000463 material Substances 0.000 abstract description 14
- 230000002093 peripheral effect Effects 0.000 description 19
- 239000000758 substrate Substances 0.000 description 13
- 229910052751 metal Inorganic materials 0.000 description 9
- 239000002184 metal Substances 0.000 description 9
- 238000010998 test method Methods 0.000 description 6
- 238000009826 distribution Methods 0.000 description 5
- 238000013329 compounding Methods 0.000 description 4
- 238000002156 mixing Methods 0.000 description 4
- 238000003756 stirring Methods 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- 244000309466 calf Species 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 239000012299 nitrogen atmosphere Substances 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 238000004062 sedimentation Methods 0.000 description 3
- 230000002269 spontaneous effect Effects 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 239000005011 phenolic resin Substances 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- 239000004640 Melamine resin Substances 0.000 description 1
- 229920000877 Melamine resin Polymers 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910020177 SiOF Inorganic materials 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 238000000748 compression moulding Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000007873 sieving Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B26—HAND CUTTING TOOLS; CUTTING; SEVERING
- B26D—CUTTING; DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING, CUTTING-OUT, STAMPING-OUT OR SEVERING
- B26D1/00—Cutting through work characterised by the nature or movement of the cutting member or particular materials not otherwise provided for; Apparatus or machines therefor; Cutting members therefor
- B26D1/0006—Cutting members therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D5/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting only by their periphery; Bushings or mountings therefor
- B24D5/12—Cut-off wheels
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
- B23D65/00—Making tools for sawing machines or sawing devices for use in cutting any kind of material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B27/00—Other grinding machines or devices
- B24B27/06—Grinders for cutting-off
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
- B24B41/068—Table-like supports for panels, sheets or the like
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
- B24D18/0009—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for using moulds or presses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
- B28D5/022—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B26—HAND CUTTING TOOLS; CUTTING; SEVERING
- B26D—CUTTING; DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING, CUTTING-OUT, STAMPING-OUT OR SEVERING
- B26D1/00—Cutting through work characterised by the nature or movement of the cutting member or particular materials not otherwise provided for; Apparatus or machines therefor; Cutting members therefor
- B26D1/0006—Cutting members therefor
- B26D2001/002—Materials or surface treatments therefor, e.g. composite materials
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Life Sciences & Earth Sciences (AREA)
- Forests & Forestry (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Dicing (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
Description
5 成形体
11 ウェーハ
11a 表面
11b 裏面
13 分割予定ライン
13a 切削溝
15 デバイス
17 ダイシングテープ
19 フレーム
21 ウェーハユニット
23 基板
25 多層配線層
2 切削ブレード
2a 砥粒
2b 結合材
2c 熱硬化性樹脂
4 貫通穴
6 攪拌機
8 筐体
8a 開口
8b 底面
10 軸部
10a 回転軸
12 金型
14 底板
16 外筒
16a,18a,22a 貫通孔
18 下パンチ
18b 上面
20 中パンチ
22 上パンチ
22b 下面
24 ならし治具
30 切削装置
32 チャックテーブル
34 切削ユニット
36 スピンドルハウジング
38 前フランジ
40 押えナット
42 カメラユニット
Claims (5)
- 結合材と砥粒とを有する切削ブレードであって、
少なくとも一部がガラス状カーボンである該結合材により該砥粒が固定されていることを特徴とする切削ブレード。 - 該切削ブレードの該砥粒の平均粒子径が、12μm以下であることを特徴とする請求項1記載の切削ブレード。
- 結合材によって砥粒が固定されている切削ブレードの製造方法であって、
熱硬化性樹脂と該砥粒とを有する混合物から所定形状の成形体を形成する成形工程と、
該成形体を100℃以上300℃以下の温度で焼成して焼成体を形成する焼成工程と、
該焼成体を、不活性ガス雰囲気下又は真空雰囲気下で500℃以上1500℃以下の温度で熱処理する熱処理工程と、
を備え、
該熱処理工程で、該熱硬化性樹脂の少なくとも一部はガラス状カーボンの該結合材となることを特徴とする切削ブレードの製造方法。 - 格子状に設定された分割予定ラインによって区切られた複数の領域の各々にデバイスが形成されたウェーハの表面側に設けられた絶縁膜を切削する、ウェーハの切削方法であって、
チャックテーブルで該ウェーハの該表面とは反対側に位置する裏面側を吸引して保持することにより、該表面側を露出させた状態で該ウェーハを保持する保持工程と、
少なくとも一部がガラス状カーボンである結合材により砥粒が固定されている切削ブレードを使用して、該表面側に位置する該絶縁膜を該分割予定ラインに沿って切削する切削工程と、
を備えることを特徴とするウェーハの切削方法。 - 該切削工程では、砥粒の平均粒子径が12μm以下である該切削ブレードを使用して、該絶縁膜を切削することを特徴とする請求項4記載のウェーハの切削方法。
Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019166094A JP2021041502A (ja) | 2019-09-12 | 2019-09-12 | 切削ブレード、切削ブレードの製造方法、及び、ウェーハの切削方法 |
KR1020200102977A KR20210031603A (ko) | 2019-09-12 | 2020-08-18 | 절삭 블레이드, 절삭 블레이드의 제조 방법, 및, 웨이퍼의 절삭 방법 |
SG10202008562RA SG10202008562RA (en) | 2019-09-12 | 2020-09-03 | Cutting blade and manufacturing method of cutting blade |
TW109130903A TW202111790A (zh) | 2019-09-12 | 2020-09-09 | 切割刀片、切割刀片之製造方法以及晶圓之切割方法 |
CN202010938855.4A CN112476257A (zh) | 2019-09-12 | 2020-09-09 | 切削刀具、切削刀具的制造方法和晶片的切削方法 |
US17/016,713 US20210078204A1 (en) | 2019-09-12 | 2020-09-10 | Cutting blade and manufacturing method of cutting blade |
DE102020211447.1A DE102020211447A1 (de) | 2019-09-12 | 2020-09-11 | Schneidklinge und Herstellungsverfahren für eine Schneidklinge |
JP2024001958A JP2024026699A (ja) | 2019-09-12 | 2024-01-10 | 切削ブレードの製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019166094A JP2021041502A (ja) | 2019-09-12 | 2019-09-12 | 切削ブレード、切削ブレードの製造方法、及び、ウェーハの切削方法 |
Related Child Applications (1)
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JP2024001958A Division JP2024026699A (ja) | 2019-09-12 | 2024-01-10 | 切削ブレードの製造方法 |
Publications (1)
Publication Number | Publication Date |
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JP2021041502A true JP2021041502A (ja) | 2021-03-18 |
Family
ID=74686219
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
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JP2019166094A Pending JP2021041502A (ja) | 2019-09-12 | 2019-09-12 | 切削ブレード、切削ブレードの製造方法、及び、ウェーハの切削方法 |
JP2024001958A Pending JP2024026699A (ja) | 2019-09-12 | 2024-01-10 | 切削ブレードの製造方法 |
Family Applications After (1)
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JP2024001958A Pending JP2024026699A (ja) | 2019-09-12 | 2024-01-10 | 切削ブレードの製造方法 |
Country Status (7)
Country | Link |
---|---|
US (1) | US20210078204A1 (ja) |
JP (2) | JP2021041502A (ja) |
KR (1) | KR20210031603A (ja) |
CN (1) | CN112476257A (ja) |
DE (1) | DE102020211447A1 (ja) |
SG (1) | SG10202008562RA (ja) |
TW (1) | TW202111790A (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20230178536A1 (en) * | 2021-12-07 | 2023-06-08 | Taiwan Semiconductor Manufacturing Co., Ltd. | Trimming and Sawing Processes in the Formation of Wafer-Form Packages |
TWI832179B (zh) * | 2022-03-22 | 2024-02-11 | 盛新材料科技股份有限公司 | 晶圓定位治具及使用其的晶圓加工方法 |
CN116377416B (zh) * | 2023-03-08 | 2023-12-12 | 北京爱克瑞特金刚石工具有限公司 | 一种划片刀及其制备方法 |
Citations (3)
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JPS60232873A (ja) * | 1984-05-01 | 1985-11-19 | Kao Corp | 研磨切断用具およびその製造方法 |
JP2006116683A (ja) * | 2004-10-25 | 2006-05-11 | Read Co Ltd | ダイヤモンドまたはcBN工具及びその製造方法 |
JP2015018965A (ja) * | 2013-07-11 | 2015-01-29 | 株式会社ディスコ | ウェーハの加工方法 |
Family Cites Families (11)
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US6271102B1 (en) * | 1998-02-27 | 2001-08-07 | International Business Machines Corporation | Method and system for dicing wafers, and semiconductor structures incorporating the products thereof |
JP2001030175A (ja) * | 1999-07-21 | 2001-02-06 | Asahi Diamond Industrial Co Ltd | 超砥粒カッター |
DE60102951T2 (de) * | 2000-02-16 | 2005-03-31 | Mitsubishi Materials Corp. | Kunstharzgebundenes Schleifwerkzeug |
JP2004188475A (ja) | 2002-12-13 | 2004-07-08 | Disco Abrasive Syst Ltd | レーザー加工方法 |
JP2005064230A (ja) | 2003-08-12 | 2005-03-10 | Disco Abrasive Syst Ltd | 板状物の分割方法 |
JP2007111827A (ja) * | 2005-10-20 | 2007-05-10 | Read Co Ltd | ダイヤモンドまたはcBN砥石及びその製造方法 |
JP5395446B2 (ja) * | 2009-01-22 | 2014-01-22 | ルネサスエレクトロニクス株式会社 | 半導体装置および半導体装置の製造方法 |
JP6223237B2 (ja) * | 2014-03-07 | 2017-11-01 | 株式会社ディスコ | 切削装置 |
JP2018094646A (ja) * | 2016-12-09 | 2018-06-21 | 株式会社ディスコ | 切削ブレード |
JP6814663B2 (ja) * | 2017-03-01 | 2021-01-20 | 株式会社ディスコ | 被加工物の切削方法 |
JP7114169B2 (ja) * | 2018-02-14 | 2022-08-08 | 株式会社ディスコ | 切削ブレードの整形方法 |
-
2019
- 2019-09-12 JP JP2019166094A patent/JP2021041502A/ja active Pending
-
2020
- 2020-08-18 KR KR1020200102977A patent/KR20210031603A/ko unknown
- 2020-09-03 SG SG10202008562RA patent/SG10202008562RA/en unknown
- 2020-09-09 CN CN202010938855.4A patent/CN112476257A/zh active Pending
- 2020-09-09 TW TW109130903A patent/TW202111790A/zh unknown
- 2020-09-10 US US17/016,713 patent/US20210078204A1/en not_active Abandoned
- 2020-09-11 DE DE102020211447.1A patent/DE102020211447A1/de active Pending
-
2024
- 2024-01-10 JP JP2024001958A patent/JP2024026699A/ja active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60232873A (ja) * | 1984-05-01 | 1985-11-19 | Kao Corp | 研磨切断用具およびその製造方法 |
JP2006116683A (ja) * | 2004-10-25 | 2006-05-11 | Read Co Ltd | ダイヤモンドまたはcBN工具及びその製造方法 |
JP2015018965A (ja) * | 2013-07-11 | 2015-01-29 | 株式会社ディスコ | ウェーハの加工方法 |
Also Published As
Publication number | Publication date |
---|---|
US20210078204A1 (en) | 2021-03-18 |
SG10202008562RA (en) | 2021-04-29 |
TW202111790A (zh) | 2021-03-16 |
KR20210031603A (ko) | 2021-03-22 |
JP2024026699A (ja) | 2024-02-28 |
CN112476257A (zh) | 2021-03-12 |
DE102020211447A1 (de) | 2021-03-18 |
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