JP2015508570A - ウエハ状物品の表面を処理するための装置 - Google Patents
ウエハ状物品の表面を処理するための装置 Download PDFInfo
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- JP2015508570A JP2015508570A JP2014548288A JP2014548288A JP2015508570A JP 2015508570 A JP2015508570 A JP 2015508570A JP 2014548288 A JP2014548288 A JP 2014548288A JP 2014548288 A JP2014548288 A JP 2014548288A JP 2015508570 A JP2015508570 A JP 2015508570A
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- 238000000034 method Methods 0.000 claims abstract description 79
- 238000012545 processing Methods 0.000 claims abstract description 11
- 239000007788 liquid Substances 0.000 claims abstract description 9
- 239000012530 fluid Substances 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 8
- 238000010438 heat treatment Methods 0.000 claims description 6
- 230000005855 radiation Effects 0.000 claims description 6
- 235000012431 wafers Nutrition 0.000 description 43
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 5
- 239000008367 deionised water Substances 0.000 description 5
- 229910021641 deionized water Inorganic materials 0.000 description 5
- 229920001774 Perfluoroether Polymers 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 230000001143 conditioned effect Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- 238000013022 venting Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
- H01L21/6708—Apparatus for fluid treatment for etching for wet etching using mainly spraying means, e.g. nozzles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67115—Apparatus for thermal treatment mainly by radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/6719—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the processing chambers, e.g. modular processing chambers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68728—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a plurality of separate clamping members, e.g. clamping fingers
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Weting (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
半導体ウエハは、エッチング、洗浄、研磨、および材料蒸着などの様々な表面処理プロセスを経る。このようなプロセスに適応するためには、例えば米国特許第4,903,717号および第5,513,668号に記載されるように、回転式キャリアに付随するチャックによって1枚のウエハが1つ以上の処理流体ノズルに関係付けられて支えられてよい。
Claims (15)
- ウエハ状物品を処理するための装置であって、
プロセスチャンバと、
前記プロセスチャンバ内に位置付けられた回転式チャックと、
を備え、
前記回転式チャックは、物理的接触を伴うことなく磁気軸受けを通じて駆動されるように構成され、
前記回転式チャックは、前記回転式チャックから下向きに吊り下がる位置でウエハ状物品を保持するように構成された一連の把持ピンを含み、
前記回転式チャックは、さらに、前記回転式チャックとともに回転する板を含み、
前記板は、前記回転式チャックの使用時にウエハ状物品によって占められる領域の上方に配され、
前記板は、前記回転式チャックの使用中にウエハ状物品から振り落とされる液体から前記プロセスチャンバの上面を遮る、装置。 - 請求項1に記載の装置であって、
前記板は、前記回転式チャックの使用中にウエハ状物品の主要面が存在する面に平行に配され、そうして、前記板と前記面との間に所定幅のギャップを形成する、装置。 - 請求項2に記載の装置であって、
前記所定幅は、約0.1〜5mmであり、好ましくは約0.5〜2mmである、装置。 - 請求項1に記載の装置であって、
前記前記板は、前記プロセスチャンバの覆い蓋に平行に配され、そうして、前記板と前記蓋との間に所定幅のギャップを形成する、装置。 - 請求項4に記載の装置であって、
前記所定幅は、約0.1〜10mmであり、好ましくは約0.5〜5mmであり、より好ましくは約1〜3mmである、装置。 - 請求項1に記載の装置であって、
前記プロセスチャンバは、前記板を覆う蓋と、前記蓋の上に搭載されたノズルアセンブリとを含み、前記ノズルアセンブリは、前記蓋と前記板の中央領域とを通る放出端を有し、そうして、前記装置の使用中に前記ノズルアセンブリを通じてウエハ状物品の上向き表面にプロセス流体が供給可能である、装置。 - 請求項1に記載の装置であって、さらに、
前記プロセスチャンバの外側に配されて前記板を覆う、少なくとも1つの赤外線(IR)ランプを備える装置。 - 請求項7に記載の装置であって、
前記少なくとも1つのIRランプは、前記プロセスチャンバの蓋に隣接して配され、前記蓋の少なくとも一部分および前記板は、前記少なくとも1つのIRランプが発するIR放射に対して透明な材料で形成される、装置。 - 請求項1に記載の装置であって、
前記プロセスチャンバは、前記プロセスチャンバ内に配された内部カバーを含み、前記内部カバーは、前記回転式チャックが前記密閉プロセスチャンバの外壁と通じる第1の位置と、前記回転式チャックに隣接するところで前記内部カバーが前記密閉プロセスチャンバの内表面に密着して気密性の内側プロセスチャンバを構成する第2の位置と、の間で可動である、装置。 - 請求項9に記載の装置であって、
前記内部カバーは、前記第2の位置にあるときに前記内側プロセスチャンバの下方部分を形成する、装置。 - 請求項1に記載の装置であって、
前記磁気軸受けは、前記密閉プロセスチャンバの外側に位置付けられたステータを含む、装置。 - ウエハ状物品を処理するための方法であって、
ウエハ状物品を、前記ウエハ状物品が回転式チャックによって前記回転式チャックから下向きに吊り下がる位置に保持されるように、プロセスチャンバ内において前記回転式チャック上に配することと、
前記ウエハ状物品の上面と、前記回転式チャックに載せられた板と、の間のギャップ内に液体の膜を形成することと、を備え、
前記板は、前記ウエハ状物品を覆って前記ウエハ状物品に平行に広がり、そうして、所定幅のギャップを形成する、方法。 - 請求項12に記載の方法であって、
前記所定幅は、約0.1〜5mmであり、好ましくは約0.5〜2mmである、方法。 - 請求項12に記載の方法であって、
前記回転式チャックは、物理的接触を伴うことなく磁気軸受けを通じて駆動されるように構成される、方法。 - 請求項12に記載の方法であって、さらに、
前記プロセスチャンバの外側に配された少なくとも1つの赤外線(IR)ランプを使用して、前記ウエハ状物品を加熱することを備え、
前記ウエハ状物品を覆っている前記プロセスチャンバおよび前記板の部分は、前記少なくとも1つのIRランプが発するIR放射に対して透明な材料で形成される、方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US13/336,685 | 2011-12-23 | ||
US13/336,685 US9548223B2 (en) | 2011-12-23 | 2011-12-23 | Apparatus for treating surfaces of wafer-shaped articles |
PCT/IB2012/057383 WO2013093759A1 (en) | 2011-12-23 | 2012-12-17 | Apparatus for treating surfaces of wafer-shaped articles |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2015508570A true JP2015508570A (ja) | 2015-03-19 |
JP2015508570A5 JP2015508570A5 (ja) | 2016-02-12 |
Family
ID=48653163
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2014548288A Pending JP2015508570A (ja) | 2011-12-23 | 2012-12-17 | ウエハ状物品の表面を処理するための装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US9548223B2 (ja) |
JP (1) | JP2015508570A (ja) |
KR (1) | KR20140110970A (ja) |
CN (1) | CN104011847A (ja) |
TW (1) | TWI559984B (ja) |
WO (1) | WO2013093759A1 (ja) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10269615B2 (en) | 2011-09-09 | 2019-04-23 | Lam Research Ag | Apparatus for treating surfaces of wafer-shaped articles |
JP6001896B2 (ja) * | 2012-03-27 | 2016-10-05 | 株式会社Screenセミコンダクターソリューションズ | 基板洗浄装置およびそれを備えた基板処理装置 |
US9748120B2 (en) | 2013-07-01 | 2017-08-29 | Lam Research Ag | Apparatus for liquid treatment of disc-shaped articles and heating system for use in such apparatus |
KR102119690B1 (ko) * | 2013-12-06 | 2020-06-08 | 세메스 주식회사 | 기판 가열 유닛 |
US10043686B2 (en) * | 2013-12-31 | 2018-08-07 | Lam Research Ag | Apparatus for treating surfaces of wafer-shaped articles |
US10490426B2 (en) | 2014-08-26 | 2019-11-26 | Lam Research Ag | Method and apparatus for processing wafer-shaped articles |
US10167552B2 (en) * | 2015-02-05 | 2019-01-01 | Lam Research Ag | Spin chuck with rotating gas showerhead |
JP6625891B2 (ja) * | 2016-02-10 | 2019-12-25 | 株式会社日立ハイテクノロジーズ | 真空処理装置 |
US10910253B2 (en) * | 2016-11-09 | 2021-02-02 | Tel Manufacturing And Engineering Of America, Inc. | Magnetically levitated and rotated chuck for processing microelectronic substrates in a process chamber |
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JP2001351874A (ja) * | 2000-06-09 | 2001-12-21 | Ebara Corp | 基板回転装置 |
JP2007527606A (ja) * | 2003-06-24 | 2007-09-27 | エスイーゼツト・アクチエンゲゼルシヤフト | ディスク様基板の湿式処理装置と方法 |
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WO2011010661A1 (ja) * | 2009-07-22 | 2011-01-27 | 東京エレクトロン株式会社 | 処理装置及びその動作方法 |
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EP2380192A4 (en) * | 2008-12-19 | 2014-07-30 | Lam Res Ag | DEVICE FOR TREATING DISC-SHAPED ARTICLES AND METHOD FOR IMPLEMENTING THE SAME |
-
2011
- 2011-12-23 US US13/336,685 patent/US9548223B2/en active Active
-
2012
- 2012-12-17 CN CN201280063592.0A patent/CN104011847A/zh active Pending
- 2012-12-17 KR KR1020147020603A patent/KR20140110970A/ko not_active Application Discontinuation
- 2012-12-17 JP JP2014548288A patent/JP2015508570A/ja active Pending
- 2012-12-17 WO PCT/IB2012/057383 patent/WO2013093759A1/en active Application Filing
- 2012-12-20 TW TW101148713A patent/TWI559984B/zh active
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JP2001524259A (ja) * | 1995-07-10 | 2001-11-27 | シーヴィシー、プラダクツ、インク | マイクロエレクトロニクス製造装置用プログラマブル超クリーン電磁サブストレート回転装置及び方法 |
JP2001104860A (ja) * | 1999-10-13 | 2001-04-17 | Ebara Corp | 基板処理装置 |
JP2001351874A (ja) * | 2000-06-09 | 2001-12-21 | Ebara Corp | 基板回転装置 |
JP2007527606A (ja) * | 2003-06-24 | 2007-09-27 | エスイーゼツト・アクチエンゲゼルシヤフト | ディスク様基板の湿式処理装置と方法 |
JP2009539269A (ja) * | 2006-05-30 | 2009-11-12 | アプライド マテリアルズ インコーポレイテッド | 誘電性ギャップ充填のためのプロセスチャンバ |
WO2011010661A1 (ja) * | 2009-07-22 | 2011-01-27 | 東京エレクトロン株式会社 | 処理装置及びその動作方法 |
Also Published As
Publication number | Publication date |
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CN104011847A (zh) | 2014-08-27 |
TWI559984B (en) | 2016-12-01 |
US9548223B2 (en) | 2017-01-17 |
US20130160260A1 (en) | 2013-06-27 |
KR20140110970A (ko) | 2014-09-17 |
WO2013093759A1 (en) | 2013-06-27 |
TW201341059A (zh) | 2013-10-16 |
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