JP2013541192A - スタガー薄膜トランジスタおよびその形成方法 - Google Patents
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- 239000010409 thin film Substances 0.000 title claims abstract description 54
- 238000000034 method Methods 0.000 title claims abstract description 38
- 239000010949 copper Substances 0.000 claims abstract description 143
- 229910052802 copper Inorganic materials 0.000 claims abstract description 141
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 138
- 229910000881 Cu alloy Inorganic materials 0.000 claims abstract description 88
- 229910052760 oxygen Inorganic materials 0.000 claims description 45
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 43
- 239000001301 oxygen Substances 0.000 claims description 43
- 239000000758 substrate Substances 0.000 claims description 37
- 238000004544 sputter deposition Methods 0.000 claims description 27
- 238000000151 deposition Methods 0.000 claims description 26
- 238000000137 annealing Methods 0.000 claims description 24
- 239000000463 material Substances 0.000 claims description 18
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 15
- 239000000956 alloy Substances 0.000 claims description 14
- 238000001465 metallisation Methods 0.000 claims description 10
- 229910052804 chromium Inorganic materials 0.000 claims description 9
- 239000007789 gas Substances 0.000 claims description 9
- 239000011651 chromium Substances 0.000 claims description 7
- 229910052749 magnesium Inorganic materials 0.000 claims description 7
- 229910052748 manganese Inorganic materials 0.000 claims description 7
- 230000008021 deposition Effects 0.000 claims description 6
- 229910052786 argon Inorganic materials 0.000 claims description 5
- 239000011572 manganese Substances 0.000 claims description 5
- 239000011261 inert gas Substances 0.000 claims description 4
- 239000011777 magnesium Substances 0.000 claims description 4
- 239000000203 mixture Substances 0.000 claims description 4
- 230000001590 oxidative effect Effects 0.000 claims description 3
- 229910000882 Ca alloy Inorganic materials 0.000 claims description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 10
- 230000015572 biosynthetic process Effects 0.000 description 8
- 239000010408 film Substances 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 230000004888 barrier function Effects 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 230000003647 oxidation Effects 0.000 description 6
- 238000007254 oxidation reaction Methods 0.000 description 6
- 229910052814 silicon oxide Inorganic materials 0.000 description 6
- 229910045601 alloy Inorganic materials 0.000 description 5
- 239000011787 zinc oxide Substances 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- -1 ITO Substances 0.000 description 4
- 238000005477 sputtering target Methods 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 3
- 238000002161 passivation Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- 230000003068 static effect Effects 0.000 description 3
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 239000012298 atmosphere Substances 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 229910000967 As alloy Inorganic materials 0.000 description 1
- 239000005751 Copper oxide Substances 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 229910000583 Nd alloy Inorganic materials 0.000 description 1
- 229910001370 Se alloy Inorganic materials 0.000 description 1
- 239000005407 aluminoborosilicate glass Substances 0.000 description 1
- 239000005354 aluminosilicate glass Substances 0.000 description 1
- UBSJOWMHLJZVDJ-UHFFFAOYSA-N aluminum neodymium Chemical compound [Al].[Nd] UBSJOWMHLJZVDJ-UHFFFAOYSA-N 0.000 description 1
- AINNHYSCPOKHAO-UHFFFAOYSA-N aluminum;selenium Chemical compound [Se]=[Al] AINNHYSCPOKHAO-UHFFFAOYSA-N 0.000 description 1
- 239000012300 argon atmosphere Substances 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 150000001879 copper Chemical class 0.000 description 1
- 229910000431 copper oxide Inorganic materials 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- HRHKULZDDYWVBE-UHFFFAOYSA-N indium;oxozinc;tin Chemical compound [In].[Sn].[Zn]=O HRHKULZDDYWVBE-UHFFFAOYSA-N 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- KYKLWYKWCAYAJY-UHFFFAOYSA-N oxotin;zinc Chemical compound [Zn].[Sn]=O KYKLWYKWCAYAJY-UHFFFAOYSA-N 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- YSRUGFMGLKANGO-UHFFFAOYSA-N zinc hafnium(4+) indium(3+) oxygen(2-) Chemical compound [O-2].[Zn+2].[In+3].[Hf+4] YSRUGFMGLKANGO-UHFFFAOYSA-N 0.000 description 1
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 1
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/45—Ohmic electrodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/532—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body characterised by the materials
- H01L23/53204—Conductive materials
- H01L23/53209—Conductive materials based on metals, e.g. alloys, metal silicides
- H01L23/53228—Conductive materials based on metals, e.g. alloys, metal silicides the principal metal being copper
- H01L23/53238—Additional layers associated with copper layers, e.g. adhesion, barrier, cladding layers
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/4908—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET for thin film semiconductor, e.g. gate of TFT
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66742—Thin film unipolar transistors
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66969—Multistep manufacturing processes of devices having semiconductor bodies not comprising group 14 or group 13/15 materials
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/7869—Thin film transistors, i.e. transistors with a channel being at least partly a thin film having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate
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- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Thin Film Transistor (AREA)
- Electrodes Of Semiconductors (AREA)
- Formation Of Insulating Films (AREA)
Abstract
Description
Claims (15)
- 酸化物含有層(210)と、
前記酸化物含有層上に堆積させた銅合金層(220)と、
銅含有酸化物層(230)と、
銅含有層(240)と
を備えるアニール層スタック(200)
を備えるスタガー薄膜トランジスタ。 - 前記スタガー薄膜トランジスタが反転スタガー薄膜トランジスタである、請求項1に記載のスタガー薄膜トランジスタ。
- 前記酸化物含有層が導電酸化物層である、請求項1または2に記載のスタガー薄膜トランジスタ。
- 前記導電酸化物層が透明酸化物層、詳細にはZnO含有層またはIGZO含有層である、請求項3に記載のスタガー薄膜トランジスタ。
- 前記銅合金層、前記銅含有酸化物層、および前記銅含有層が、前記薄膜トランジスタの能動チャネル領域を形成する前記酸化物含有層に接触する前記薄膜トランジスタの電極を形成する、請求項1ないし4のいずれか一項に記載のスタガー薄膜トランジスタ。
- 前記銅合金層、前記銅含有酸化物層、および前記銅含有層が、前記薄膜トランジスタの基板の少なくとも一部を形成する前記酸化物含有層に接触する前記薄膜トランジスタのゲート電極を形成する、請求項1または2に記載のスタガー薄膜トランジスタ。
- 前記酸化物含有層および前記銅含有酸化物層から選択される少なくとも1つの層が、前記銅合金層に隣接する酸素空乏ゾーン(215)を有する、請求項1ないし6のいずれか一項に記載のスタガー薄膜トランジスタ。
- 前記銅合金層が、少なくとも部分酸化したCu、Mn、Mg、Cr、Mo、Caの合金材料、Cu、Mn、Mg、Cr、Mo、Caの酸化物、およびこれらの組合せからなる群から選択される少なくとも1つの材料を含む、請求項1ないし7のいずれか一項に記載のスタガー薄膜トランジスタ。
- スタガー薄膜トランジスタの形成方法であって、
前記薄膜トランジスタの酸化物含有層(210)を設けることと、
前記酸化物含有層上に銅合金層(220)を堆積させることと、
前記銅合金層上に銅含有酸化物層(230)を堆積させることと、
前記銅含有酸化物層上に銅含有層(240)を堆積させることと、
前記酸化物含有層、前記銅合金層、前記銅含有酸化物層、および前記銅含有層をアニールすることと
を含む方法。 - 前記アニールすることが、前記銅合金層の少なくとも1つの合金材料を、前記酸化物含有層および前記銅含有酸化物層から選択される少なくとも1つの層からの酸素で酸化させることを含む、請求項9に記載の方法。
- 前記銅合金層を堆積させることが、銅合金のスパッタリング、任意選択で前記銅合金のマグネトロンスパッタリングを含み、前記銅合金の前記合金材料が、Mn、Mg、Cr、Mo、Ca、およびこれらの混合物から任意選択で選択される、請求項9または10に記載の方法。
- 前記銅含有酸化物層を堆積させることが、酸素含有ガス環境内、任意選択でArおよびO2を含むガス環境内での、銅のスパッタリング、任意選択で銅のマグネトロンスパッタリングを含む、請求項9ないし11のいずれか一項に記載の方法。
- 前記銅含有層を堆積させることが、不活性ガス環境内、任意選択でArを含む不活性ガス環境内での、銅のスパッタリング、任意選択で銅のマグネトロンスパッタリングを含む、請求項9ないし12のいずれか一項に記載の方法。
- 前記酸化物含有層が導電酸化物層であり、前記銅合金層、前記銅含有酸化物層、および前記銅含有層が、前記薄膜トランジスタの前記能動チャネル領域を形成する前記導電酸化物層に接触する前記薄膜トランジスタの電極を形成する、請求項9ないし13のいずれか一項に記載の方法。
- 前記スタガー薄膜トランジスタの基板上にゲート電極金属化を堆積させることと、
前記基板からの酸素によって前記ゲート電極金属化を少なくとも部分的に酸化させるように前記ゲート電極金属化をアニールすることと
をさらに含む、請求項9ないし14のいずれか一項に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP10175294A EP2426720A1 (en) | 2010-09-03 | 2010-09-03 | Staggered thin film transistor and method of forming the same |
EP10175294.7 | 2010-09-03 | ||
PCT/EP2011/063712 WO2012028432A1 (en) | 2010-09-03 | 2011-08-09 | Staggered thin film transistor and method of forming the same |
Publications (2)
Publication Number | Publication Date |
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JP2013541192A true JP2013541192A (ja) | 2013-11-07 |
JP2013541192A5 JP2013541192A5 (ja) | 2014-09-25 |
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US (1) | US20120056173A1 (ja) |
EP (1) | EP2426720A1 (ja) |
JP (1) | JP2013541192A (ja) |
KR (1) | KR20130102576A (ja) |
CN (1) | CN103140929B (ja) |
TW (1) | TW201232784A (ja) |
WO (1) | WO2012028432A1 (ja) |
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US8962386B2 (en) * | 2011-11-25 | 2015-02-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
JP6051960B2 (ja) * | 2012-03-19 | 2016-12-27 | 株式会社リコー | 導電性薄膜、導電性薄膜形成用塗布液、電界効果型トランジスタ、及び電界効果型トランジスタの製造方法 |
WO2013183254A1 (ja) * | 2012-06-08 | 2013-12-12 | パナソニック株式会社 | 薄膜トランジスタ及び薄膜トランジスタの製造方法 |
JP5972065B2 (ja) * | 2012-06-20 | 2016-08-17 | 富士フイルム株式会社 | 薄膜トランジスタの製造方法 |
US9379247B2 (en) * | 2012-06-28 | 2016-06-28 | Cbrite Inc. | High mobility stabile metal oxide TFT |
US8823003B2 (en) * | 2012-08-10 | 2014-09-02 | Apple Inc. | Gate insulator loss free etch-stop oxide thin film transistor |
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TW201232784A (en) | 2012-08-01 |
US20120056173A1 (en) | 2012-03-08 |
KR20130102576A (ko) | 2013-09-17 |
CN103140929A (zh) | 2013-06-05 |
EP2426720A1 (en) | 2012-03-07 |
WO2012028432A1 (en) | 2012-03-08 |
CN103140929B (zh) | 2015-12-02 |
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