JP2020537359A - 金属堆積用の核生成層としての共形ドープアモルファスシリコン - Google Patents
金属堆積用の核生成層としての共形ドープアモルファスシリコン Download PDFInfo
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- JP2020537359A JP2020537359A JP2020540695A JP2020540695A JP2020537359A JP 2020537359 A JP2020537359 A JP 2020537359A JP 2020540695 A JP2020540695 A JP 2020540695A JP 2020540695 A JP2020540695 A JP 2020540695A JP 2020537359 A JP2020537359 A JP 2020537359A
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- layer
- amorphous silicon
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- doped amorphous
- precursor
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- 229910021417 amorphous silicon Inorganic materials 0.000 title claims abstract description 60
- 230000006911 nucleation Effects 0.000 title abstract description 11
- 238000010899 nucleation Methods 0.000 title abstract description 11
- 238000001465 metallisation Methods 0.000 title description 4
- 239000010410 layer Substances 0.000 claims abstract description 99
- 239000000758 substrate Substances 0.000 claims abstract description 93
- 238000000034 method Methods 0.000 claims abstract description 74
- 229910052751 metal Inorganic materials 0.000 claims abstract description 49
- 239000002184 metal Substances 0.000 claims abstract description 49
- 239000012790 adhesive layer Substances 0.000 claims abstract description 29
- 238000000151 deposition Methods 0.000 claims abstract description 22
- 239000002243 precursor Substances 0.000 claims description 32
- 238000000231 atomic layer deposition Methods 0.000 claims description 26
- 239000002019 doping agent Substances 0.000 claims description 25
- 239000012686 silicon precursor Substances 0.000 claims description 20
- 239000000376 reactant Substances 0.000 claims description 18
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 16
- 229910052710 silicon Inorganic materials 0.000 claims description 16
- 239000010703 silicon Substances 0.000 claims description 16
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 15
- 229910052721 tungsten Inorganic materials 0.000 claims description 15
- 239000010937 tungsten Substances 0.000 claims description 15
- 238000011282 treatment Methods 0.000 claims description 14
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 7
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 6
- PZPGRFITIJYNEJ-UHFFFAOYSA-N disilane Chemical compound [SiH3][SiH3] PZPGRFITIJYNEJ-UHFFFAOYSA-N 0.000 claims description 6
- 229910052750 molybdenum Inorganic materials 0.000 claims description 6
- 239000011733 molybdenum Substances 0.000 claims description 6
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 5
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 claims description 4
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims description 4
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- 229910052732 germanium Inorganic materials 0.000 claims description 4
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 4
- 239000001257 hydrogen Substances 0.000 claims description 4
- 229910052739 hydrogen Inorganic materials 0.000 claims description 4
- 229910000077 silane Inorganic materials 0.000 claims description 4
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 3
- 229910015275 MoF 6 Inorganic materials 0.000 claims description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 3
- 229910052785 arsenic Inorganic materials 0.000 claims description 3
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 claims description 3
- 229910052796 boron Inorganic materials 0.000 claims description 3
- -1 diborane Chemical compound 0.000 claims description 3
- VXGHASBVNMHGDI-UHFFFAOYSA-N digermane Chemical compound [Ge][Ge] VXGHASBVNMHGDI-UHFFFAOYSA-N 0.000 claims description 3
- 229910052698 phosphorus Inorganic materials 0.000 claims description 3
- 239000011574 phosphorus Substances 0.000 claims description 3
- 229910000085 borane Inorganic materials 0.000 claims description 2
- GCOJIFYUTTYXOF-UHFFFAOYSA-N hexasilinane Chemical compound [SiH2]1[SiH2][SiH2][SiH2][SiH2][SiH2]1 GCOJIFYUTTYXOF-UHFFFAOYSA-N 0.000 claims description 2
- CVLHDNLPWKYNNR-UHFFFAOYSA-N pentasilolane Chemical compound [SiH2]1[SiH2][SiH2][SiH2][SiH2]1 CVLHDNLPWKYNNR-UHFFFAOYSA-N 0.000 claims description 2
- 229910000073 phosphorus hydride Inorganic materials 0.000 claims description 2
- VEDJZFSRVVQBIL-UHFFFAOYSA-N trisilane Chemical compound [SiH3][SiH2][SiH3] VEDJZFSRVVQBIL-UHFFFAOYSA-N 0.000 claims description 2
- ZOCHARZZJNPSEU-UHFFFAOYSA-N diboron Chemical compound B#B ZOCHARZZJNPSEU-UHFFFAOYSA-N 0.000 claims 1
- LICVGLCXGGVLPA-UHFFFAOYSA-N disilanyl(disilanylsilyl)silane Chemical compound [SiH3][SiH2][SiH2][SiH2][SiH2][SiH3] LICVGLCXGGVLPA-UHFFFAOYSA-N 0.000 claims 1
- 238000010586 diagram Methods 0.000 abstract 1
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- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 4
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- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
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- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 1
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- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- 239000012080 ambient air Substances 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- RBFQJDQYXXHULB-UHFFFAOYSA-N arsane Chemical compound [AsH3] RBFQJDQYXXHULB-UHFFFAOYSA-N 0.000 description 1
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- WYEMLYFITZORAB-UHFFFAOYSA-N boscalid Chemical compound C1=CC(Cl)=CC=C1C1=CC=CC=C1NC(=O)C1=CC=CN=C1Cl WYEMLYFITZORAB-UHFFFAOYSA-N 0.000 description 1
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 1
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- MROCJMGDEKINLD-UHFFFAOYSA-N dichlorosilane Chemical compound Cl[SiH2]Cl MROCJMGDEKINLD-UHFFFAOYSA-N 0.000 description 1
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- 229910052734 helium Inorganic materials 0.000 description 1
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- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02524—Group 14 semiconducting materials
- H01L21/02532—Silicon, silicon germanium, germanium
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H—ELECTRICITY
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- H01L21/02518—Deposited layers
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- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
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Abstract
Description
Claims (15)
- 厚さを有するドープアモルファスシリコン層を形成するために、基板表面をシリコン前駆体及びドーパントに曝露すること、並びに
前記ドープアモルファスシリコン層上に金属層を形成することを含む、処理方法。 - 前記基板表面が、同時に前記シリコン前駆体と前記ドーパントに曝露される、請求項1に記載の方法。
- 前記シリコン前駆体が、シラン又はハロシランを含む、請求項1に記載の方法。
- 前記シランが、シラン、ジシラン、トリシラン、テトラシラン、イソテトラシラン、ネオペンタシラン、シクロペンタシラン、ヘキサシラン、又はシクロヘキサシランのうちの1以上を含む、請求項3に記載の方法。
- 前記ハロシランが、ジハロシラン、トリハロシラン、テトラハロシラン、又はヘキサハロジシランのうちの1以上を含む、請求項3に記載の方法。
- 前記ドープアモルファスシリコン層が、ホウ素、リン、ヒ素、又はゲルマニウムのうちの1以上を含む、請求項1に記載の方法。
- 前記ドーパントが、ボラン、ジボラン、ホスフィン、ゲルマン、又はジゲルマンのうちの1以上を含む、請求項6に記載の方法。
- 前記基板表面が、摂氏約100度以下の温度で曝露される、請求項1に記載の方法。
- 前記金属層が、原子層堆積によって堆積される、請求項1に記載の方法。
- 前記金属層が、前記ドープアモルファスシリコン層を金属前駆体及び反応物質に曝露することによって形成され、前記金属前駆体が、WF6とMoF6のうちの1以上を含み、前記反応物質が、水素を含む、請求項1に記載の方法。
- 前記ドープアモルファスシリコン層を形成する前に前記基板表面上に接着剤層を堆積させることを更に含み、前記接着剤層が、TiNを含む、請求項1に記載の方法。
- 酸化ケイ素表面を有するシリコン基板を提供すること、
前記シリコン基板上に、約1Åから約30Åの範囲内の厚さを有するTiNを含む接着剤層を形成すること、
前記接着剤層を、ジシランを含むシリコン前駆体及びジボランを含むドーパントに曝露することによって、前記接着剤層上にドープアモルファスシリコン層を形成することであって、前記基板が、摂氏約100度以下の温度に維持される、ドープアモルファスシリコン層を形成すること、並びに
前記ドープアモルファスシリコン層上に金属層を形成することを含む、処理方法。 - 前記金属層が、原子層堆積によって形成される、請求項12に記載の方法。
- 前記金属層が、タングステンとモリブデンのうちの1以上を含む、請求項13に記載の方法。
- 前記金属層が、前記ドープアモルファスシリコン層を金属前駆体及び反応物質に曝露することによって堆積され、前記金属前駆体が、WF6とMoF6のうちの1以上を含み、前記反応物質が、水素を含む、請求項14に記載の方法。
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US201762569883P | 2017-10-09 | 2017-10-09 | |
US62/569,883 | 2017-10-09 | ||
PCT/US2018/054932 WO2019074877A1 (en) | 2017-10-09 | 2018-10-09 | DOPED AMORPHOUS SILICON CONFORMS AS A METAL DEPOSITION NUCLEATION LAYER |
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JP2020540695A Pending JP2020537359A (ja) | 2017-10-09 | 2018-10-09 | 金属堆積用の核生成層としての共形ドープアモルファスシリコン |
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US (1) | US11244824B2 (ja) |
JP (1) | JP2020537359A (ja) |
KR (2) | KR20240006002A (ja) |
CN (1) | CN111194361B (ja) |
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WO2023037452A1 (ja) * | 2021-09-08 | 2023-03-16 | 株式会社Kokusai Electric | 半導体装置の製造方法、基板処理方法、基板処理装置および記録媒体 |
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US20240006109A1 (en) * | 2022-06-30 | 2024-01-04 | Western Digital Technologies, Inc. | Highly Textured 001 BiSb And Materials for Making Same |
CN117238848B (zh) * | 2023-11-15 | 2024-02-02 | 合肥晶合集成电路股份有限公司 | 一种接触孔结构及其形成方法 |
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