JP2013251556A - 化合物半導体の熱処理方法及びその装置 - Google Patents
化合物半導体の熱処理方法及びその装置 Download PDFInfo
- Publication number
- JP2013251556A JP2013251556A JP2013145718A JP2013145718A JP2013251556A JP 2013251556 A JP2013251556 A JP 2013251556A JP 2013145718 A JP2013145718 A JP 2013145718A JP 2013145718 A JP2013145718 A JP 2013145718A JP 2013251556 A JP2013251556 A JP 2013251556A
- Authority
- JP
- Japan
- Prior art keywords
- compound semiconductor
- heat treatment
- processed
- treatment method
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 157
- 150000001875 compounds Chemical class 0.000 title claims abstract description 109
- 238000010438 heat treatment Methods 0.000 title claims abstract description 74
- 238000000034 method Methods 0.000 title claims abstract description 37
- 230000001678 irradiating effect Effects 0.000 claims abstract description 9
- 238000012545 processing Methods 0.000 claims description 43
- 239000000758 substrate Substances 0.000 claims description 35
- 239000010409 thin film Substances 0.000 claims description 31
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 16
- 230000008569 process Effects 0.000 claims description 15
- 239000010408 film Substances 0.000 claims description 14
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 claims description 11
- 229910003465 moissanite Inorganic materials 0.000 claims description 9
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 9
- 229910002601 GaN Inorganic materials 0.000 claims description 8
- 238000000137 annealing Methods 0.000 claims description 8
- 238000011282 treatment Methods 0.000 claims description 6
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 4
- 229910017083 AlN Inorganic materials 0.000 claims description 4
- -1 InN Inorganic materials 0.000 claims description 4
- SBIBMFFZSBJNJF-UHFFFAOYSA-N selenium;zinc Chemical compound [Se]=[Zn] SBIBMFFZSBJNJF-UHFFFAOYSA-N 0.000 claims description 4
- 230000007547 defect Effects 0.000 abstract description 10
- 239000013078 crystal Substances 0.000 abstract description 9
- 230000003247 decreasing effect Effects 0.000 abstract description 3
- 239000007789 gas Substances 0.000 description 36
- 238000006243 chemical reaction Methods 0.000 description 23
- 239000000463 material Substances 0.000 description 21
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 16
- 229910052710 silicon Inorganic materials 0.000 description 15
- 239000010703 silicon Substances 0.000 description 15
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 14
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 9
- 238000002844 melting Methods 0.000 description 8
- 230000008018 melting Effects 0.000 description 8
- 230000005855 radiation Effects 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 238000009792 diffusion process Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 229910052732 germanium Inorganic materials 0.000 description 4
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- 235000019441 ethanol Nutrition 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 239000002826 coolant Substances 0.000 description 2
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 238000002248 hydride vapour-phase epitaxy Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 238000001451 molecular beam epitaxy Methods 0.000 description 2
- 239000013307 optical fiber Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 230000002269 spontaneous effect Effects 0.000 description 2
- 229910052714 tellurium Inorganic materials 0.000 description 2
- PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910002665 PbTe Inorganic materials 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- XOYLJNJLGBYDTH-UHFFFAOYSA-M chlorogallium Chemical compound [Ga]Cl XOYLJNJLGBYDTH-UHFFFAOYSA-M 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000004590 computer program Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- 150000003377 silicon compounds Chemical class 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- OCGWQDWYSQAFTO-UHFFFAOYSA-N tellanylidenelead Chemical compound [Pb]=[Te] OCGWQDWYSQAFTO-UHFFFAOYSA-N 0.000 description 1
- 238000002230 thermal chemical vapour deposition Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000000927 vapour-phase epitaxy Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67115—Apparatus for thermal treatment mainly by radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/8252—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using III-V technology
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/8258—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using a combination of technologies covered by H01L21/8206, H01L21/8213, H01L21/822, H01L21/8252, H01L21/8254 or H01L21/8256
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
- H01L27/0605—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits made of compound material, e.g. AIIIBV
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66234—Bipolar junction transistors [BJT]
- H01L29/6631—Bipolar junction transistors [BJT] with an active layer made of a group 13/15 material
- H01L29/66318—Heterojunction transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66446—Unipolar field-effect transistors with an active layer made of a group 13/15 material, e.g. group 13/15 velocity modulation transistor [VMT], group 13/15 negative resistance FET [NERFET]
- H01L29/66462—Unipolar field-effect transistors with an active layer made of a group 13/15 material, e.g. group 13/15 velocity modulation transistor [VMT], group 13/15 negative resistance FET [NERFET] with a heterojunction interface channel or gate, e.g. HFET, HIGFET, SISFET, HJFET, HEMT
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66848—Unipolar field-effect transistors with a Schottky gate, i.e. MESFET
- H01L29/66856—Unipolar field-effect transistors with a Schottky gate, i.e. MESFET with an active layer made of a group 13/15 material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02656—Special treatments
- H01L21/02664—Aftertreatments
- H01L21/02694—Controlling the interface between substrate and epitaxial layer, e.g. by ion implantation followed by annealing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1025—Channel region of field-effect devices
- H01L29/1029—Channel region of field-effect devices of field-effect transistors
- H01L29/1033—Channel region of field-effect devices of field-effect transistors with insulated gate, e.g. characterised by the length, the width, the geometric contour or the doping structure
- H01L29/1054—Channel region of field-effect devices of field-effect transistors with insulated gate, e.g. characterised by the length, the width, the geometric contour or the doping structure with a variation of the composition, e.g. channel with strained layer for increasing the mobility
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/51—Insulating materials associated therewith
- H01L29/517—Insulating materials associated therewith the insulating material comprising a metallic compound, e.g. metal oxide, metal silicate
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Chemical Vapour Deposition (AREA)
- Recrystallisation Techniques (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Abstract
【解決手段】被処理体Wの表面に電磁波を照射することにより化合物半導体に関する熱処理を施すようにする。これにより、化合物半導体を用いた半導体デバイスにおける界面準位や結晶欠陥等を低減することができる。
【選択図】 図1
Description
この場合、半導体としては、コスト面、製造加工等の容易性等を考慮して、一般的にはシリコンが特に用いられている。例えば半導体デバイスを製造するために、シリコン基板上に、シリコン酸化物、シリコン窒化物、金属シリサイド等のシリコン化合物が主に形成されており、また、これらと金属膜を組み合わせたMOSFET等も製造されている。
このように、被処理体の表面に電磁波を照射することにより化合物半導体に関する熱処理を施すようにしたので、化合物半導体を用いた半導体デバイスにおける界面準位や結晶欠陥等を低減することができる。
また例えば請求項3に記載したように、前記化合物半導体の薄膜は、SiC、GaAs、InGaAs、GaN、InN、AlN、BN、InP、ZnO、ZnSeよりなる群より選択される1の薄膜である。
また例えば請求項4に記載したように、前記熱処理は、前記被処理体に形成されている化合物半導体よりなる薄膜のアニール処理である。
また例えば請求項5に記載したように、前記被処理体は、単体の半導体基板よりなる。
また例えば請求項7に記載したように、前記化合物半導体は、GaAs、InGaAs、Al2 O3 、SiC、GaN、AlN、ZnOよりなる群より選択される1の基板である。
また例えば請求項8に記載したように、前記電磁波の周波数は、100Hz〜10THzの範囲内である。
被処理体の表面に電磁波を照射することにより化合物半導体に関する熱処理を施すようにしたので、化合物半導体を用いた半導体デバイスにおける界面準位や結晶欠陥等を低減することができる。
図1は本発明の熱処理装置の第1実施例を示す断面構成図、図2は熱電変換素子の配列状態を示す平面図である。
次に本発明に係る熱処理装置の第2実施例について説明する。図6は本発明の熱処理装置の第2実施例を示す断面構成図である。尚、図1中に示す構成部分と同一構成部分については同一参照符号を付して、その説明を省略する。
次に本発明に係る熱処理装置の第3実施例について説明する。図7は本発明の熱処理装置の第3実施例を示す断面構成図である。尚、図1中に示す構成部分と同一構成部分については同一参照符号を付して、その説明を省略する。
また、化合物半導体としては、GaAs、InGaAs、Al2 O3 、SiC、GaN、AlN、ZnOよりなる群より選択される1の基板を用いることができる。
更に、ここで形成される化合物半導体の薄膜としては、SiC、GaAs、InGaAs、GaN、InN、AlN、BN、InP、ZnO、ZnSeよりなる群より選択される1の薄膜を用いることができる。
また、ここでは被処理体として半導体ウェーハを例にとって説明したが、これに限定されず、ガラス基板、LCD基板、セラミック基板等にも本発明を適用することができる。
4 処理容器
14 ガス導入手段
24 排気系
28 載置台
32 温調手段(熱電変換素子)
56 電磁波供給手段
58 平面アンテナ部材
66 同軸導波管
72 導波管
74,90,100 電磁波発生源
78 制御手段
80 記憶媒体
92 導波路
94 入射アンテナ部
104 高周波ケーブル
W 半導体ウェーハ(被処理体)
このように、被処理体の表面に電磁波を照射することにより化合物半導体に関する熱処理を施すようにしたので、化合物半導体を用いた半導体デバイスにおける界面準位や結晶欠陥等を低減することができる。
また例えば請求項3に記載したように、前記化合物半導体の薄膜は、SiC、GaAs、InGaAs、GaN、InN、AlN、BN、InP、ZnO、ZnSeよりなる群より選択される1の薄膜である。
また例えば請求項4に記載したように、前記熱処理は、前記被処理体に形成されている化合物半導体よりなる薄膜のアニール処理である。
また例えば前記化合物半導体は、GaAs、InGaAs、Al2 O3 、SiC、GaN、AlN、ZnOよりなる群より選択される1の基板である。
また例えば請求項5に記載したように、前記電磁波の周波数は、100Hz〜10THzの範囲内である。
また例えば請求項6に記載したように、前記半導体基板は、シリコン或いはゲルマニウムよりなる。
また、例えば請求項9に記載したように、前記半導体基板は、シリコン或いはゲルマニウムよりなる。
Claims (11)
- 被処理体の表面に電磁波を照射することにより化合物半導体に関する熱処理を施すようにしたことを特徴とする化合物半導体の熱処理方法。
- 前記熱処理は、前記化合物半導体の薄膜を形成するための成膜処理であることを特徴とする請求項1記載の化合物半導体の熱処理方法。
- 前記化合物半導体の薄膜は、SiC、GaAs、InGaAs、GaN、InN、AlN、BN、InP、ZnO、ZnSeよりなる群より選択される1の薄膜であることを特徴とする請求項1又は2記載の化合物半導体の熱処理方法。
- 前記熱処理は、前記被処理体に形成されている化合物半導体よりなる薄膜のアニール処理であることを特徴とする請求項1記載の化合物半導体の熱処理方法。
- 前記被処理体は、単体の半導体基板よりなることを特徴とする請求項4記載の化合物半導体の熱処理方法。
- 前記被処理体は、化合物半導体基板よりなることを特徴とする請求項1乃至4のいずれかに記載の化合物半導体の熱処理方法。
- 前記化合物半導体は、GaAs、InGaAs、Al2 O3 、SiC、GaN、AlN、ZnOよりなる群より選択される1の基板であることを特徴とする請求項6記載の化合物半導体の熱処理方法。
- 前記電磁波の周波数は、100Hz〜10THzの範囲内であることを特徴とする請求項1乃至7のいずれかに記載の化合物半導体の熱処理方法。
- 被処理体に対して電磁波を用いて化合物半導体に関する熱処理を施す熱処理装置において、
真空排気可能になされた処理容器と、
前記被処理体を載置する載置台と、
前記化合物半導体に対する熱処理に必要なガスを供給するガス導入手段と、
前記処理容器内へ電磁波を導入する電磁波供給手段と、
請求項1乃至8のいずれかに記載の熱処理方法を実行するように制御する制御手段と、
を備えたことを特徴とする化合物半導体の熱処理装置。 - 前記被処理体を所定の温度に維持する温調手段を有していることを特徴とする請求項9記載の化合物半導体の熱処理装置。
- 真空排気可能になされた処理容器と、
被処理体を載置する載置台と、
前記化合物半導体に対する熱処理に必要なガスを供給するガス導入手段と、
前記処理容器内へ電磁波を導入する電磁波供給手段と、
装置全体を制御する制御手段と、を備えた熱処理装置を用いて前記被処理体に対して電磁波を用いて化合物半導体に対する熱処理を施すに際して、
請求項1乃至8のいずれかに記載の熱処理方法を実行するように前記熱処理装置を制御するコンピュータ読み取り可能なプログラムを記憶する記憶媒体。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013145718A JP2013251556A (ja) | 2007-05-08 | 2013-07-11 | 化合物半導体の熱処理方法及びその装置 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007123991 | 2007-05-08 | ||
JP2007123991 | 2007-05-08 | ||
JP2013145718A JP2013251556A (ja) | 2007-05-08 | 2013-07-11 | 化合物半導体の熱処理方法及びその装置 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008121733A Division JP2008306176A (ja) | 2007-05-08 | 2008-05-08 | 化合物半導体の熱処理方法及びその装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2013251556A true JP2013251556A (ja) | 2013-12-12 |
Family
ID=40002222
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008121733A Pending JP2008306176A (ja) | 2007-05-08 | 2008-05-08 | 化合物半導体の熱処理方法及びその装置 |
JP2013145718A Pending JP2013251556A (ja) | 2007-05-08 | 2013-07-11 | 化合物半導体の熱処理方法及びその装置 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008121733A Pending JP2008306176A (ja) | 2007-05-08 | 2008-05-08 | 化合物半導体の熱処理方法及びその装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US20100055881A1 (ja) |
JP (2) | JP2008306176A (ja) |
WO (1) | WO2008140022A1 (ja) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009177149A (ja) * | 2007-12-26 | 2009-08-06 | Konica Minolta Holdings Inc | 金属酸化物半導体とその製造方法および薄膜トランジスタ |
WO2011007682A1 (en) * | 2009-07-17 | 2011-01-20 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing semiconductor device |
US8637794B2 (en) * | 2009-10-21 | 2014-01-28 | Lam Research Corporation | Heating plate with planar heating zones for semiconductor processing |
JP5478280B2 (ja) * | 2010-01-27 | 2014-04-23 | 東京エレクトロン株式会社 | 基板加熱装置および基板加熱方法、ならびに基板処理システム |
JP5820661B2 (ja) * | 2010-09-14 | 2015-11-24 | 東京エレクトロン株式会社 | マイクロ波照射装置 |
JP2012104703A (ja) * | 2010-11-11 | 2012-05-31 | Hitachi Kokusai Electric Inc | 半導体装置の製造方法および基板処理装置 |
US8791392B2 (en) | 2010-10-22 | 2014-07-29 | Lam Research Corporation | Methods of fault detection for multiplexed heater array |
US8546732B2 (en) * | 2010-11-10 | 2013-10-01 | Lam Research Corporation | Heating plate with planar heater zones for semiconductor processing |
JP5214774B2 (ja) | 2010-11-19 | 2013-06-19 | 株式会社日立国際電気 | 基板処理装置及び半導体装置の製造方法 |
JP6019599B2 (ja) * | 2011-03-31 | 2016-11-02 | ソニー株式会社 | 半導体装置、および、その製造方法 |
US8610172B2 (en) * | 2011-12-15 | 2013-12-17 | International Business Machines Corporation | FETs with hybrid channel materials |
JP5738814B2 (ja) * | 2012-09-12 | 2015-06-24 | 株式会社東芝 | マイクロ波アニール装置及び半導体装置の製造方法 |
JP2014192372A (ja) * | 2013-03-27 | 2014-10-06 | Tokyo Electron Ltd | マイクロ波加熱処理装置 |
US10039157B2 (en) * | 2014-06-02 | 2018-07-31 | Applied Materials, Inc. | Workpiece processing chamber having a rotary microwave plasma source |
JP6428789B2 (ja) * | 2014-06-24 | 2018-11-28 | インテル・コーポレーション | 集積回路、相補型金属酸化膜半導体(cmos)デバイス、コンピューティングシステム、および方法 |
US11621168B1 (en) | 2022-07-12 | 2023-04-04 | Gyrotron Technology, Inc. | Method and system for doping semiconductor materials |
Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6272109A (ja) * | 1985-09-25 | 1987-04-02 | Sharp Corp | 化合物半導体装置の製造方法 |
JPS62118521A (ja) * | 1985-11-18 | 1987-05-29 | Semiconductor Energy Lab Co Ltd | 半導体被膜作製方法 |
JPH025293B2 (ja) * | 1981-08-25 | 1990-02-01 | Fujitsu Ltd | |
JPH10214785A (ja) * | 1997-01-30 | 1998-08-11 | Jiyuu Denshi Laser Kenkyusho:Kk | 半導体薄膜及びその製膜方法 |
JPH11224861A (ja) * | 1997-11-28 | 1999-08-17 | Matsushita Electric Ind Co Ltd | 半導体不純物の活性化方法、および活性化装置 |
JP2000058919A (ja) * | 1998-08-13 | 2000-02-25 | Toshiba Corp | 半導体素子及びその製造方法 |
JP2001338894A (ja) * | 2000-05-26 | 2001-12-07 | Matsushita Electric Ind Co Ltd | 固体試料のアニール方法および半導体不純物ドーピング層形成方法 |
JP2002093735A (ja) * | 2000-09-13 | 2002-03-29 | Sony Corp | 半導体装置の製造方法 |
JP2002246322A (ja) * | 2001-02-21 | 2002-08-30 | Nichia Chem Ind Ltd | 窒化物半導体基板及びその成長方法 |
JP2002363759A (ja) * | 2001-06-12 | 2002-12-18 | Tokyo Electron Ltd | プラズマ処理装置、プラズマ処理方法及び微量ガスの導入時期検出方法 |
JP2003060193A (ja) * | 2001-06-04 | 2003-02-28 | Matsushita Electric Ind Co Ltd | 半導体装置およびその製造方法 |
JP2005142234A (ja) * | 2003-11-04 | 2005-06-02 | Canon Inc | 処理装置及び方法 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2587623B2 (ja) * | 1986-11-22 | 1997-03-05 | 新技術事業団 | 化合物半導体のエピタキシヤル結晶成長方法 |
JPS63164527A (ja) * | 1986-12-25 | 1988-07-07 | Matsushita Electric Ind Co Ltd | 化合物半導体集積回路 |
JPS63173321A (ja) * | 1987-01-13 | 1988-07-16 | Nec Corp | 化合物半導体装置の製造方法 |
JPH0337186A (ja) * | 1989-06-30 | 1991-02-18 | Toshiba Corp | 化合物半導体薄膜の形成方法 |
JP3077781B2 (ja) * | 1992-12-10 | 2000-08-14 | 日亜化学工業株式会社 | 窒化インジウムガリウムの成長方法 |
TW455599B (en) * | 1995-04-25 | 2001-09-21 | Hitachi Ltd | Fluorine-containing silicon network polymer, its use as insulating coating, and electronic devices using which |
JP3438124B2 (ja) * | 1996-10-30 | 2003-08-18 | 富士通株式会社 | 半導体装置 |
TW449931B (en) * | 2000-01-27 | 2001-08-11 | United Epitaxy Co Ltd | Manufacturing method of P-type semiconductor with a low resistance coefficient |
TW478179B (en) * | 2000-03-27 | 2002-03-01 | Tohoku Techno Arch Co Ltd | Method of manufacturing zinc oxide semiconductor material |
JP4581198B2 (ja) * | 2000-08-10 | 2010-11-17 | ソニー株式会社 | 窒化物化合物半導体層の熱処理方法及び半導体素子の製造方法 |
JP2004288898A (ja) * | 2003-03-24 | 2004-10-14 | Canon Inc | 太陽電池モジュールの製造方法 |
JP5055756B2 (ja) * | 2005-09-21 | 2012-10-24 | 東京エレクトロン株式会社 | 熱処理装置及び記憶媒体 |
-
2008
- 2008-05-08 WO PCT/JP2008/058566 patent/WO2008140022A1/ja active Application Filing
- 2008-05-08 JP JP2008121733A patent/JP2008306176A/ja active Pending
-
2009
- 2009-11-06 US US12/614,168 patent/US20100055881A1/en not_active Abandoned
-
2013
- 2013-07-11 JP JP2013145718A patent/JP2013251556A/ja active Pending
Patent Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH025293B2 (ja) * | 1981-08-25 | 1990-02-01 | Fujitsu Ltd | |
JPS6272109A (ja) * | 1985-09-25 | 1987-04-02 | Sharp Corp | 化合物半導体装置の製造方法 |
JPS62118521A (ja) * | 1985-11-18 | 1987-05-29 | Semiconductor Energy Lab Co Ltd | 半導体被膜作製方法 |
JPH10214785A (ja) * | 1997-01-30 | 1998-08-11 | Jiyuu Denshi Laser Kenkyusho:Kk | 半導体薄膜及びその製膜方法 |
JPH11224861A (ja) * | 1997-11-28 | 1999-08-17 | Matsushita Electric Ind Co Ltd | 半導体不純物の活性化方法、および活性化装置 |
JP2000058919A (ja) * | 1998-08-13 | 2000-02-25 | Toshiba Corp | 半導体素子及びその製造方法 |
JP2001338894A (ja) * | 2000-05-26 | 2001-12-07 | Matsushita Electric Ind Co Ltd | 固体試料のアニール方法および半導体不純物ドーピング層形成方法 |
JP2002093735A (ja) * | 2000-09-13 | 2002-03-29 | Sony Corp | 半導体装置の製造方法 |
JP2002246322A (ja) * | 2001-02-21 | 2002-08-30 | Nichia Chem Ind Ltd | 窒化物半導体基板及びその成長方法 |
JP2003060193A (ja) * | 2001-06-04 | 2003-02-28 | Matsushita Electric Ind Co Ltd | 半導体装置およびその製造方法 |
JP2002363759A (ja) * | 2001-06-12 | 2002-12-18 | Tokyo Electron Ltd | プラズマ処理装置、プラズマ処理方法及び微量ガスの導入時期検出方法 |
JP2005142234A (ja) * | 2003-11-04 | 2005-06-02 | Canon Inc | 処理装置及び方法 |
Also Published As
Publication number | Publication date |
---|---|
US20100055881A1 (en) | 2010-03-04 |
JP2008306176A (ja) | 2008-12-18 |
WO2008140022A1 (ja) | 2008-11-20 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP2013251556A (ja) | 化合物半導体の熱処理方法及びその装置 | |
TWI478224B (zh) | 基板處理裝置及半導體裝置之製造方法 | |
US20120071005A1 (en) | Heat treating apparatus, heat treating method and storage medium | |
KR100927913B1 (ko) | 기판 탑재 기구 및 기판 처리 장치 | |
KR100920280B1 (ko) | 처리 장치 | |
JP4280686B2 (ja) | 処理方法 | |
KR101244590B1 (ko) | 플라즈마 cvd 방법, 질화 규소막의 형성 방법 및 반도체 장치의 제조 방법 | |
US20060110934A1 (en) | Method and apparatus for forming insulating film | |
JPH08250488A (ja) | プラズマ処理装置及びその方法 | |
WO2010061619A1 (ja) | 半導体基板の製造方法、半導体基板、電子デバイスの製造方法、および反応装置 | |
US6729261B2 (en) | Plasma processing apparatus | |
KR20170042315A (ko) | 기판 처리 방법 | |
WO2018163386A1 (ja) | 基板処理装置、半導体装置の製造方法およびプログラム | |
US8513578B2 (en) | Electromagnetic wave processing apparatus | |
KR20180052082A (ko) | 마이크로파 플라즈마원 및 마이크로파 플라즈마 처리 장치 | |
JP3204836B2 (ja) | プラズマ処理方法およびプラズマ処理装置 | |
KR101255905B1 (ko) | 실리콘 산화막의 형성 방법 및 장치 | |
US20140038430A1 (en) | Method for processing object | |
KR101207696B1 (ko) | 탑재대 구조 및 이것을 이용한 처리 장치 | |
JP2008243965A (ja) | 半導体処理装置および半導体処理方法 | |
JP2007059782A (ja) | スペーサー部材およびプラズマ処理装置 | |
JP3258441B2 (ja) | マイクロ波プラズマ処理装置およびマイクロ波プラズマ処理方法 | |
WO2022163357A1 (ja) | 成膜方法および成膜装置 | |
TW202401524A (zh) | 成膜裝置 | |
JP2013047388A (ja) | 微結晶シリコン膜形成方法、微結晶シリコン膜成膜装置および表示装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20140408 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20140513 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20140606 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20150127 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20160112 |