JP6264145B2 - X線発生装置 - Google Patents
X線発生装置 Download PDFInfo
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- JP6264145B2 JP6264145B2 JP2014068501A JP2014068501A JP6264145B2 JP 6264145 B2 JP6264145 B2 JP 6264145B2 JP 2014068501 A JP2014068501 A JP 2014068501A JP 2014068501 A JP2014068501 A JP 2014068501A JP 6264145 B2 JP6264145 B2 JP 6264145B2
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- 230000005684 electric field Effects 0.000 claims description 23
- 230000001678 irradiating effect Effects 0.000 claims description 3
- 238000010894 electron beam technology Methods 0.000 description 38
- 238000000034 method Methods 0.000 description 11
- 230000008859 change Effects 0.000 description 9
- 230000005540 biological transmission Effects 0.000 description 8
- 230000007774 longterm Effects 0.000 description 5
- 239000000284 extract Substances 0.000 description 3
- 238000000605 extraction Methods 0.000 description 3
- 238000007689 inspection Methods 0.000 description 3
- 230000001105 regulatory effect Effects 0.000 description 3
- 101100077189 Caenorhabditis elegans lep-2 gene Proteins 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 238000002441 X-ray diffraction Methods 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 229910052790 beryllium Inorganic materials 0.000 description 2
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 230000008901 benefit Effects 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 239000013590 bulk material Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
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- 230000003993 interaction Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
- H01J35/147—Spot size control
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/16—Vessels; Containers; Shields associated therewith
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B6/00—Apparatus or devices for radiation diagnosis; Apparatus or devices for radiation diagnosis combined with radiation therapy equipment
- A61B6/40—Arrangements for generating radiation specially adapted for radiation diagnosis
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/88—Mounting, supporting, spacing, or insulating of electrodes or of electrode assemblies
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J19/00—Details of vacuum tubes of the types covered by group H01J21/00
- H01J19/54—Vessels; Containers; Shields associated therewith
- H01J19/56—Vessels; Containers; Shields associated therewith characterised by the material of the vessel or container
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/24—Tubes wherein the point of impact of the cathode ray on the anode or anticathode is movable relative to the surface thereof
- H01J35/28—Tubes wherein the point of impact of the cathode ray on the anode or anticathode is movable relative to the surface thereof by vibration, oscillation, reciprocation, or swash-plate motion of the anode or anticathode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/16—Vessels; Containers
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G1/00—X-ray apparatus involving X-ray tubes; Circuits therefor
- H05G1/02—Constructional details
- H05G1/04—Mounting the X-ray tube within a closed housing
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B2560/00—Constructional details of operational features of apparatus; Accessories for medical measuring apparatus
- A61B2560/04—Constructional details of apparatus
- A61B2560/0406—Constructional details of apparatus specially shaped apparatus housings
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B6/00—Apparatus or devices for radiation diagnosis; Apparatus or devices for radiation diagnosis combined with radiation therapy equipment
- A61B6/44—Constructional features of apparatus for radiation diagnosis
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/36—Solid anodes; Solid auxiliary anodes for maintaining a discharge
- H01J1/40—Solid anodes; Solid auxiliary anodes for maintaining a discharge forming part of the envelope of the tube or lamp
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/08—Targets (anodes) and X-ray converters
- H01J2235/083—Bonding or fixing with the support or substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/16—Vessels
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/16—Vessels
- H01J2235/163—Vessels shaped for a particular application
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/08—Anodes; Anti cathodes
- H01J35/112—Non-rotating anodes
- H01J35/116—Transmissive anodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/16—Vessels; Containers; Shields associated therewith
- H01J35/18—Windows
- H01J35/186—Windows used as targets or X-ray converters
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
- H01J5/02—Vessels; Containers; Shields associated therewith; Vacuum locks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
- H01J5/02—Vessels; Containers; Shields associated therewith; Vacuum locks
- H01J5/04—Vessels or containers characterised by the material thereof
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G1/00—X-ray apparatus involving X-ray tubes; Circuits therefor
- H05G1/02—Constructional details
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- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Medical Informatics (AREA)
- Engineering & Computer Science (AREA)
- Optics & Photonics (AREA)
- Biomedical Technology (AREA)
- Biophysics (AREA)
- High Energy & Nuclear Physics (AREA)
- Analytical Chemistry (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Chemical & Material Sciences (AREA)
- Pathology (AREA)
- Radiology & Medical Imaging (AREA)
- Physics & Mathematics (AREA)
- Heart & Thoracic Surgery (AREA)
- Molecular Biology (AREA)
- Surgery (AREA)
- Animal Behavior & Ethology (AREA)
- General Health & Medical Sciences (AREA)
- Public Health (AREA)
- Veterinary Medicine (AREA)
- X-Ray Techniques (AREA)
Description
ここで、X線検査装置においては、焦点移動が生じると同一箇所にサンプルを置いても透視領域が変化する上、装置システムの各種パラメータの再構成や装置構成部品の位置調整など、様々な再調整が必要となるため好ましくない。
特許文献2に開示されている技術のように、ターゲット部材を含む真空容器の一部を容器本体部に対して変位させると、真空容器内の内面の凹凸形状が変化することになり、真空容器内部の電界形状が変化する。この電界形状の変化に伴って電子ビームの軌道が変化し、X線発生点の絶対位置の移動、つまり焦点移動が生じる。したがって、特許文献2の技術によっても、X線の焦点位置を一定に保つためには、ターゲット面上でのX線発生点の変更ごとに、X線発生装置全体を微小に移動させる調整が必要となる。
上記のストッパ1cは、本発明における規制部材である。また、容器可動部1bを平行移動させるための規制部材としては、上記構成に限られず、例えば容器可動部に設けた鍔状部材とそれを摺動可能に支える溝を有する支持部材などから構成してもよい。
すなわち、電子源7にはターゲットに対して電子を加速するための接地電位に対してマイナス数十kVからマイナス百数十kVの高電圧がかけられる。電極8は電子源7で発生した電子の拡散を抑制するためのグリッドとして機能し、電子源7に対してマイナス数Vからマイナス数百V程度の電圧がかけられる。電極9はグリッド(電極8)により抑えられた電子を引き出す引出し電極として機能し、電子源7に対してプラス数百Vからプラス千数百Vの電圧がかけられる。そして電極10は、引出し電極(電極9)により引き出された電子を、以下に示す固定アノード12との相互作用により集束する集束電極として機能するものであり、電子源7に対してプラス数百Vからプラス千数百Vの電圧がかけられる。
1a 容器本体部
1b 容器可動部
2 ターゲット
3 X線照射窓
4 ターゲット部材
5 連結部材
6 筒体
7 電子源
8 電極(グリッド)
9 電極(引出し電極)
10 電極(集束電極)
11 電子銃
12 固定アノード
12a 貫通孔
13 支持体
Claims (4)
- ターゲットが一体に形成されたX線照射窓を支持するためにターゲットの下側に張り出す内フランジ部が真空容器に設けられ、上記内フランジ部は真空容器内側に向いた上記ターゲットの下面を支持する構造とされ、電子源と、その電子源および真空容器に対してそれぞれに所定の電位差が付与された電極群が設けられ、真空容器内に形成される電界によって上記電子源からの電子を加速および集束して上記ターゲットに照射することにより、X線を発生して上記X線照射窓を介して外部に取り出すX線発生装置において、
上記X線照射窓を含む上記真空容器の一部が、連結部材を介して真空容器本体部に対して移動可能に連結されているとともに、
上記真空容器内には、上記電極群の最終段の電極と上記ターゲットとの間に、真空容器と同電位で、電子を透過させるための孔が形成されてなるアノードが、真空容器本体部に対して固定された状態で配置されていることを特徴とするX線発生装置。 - 上記アノードは、上記ターゲットの直近に設けられていることを特徴とする請求項1に記載のX線発生装置。
- 上記アノードは、少なくとも反射電子が衝突する可能性のある範囲に原子番号13以下の軽元素部材を用いることを特徴とする請求項1又は2に記載のX線発生装置。
- 上記連結部材は、上記X線照射窓を含む真空容器の一部が、上記真空容器本体部に対して平行移動可能に連結する部材であり、上記真空容器の外部には、上記X線照射窓を含む真空容器の一部が当接し、その姿勢を上記真空容器本体部に対して平行移動状態に規制する規制部材が設けられていることを特徴とする請求項1〜3のいずれか1項に記載のX線発生装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014068501A JP6264145B2 (ja) | 2014-03-28 | 2014-03-28 | X線発生装置 |
EP15153821.2A EP2924705B1 (en) | 2014-03-28 | 2015-02-04 | X-ray generator |
US14/614,781 US9589759B2 (en) | 2014-03-28 | 2015-02-05 | X-ray generator |
CN201510080168.2A CN104952677B (zh) | 2014-03-28 | 2015-02-13 | X射线产生装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014068501A JP6264145B2 (ja) | 2014-03-28 | 2014-03-28 | X線発生装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2015191795A JP2015191795A (ja) | 2015-11-02 |
JP6264145B2 true JP6264145B2 (ja) | 2018-01-24 |
Family
ID=52598575
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014068501A Expired - Fee Related JP6264145B2 (ja) | 2014-03-28 | 2014-03-28 | X線発生装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US9589759B2 (ja) |
EP (1) | EP2924705B1 (ja) |
JP (1) | JP6264145B2 (ja) |
CN (1) | CN104952677B (ja) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6478288B2 (ja) * | 2014-09-12 | 2019-03-06 | 株式会社リガク | X線発生装置及びx線分析装置 |
JP6388400B2 (ja) * | 2014-11-12 | 2018-09-12 | キヤノン株式会社 | X線発生装置及びこれを用いたx線撮影システム |
JP6659167B2 (ja) * | 2016-03-30 | 2020-03-04 | キヤノン株式会社 | 電子銃を備えたx線発生管及びx線撮影装置 |
US10529529B2 (en) | 2016-04-20 | 2020-01-07 | Moxtek, Inc. | Electron-beam spot optimization |
DE102016222365B3 (de) * | 2016-11-15 | 2018-04-05 | Siemens Healthcare Gmbh | Verfahren, Computerprogrammprodukt, computerlesbares Medium und Vorrichtung zur Erzeugung von Röntgenpulsen bei einer Röntgenbildgebung |
WO2018186294A1 (ja) * | 2017-04-05 | 2018-10-11 | 株式会社Photo electron Soul | 電子線発生装置、および、電子線適用装置 |
JP6867224B2 (ja) * | 2017-04-28 | 2021-04-28 | 浜松ホトニクス株式会社 | X線管及びx線発生装置 |
JP6849518B2 (ja) * | 2017-04-28 | 2021-03-24 | 浜松ホトニクス株式会社 | X線管及びx線発生装置 |
DE112019005321T5 (de) * | 2018-10-25 | 2021-08-05 | Horiba, Ltd. | Röntgenanalyseeinrichtung und röntgenstrahl-erzeugungseinheit |
CN109449072B (zh) * | 2018-10-30 | 2020-08-21 | 中国电子科技集团公司第三十八研究所 | 一种用于射线源的浮动靶机构 |
CN109589125A (zh) * | 2018-12-03 | 2019-04-09 | 深圳圣诺医疗设备股份有限公司 | 电子束扫描多焦点反射式射线源装置 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2209963A (en) * | 1938-06-18 | 1940-08-06 | California Inst Of Techn | X-ray generating device |
US2290226A (en) * | 1940-12-19 | 1942-07-21 | Mond Jesse W M Du | X-ray generating device |
US2814729A (en) * | 1956-10-01 | 1957-11-26 | Gen Electric | X-ray microscope |
US2922904A (en) * | 1957-12-30 | 1960-01-26 | Gen Electric | Target window for x-ray microscopes |
US3689790A (en) * | 1971-04-29 | 1972-09-05 | Pepi Inc | Moving target sealed x-ray tube |
US3737698A (en) * | 1971-11-24 | 1973-06-05 | F Carter | X-ray target changer using a translating anode |
US3753020A (en) * | 1971-11-26 | 1973-08-14 | Philips Electronics And Pharm | Multi-anode x-ray tube |
US3794872A (en) * | 1972-06-21 | 1974-02-26 | D Haas | Moving target spring loaded x-ray tube |
US3835341A (en) * | 1973-06-25 | 1974-09-10 | W Zingaro | Selectable multi-window x-ray tube |
NL7803837A (nl) * | 1978-04-11 | 1979-10-15 | Neratoom | Inrichting voor het opwekken van roentgenstralen. |
US6944270B1 (en) * | 2004-02-26 | 2005-09-13 | Osmic, Inc. | X-ray source |
JP2005276760A (ja) * | 2004-03-26 | 2005-10-06 | Shimadzu Corp | X線発生装置 |
JP4886760B2 (ja) | 2008-11-21 | 2012-02-29 | 株式会社東芝 | X線装置 |
JP2011113705A (ja) | 2009-11-25 | 2011-06-09 | Toshiba Corp | X線管 |
JP2012004060A (ja) * | 2010-06-21 | 2012-01-05 | Toshiba Corp | X線源、その調整装置および調整方法 |
JP5875297B2 (ja) * | 2011-08-31 | 2016-03-02 | キヤノン株式会社 | 放射線発生管及びそれを用いた放射線発生装置、放射線撮影システム |
US9184020B2 (en) * | 2013-03-04 | 2015-11-10 | Moxtek, Inc. | Tiltable or deflectable anode x-ray tube |
US9177755B2 (en) * | 2013-03-04 | 2015-11-03 | Moxtek, Inc. | Multi-target X-ray tube with stationary electron beam position |
-
2014
- 2014-03-28 JP JP2014068501A patent/JP6264145B2/ja not_active Expired - Fee Related
-
2015
- 2015-02-04 EP EP15153821.2A patent/EP2924705B1/en not_active Not-in-force
- 2015-02-05 US US14/614,781 patent/US9589759B2/en not_active Expired - Fee Related
- 2015-02-13 CN CN201510080168.2A patent/CN104952677B/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP2924705B1 (en) | 2017-12-13 |
US9589759B2 (en) | 2017-03-07 |
EP2924705A1 (en) | 2015-09-30 |
CN104952677B (zh) | 2018-01-30 |
CN104952677A (zh) | 2015-09-30 |
US20150279608A1 (en) | 2015-10-01 |
JP2015191795A (ja) | 2015-11-02 |
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