JP2018190526A - X線管及びx線発生装置 - Google Patents
X線管及びx線発生装置 Download PDFInfo
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- JP2018190526A JP2018190526A JP2017090044A JP2017090044A JP2018190526A JP 2018190526 A JP2018190526 A JP 2018190526A JP 2017090044 A JP2017090044 A JP 2017090044A JP 2017090044 A JP2017090044 A JP 2017090044A JP 2018190526 A JP2018190526 A JP 2018190526A
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- 238000004846 x-ray emission Methods 0.000 claims abstract description 71
- 238000010894 electron beam technology Methods 0.000 claims description 34
- 230000002093 peripheral effect Effects 0.000 claims description 8
- 238000007789 sealing Methods 0.000 claims description 2
- 239000000758 substrate Substances 0.000 abstract description 79
- 230000007246 mechanism Effects 0.000 description 33
- 230000017525 heat dissipation Effects 0.000 description 11
- 239000000463 material Substances 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 8
- 239000002184 metal Substances 0.000 description 8
- 230000004308 accommodation Effects 0.000 description 7
- 238000004891 communication Methods 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000003825 pressing Methods 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 230000003746 surface roughness Effects 0.000 description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- 206010037660 Pyrexia Diseases 0.000 description 2
- 229910052790 beryllium Inorganic materials 0.000 description 2
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 238000004381 surface treatment Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910000623 nickel–chromium alloy Inorganic materials 0.000 description 1
- 238000005121 nitriding Methods 0.000 description 1
- 238000010943 off-gassing Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/08—Anodes; Anti cathodes
- H01J35/112—Non-rotating anodes
- H01J35/116—Transmissive anodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/08—Anodes; Anti cathodes
- H01J35/10—Rotary anodes; Arrangements for rotating anodes; Cooling rotary anodes
- H01J35/101—Arrangements for rotating anodes, e.g. supporting means, means for greasing, means for sealing the axle or means for shielding or protecting the driving
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/08—Anodes; Anti cathodes
- H01J35/12—Cooling non-rotary anodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/16—Vessels; Containers; Shields associated therewith
- H01J35/18—Windows
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G1/00—X-ray apparatus involving X-ray tubes; Circuits therefor
- H05G1/02—Constructional details
- H05G1/025—Means for cooling the X-ray tube or the generator
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/12—Cooling
- H01J2235/1225—Cooling characterised by method
- H01J2235/1291—Thermal conductivity
- H01J2235/1295—Contact between conducting bodies
Landscapes
- X-Ray Techniques (AREA)
Abstract
Description
Claims (9)
- 真空の内部空間を有する真空筐体と、
前記内部空間に配置され、電子ビームの入射によりX線を発生するターゲットと前記ターゲットを支持し且つ前記ターゲットで発生した前記X線を透過させるターゲット支持部とを含むターゲット部と、
前記ターゲット支持部と対向するように設けられ、前記真空筐体の開口部を封止し、前記ターゲット支持部を透過した前記X線を透過させるX線出射窓と、を備え、
前記X線出射窓の少なくとも一部は、前記ターゲット支持部と接触している、X線管。 - 前記X線出射窓のX線出射方向から見て、前記ターゲット支持部は、前記X線出射窓に含まれる、請求項1に記載のX線管。
- 前記X線出射窓の一部は、前記ターゲット支持部と接触し、
前記X線出射窓の他部は、前記ターゲット支持部と離間する、請求項1又は2に記載のX線管。 - 前記X線出射窓の一部は、前記ターゲット支持部における前記ターゲットの電子入射領域と対向する領域であり、
前記X線出射窓の他部は、前記X線出射窓の周縁部である、請求項3に記載のX線管。 - 前記X線出射窓は、前記ターゲット支持部側に突出して前記ターゲット支持部と接触する凸形状を有する、請求項3又は4に記載のX線管。
- 前記ターゲット支持部は、前記X線出射窓側に突出して前記X線出射窓と接触する凸形状を有する、請求項3〜5の何れか一項に記載のX線管。
- 前記ターゲット部を前記電子ビームの入射方向と交差する方向に沿って移動させるターゲット移動部を備える、請求項1〜6の何れか一項に記載のX線管。
- 前記ターゲット部を前記X線出射窓に近づく方向に押圧する弾性部材を備える、請求項1〜7の何れか一項に記載のX線管。
- 請求項1〜8の何れか一項に記載のX線管と、
前記X線管の少なくとも一部を収容すると共に、絶縁油が封入された筐体と、
前記X線管に給電部を介して電気的に接続された電源部と、を備えるX線発生装置。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017090044A JP6867224B2 (ja) | 2017-04-28 | 2017-04-28 | X線管及びx線発生装置 |
CN201880027525.0A CN110582831B (zh) | 2017-04-28 | 2018-02-26 | X射线管和x射线产生装置 |
EP18791431.2A EP3618093A4 (en) | 2017-04-28 | 2018-02-26 | X-RAY TUBE AND X-RAY GENERATION DEVICE |
US16/494,799 US11004646B2 (en) | 2017-04-28 | 2018-02-26 | X-ray tube and X-ray generation device |
PCT/JP2018/006980 WO2018198517A1 (ja) | 2017-04-28 | 2018-02-26 | X線管及びx線発生装置 |
KR1020197019773A KR102470380B1 (ko) | 2017-04-28 | 2018-02-26 | X선관 및 x선 발생 장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017090044A JP6867224B2 (ja) | 2017-04-28 | 2017-04-28 | X線管及びx線発生装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018190526A true JP2018190526A (ja) | 2018-11-29 |
JP6867224B2 JP6867224B2 (ja) | 2021-04-28 |
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JP2017090044A Active JP6867224B2 (ja) | 2017-04-28 | 2017-04-28 | X線管及びx線発生装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US11004646B2 (ja) |
EP (1) | EP3618093A4 (ja) |
JP (1) | JP6867224B2 (ja) |
KR (1) | KR102470380B1 (ja) |
CN (1) | CN110582831B (ja) |
WO (1) | WO2018198517A1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2021029161A1 (ja) * | 2019-08-09 | 2021-02-18 | 浜松ホトニクス株式会社 | X線発生装置 |
EP3923312A4 (en) * | 2019-04-15 | 2022-06-01 | Canon Anelva Corporation | X-RAY GENERATION DEVICE AND X-RAY IMAGING METHOD |
US11875965B2 (en) | 2019-07-24 | 2024-01-16 | Hamamatsu Photonics K.K. | X-ray tube |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10734187B2 (en) * | 2017-11-16 | 2020-08-04 | Uih-Rt Us Llc | Target assembly, apparatus incorporating same, and method for manufacturing same |
JP6543378B1 (ja) * | 2018-04-12 | 2019-07-10 | 浜松ホトニクス株式会社 | X線発生装置 |
CN113225886B (zh) * | 2021-07-07 | 2021-11-23 | 中国工程物理研究院应用电子学研究所 | 一种用于高能微焦点x射线的水冷旋转式辐射转换靶 |
KR102384833B1 (ko) | 2021-09-16 | 2022-04-08 | 주식회사 이레이 | 시료에 대한 열 전달을 방지하는 타겟부를 가진 x선 발생 장치 및 그 제조 방법 |
WO2023145101A1 (ja) * | 2022-01-31 | 2023-08-03 | キヤノンアネルバ株式会社 | 検査装置および検査方法 |
Citations (14)
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US2905841A (en) * | 1956-01-02 | 1959-09-22 | Licentia Gmbh | High power x-ray tube with membrane anode |
US3239706A (en) * | 1961-04-17 | 1966-03-08 | High Voltage Engineering Corp | X-ray target |
JPH04262348A (ja) * | 1991-02-15 | 1992-09-17 | Hitachi Medical Corp | 固定陽極x線管の陽極構造 |
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JP2004028845A (ja) * | 2002-06-27 | 2004-01-29 | Japan Science & Technology Corp | 高輝度・高出力微小x線発生源とそれを用いた非破壊検査装置 |
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JP2009031167A (ja) * | 2007-07-28 | 2009-02-12 | Sii Nanotechnology Inc | X線管及びx線分析装置 |
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-
2017
- 2017-04-28 JP JP2017090044A patent/JP6867224B2/ja active Active
-
2018
- 2018-02-26 KR KR1020197019773A patent/KR102470380B1/ko active IP Right Grant
- 2018-02-26 EP EP18791431.2A patent/EP3618093A4/en active Pending
- 2018-02-26 CN CN201880027525.0A patent/CN110582831B/zh active Active
- 2018-02-26 US US16/494,799 patent/US11004646B2/en active Active
- 2018-02-26 WO PCT/JP2018/006980 patent/WO2018198517A1/ja active Application Filing
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US3239706A (en) * | 1961-04-17 | 1966-03-08 | High Voltage Engineering Corp | X-ray target |
JPH04262348A (ja) * | 1991-02-15 | 1992-09-17 | Hitachi Medical Corp | 固定陽極x線管の陽極構造 |
JPH07260713A (ja) * | 1994-03-18 | 1995-10-13 | Hitachi Ltd | X線撮像装置 |
JP2004028845A (ja) * | 2002-06-27 | 2004-01-29 | Japan Science & Technology Corp | 高輝度・高出力微小x線発生源とそれを用いた非破壊検査装置 |
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Publication number | Priority date | Publication date | Assignee | Title |
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EP3923312A4 (en) * | 2019-04-15 | 2022-06-01 | Canon Anelva Corporation | X-RAY GENERATION DEVICE AND X-RAY IMAGING METHOD |
US11875965B2 (en) | 2019-07-24 | 2024-01-16 | Hamamatsu Photonics K.K. | X-ray tube |
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Also Published As
Publication number | Publication date |
---|---|
KR102470380B1 (ko) | 2022-11-24 |
WO2018198517A1 (ja) | 2018-11-01 |
CN110582831A (zh) | 2019-12-17 |
CN110582831B (zh) | 2022-03-04 |
KR20200002784A (ko) | 2020-01-08 |
EP3618093A4 (en) | 2021-01-06 |
EP3618093A1 (en) | 2020-03-04 |
US20200098539A1 (en) | 2020-03-26 |
JP6867224B2 (ja) | 2021-04-28 |
US11004646B2 (en) | 2021-05-11 |
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