JP2020122961A - 光学ユニット - Google Patents
光学ユニット Download PDFInfo
- Publication number
- JP2020122961A JP2020122961A JP2020010837A JP2020010837A JP2020122961A JP 2020122961 A JP2020122961 A JP 2020122961A JP 2020010837 A JP2020010837 A JP 2020010837A JP 2020010837 A JP2020010837 A JP 2020010837A JP 2020122961 A JP2020122961 A JP 2020122961A
- Authority
- JP
- Japan
- Prior art keywords
- wall portion
- top surface
- window member
- mirror
- main surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 230000003287 optical effect Effects 0.000 title claims abstract description 49
- 239000000463 material Substances 0.000 claims description 19
- 230000033228 biological regulation Effects 0.000 description 8
- 239000010931 gold Substances 0.000 description 7
- 229910052782 aluminium Inorganic materials 0.000 description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 6
- 239000005357 flat glass Substances 0.000 description 6
- 239000010949 copper Substances 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 5
- 229910052737 gold Inorganic materials 0.000 description 5
- 239000007769 metal material Substances 0.000 description 5
- 229910052709 silver Inorganic materials 0.000 description 5
- 239000004332 silver Substances 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 229910000838 Al alloy Inorganic materials 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 230000008018 melting Effects 0.000 description 4
- 238000002844 melting Methods 0.000 description 4
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 4
- 229910052721 tungsten Inorganic materials 0.000 description 4
- 239000010937 tungsten Substances 0.000 description 4
- 238000003466 welding Methods 0.000 description 4
- 239000000696 magnetic material Substances 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 238000005219 brazing Methods 0.000 description 2
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 230000002040 relaxant effect Effects 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229910001020 Au alloy Inorganic materials 0.000 description 1
- 229910000927 Ge alloy Inorganic materials 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000004840 adhesive resin Substances 0.000 description 1
- 229920006223 adhesive resin Polymers 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000011435 rock Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/0025—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration
- G02B27/0031—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration for scanning purposes
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/0006—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 with means to keep optical surfaces clean, e.g. by preventing or removing dirt, stains, contamination, condensation
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Electromagnetism (AREA)
- Micromachines (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Optical Elements Other Than Lenses (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
Abstract
Description
Claims (6)
- 主面を有するベースと、
可動ミラー部を有し、前記ベース上に配置されたミラーデバイスと、
前記ミラーデバイスを囲うように前記主面に設けられた枠部材と、
前記枠部材に接合された平板状の窓部材と、
を備え、
前記枠部材は、前記主面に設けられ、前記主面と反対側の第1頂面を含む第1壁部と、前記第1壁部に対向するように前記主面に設けられ、前記主面と反対側の第2頂面を含む第2壁部と、前記第1壁部の両端と前記第2壁部の両端とにおいて前記第1壁部と前記第2壁部とを互いに接続するように前記主面に設けられ、第3頂面を含む第3壁部と、を有し、
前記第1壁部の前記主面からの高さは、前記第2壁部の前記主面からの高さよりも低くされており、
前記窓部材は、少なくとも前記第1頂面及び前記第2頂面に接合されることにより、前記第1壁部から前記第2壁部に向かうにつれて前記主面から遠ざかるように傾斜しており、
前記第1頂面、前記第2頂面、及び、前記第3頂面は、前記窓部材の傾斜に応じた角度で傾斜しており、
前記窓部材の厚さは、前記第1壁部の前記主面からの高さの最小値よりも厚く、
前記第1壁部から前記第2壁部に向かう第1方向に沿った前記第1頂面の長さは、前記最小値よりも長い、
光学ユニット。 - 前記第1頂面のうちの前記窓部材が接合される部分の前記第1方向に沿った長さは、前記最小値よりも長い、
請求項1に記載の光学ユニット。 - 前記第1頂面のうちの前記窓部材が接合される部分の前記第1方向に沿った長さは、前記第1頂面の全体の前記第1方向に沿った長さよりも短い、
請求項1又は2に記載の光学ユニット。 - 前記主面には、前記主面に交差する第2方向からみて前記ミラーデバイスが配置される凹部が形成されており、
前記第2方向からみて前記凹部の角部は曲面状とされている、
請求項1〜3のいずれか一項に記載の光学ユニット。 - 前記枠部材の内側面における前記窓部材側の部分、及び、前記窓部材の外側面には、前記枠部材と前記窓部材との接合材のフィレットが形成されている、
請求項1〜4のいずれか一項に記載の光学ユニット。 - 前記第1壁部における前記主面に臨む底面の前記第1方向に沿った長さは、前記最小値よりも長い、
請求項1〜5のいずれか一項に記載の光学ユニット。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2023223230A JP2024026612A (ja) | 2019-01-30 | 2023-12-28 | 光学ユニット |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019014610 | 2019-01-30 | ||
JP2019014610 | 2019-01-30 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2023223230A Division JP2024026612A (ja) | 2019-01-30 | 2023-12-28 | 光学ユニット |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2020122961A true JP2020122961A (ja) | 2020-08-13 |
JP7414553B2 JP7414553B2 (ja) | 2024-01-16 |
Family
ID=71733655
Family Applications (4)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020010837A Active JP7414553B2 (ja) | 2019-01-30 | 2020-01-27 | 光学ユニット |
JP2020011753A Active JP7491702B2 (ja) | 2019-01-30 | 2020-01-28 | ミラーユニット |
JP2020011754A Active JP7438767B2 (ja) | 2019-01-30 | 2020-01-28 | ミラーユニット |
JP2023223230A Pending JP2024026612A (ja) | 2019-01-30 | 2023-12-28 | 光学ユニット |
Family Applications After (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020011753A Active JP7491702B2 (ja) | 2019-01-30 | 2020-01-28 | ミラーユニット |
JP2020011754A Active JP7438767B2 (ja) | 2019-01-30 | 2020-01-28 | ミラーユニット |
JP2023223230A Pending JP2024026612A (ja) | 2019-01-30 | 2023-12-28 | 光学ユニット |
Country Status (2)
Country | Link |
---|---|
US (7) | US11333882B2 (ja) |
JP (4) | JP7414553B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2022080247A1 (ja) * | 2020-10-13 | 2022-04-21 | ファナック株式会社 | ガルバノスキャナ及びこれを用いたレーザ加工装置 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7181051B2 (ja) * | 2018-10-18 | 2022-11-30 | シャープ株式会社 | 原稿搬送装置および画像形成装置 |
JP7414553B2 (ja) * | 2019-01-30 | 2024-01-16 | 浜松ホトニクス株式会社 | 光学ユニット |
DE102021204467A1 (de) | 2021-05-04 | 2022-11-10 | Robert Bosch Gesellschaft mit beschränkter Haftung | Mikromechanisches Schwingungssystem |
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JP2007034309A (ja) * | 2005-07-27 | 2007-02-08 | Samsung Electronics Co Ltd | マイクロミラー素子パッケージおよびその製造方法 |
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JP2017215352A (ja) * | 2016-05-30 | 2017-12-07 | 株式会社リコー | 電子部品装置及びその製造方法、光偏向装置 |
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US6430332B1 (en) | 1998-06-05 | 2002-08-06 | Fiber, Llc | Optical switching apparatus |
JP2008183636A (ja) * | 2007-01-26 | 2008-08-14 | Sony Corp | Memsデバイス、memsデバイスの製造方法、及び電子機器 |
DE102007050002A1 (de) | 2007-10-16 | 2009-04-23 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Mikromechanisches Sensor- oder Aktorbauelement und Verfahren zur Herstellung von mikromechanischen Sensor- oder Aktorbauelementen |
DE102008040528B4 (de) | 2008-07-18 | 2018-11-08 | Robert Bosch Gmbh | Herstellungsverfahren für ein mikromechanisches Bauteil und ein mikromechanisches Bauteil |
US9778549B2 (en) * | 2012-05-07 | 2017-10-03 | Panasonic Intellectual Property Management Co., Ltd. | Optical element |
JP2013246361A (ja) * | 2012-05-28 | 2013-12-09 | Jvc Kenwood Corp | 2軸偏向電磁駆動型光偏向器 |
JP6439802B2 (ja) | 2014-12-08 | 2018-12-19 | 株式会社リコー | 光偏向器、画像表示装置及び物体装置 |
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US11372238B2 (en) | 2019-01-30 | 2022-06-28 | Hamamatsu Photonics K.K. | Mirror unit |
JP7414553B2 (ja) * | 2019-01-30 | 2024-01-16 | 浜松ホトニクス株式会社 | 光学ユニット |
-
2020
- 2020-01-27 JP JP2020010837A patent/JP7414553B2/ja active Active
- 2020-01-27 US US16/752,941 patent/US11333882B2/en active Active
- 2020-01-28 JP JP2020011753A patent/JP7491702B2/ja active Active
- 2020-01-28 JP JP2020011754A patent/JP7438767B2/ja active Active
- 2020-01-29 US US16/775,456 patent/US11372240B2/en active Active
-
2022
- 2022-04-18 US US17/722,757 patent/US11598951B2/en active Active
- 2022-05-20 US US17/749,697 patent/US11782267B2/en active Active
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2023
- 2023-01-30 US US18/103,030 patent/US11835716B2/en active Active
- 2023-01-31 US US18/103,572 patent/US11977223B2/en active Active
- 2023-10-23 US US18/382,777 patent/US20240053603A1/en active Pending
- 2023-12-28 JP JP2023223230A patent/JP2024026612A/ja active Pending
Patent Citations (4)
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JP2007524112A (ja) * | 2003-05-22 | 2007-08-23 | リフレクティヴィティー, インク. | ヒーターと一体となった微細電気機械装置のパッケージ |
JP2007034309A (ja) * | 2005-07-27 | 2007-02-08 | Samsung Electronics Co Ltd | マイクロミラー素子パッケージおよびその製造方法 |
US20150200105A1 (en) * | 2012-09-28 | 2015-07-16 | Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. | Production method |
JP2017215352A (ja) * | 2016-05-30 | 2017-12-07 | 株式会社リコー | 電子部品装置及びその製造方法、光偏向装置 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2022080247A1 (ja) * | 2020-10-13 | 2022-04-21 | ファナック株式会社 | ガルバノスキャナ及びこれを用いたレーザ加工装置 |
JP7445013B2 (ja) | 2020-10-13 | 2024-03-06 | ファナック株式会社 | ガルバノスキャナ及びこれを用いたレーザ加工装置 |
Also Published As
Publication number | Publication date |
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US20200278533A1 (en) | 2020-09-03 |
JP2020122964A (ja) | 2020-08-13 |
US20240053603A1 (en) | 2024-02-15 |
JP7438767B2 (ja) | 2024-02-27 |
US20220236558A1 (en) | 2022-07-28 |
JP2024026612A (ja) | 2024-02-28 |
US11333882B2 (en) | 2022-05-17 |
JP2020122963A (ja) | 2020-08-13 |
US20230168494A1 (en) | 2023-06-01 |
US11977223B2 (en) | 2024-05-07 |
US20220276487A1 (en) | 2022-09-01 |
US11598951B2 (en) | 2023-03-07 |
JP7491702B2 (ja) | 2024-05-28 |
US20230168493A1 (en) | 2023-06-01 |
US11782267B2 (en) | 2023-10-10 |
US11835716B2 (en) | 2023-12-05 |
JP7414553B2 (ja) | 2024-01-16 |
US11372240B2 (en) | 2022-06-28 |
US20200241289A1 (en) | 2020-07-30 |
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