JP2019096877A - 完全自己整合性ビアを形成するための選択的付着の方法 - Google Patents
完全自己整合性ビアを形成するための選択的付着の方法 Download PDFInfo
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- JP2019096877A JP2019096877A JP2018216745A JP2018216745A JP2019096877A JP 2019096877 A JP2019096877 A JP 2019096877A JP 2018216745 A JP2018216745 A JP 2018216745A JP 2018216745 A JP2018216745 A JP 2018216745A JP 2019096877 A JP2019096877 A JP 2019096877A
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- Prior art keywords
- substrate
- gas
- silanol
- metal
- metal oxide
- Prior art date
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- Granted
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- 238000000034 method Methods 0.000 title claims abstract description 95
- 230000008021 deposition Effects 0.000 title claims abstract description 28
- 239000000758 substrate Substances 0.000 claims abstract description 122
- 229910052751 metal Inorganic materials 0.000 claims abstract description 72
- 239000002184 metal Substances 0.000 claims abstract description 72
- 229910044991 metal oxide Inorganic materials 0.000 claims abstract description 68
- 150000004706 metal oxides Chemical class 0.000 claims abstract description 68
- 230000008569 process Effects 0.000 claims abstract description 51
- 238000000151 deposition Methods 0.000 claims abstract description 50
- 239000003989 dielectric material Substances 0.000 claims abstract description 43
- SCPYDCQAZCOKTP-UHFFFAOYSA-N silanol Chemical compound [SiH3]O SCPYDCQAZCOKTP-UHFFFAOYSA-N 0.000 claims abstract description 26
- 239000003054 catalyst Substances 0.000 claims abstract description 25
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims abstract description 14
- 239000011248 coating agent Substances 0.000 claims abstract description 5
- 238000000576 coating method Methods 0.000 claims abstract description 5
- 239000007789 gas Substances 0.000 claims description 127
- 239000010410 layer Substances 0.000 claims description 101
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 31
- 239000002094 self assembled monolayer Substances 0.000 claims description 15
- 239000013545 self-assembled monolayer Substances 0.000 claims description 15
- 239000000243 solution Substances 0.000 claims description 11
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 9
- 229910052782 aluminium Inorganic materials 0.000 claims description 8
- 229910052719 titanium Inorganic materials 0.000 claims description 8
- ORJFXWYTRPGGRK-UHFFFAOYSA-N hydroxy-tris(2-methylbutan-2-yloxy)silane Chemical compound CCC(C)(C)O[Si](O)(OC(C)(C)CC)OC(C)(C)CC ORJFXWYTRPGGRK-UHFFFAOYSA-N 0.000 claims description 7
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 6
- 239000003795 chemical substances by application Substances 0.000 claims description 5
- 229910052739 hydrogen Inorganic materials 0.000 claims description 5
- MBMITMZVBNZJTQ-UHFFFAOYSA-N hydroxy-bis[(2-methylpropan-2-yl)oxy]-propan-2-yloxysilane Chemical compound CC(C)O[Si](O)(OC(C)(C)C)OC(C)(C)C MBMITMZVBNZJTQ-UHFFFAOYSA-N 0.000 claims description 5
- HLDBBQREZCVBMA-UHFFFAOYSA-N hydroxy-tris[(2-methylpropan-2-yl)oxy]silane Chemical compound CC(C)(C)O[Si](O)(OC(C)(C)C)OC(C)(C)C HLDBBQREZCVBMA-UHFFFAOYSA-N 0.000 claims description 5
- 230000003301 hydrolyzing effect Effects 0.000 claims description 4
- 230000001590 oxidative effect Effects 0.000 claims description 4
- 239000000126 substance Substances 0.000 claims description 4
- VCUDBOXVJZSMOK-UHFFFAOYSA-N 1,1,2,2,3,3,4,4,5,5,6,6,7,7,8,8,9,9,10,10,10-henicosafluorodecane-1-thiol Chemical compound FC(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)S VCUDBOXVJZSMOK-UHFFFAOYSA-N 0.000 claims description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims description 2
- 229910052802 copper Inorganic materials 0.000 claims description 2
- 230000003647 oxidation Effects 0.000 claims description 2
- 238000007254 oxidation reaction Methods 0.000 claims description 2
- UEZVMMHDMIWARA-UHFFFAOYSA-M phosphonate Chemical compound [O-]P(=O)=O UEZVMMHDMIWARA-UHFFFAOYSA-M 0.000 claims description 2
- 229910052707 ruthenium Inorganic materials 0.000 claims description 2
- 229910000077 silane Inorganic materials 0.000 claims description 2
- BCNZYOJHNLTNEZ-UHFFFAOYSA-N tert-butyldimethylsilyl chloride Chemical compound CC(C)(C)[Si](C)(C)Cl BCNZYOJHNLTNEZ-UHFFFAOYSA-N 0.000 claims description 2
- 150000003573 thiols Chemical class 0.000 claims description 2
- QRPMCZNLJXJVSG-UHFFFAOYSA-N trichloro(1,1,2,2,3,3,4,4,5,5,6,6,7,7,8,8,9,9,10,10,10-henicosafluorodecyl)silane Chemical group FC(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)[Si](Cl)(Cl)Cl QRPMCZNLJXJVSG-UHFFFAOYSA-N 0.000 claims description 2
- 229910052721 tungsten Inorganic materials 0.000 claims description 2
- 239000001257 hydrogen Substances 0.000 claims 2
- ZLZGHBNDPINFKG-UHFFFAOYSA-N chloro-decyl-dimethylsilane Chemical compound CCCCCCCCCC[Si](C)(C)Cl ZLZGHBNDPINFKG-UHFFFAOYSA-N 0.000 claims 1
- 150000002431 hydrogen Chemical class 0.000 claims 1
- 239000012528 membrane Substances 0.000 abstract 1
- 239000010408 film Substances 0.000 description 46
- 239000010936 titanium Substances 0.000 description 34
- 239000002243 precursor Substances 0.000 description 12
- 238000009792 diffusion process Methods 0.000 description 7
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 6
- 229910052801 chlorine Inorganic materials 0.000 description 6
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 150000001298 alcohols Chemical class 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 239000004020 conductor Substances 0.000 description 4
- 239000011261 inert gas Substances 0.000 description 4
- 239000003446 ligand Substances 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 238000003672 processing method Methods 0.000 description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- -1 aryloxide Chemical class 0.000 description 2
- 125000004429 atom Chemical group 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 230000003197 catalytic effect Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000011777 magnesium Substances 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 238000002203 pretreatment Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 229910052718 tin Inorganic materials 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910017083 AlN Inorganic materials 0.000 description 1
- 229910017109 AlON Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910018565 CuAl Inorganic materials 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- 101100023111 Schizosaccharomyces pombe (strain 972 / ATCC 24843) mfc1 gene Proteins 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910004491 TaAlN Inorganic materials 0.000 description 1
- 229910004166 TaN Inorganic materials 0.000 description 1
- 229910004200 TaSiN Inorganic materials 0.000 description 1
- 229910010041 TiAlC Inorganic materials 0.000 description 1
- 229910010037 TiAlN Inorganic materials 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 229910010282 TiON Inorganic materials 0.000 description 1
- 229910008482 TiSiN Inorganic materials 0.000 description 1
- 229910011208 Ti—N Inorganic materials 0.000 description 1
- 150000004703 alkoxides Chemical class 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- 150000001408 amides Chemical class 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- 125000000129 anionic group Chemical group 0.000 description 1
- 150000007942 carboxylates Chemical class 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 150000003983 crown ethers Chemical class 0.000 description 1
- 125000000058 cyclopentadienyl group Chemical group C1(=CC=CC1)* 0.000 description 1
- UBHZUDXTHNMNLD-UHFFFAOYSA-N dimethylsilane Chemical compound C[SiH2]C UBHZUDXTHNMNLD-UHFFFAOYSA-N 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- ZSWFCLXCOIISFI-UHFFFAOYSA-N endo-cyclopentadiene Natural products C1C=CC=C1 ZSWFCLXCOIISFI-UHFFFAOYSA-N 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 150000002170 ethers Chemical class 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 150000002240 furans Chemical class 0.000 description 1
- 150000004820 halides Chemical class 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 238000011534 incubation Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- QRXWMOHMRWLFEY-UHFFFAOYSA-N isoniazide Chemical compound NNC(=O)C1=CC=NC=C1 QRXWMOHMRWLFEY-UHFFFAOYSA-N 0.000 description 1
- 125000003253 isopropoxy group Chemical group [H]C([H])([H])C([H])(O*)C([H])([H])[H] 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 150000002825 nitriles Chemical class 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- 125000001181 organosilyl group Chemical group [SiH3]* 0.000 description 1
- 239000007800 oxidant agent Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 150000003138 primary alcohols Chemical class 0.000 description 1
- 150000003222 pyridines Chemical class 0.000 description 1
- 150000003233 pyrroles Chemical class 0.000 description 1
- 150000003235 pyrrolidines Chemical class 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 150000003333 secondary alcohols Chemical class 0.000 description 1
- 150000004756 silanes Chemical class 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- MNWRORMXBIWXCI-UHFFFAOYSA-N tetrakis(dimethylamido)titanium Chemical compound CN(C)[Ti](N(C)C)(N(C)C)N(C)C MNWRORMXBIWXCI-UHFFFAOYSA-N 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 229910006400 μ-Cl Inorganic materials 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0227—Pretreatment of the material to be coated by cleaning or etching
- C23C16/0236—Pretreatment of the material to be coated by cleaning or etching by etching with a reactive gas
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/32—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers using masks
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- C—CHEMISTRY; METALLURGY
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
- C23C16/0281—Deposition of sub-layers, e.g. to promote the adhesion of the main coating of metallic sub-layers
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/04—Coating on selected surface areas, e.g. using masks
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/401—Oxides containing silicon
- C23C16/402—Silicon dioxide
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4582—Rigid and flat substrates, e.g. plates or discs
- C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
- C23C16/4584—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally the substrate being rotated
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02057—Cleaning during device manufacture
- H01L21/02068—Cleaning during device manufacture during, before or after processing of conductive layers, e.g. polysilicon or amorphous silicon layers
- H01L21/02074—Cleaning during device manufacture during, before or after processing of conductive layers, e.g. polysilicon or amorphous silicon layers the processing being a planarization of conductive layers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/02164—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material being a silicon oxide, e.g. SiO2
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
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Abstract
Description
AlL1L2L3Dx
ここで、L1、L2、L3は個々のアニオン性配位子であり、Dは、xが0、1、又は2とすることができる中性ドナー配位子である。各L1、L2、L3配位子は、アルコキシド、ハライド、アリールオキシド、アミド、シクロペンタジエニル、アルキル、シリル、アミジネート、β−ジケトネート、ケトイミネート、シラノエート、及びカルボキシレートの群から個別に選択してよい。D配位子は、エーテル、フラン、ピリジン、ピロール、ピロリジン、アミン、クラウンエーテル、グライム、及びニトリルの群から選択してよい。
Claims (20)
- 基板処理の方法であって、
誘電体材料及び金属層を含む基板を提供するステップであって、該金属層はその上に酸化金属層を有する、ステップと、
前記基板を金属含有触媒層で被覆するステップと、
前記金属層から前記酸化金属層及び前記酸化金属層上の前記金属含有触媒層を除去するアルコール溶液で前記基板を処理するステップと、
前記誘電体材料上の金属含有触媒層上にSiO2膜を選択的に付着させるシラノールガスを含むプロセスガスに前記基板をある期間にわたって暴露するステップと、を含む方法。 - 前記金属層はCu、Ru、Co又はWを含み、前記酸化金属層は酸化Cu、酸化Ru、酸化Co又は酸化Wを含む、請求項1に記載の方法。
- 前記金属含有触媒層は、Al、Ti又はAlとTiの両方を含む、請求項1に記載の方法。
- 前記シラノールガスを含む前記プロセスガスに前記基板を暴露するステップは、約150℃以下の基板温度で任意の酸化及び加水分解剤なしで実行される、請求項1に記載の方法。
- 前記シラノールガスは、トリス(tert−ペントキシ)シラノール、トリス(tert−ブトキシ)シラノール及びビス(tert−ブトキシ)(イソプロポキシ)シラノールからなる群から選択される、請求項1に記載の方法。
- 前記誘電体材料上のSiO2膜の厚さを増加させるために、前記基板を被覆するステップ、アルコール溶液で前記基板を処理するステップ、及びシラノールガスを含むプロセスガスに前記基板を暴露するステップを少なくとも1回繰り返すステップをさらに含む、請求項1に記載の方法。
- 基板処理の方法であって、
誘電体材料及び金属層を含む基板を提供するステップであって、該金属層はその上に酸化金属層を有する、ステップと、
前記基板上に自己組織化単分子層(SAM)を形成する分子を含む反応ガスに前記基板を暴露するステップと、
前記基板を付着ガスに暴露することによって、前記酸化金属層に対して前記誘電体材料上に金属酸化物膜を選択的に付着させるステップと、
前記金属酸化物膜上に選択的にSiO2膜を付着させるシラノールガスを含むプロセスガスに前記基板をある期間にわたって暴露するステップと、を含む方法。 - 前記分子が、頭部基、尾部基及び官能性末端基を含み、前記頭部基はチオール、シラン又はホスホネートを含む、請求項7に記載の方法。
- 前記分子が、ペルフルオロデシルトリクロロシラン(CF3(CF2)7CH2CH2SiCl3)、ペルフルオロデカンチオール(CF3(CF2)7CH2CH2SH)、クロロデシルジメチルシラン(CH3(CH2)8CH2Si(CH3)2Cl)、又はtertブチル(クロロ)ジメチルシラン((CH3)3CSi(Cl)(CH3)2)を含む、請求項7に記載の方法。
- 前記金属酸化物膜は、HfO2、ZrO2、又はAl2O3を含む、請求項7に記載の方法。
- 前記シラノールガスを含む前記プロセスガスに前記基板を暴露するステップは、約150℃以下の基板温度で任意の酸化及び加水分解剤なしで実行される、請求項7に記載の方法。
- 前記シラノールガスは、トリス(tert−ペントキシ)シラノール、トリス(tert−ブトキシ)シラノール及びビス(tert−ブトキシ)(イソプロポキシ)シラノールからなる群から選択される、請求項7に記載の方法。
- 前記誘電体材料上の金属酸化物膜及びSiO2膜の厚さを増加させるために、前記基板を反応ガスに暴露するステップ、金属酸化物膜を選択的に付着させるステップ、及びシラノールガスを含むプロセスガスに前記基板を暴露するステップを少なくとも1回繰り返すステップをさらに含む、請求項7に記載の方法。
- 基板処理の方法であって、
誘電体材料及び金属層を含む基板を提供するステップであって、該金属層はその上に酸化金属層を有する、ステップと、
前記基板をプラズマ源によって励起された水素(H2)ガスに暴露するステップと、
前記基板を付着ガスに暴露することによって、前記誘電体材料上に金属酸化物膜を選択的に付着させるステップと、
前記金属酸化物膜上に選択的にSiO2膜を付着させるシラノールガスを含むプロセスガスに前記基板をある期間にわたって暴露するステップと、を含む方法。 - 前記基板を前記プラズマ源によって励起された前記水素ガスに暴露するステップは、前記酸化金属層上に水素終端を形成する、請求項14に記載の方法。
- 前記金属層から前記酸化金属層を除去するステップと、
前記基板を前記付着ガスに暴露することによって、前記金属層と比較して前記誘電体材料上に金属酸化物膜を選択的に付着させるステップと、をさらに含む、請求項14に記載の方法。 - 前記除去するステップは、化学酸化物除去(COR)プロセスを含む、請求項14に記載の方法。
- 前記金属酸化物膜は、HfO2、ZrO2又はAl2O3を含む、請求項14に記載の方法。
- 前記シラノールガスを含むプロセスガスに前記基板を暴露するステップは、約150℃以下の基板温度で任意の酸化及び加水分解剤なしで実行される、請求項14に記載の方法。
- 前記シラノールガスは、トリス(tert−ペントキシ)シラノール、トリス(tert−ブトキシ)シラノール及びビス(tert−ブトキシ)(イソプロポキシ)シラノールからなる群から選択される、請求項14に記載の方法。
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Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2021060109A1 (ja) * | 2019-09-24 | 2021-04-01 | 東京エレクトロン株式会社 | 成膜方法 |
JP2021052071A (ja) * | 2019-09-24 | 2021-04-01 | 東京エレクトロン株式会社 | 成膜方法 |
CN113053727A (zh) * | 2019-12-27 | 2021-06-29 | 株式会社国际电气 | 半导体器件的制造方法、衬底处理装置及记录介质 |
WO2021132163A1 (ja) * | 2019-12-27 | 2021-07-01 | 東京エレクトロン株式会社 | 成膜方法及び成膜装置 |
JP2021125607A (ja) * | 2020-02-06 | 2021-08-30 | 東京エレクトロン株式会社 | 成膜方法 |
WO2022059538A1 (ja) * | 2020-09-17 | 2022-03-24 | 東京エレクトロン株式会社 | 成膜方法及び成膜装置 |
WO2022210351A1 (ja) * | 2021-03-31 | 2022-10-06 | 東京エレクトロン株式会社 | 膜形成方法及び基板処理装置 |
WO2023243406A1 (ja) * | 2022-06-14 | 2023-12-21 | 東京エレクトロン株式会社 | 成膜方法及び成膜装置 |
US11923193B2 (en) | 2020-02-27 | 2024-03-05 | Kokusai Electric Corporation | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium |
WO2024070825A1 (ja) * | 2022-09-28 | 2024-04-04 | 東京エレクトロン株式会社 | 膜形成方法及び基板処理装置 |
US11993842B2 (en) | 2020-04-08 | 2024-05-28 | Applied Materials, Inc. | Selective deposition of metal oxide by pulsed chemical vapor deposition |
Families Citing this family (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9112003B2 (en) | 2011-12-09 | 2015-08-18 | Asm International N.V. | Selective formation of metallic films on metallic surfaces |
US9895715B2 (en) | 2014-02-04 | 2018-02-20 | Asm Ip Holding B.V. | Selective deposition of metals, metal oxides, and dielectrics |
US10047435B2 (en) | 2014-04-16 | 2018-08-14 | Asm Ip Holding B.V. | Dual selective deposition |
US9490145B2 (en) | 2015-02-23 | 2016-11-08 | Asm Ip Holding B.V. | Removal of surface passivation |
US10428421B2 (en) | 2015-08-03 | 2019-10-01 | Asm Ip Holding B.V. | Selective deposition on metal or metallic surfaces relative to dielectric surfaces |
US10695794B2 (en) | 2015-10-09 | 2020-06-30 | Asm Ip Holding B.V. | Vapor phase deposition of organic films |
US11081342B2 (en) | 2016-05-05 | 2021-08-03 | Asm Ip Holding B.V. | Selective deposition using hydrophobic precursors |
US10373820B2 (en) | 2016-06-01 | 2019-08-06 | Asm Ip Holding B.V. | Deposition of organic films |
US10453701B2 (en) | 2016-06-01 | 2019-10-22 | Asm Ip Holding B.V. | Deposition of organic films |
US11430656B2 (en) | 2016-11-29 | 2022-08-30 | Asm Ip Holding B.V. | Deposition of oxide thin films |
US11094535B2 (en) | 2017-02-14 | 2021-08-17 | Asm Ip Holding B.V. | Selective passivation and selective deposition |
US11501965B2 (en) * | 2017-05-05 | 2022-11-15 | Asm Ip Holding B.V. | Plasma enhanced deposition processes for controlled formation of metal oxide thin films |
US11170993B2 (en) | 2017-05-16 | 2021-11-09 | Asm Ip Holding B.V. | Selective PEALD of oxide on dielectric |
US10586734B2 (en) | 2017-11-20 | 2020-03-10 | Tokyo Electron Limited | Method of selective film deposition for forming fully self-aligned vias |
TW201946113A (zh) * | 2018-04-27 | 2019-12-01 | 日商東京威力科創股份有限公司 | 用於先進接觸件中之覆蓋層形成的區域選擇性沉積 |
JP2020056104A (ja) | 2018-10-02 | 2020-04-09 | エーエスエム アイピー ホールディング ビー.ブイ. | 選択的パッシベーションおよび選択的堆積 |
US11965238B2 (en) | 2019-04-12 | 2024-04-23 | Asm Ip Holding B.V. | Selective deposition of metal oxides on metal surfaces |
TW202113977A (zh) | 2019-06-12 | 2021-04-01 | 日商東京威力科創股份有限公司 | 半導體裝置的平坦化 |
KR20220034785A (ko) * | 2019-07-18 | 2022-03-18 | 도쿄엘렉트론가부시키가이샤 | 영역 선택적 증착에서 측면 필름 성장의 완화 방법 |
JP2021057563A (ja) * | 2019-09-24 | 2021-04-08 | 東京エレクトロン株式会社 | 成膜方法 |
US20210134669A1 (en) * | 2019-10-31 | 2021-05-06 | Taiwan Semiconductor Manufacturing Co., Ltd. | Isolation structure for metal interconnect |
US11139163B2 (en) | 2019-10-31 | 2021-10-05 | Asm Ip Holding B.V. | Selective deposition of SiOC thin films |
US11915973B2 (en) | 2019-12-10 | 2024-02-27 | Tokyo Electron Limited | Self-assembled monolayers as sacrificial capping layers |
TW202140832A (zh) | 2020-03-30 | 2021-11-01 | 荷蘭商Asm Ip私人控股有限公司 | 氧化矽在金屬表面上之選擇性沉積 |
TW202140833A (zh) | 2020-03-30 | 2021-11-01 | 荷蘭商Asm Ip私人控股有限公司 | 相對於金屬表面在介電表面上之氧化矽的選擇性沉積 |
TW202204658A (zh) | 2020-03-30 | 2022-02-01 | 荷蘭商Asm Ip私人控股有限公司 | 在兩不同表面上同時選擇性沉積兩不同材料 |
KR20230024298A (ko) * | 2020-06-17 | 2023-02-20 | 도쿄엘렉트론가부시키가이샤 | 표면 세정 공정을 이용한 영역 선택적 증착 방법 |
US20220238323A1 (en) * | 2021-01-28 | 2022-07-28 | Tokyo Electron Limited | Method for selective deposition of dielectric on dielectric |
KR20230135603A (ko) * | 2021-02-08 | 2023-09-25 | 도쿄엘렉트론가부시키가이샤 | 액상 컨포멀 실리콘 산화물 스핀-온 증착 |
JP2024019774A (ja) * | 2022-08-01 | 2024-02-14 | 東京エレクトロン株式会社 | 成膜方法および成膜装置 |
CN115418629B (zh) * | 2022-08-17 | 2024-01-12 | 杭州富芯半导体有限公司 | 薄膜沉积的方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20080032064A1 (en) * | 2006-07-10 | 2008-02-07 | President And Fellows Of Harvard College | Selective sealing of porous dielectric materials |
JP2017195371A (ja) * | 2016-04-12 | 2017-10-26 | 東京エレクトロン株式会社 | 微細凹状フィーチャのSiO2充填及び触媒表面上への選択的SiO2堆積のための方法 |
Family Cites Families (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3469251B2 (ja) * | 1990-02-14 | 2003-11-25 | 株式会社東芝 | 半導体装置の製造方法 |
JP4448356B2 (ja) * | 2004-03-26 | 2010-04-07 | 富士通株式会社 | 半導体装置およびその製造方法 |
MXPA06014584A (es) * | 2004-06-22 | 2007-12-04 | Sunnen Products Co | Aparato y sistema de recorrido de servo. |
US20060073276A1 (en) * | 2004-10-04 | 2006-04-06 | Eric Antonissen | Multi-zone atomic layer deposition apparatus and method |
CN101646468A (zh) * | 2006-10-10 | 2010-02-10 | 西洛诺瓦生物科学公司 | 包含硅酮和特定聚磷氮烯的组合物和装置 |
US9245739B2 (en) * | 2006-11-01 | 2016-01-26 | Lam Research Corporation | Low-K oxide deposition by hydrolysis and condensation |
JP2010041038A (ja) * | 2008-06-27 | 2010-02-18 | Asm America Inc | 重要な用途のための二酸化ケイ素の低温熱でのald |
JP2010010686A (ja) | 2008-06-27 | 2010-01-14 | Asm America Inc | 高成長率の二酸化ケイ素の堆積 |
JP5310283B2 (ja) * | 2008-06-27 | 2013-10-09 | 東京エレクトロン株式会社 | 成膜方法、成膜装置、基板処理装置及び記憶媒体 |
US8907881B2 (en) * | 2010-04-09 | 2014-12-09 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and method for driving the same |
GB2500550A (en) * | 2010-12-16 | 2013-09-25 | Sensor Innovations Inc | Electrochemical sensors |
EP3058115A1 (en) * | 2013-10-15 | 2016-08-24 | Veeco ALD Inc. | Fast atomic layer deposition process using seed precursor |
US9895715B2 (en) | 2014-02-04 | 2018-02-20 | Asm Ip Holding B.V. | Selective deposition of metals, metal oxides, and dielectrics |
JP6213278B2 (ja) * | 2014-02-07 | 2017-10-18 | ウシオ電機株式会社 | パターン形成体の製造方法 |
GB201415119D0 (en) * | 2014-08-27 | 2014-10-08 | Ibm | Method for fabricating a semiconductor structure |
US20160064275A1 (en) | 2014-08-27 | 2016-03-03 | Applied Materials, Inc. | Selective Deposition With Alcohol Selective Reduction And Protection |
US10062564B2 (en) * | 2014-12-15 | 2018-08-28 | Tokyo Electron Limited | Method of selective gas phase film deposition on a substrate by modifying the surface using hydrogen plasma |
US9508545B2 (en) * | 2015-02-09 | 2016-11-29 | Applied Materials, Inc. | Selectively lateral growth of silicon oxide thin film |
WO2016138284A1 (en) * | 2015-02-26 | 2016-09-01 | Applied Materials, Inc. | Methods for selective dielectric deposition using self-assembled monolayers |
US20170029948A1 (en) * | 2015-07-28 | 2017-02-02 | Asm Ip Holding B.V. | Methods and apparatuses for temperature-indexed thin film deposition |
US20170092533A1 (en) | 2015-09-29 | 2017-03-30 | Applied Materials, Inc. | Selective silicon dioxide deposition using phosphonic acid self assembled monolayers as nucleation inhibitor |
US10316406B2 (en) * | 2015-10-21 | 2019-06-11 | Ultratech, Inc. | Methods of forming an ALD-inhibiting layer using a self-assembled monolayer |
US9981286B2 (en) * | 2016-03-08 | 2018-05-29 | Asm Ip Holding B.V. | Selective formation of metal silicides |
US10068764B2 (en) | 2016-09-13 | 2018-09-04 | Tokyo Electron Limited | Selective metal oxide deposition using a self-assembled monolayer surface pretreatment |
US10453749B2 (en) | 2017-02-14 | 2019-10-22 | Tokyo Electron Limited | Method of forming a self-aligned contact using selective SiO2 deposition |
US10586734B2 (en) | 2017-11-20 | 2020-03-10 | Tokyo Electron Limited | Method of selective film deposition for forming fully self-aligned vias |
US10468585B1 (en) * | 2018-05-31 | 2019-11-05 | International Business Machines Corporation | Dual function magnetic tunnel junction pillar encapsulation |
-
2018
- 2018-11-16 US US16/193,849 patent/US10586734B2/en active Active
- 2018-11-16 US US16/193,833 patent/US10847363B2/en active Active
- 2018-11-19 TW TW107141020A patent/TWI798290B/zh active
- 2018-11-19 JP JP2018216745A patent/JP7287770B2/ja active Active
- 2018-11-19 TW TW112109475A patent/TW202328473A/zh unknown
- 2018-11-19 TW TW107141017A patent/TWI788463B/zh active
- 2018-11-20 KR KR1020180143517A patent/KR102491746B1/ko active IP Right Grant
- 2018-11-20 KR KR1020180143516A patent/KR102523731B1/ko active IP Right Grant
- 2018-11-20 JP JP2018217623A patent/JP7193990B2/ja active Active
-
2020
- 2020-11-23 US US17/102,054 patent/US11658068B2/en active Active
-
2022
- 2022-09-16 KR KR1020220116934A patent/KR102549289B1/ko active IP Right Grant
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20080032064A1 (en) * | 2006-07-10 | 2008-02-07 | President And Fellows Of Harvard College | Selective sealing of porous dielectric materials |
JP2017195371A (ja) * | 2016-04-12 | 2017-10-26 | 東京エレクトロン株式会社 | 微細凹状フィーチャのSiO2充填及び触媒表面上への選択的SiO2堆積のための方法 |
Cited By (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2021060109A1 (ja) * | 2019-09-24 | 2021-04-01 | 東京エレクトロン株式会社 | 成膜方法 |
JP2021052071A (ja) * | 2019-09-24 | 2021-04-01 | 東京エレクトロン株式会社 | 成膜方法 |
WO2021060111A1 (ja) * | 2019-09-24 | 2021-04-01 | 東京エレクトロン株式会社 | 成膜方法 |
JP7365898B2 (ja) | 2019-12-27 | 2023-10-20 | 東京エレクトロン株式会社 | 成膜方法及び成膜装置 |
US11848203B2 (en) | 2019-12-27 | 2023-12-19 | Kokusai Electric Corporation | Methods of processing substrate and manufacturing semiconductor device by forming film, substrate processing apparatus, and recording medium |
JP2021106242A (ja) * | 2019-12-27 | 2021-07-26 | 株式会社Kokusai Electric | 半導体装置の製造方法、基板処理装置、およびプログラム |
JP2021108335A (ja) * | 2019-12-27 | 2021-07-29 | 東京エレクトロン株式会社 | 成膜方法及び成膜装置 |
CN113053727B (zh) * | 2019-12-27 | 2024-04-12 | 株式会社国际电气 | 半导体器件的制造方法、衬底处理装置及记录介质 |
WO2021132163A1 (ja) * | 2019-12-27 | 2021-07-01 | 東京エレクトロン株式会社 | 成膜方法及び成膜装置 |
CN113053727A (zh) * | 2019-12-27 | 2021-06-29 | 株式会社国际电气 | 半导体器件的制造方法、衬底处理装置及记录介质 |
JP7227122B2 (ja) | 2019-12-27 | 2023-02-21 | 株式会社Kokusai Electric | 基板処理方法、半導体装置の製造方法、基板処理装置、およびプログラム |
JP7353200B2 (ja) | 2020-02-06 | 2023-09-29 | 東京エレクトロン株式会社 | 成膜方法 |
JP2021125607A (ja) * | 2020-02-06 | 2021-08-30 | 東京エレクトロン株式会社 | 成膜方法 |
US11923193B2 (en) | 2020-02-27 | 2024-03-05 | Kokusai Electric Corporation | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium |
US11993842B2 (en) | 2020-04-08 | 2024-05-28 | Applied Materials, Inc. | Selective deposition of metal oxide by pulsed chemical vapor deposition |
WO2022059538A1 (ja) * | 2020-09-17 | 2022-03-24 | 東京エレクトロン株式会社 | 成膜方法及び成膜装置 |
WO2022210351A1 (ja) * | 2021-03-31 | 2022-10-06 | 東京エレクトロン株式会社 | 膜形成方法及び基板処理装置 |
WO2023243406A1 (ja) * | 2022-06-14 | 2023-12-21 | 東京エレクトロン株式会社 | 成膜方法及び成膜装置 |
WO2024070825A1 (ja) * | 2022-09-28 | 2024-04-04 | 東京エレクトロン株式会社 | 膜形成方法及び基板処理装置 |
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TW201930626A (zh) | 2019-08-01 |
JP2019096881A (ja) | 2019-06-20 |
US20190164749A1 (en) | 2019-05-30 |
US10586734B2 (en) | 2020-03-10 |
KR102491746B1 (ko) | 2023-01-25 |
US10847363B2 (en) | 2020-11-24 |
KR102523731B1 (ko) | 2023-04-19 |
US20190157149A1 (en) | 2019-05-23 |
JP7287770B2 (ja) | 2023-06-06 |
KR20220132493A (ko) | 2022-09-30 |
TW201930625A (zh) | 2019-08-01 |
KR20190058343A (ko) | 2019-05-29 |
KR102549289B1 (ko) | 2023-06-29 |
KR20190058342A (ko) | 2019-05-29 |
TWI798290B (zh) | 2023-04-11 |
TW202328473A (zh) | 2023-07-16 |
TWI788463B (zh) | 2023-01-01 |
US11658068B2 (en) | 2023-05-23 |
US20210074584A1 (en) | 2021-03-11 |
JP7193990B2 (ja) | 2022-12-21 |
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