JP2014101271A - 圧電セラミック多層エレメント - Google Patents
圧電セラミック多層エレメント Download PDFInfo
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- JP2014101271A JP2014101271A JP2013264068A JP2013264068A JP2014101271A JP 2014101271 A JP2014101271 A JP 2014101271A JP 2013264068 A JP2013264068 A JP 2013264068A JP 2013264068 A JP2013264068 A JP 2013264068A JP 2014101271 A JP2014101271 A JP 2014101271A
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- 239000000919 ceramic Substances 0.000 title claims abstract description 22
- 239000000463 material Substances 0.000 claims abstract description 66
- 238000005245 sintering Methods 0.000 claims abstract description 54
- 239000000203 mixture Substances 0.000 claims abstract description 22
- 229910052709 silver Inorganic materials 0.000 claims abstract description 17
- 239000004332 silver Substances 0.000 claims abstract description 17
- 239000007772 electrode material Substances 0.000 claims abstract description 14
- 229910044991 metal oxide Inorganic materials 0.000 claims abstract description 14
- 150000004706 metal oxides Chemical class 0.000 claims abstract description 14
- 229910001092 metal group alloy Inorganic materials 0.000 claims abstract description 12
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims abstract description 8
- 229910000510 noble metal Inorganic materials 0.000 claims abstract description 8
- 239000012811 non-conductive material Substances 0.000 claims abstract description 8
- 229910052763 palladium Inorganic materials 0.000 claims abstract description 4
- 229910052451 lead zirconate titanate Inorganic materials 0.000 claims description 21
- 238000000034 method Methods 0.000 claims description 21
- 238000004519 manufacturing process Methods 0.000 claims description 10
- 239000000843 powder Substances 0.000 claims description 7
- 238000005266 casting Methods 0.000 claims description 6
- 150000001768 cations Chemical class 0.000 claims description 6
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 6
- 238000001354 calcination Methods 0.000 claims description 5
- 239000002994 raw material Substances 0.000 claims description 5
- 238000002156 mixing Methods 0.000 claims description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 4
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 3
- 229910005793 GeO 2 Inorganic materials 0.000 claims description 3
- -1 InO 2 Inorganic materials 0.000 claims description 3
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 3
- 229910006404 SnO 2 Inorganic materials 0.000 claims description 3
- 229910002113 barium titanate Inorganic materials 0.000 claims description 3
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 claims description 3
- 239000011230 binding agent Substances 0.000 claims description 3
- 229910002115 bismuth titanate Inorganic materials 0.000 claims description 3
- 239000011248 coating agent Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- 238000013329 compounding Methods 0.000 claims description 2
- 238000007606 doctor blade method Methods 0.000 claims description 2
- 239000007788 liquid Substances 0.000 claims description 2
- 229910052697 platinum Inorganic materials 0.000 claims description 2
- 238000003672 processing method Methods 0.000 claims description 2
- 238000004080 punching Methods 0.000 claims description 2
- 239000012798 spherical particle Substances 0.000 claims description 2
- 238000010030 laminating Methods 0.000 claims 1
- 229910010293 ceramic material Inorganic materials 0.000 abstract description 5
- 238000002844 melting Methods 0.000 abstract description 4
- 230000008018 melting Effects 0.000 abstract description 4
- 229910001252 Pd alloy Inorganic materials 0.000 abstract description 3
- SWELZOZIOHGSPA-UHFFFAOYSA-N palladium silver Chemical compound [Pd].[Ag] SWELZOZIOHGSPA-UHFFFAOYSA-N 0.000 abstract description 3
- 239000010953 base metal Substances 0.000 abstract description 2
- 238000005516 engineering process Methods 0.000 abstract description 2
- 238000007254 oxidation reaction Methods 0.000 abstract description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 14
- 239000011149 active material Substances 0.000 description 6
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 5
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 4
- DLYUQMMRRRQYAE-UHFFFAOYSA-N tetraphosphorus decaoxide Chemical compound O1P(O2)(=O)OP3(=O)OP1(=O)OP2(=O)O3 DLYUQMMRRRQYAE-UHFFFAOYSA-N 0.000 description 4
- 239000001856 Ethyl cellulose Substances 0.000 description 3
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 3
- WUOACPNHFRMFPN-UHFFFAOYSA-N alpha-terpineol Chemical compound CC1=CCC(C(C)(C)O)CC1 WUOACPNHFRMFPN-UHFFFAOYSA-N 0.000 description 3
- SQIFACVGCPWBQZ-UHFFFAOYSA-N delta-terpineol Natural products CC(C)(O)C1CCC(=C)CC1 SQIFACVGCPWBQZ-UHFFFAOYSA-N 0.000 description 3
- 229920001249 ethyl cellulose Polymers 0.000 description 3
- 235000019325 ethyl cellulose Nutrition 0.000 description 3
- 229940116411 terpineol Drugs 0.000 description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 239000010970 precious metal Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000002003 electrode paste Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
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Abstract
【解決手段】したがって本発明によれば、基本材料に非導電性の焼結助剤を添加し、内部電極が主材料成分として銀、有利には純銀、また非導電性材料成分および/または金属合金または金属酸化物混合物を含有する。
【選択図】図1
Description
a)低温で焼結するPZTセラミックが使用されなければならない。
b)PZT材料は焼結時の銀の拡散に対してロバストでなければならない。内部電極から拡散する銀は焼結温度をさらに著しく低下させる。しかしながら、材料の圧電機械的な特性に及ぼされる影響は可能な限り小さくなくてはならない。
c)内部電極はPZTの添加によって、または使用されるセラミックの種類および/または金属合金および/または金属混合物の添加によって安定化されなければならない。何故ならば、安定化されなければ内部電極がセラミック内に広範に拡散し、セラミックの特性を変化させ、導電率を失わせるからである。
焼結助剤はNa2O,K2O,MgO,CaO,SrO,Al2O3,Fe2O3,NiO,Mn2O3またはCr2O3のような1価、2価または3価の金属酸化物から選択される。
Claims (28)
- 基本材料としてのPZT材料から成る圧電セラミック多層エレメントを製造するための材料において、
前記基本材料に非導電性の焼結助剤が添加されている、
ことを特徴とする材料。 - 前記基本材料はチタン酸ジルコン酸鉛、チタン酸バリウムまたはチタン酸ビスマスである、
請求項1記載の材料。 - 前記焼結助剤は1価、2価または3価の金属酸化物、有利にはNa2O,K2O,MgO,CaO,SrO,Al2O3,Fe2O3,NiO,Mn2O3またはCr2O3から選択されている、
請求項1または2記載の材料。 - 前記焼結助剤は、有利にはSiO2,GeO2,InO2,TlO2またはSnO2から選択されている、4価の陽イオンを含む、
請求項1または2記載の材料。 - 前記焼結助剤は、有利にはP2O5,As2O5,Sb2O5またはBi2O5から選択されている、5価の陽イオンを含む、
請求項1または2記載の材料。 - 前記焼結助剤は、1つのグループの1つの材料または前記材料の組み合わせ、または、種々のグループの前記材料の組み合わせから成る、
請求項1から5までのいずれか1項記載の材料。 - 全材料中の前記焼結助剤の濃度は5重量%以下、有利には2重量%未満、殊に有利には1重量%未満である、
請求項1から6までのいずれか1項記載の材料。 - 前記焼結助剤の個々の材料の濃度は3重量%以下、有利には1重量%未満、殊に有利には0.5重量%未満である、
請求項1から7までのいずれか1項記載の材料。 - か焼前またはか焼後の原材料の混合時に添加が行われる場合には、前記量の焼結助剤の添加は配合時に既に考慮されている、
請求項1から8までのいずれか1項記載の材料。 - 前記圧電セラミック多層エレメントを製造するための材料の焼結温度は1000℃未満、有利には960℃未満、殊に有利には900℃未満である、
請求項1から9までのいずれか1項記載の材料。 - 基本材料としてのPZT材料から成る圧電セラミック多層エレメントを製造するための材料の製造方法において、
前記基本材料に非導電性の焼結助剤を添加する、
ことを特徴とする方法。 - 前記基本材料としてチタン酸ジルコン酸鉛、チタン酸バリウムまたはチタン酸ビスマスを選択する、
請求項11記載の方法。 - 焼結助剤として1価、2価または3価の金属酸化物、有利にはNa2O,K2O,MgO,CaO,SrO,Al2O3,Fe2O3,NiO,Mn2O3またはCr2O3を選択する、
請求項11または12記載の方法。 - 4価の陽イオンを含む焼結助剤、有利にはSiO2,GeO2,InO2,TlO2またはSnO2を選択する、
請求項11または12記載の方法。 - 5価の陽イオンを含む焼結助剤、有利にはP2O5,As2O5,Sb2O5またはBi2O5を選択する、
請求項11または12記載の方法。 - 前記焼結助剤は、1つのグループの1つの材料または前記材料の組み合わせ、または、種々のグループの前記材料の組み合わせから成る、
請求項11から15までのいずれか1項記載の方法。 - 全材料中の前記焼結助剤の濃度として5重量%以下、有利には2重量%未満、殊に有利には1重量%未満を選択する、
請求項11から16までのいずれか1項記載の方法。 - 前記焼結助剤の個々の材料の濃度として3重量%以下、有利には1重量%未満、殊に有利には0.5重量%未満を選択する、
請求項11から17までのいずれか1項記載の方法。 - か焼前またはか焼後の原材料の混合時に添加が行われる場合には、前記量の焼結助剤の添加を配合時に既に考慮する、
請求項11または18までのいずれか1項記載の方法。 - 原材料および処理方法の変動を考慮するために、前記量の焼結助剤の添加を目標値への計量およびドーピングによって行う、
請求項11から19までのいずれか1項記載の方法。 - か焼前またはか焼後に焼結助剤を液状に添加することによって被覆を行う、
請求項11から20までのいずれか1項記載の方法。 - 請求項1から10までのいずれか1項記載の材料から成る圧電セラミック多層エレメントの製造方法において、
か焼された基本材料としてのPZT材料を粉砕し、
従来技術による粉末からキャスティングスリップを準備し、該キャスティングスリップに請求項13から20までのいずれか1項記載の材料のうちの1つまたは該材料の組み合わせから成る焼結助剤を5重量%以下の量で添加し、
前記キャスティングスリップを有利にはドクターブレード方式により連続的なフィルムにキャスティングし、乾燥させ、フィルム切片に細分化し、
該フィルム切片に内部電極の金属ペーストでもって該内部電極の印刷レイアウトの形状を印刷し、
印刷されて乾燥された前記フィルム切片を、多層エレメントの構造が生じるように複数枚積層化し、
積層化された前記フィルムを従来技術に従い高圧下および高温下で相互に合わせ1つのラミネートにし、
該ラミネートを前記印刷レイアウトによって設定された多層エレメントの形状と数に、例えば鋸引きまたは打ち抜きによって分割し、
約500℃の温度で多層エレメントから有機バインダを除去し、続いて1000℃以下の温度、有利には900℃で焼結することを特徴とする、
圧電セラミック多層エレメントの製造方法。 - 請求項1から10までのいずれか1項記載の圧電セラミック多層エレメントを製造するための材料を使用して、請求項22記載の方法に従い製造されている圧電セラミック多層エレメントにおいて使用するための、少なくとも1つの金属成分として銀を有する内部電極材料において、
内部電極は主材料成分として銀、有利には純銀を含有し、さらに、0%から最大で30%、有利には15%以下の重量比を有する非導電性材料成分および/または30重量%未満の割合の金属酸化物混合物および/または金属合金を含有する、
ことを特徴とする内部電極材料。 - 前記銀は焼結前の出発状態では球体状の粒子(粉末)として存在する、
請求項23記載の内部電極材料。 - 前記非導電性材料成分は、30重量%未満、有利には5%〜15%の割合のチタン酸ジルコン酸鉛(PZT)であり、殊に共ドープされた材料から成る、
請求項23または24記載の内部電極材料。 - 添加される前記金属合金および/または前記金属酸化物混合物の割合は10重量%未満、有利には5重量%未満である、
請求項23から25までのいずれか1項記載の内部電極材料。 - 前記金属合金および/または前記金属酸化物混合物は銀を除く貴金属から成る、
請求項23から26までのいずれか1項記載の内部電極材料。 - 前記金属合金および/または前記金属酸化物混合物はパラジウムまたはプラチナを含む、
請求項27記載の内部電極材料。
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JP2005170693A (ja) * | 2003-12-08 | 2005-06-30 | Ngk Insulators Ltd | 圧電/電歪磁器組成物、圧電/電歪体、及び圧電/電歪膜型素子 |
JP2006108546A (ja) * | 2004-10-08 | 2006-04-20 | Nec Tokin Corp | 積層型圧電セラミックス素子およびその製造方法 |
JP2006265055A (ja) * | 2005-03-25 | 2006-10-05 | Nec Tokin Corp | 圧電セラミックスの製造方法 |
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EP2207758A1 (de) | 2010-07-21 |
US9598319B2 (en) | 2017-03-21 |
JP2011501880A (ja) | 2011-01-13 |
CN101903308B (zh) | 2017-04-19 |
WO2009050299A1 (de) | 2009-04-23 |
DE102008042965A1 (de) | 2009-04-23 |
EP2207758B1 (de) | 2017-08-30 |
CN101903308A (zh) | 2010-12-01 |
SI2207758T1 (en) | 2018-01-31 |
JP5745852B2 (ja) | 2015-07-08 |
US20100307669A1 (en) | 2010-12-09 |
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