JP2015107634A - 液滴吐出ヘッド及び画像形成装置 - Google Patents
液滴吐出ヘッド及び画像形成装置 Download PDFInfo
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Abstract
Description
複数の圧電素子と、
前記圧電素子の電極と、駆動回路に接続するための駆動回路接続部との間を接続する複数の配線と、
流路基板と対向する側の面に前記複数の圧電素子を収容する凹部を有し、前記駆動回路接続部上面に開口部が設けられた保持基板と、を有し、
前記保持基板は、前記流路基板上の前記配線を横切る領域を含む保持基板接着領域において前記流路基板と接着され、
前記保持基板接着領域において、前記配線の配線間の形状がクランク部を有する形状であることを特徴とする液滴吐出ヘッドを提供する。
[第1の実施形態]
本実施形態では、本発明の液滴吐出ヘッドについて説明する。
(ノズルプレート)
ノズルプレート10はノズル15を形成した板状の部材である。ノズル15は流路基板11に形成される個別液室14ごとに配置され、個別液室14と連通する。
(流路基板)
流路基板11にはノズル15およびインク供給路13に連通する個別液室14が形成される。また、個別液室14上に形成される圧電アクチュエータ17および圧電アクチュエータ17に駆動信号を供給する引き出し配線19(個別電極配線および/または共通電極配線)を形成することができる。
(保持基板)
流路基板11として40〜100μmのシリコンウェハを用いることが好ましいと説明したが、この場合、厚さが薄く強度が不足するため、保持基板12を接着する必要がある。
[第2の実施形態]
本実施形態では、本発明の液滴吐出ヘッドの他の構成例について説明する。
[第3の実施形態]
本実施形態では、第1、2の実施形態で説明した液滴吐出ヘッドを備えた画像形成装置について説明する。
る。また画像形成装置200の下方部には前方側から多数枚の用紙240を積載可能な給紙カセット(給紙トレイ)250を抜き差し自在に装着される。
[実施例1]
本実施例では、図1に示す断面構造を有する液滴吐出ヘッドを下記の手順により作成した。
(シリコン(Si)ウェハ上に圧電アクチュエータを作成)
流路基板11となる直径150mm、厚さ625μmのシリコン(Si)ウェハ上に、熱酸化膜を1μm、Si3N4 0.5μm、及び、SiO2 0.5μmをCVD法により順次成膜し、総厚が2μm振動板を形成した。
(保持基板の作成)
直径 150mm、厚さ400μmのSiウェハにフォトリソグラフィおよびドライエッチングを用いて保持基板12を作成した。保持基板には、図1に示すとおり、駆動回路接続部18とインク供給路13に対応する部分を貫通穴加工し、振動室21部分を深さ20μmに加工した。ドライエッチングには、酸化膜マスクを用いたICP(Inductive Coupled Plasma)エッチング法(RIE法)を用いて加工した。
(圧電アクチュエータを有するシリコン(Si)ウェハに保持基板を貼り合わせる工程)
保持基板12と圧電アクチュエータ形成済みの流路基板11を、接着剤を用いて接合した。接着剤としては2液性のエポキシ接着剤を用いるが、常温での粘度を10Pa・sとなる高粘度のものを用いた。接着剤塗布は保持基板側にフレキソ印刷法によりおこなった。
[比較例]
実施例1と同様の手法で液滴吐出ヘッドを作成した。
[実施例2〜4]
表1に示すように、クランク部の数および/または接着剤の厚さを変更した以外は実施例1と同様に液滴吐出ヘッドを作成し評価を行った。
12 保持基板
17 圧電素子
18 駆動回路接続部
19 配線
20 保持基板接着領域
51、61、72、91 クランク部
200 画像形成装置
Claims (9)
- 個別液室が形成された流路基板上に、
複数の圧電素子と、
前記圧電素子の電極と、駆動回路に接続するための駆動回路接続部との間を接続する複数の配線と、
流路基板と対向する側の面に前記複数の圧電素子を収容する凹部を有し、前記駆動回路接続部上面に開口部が設けられた保持基板と、を有し、
前記保持基板は、前記流路基板上の前記配線を横切る領域を含む保持基板接着領域において前記流路基板と接着され、
前記保持基板接着領域において、前記配線の配線間の形状がクランク部を有する形状であることを特徴とする液滴吐出ヘッド。 - 前記保持基板接着領域に形成される前記配線の配線幅が、前記配線の配線間隔よりも広いことを特徴とする請求項1に記載の液滴吐出ヘッド。
- 前記保持基板接着領域に形成される、前記配線間の形状が前記クランク部を2箇所以上有する形状であることを特徴とする請求項1または請求項2に記載の液滴吐出ヘッド。
- 前記保持基板接着領域における前記配線の配線幅W1と前記配線の配線間幅W2の比率W2/W1が、液滴吐出ヘッド内において略同一であることを特徴とする請求項1乃至3のいずれか一項に記載の液滴吐出ヘッド。
- 前記保持基板接着領域において、前記配線上面の接着層の厚さが、前記配線間の上面の接着層の厚さよりも薄いことを特徴とする請求項1乃至4のいずれか一項に記載の液滴吐出ヘッド。
- 前記保持基板接着領域と前記駆動回路接続部との間の領域における前記配線の配線間隔は、
前記保持基板接着領域における前記配線の配線間隔よりも広い部分を含むことを特徴とする請求項1乃至5いずれか一項に記載の液滴吐出ヘッド。 - 前記配線は、前記保持基板接着領域と、前記保持基板接着領域と前記駆動回路接続部との間の領域と、の境界部において屈曲していることを特徴とする請求項6に記載の液滴吐出ヘッド。
- 前記駆動回路接続部に駆動回路がフリップチップで接合される構成において、
前記保持基板の開口部内で前記駆動回路と重なる領域の前記配線の配線間隔を、前記保持基板の開口部内で前記駆動回路と重ならない領域の前記配線の配線間隔より狭くしたことを特徴とする請求項6または7に記載の液滴吐出ヘッド。 - 請求項1乃至8のいずれか一項に記載の液滴吐出ヘッドを備えた画像形成装置。
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