JP5617523B2 - 積層型圧電薄膜フィルタの製造方法 - Google Patents
積層型圧電薄膜フィルタの製造方法 Download PDFInfo
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Description
また、本発明に係る積層型圧電薄膜フィルタの製造方法は、前記検査用下部圧電薄膜共振子または前記検査用上部圧電薄膜共振子の膜厚を測定して、前記膜厚を参照して前記下部圧電薄膜共振子、前記上部圧電薄膜共振子、または前記積層型圧電薄膜フィルタの周波数を調整することが好ましい。
(実施形態1)
図1に、本発明に係る製造方法で作製された積層型圧電薄膜フィルタの断面図を示す。
(実施形態2)
実施形態2は、実施形態1のように上部圧電薄膜共振子の周波数を参照して周波数を調整する代わりに、積層型圧電薄膜フィルタの周波数を参照して周波数を調整する例である。
(実施形態3)
図6は、下部圧電薄膜共振子の周波数を参照して周波数を調整する工程において、下部圧電薄膜共振子20上に調整層37を設けて、調整層37の膜厚を増減させて周波数を調整する例である。新たに調整層を設けた場合には周波数の精密な調整が可能である。
図7は、音響結合層を形成する工程において、音響結合層の膜厚を増減させて下部圧電薄膜共振子20の周波数を調整する例である。図のように、音響結合層の一部を形成した後に、音響結合層31の膜厚を増減させて下部圧電薄膜共振子20の周波数を調整することもできる。この場合、周波数を調整するための新たな膜を形成する必要がない。なお、音響結合層の全体を形成した後に、音響結合層の膜厚を増減させても良い。
実施形態5は、検査用積層型圧電薄膜フィルタを作製し、検査用下部圧電薄膜共振子と検査用上部圧電薄膜共振子の周波数を参照して、下部圧電薄膜共振子と上部圧電薄膜共振子の周波数を調整する例である。
実施形態6は、実施形態5のように検査用上部圧電薄膜共振子の周波数を参照して周波数を調整する代わりに、検査用積層型圧電薄膜フィルタの周波数を参照して、積層型圧電薄膜フィルタと検査用積層型圧電薄膜フィルタの周波数を調整する例である。
また、実施形態1〜6は音響反射層10が設けられている例である。図1(B)のように、下部圧電薄膜共振子20の下が空隙になっている場合においても、本発明を適用することができる。
下記の積層型圧電薄膜フィルタを作製した。
5 検査用積層型圧電薄膜フィルタ
7 基板
10 音響反射層
15 検査用音響反射層
20 下部圧電薄膜共振子
21 電極
22 下部圧電層
23 電極
25 検査用下部圧電薄膜共振子
30、31 音響結合層
35 検査用音響結合層
37 調整層
40 上部圧電薄膜共振子
41 電極
42 上部圧電層
43 電極
45 検査用上部圧電薄膜共振子
51 アンテナ
52 バランスデュプレクサ
53 受信用アンプ
54 受信用ミキサ
55 送信用アンプ
56 送信用フィルタ
57 送信用ミキサ
58 デュプレクサ
59 受信用バランスフィルタ
101、102、103、104、105、106 電極
107、108 圧電層
111 基板
112 音響反射層
113 音響結合層
121、122、123、124 圧電薄膜共振子
Claims (16)
- 下部圧電薄膜共振子と、前記下部圧電薄膜共振子上に形成される音響結合層と、前記音響結合層上に形成される上部圧電薄膜共振子と、を備える積層型圧電薄膜フィルタの製造方法であって、
基板上に、下部圧電薄膜共振子を形成する工程と、
前記下部圧電薄膜共振子の周波数を参照して周波数を調整する工程と、
前記周波数を調整した下部圧電薄膜共振子上に音響結合層を形成する工程と、
前記音響結合層上に上部圧電薄膜共振子を形成して積層型圧電薄膜フィルタを形成する工程と、
前記上部圧電薄膜共振子の周波数を参照して周波数を調整する工程と、
を備える、積層型圧電薄膜フィルタの製造方法。 - 前記上部圧電薄膜共振子の周波数を参照して周波数を調整する工程において、前記上部圧電薄膜共振子の周波数を測定し、その後に周波数を調整する、請求項1に記載の積層型圧電薄膜フィルタの製造方法。
- 前記上部圧電薄膜共振子の周波数を参照して周波数を調整する工程において、前記上部圧電薄膜共振子の周波数を測定しながら周波数を調整する、請求項1に記載の積層型圧電薄膜フィルタの製造方法。
- 前記上部圧電薄膜共振子の周波数を参照して周波数を調整する工程において、前記上部圧電薄膜共振子の電極の膜厚を増減させて周波数を調整する、請求項1〜3のいずれか1項に記載の積層型圧電薄膜フィルタの製造方法。
- 下部圧電薄膜共振子と、前記下部圧電薄膜共振子上に形成される音響結合層と、前記音響結合層上に形成される上部圧電薄膜共振子と、を備える積層型圧電薄膜フィルタの製造方法であって、
基板上に、下部圧電薄膜共振子を形成する工程と、
前記下部圧電薄膜共振子の周波数を参照して周波数を調整する工程と、
前記周波数を調整した下部圧電薄膜共振子上に音響結合層を形成する工程と、
前記音響結合層上に上部圧電薄膜共振子を形成して積層型圧電薄膜フィルタを形成する工程と、
前記積層型圧電薄膜フィルタの周波数を参照して周波数を調整する工程と、
を備える、積層型圧電薄膜フィルタの製造方法。 - 前記積層型圧電薄膜フィルタの周波数を参照して周波数を調整する工程において、前記積層型圧電薄膜フィルタの周波数を測定し、その後に周波数を調整する、請求項5に記載の積層型圧電薄膜フィルタの製造方法。
- 前記積層型圧電薄膜フィルタの周波数を参照して周波数を調整する工程において、前記積層型圧電薄膜フィルタの周波数を測定しながら周波数を調整する、請求項5に記載の積層型圧電薄膜フィルタの製造方法。
- 前記積層型圧電薄膜フィルタの周波数を参照して周波数を調整する工程において、前記上部圧電薄膜共振子の電極の膜厚を増減させて周波数を調整する、請求項5〜7のいずれか1項に記載の積層型圧電薄膜フィルタの製造方法。
- 前記下部圧電薄膜共振子の周波数を参照して周波数を調整する工程において、前記下部圧電薄膜共振子の周波数を測定し、その後に周波数を調整する、請求項1〜8のいずれか1項に記載の積層型圧電薄膜フィルタの製造方法。
- 前記下部圧電薄膜共振子の周波数を参照して周波数を調整する工程において、前記下部圧電薄膜共振子の周波数を測定しながら周波数を調整する、請求項1〜8のいずれか1項に記載の積層型圧電薄膜フィルタの製造方法。
- 前記下部圧電薄膜共振子の周波数を参照して周波数を調整する工程において、前記下部圧電薄膜共振子の電極の膜厚を増減させて周波数を調整する、請求項1〜10のいずれか1項に記載の積層型圧電薄膜フィルタの製造方法。
- 前記下部圧電薄膜共振子の周波数を参照して周波数を調整する工程において、前記下部圧電薄膜共振子上に調整層を設けて、前記調整層の膜厚を増減させて周波数を調整する、
請求項1〜10のいずれか1項に記載の積層型圧電薄膜フィルタの製造方法。 - 前記音響結合層を形成する工程において、前記音響結合層の膜厚を増減させて前記下部圧電薄膜共振子の周波数を調整する、請求項1〜10のいずれか1項に記載の積層型圧電薄膜フィルタの製造方法。
- 下部圧電薄膜共振子と、前記下部圧電薄膜共振子上に形成される音響結合層と、前記音響結合層上に形成される上部圧電薄膜共振子と、を備える積層型圧電薄膜フィルタの製造方法であって、
基板上に、下部圧電薄膜共振子と検査用下部圧電薄膜共振子を形成する工程と、
前記検査用下部圧電薄膜共振子の周波数を参照して、前記下部圧電薄膜共振子と前記検査用下部圧電薄膜共振子の周波数を調整する工程と、
前記周波数を調整した下部圧電薄膜共振子上と検査用下部圧電薄膜共振子上にそれぞれ音響結合層と検査用音響結合層を形成する工程と、
前記音響結合層上と前記検査用音響結合層上にそれぞれ上部圧電薄膜共振子と検査用上部圧電薄膜共振子を形成して、積層型圧電薄膜フィルタと検査用積層型圧電薄膜フィルタを形成する工程と、
前記検査用上部圧電薄膜共振子の周波数を参照して、前記上部圧電薄膜共振子と前記検査用上部圧電薄膜共振子の周波数を調整する工程と、
を備える、積層型圧電薄膜フィルタの製造方法。 - 下部圧電薄膜共振子と、前記下部圧電薄膜共振子上に形成される音響結合層と、前記音響結合層上に形成される上部圧電薄膜共振子と、を備える積層型圧電薄膜フィルタの製造方法であって、
基板上に、下部圧電薄膜共振子と検査用下部圧電薄膜共振子を形成する工程と、
前記検査用下部圧電薄膜共振子の周波数を参照して、前記下部圧電薄膜共振子と前記検査用下部圧電薄膜共振子の周波数を調整する工程と、
前記周波数を調整した下部圧電薄膜共振子上と検査用下部圧電薄膜共振子上にそれぞれ音響結合層と検査用音響結合層を形成する工程と、
前記音響結合層上と前記検査用音響結合層上にそれぞれ上部圧電薄膜共振子と検査用上部圧電薄膜共振子を形成して、積層型圧電薄膜フィルタと検査用積層型圧電薄膜フィルタを形成する工程と、
前記検査用積層型圧電薄膜フィルタの周波数を参照して、前記積層型圧電薄膜フィルタと前記検査用積層型圧電薄膜フィルタの周波数を調整する工程と、
を備える、積層型圧電薄膜フィルタの製造方法。 - 前記検査用下部圧電薄膜共振子または前記検査用上部圧電薄膜共振子の膜厚を測定して、前記膜厚を参照して前記下部圧電薄膜共振子、前記上部圧電薄膜共振子、または前記積層型圧電薄膜フィルタの周波数を調整する、請求項14または15に記載の積層型圧電薄膜フィルタの製造方法。
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