JP2013541179A - 圧電アクチュエータの曲げ振動制御方法 - Google Patents
圧電アクチュエータの曲げ振動制御方法 Download PDFInfo
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- JP2013541179A JP2013541179A JP2013523645A JP2013523645A JP2013541179A JP 2013541179 A JP2013541179 A JP 2013541179A JP 2013523645 A JP2013523645 A JP 2013523645A JP 2013523645 A JP2013523645 A JP 2013523645A JP 2013541179 A JP2013541179 A JP 2013541179A
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- piezoelectric actuator
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- 238000000034 method Methods 0.000 title claims abstract description 34
- 238000005452 bending Methods 0.000 title claims abstract description 22
- 238000001228 spectrum Methods 0.000 claims abstract description 22
- 230000005284 excitation Effects 0.000 claims abstract description 3
- 238000005259 measurement Methods 0.000 claims description 5
- 238000005457 optimization Methods 0.000 description 7
- 238000001453 impedance spectrum Methods 0.000 description 6
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H1/00—Measuring characteristics of vibrations in solids by using direct conduction to the detector
- G01H1/04—Measuring characteristics of vibrations in solids by using direct conduction to the detector of vibrations which are transverse to direction of propagation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R29/00—Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
- G01R29/22—Measuring piezoelectric properties
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/03—Assembling devices that include piezoelectric or electrostrictive parts
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/88—Mounts; Supports; Enclosures; Casings
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Fuel-Injection Apparatus (AREA)
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
Abstract
【選択図】図1
Description
2 保持部
3 長手方向
4 縦振動
5 横振動
6 第1ステップ
7 第2ステップ
8 第3ステップ
9 ステップの反復
10 最適化前のインピーダンス曲線
11 最適化後のインピーダンス曲線
12 並列共振
13 直列共振
Claims (10)
- 圧電アクチュエータの曲げ振動を制御する方法であって,
・縦振動(4)を励起させる為に設けられた圧電アクチュエータ(1)の取り付け状態における小信号スペクトル(10,11)を測定し,
・該小信号スペクトル(10,11)において発生する共振(12,13)に基づいて圧電アクチュエータ(1)内における横振動(5)の励起を検出する方法。 - 請求項1に記載の方法において,
・圧電アクチュエータ(1)を縦振動(4)が励起される長手方向(3)で保持部(2)間に取り付け,
・望ましくない強さの横振動(5)が発生した場合に,圧電アクチュエータ(1)の取り付け状態を変更し,
・小信号スペクトル(10,11)の測定及び取り付けの変更を,小信号スペクトル(10,11)内に共振(12,13)が確認されるまで必要に応じて反復し,横振動(5)が全く励起されないように,又は所定の閾値以下の横振動(5)しか励起されないように制御する方法。 - 請求項2に記載の方法において,
・測定及び取り付けの変更を,小信号スペクトル(10,11)内における共振(12,13)が,常に所定の最小周波数間隔内でしか発生されなくなるまで反復する方法。
- 請求項2又は3に記載の方法において,測定及び取り付けの変更を,小信号スペクトル(10,11)内における共振(12,13)が,常に所定の最小周波数以上しか発生されなくなるまで反復する方法。
- 請求項2〜4の何れか一項に記載の方法において,取り付けの変更の為に,保持部(2)に対する圧電アクチュエータ(1)の取り付け位置及び/又は取り付け角度を変更する方法。
- 請求項2〜5の何れか一項に記載の方法において,取り付けの変更の為に,保持部(2)が圧電アクチュエータ(1)に及ぼす機械的応力を変更する方法。
- 請求項1〜6の何れか一項に記載の方法において,小信号スペクトル(10,11)として,印加される交流電圧の周波数fに対する圧電アクチュエータ(1)のインピーダンス絶対値|z|を測定する方法。
- 請求項7に記載の方法において,圧電アクチュエータ(1)の並列共振(12)及び直列共振(13)を決定する方法。
- 請求項1〜8の何れか一項に記載の方法において,小信号スペクトル(10,11)を電子制御回路により測定及び評価する方法。
- 請求項1〜9の何れか一項に記載の方法において,圧電アクチュエータ(1)を車両用エンジンに組み込み,又は取り付ける方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE201010036257 DE102010036257A1 (de) | 2010-09-03 | 2010-09-03 | Verfahren zur Kontrolle von Biegeschwingungen eines Piezoaktuators |
DE102010036257.3 | 2010-09-03 | ||
PCT/EP2011/065238 WO2012028735A1 (de) | 2010-09-03 | 2011-09-02 | Verfahren zur kontrolle von biegeschwingungen eines piezoaktuators |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013541179A true JP2013541179A (ja) | 2013-11-07 |
JP5663090B2 JP5663090B2 (ja) | 2015-02-04 |
Family
ID=44799991
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013523645A Expired - Fee Related JP5663090B2 (ja) | 2010-09-03 | 2011-09-02 | 圧電アクチュエータの曲げ振動制御方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US9070879B2 (ja) |
EP (1) | EP2612374B1 (ja) |
JP (1) | JP5663090B2 (ja) |
CN (1) | CN103069597B (ja) |
DE (1) | DE102010036257A1 (ja) |
WO (1) | WO2012028735A1 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102010036257A1 (de) * | 2010-09-03 | 2012-03-08 | Epcos Ag | Verfahren zur Kontrolle von Biegeschwingungen eines Piezoaktuators |
JP5507020B2 (ja) * | 2012-04-19 | 2014-05-28 | オリンパスメディカルシステムズ株式会社 | 超音波発生装置の製造方法及び超音波発生装置の組立てシステム |
DE102019119911A1 (de) * | 2019-07-23 | 2021-01-28 | Herrmann Ultraschalltechnik Gmbh & Co. Kg | Verfahren und Generator zur Charakterisierung eines Schwingsystems |
CN110470373A (zh) * | 2019-08-16 | 2019-11-19 | 东南大学 | 一种双向桥梁振动监测装置 |
CN113477495A (zh) * | 2021-06-26 | 2021-10-08 | 西北工业大学 | 一种基于堆栈排列的双频长焦深超声换能器 |
Citations (8)
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US8010A (en) * | 1851-04-01 | Peter mckinlay | ||
DE1115471B (de) * | 1956-06-19 | 1961-10-19 | Gen Electric | Verfahren zur Beobachtung, Messung oder Anzeige eines durch Schwingungen mittels eines piezoelektrischen Materials hervorgerufenen Spannungszustandes |
EP0675365A2 (en) * | 1994-03-31 | 1995-10-04 | Matsushita Electric Industrial Co., Ltd. | Acceleration sensor and method for producing the same |
US6336366B1 (en) * | 1999-09-24 | 2002-01-08 | Ut-Battelle, Llc | Piezoelectrically tunable resonance frequency beam utilizing a stress-sensitive film |
US6953977B2 (en) * | 2000-02-08 | 2005-10-11 | Boston Microsystems, Inc. | Micromechanical piezoelectric device |
WO2005104258A1 (ja) * | 2004-04-27 | 2005-11-03 | Ngk Insulators, Ltd. | 弾性体の検査方法、検査装置、及び寸法予測プログラム |
DE102005053331A1 (de) * | 2005-11-07 | 2007-05-10 | Endress + Hauser Gmbh + Co. Kg | Vorrichtung zur Bestimmung und/oder Überwachung einer Prozessgröße |
DE102009003270A1 (de) * | 2009-05-20 | 2010-11-25 | Robert Bosch Gmbh | Piezoaktor sowie Verfahren zur Anpassung der Resonanzfrequenz eines Piezoaktors |
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US5446306A (en) * | 1993-12-13 | 1995-08-29 | Trw Inc. | Thin film voltage-tuned semiconductor bulk acoustic resonator (SBAR) |
US5929555A (en) * | 1996-04-16 | 1999-07-27 | Matsushita Electric Industrial Co., Ltd. | Piezoelectric resonator and method for fabricating the same |
JP3609927B2 (ja) * | 1997-11-06 | 2005-01-12 | コニカミノルタホールディングス株式会社 | 駆動装置 |
DE19804196A1 (de) | 1998-02-03 | 1999-08-12 | Siemens Ag | Verfahren zur Auswertung von Kennwerten piezo-mechanischer Systeme |
WO2002078165A1 (fr) | 2001-03-27 | 2002-10-03 | Seiko Epson Corporation | Actionneur piezo-electrique et son circuit de commande |
US7119475B2 (en) | 2003-03-31 | 2006-10-10 | Seiko Epson Corporation | Driving method of piezoelectric actuator, driving apparatus of piezoelectric actuator, electronic watch, electronics, control program of piezoelectric actuator, and storage medium |
DE102004016196B4 (de) | 2004-04-01 | 2007-05-31 | Forschungszentrum Karlsruhe Gmbh | Vorrichtung und Verfahren zum intermittierenden Antrieb und Analyse eines elektromechanischen Systems |
CN100521274C (zh) * | 2004-04-27 | 2009-07-29 | 日本碍子株式会社 | 弹性体的检查方法、检查装置以及尺寸预测程序 |
DE102006011725B4 (de) | 2006-03-14 | 2015-05-28 | Continental Automotive Gmbh | Verfahren und Vorrichtung zum Kalibrieren eines Piezo-Aktuators |
US7667369B2 (en) * | 2006-11-01 | 2010-02-23 | Delaware Capital Formation, Inc. | High sensitivity microsensors based on flexure induced frequency effects |
DE102008023372B4 (de) * | 2008-05-13 | 2015-07-16 | Continental Automotive Gmbh | Verfahren und Vorrichtung zum Betreiben einer Stellvorrichtung |
JP5617523B2 (ja) * | 2009-12-08 | 2014-11-05 | 株式会社村田製作所 | 積層型圧電薄膜フィルタの製造方法 |
DE102010036257A1 (de) * | 2010-09-03 | 2012-03-08 | Epcos Ag | Verfahren zur Kontrolle von Biegeschwingungen eines Piezoaktuators |
-
2010
- 2010-09-03 DE DE201010036257 patent/DE102010036257A1/de not_active Withdrawn
-
2011
- 2011-09-02 EP EP20110769798 patent/EP2612374B1/de not_active Not-in-force
- 2011-09-02 JP JP2013523645A patent/JP5663090B2/ja not_active Expired - Fee Related
- 2011-09-02 CN CN201180042340.5A patent/CN103069597B/zh not_active Expired - Fee Related
- 2011-09-02 WO PCT/EP2011/065238 patent/WO2012028735A1/de active Application Filing
- 2011-09-02 US US13/813,341 patent/US9070879B2/en not_active Expired - Fee Related
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
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US8010A (en) * | 1851-04-01 | Peter mckinlay | ||
DE1115471B (de) * | 1956-06-19 | 1961-10-19 | Gen Electric | Verfahren zur Beobachtung, Messung oder Anzeige eines durch Schwingungen mittels eines piezoelektrischen Materials hervorgerufenen Spannungszustandes |
EP0675365A2 (en) * | 1994-03-31 | 1995-10-04 | Matsushita Electric Industrial Co., Ltd. | Acceleration sensor and method for producing the same |
EP0675365B1 (en) * | 1994-03-31 | 2001-11-07 | Matsushita Electric Industrial Co., Ltd. | Acceleration sensor and method for producing the same |
US6336366B1 (en) * | 1999-09-24 | 2002-01-08 | Ut-Battelle, Llc | Piezoelectrically tunable resonance frequency beam utilizing a stress-sensitive film |
US6953977B2 (en) * | 2000-02-08 | 2005-10-11 | Boston Microsystems, Inc. | Micromechanical piezoelectric device |
WO2005104258A1 (ja) * | 2004-04-27 | 2005-11-03 | Ngk Insulators, Ltd. | 弾性体の検査方法、検査装置、及び寸法予測プログラム |
DE102005053331A1 (de) * | 2005-11-07 | 2007-05-10 | Endress + Hauser Gmbh + Co. Kg | Vorrichtung zur Bestimmung und/oder Überwachung einer Prozessgröße |
DE102009003270A1 (de) * | 2009-05-20 | 2010-11-25 | Robert Bosch Gmbh | Piezoaktor sowie Verfahren zur Anpassung der Resonanzfrequenz eines Piezoaktors |
Also Published As
Publication number | Publication date |
---|---|
WO2012028735A1 (de) | 2012-03-08 |
JP5663090B2 (ja) | 2015-02-04 |
US20130212848A1 (en) | 2013-08-22 |
CN103069597A (zh) | 2013-04-24 |
CN103069597B (zh) | 2015-04-08 |
US9070879B2 (en) | 2015-06-30 |
EP2612374B1 (de) | 2015-03-25 |
DE102010036257A1 (de) | 2012-03-08 |
EP2612374A1 (de) | 2013-07-10 |
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