JP2013228331A - 回転角検出装置 - Google Patents
回転角検出装置 Download PDFInfo
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- JP2013228331A JP2013228331A JP2012101786A JP2012101786A JP2013228331A JP 2013228331 A JP2013228331 A JP 2013228331A JP 2012101786 A JP2012101786 A JP 2012101786A JP 2012101786 A JP2012101786 A JP 2012101786A JP 2013228331 A JP2013228331 A JP 2013228331A
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- pattern
- detection pattern
- angle detection
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- condenser lens
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- 238000001514 detection method Methods 0.000 title claims abstract description 131
- 238000006073 displacement reaction Methods 0.000 claims abstract description 8
- 239000000284 extract Substances 0.000 abstract description 2
- 230000003287 optical effect Effects 0.000 description 15
- 238000005259 measurement Methods 0.000 description 9
- 238000004364 calculation method Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000005286 illumination Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000013139 quantization Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 238000012935 Averaging Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/3473—Circular or rotary encoders
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34776—Absolute encoders with analogue or digital scales
- G01D5/34792—Absolute encoders with analogue or digital scales with only digital scales or both digital and incremental scales
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optical Transform (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Abstract
【解決手段】回転軸1に形成された軸部空間4と、軸受部3に形成された軸受部空間5と、前記軸部空間に収納された第1集光レンズ7と、前記軸受部空間に設けた第2集光レンズ8と、前記第1集光レンズ又は前記第2集光レンズの焦点位置に設けた検出パターン11と、前記第1集光レンズ又は前記第2集光レンズの焦点位置に設けたイメージセンサ12と、該イメージセンサからの信号に基づき前記回転軸の角度変位を演算する演算装置14とを具備し、前記検出パターンは、角度検出パターンと、基準指示パターンとを有し、前記演算装置は、前記検出パターンの投影像について前記角度検出パターンの中心を中心として前記トラックを所定の半径で全周スキャンして周波成分を抽出すると共に、前記回転軸の角度変位を、前記周波成分の位相差と前記基準指示パターンの位置変化に相当する周波の数に基づき演算する。
【選択図】図1
Description
X中心線=[Φ(A1)−Φ(B1)]/2
Y中心線=[Φ(A2)−Φ(B2)]/2
N×360゜/n+σ×360゜/nとなる。
2 軸受
3 軸受部
7 第1集光レンズ
8 第2集光レンズ
9 光軸
10 回転角検出用光学系
11 検出パターン
12 イメージセンサ
13 発光部
14 演算装置
16 信号処理部
17 演算制御部
18 角度検出部
19 芯ブレ検出部
20 記憶部
25 円パターン
26 角度検出パターン
27 基準指示パターン
37 走査ライン
38 走査ライン
39 走査ライン
Claims (5)
- 回転軸に形成された軸部空間と、軸受部に形成された軸受部空間と、前記軸部空間に収納された第1集光レンズと、前記軸受部空間に設けられ前記第1集光レンズと対向して設けられた第2集光レンズと、前記第1集光レンズ又は前記第2集光レンズのいずれか一方の焦点位置に設けられた検出パターンと、前記第1集光レンズ又は前記第2集光レンズのいずれか他方の焦点位置に設けられたイメージセンサと、該イメージセンサからの信号に基づき前記回転軸の角度変位を演算する演算装置とを具備し、前記検出パターンは、半径方向に延びる棒状の線分が所定角度ピッチで配置されてリング状のトラックが形成された角度検出パターンと、該角度検出パターンの基準位置を示す基準指示パターンとを有し、前記演算装置は、前記イメージセンサで得られる前記検出パターンの投影像について前記角度検出パターンの中心を中心として前記トラックを所定の半径で全周スキャンして周波成分を抽出すると共に、前記基準指示パターンをスキャンして、前記回転軸の角度変位を、前記周波成分の位相差と前記基準指示パターンの位置変化に相当する周波の数に基づき演算することを特徴とする回転角検出装置。
- 前記角度検出パターンの線分は、前記トラックを2n数の半径で等角度ピッチで分割して得られ、楔形状を有する請求項1の回転角検出装置。
- 前記検出パターンは前記角度検出パターンと同心の円パターンを有し、前記演算装置は、前記円パターンの投影像を直交する2方向にスキャンして前記角度検出パターンの中心を求める請求項1の回転角検出装置。
- 前記トラックを偶数等分に分割し、それぞれの分割部分で各線分の周波数成分の位相の平均を求め、対向する分割部分間での位相差から前記角度検出パターンの中心を検出する請求項1の回転角検出装置。
- 前記全周スキャンは、半径を異ならせ複数回行う請求項1〜請求項4の内いずれかの回転角検出装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012101786A JP5973773B2 (ja) | 2012-04-26 | 2012-04-26 | 回転角検出装置 |
US13/868,521 US8937278B2 (en) | 2012-04-26 | 2013-04-23 | Rotation angle detecting apparatus |
EP13164847.9A EP2657654B1 (en) | 2012-04-26 | 2013-04-23 | Rotation angle detecting apparatus |
US14/580,339 US9228858B2 (en) | 2012-04-26 | 2014-12-23 | Rotation angle detecting apparatus |
Applications Claiming Priority (1)
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JP2012101786A JP5973773B2 (ja) | 2012-04-26 | 2012-04-26 | 回転角検出装置 |
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JP2013228331A true JP2013228331A (ja) | 2013-11-07 |
JP5973773B2 JP5973773B2 (ja) | 2016-08-23 |
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JP2012101786A Active JP5973773B2 (ja) | 2012-04-26 | 2012-04-26 | 回転角検出装置 |
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US (2) | US8937278B2 (ja) |
EP (1) | EP2657654B1 (ja) |
JP (1) | JP5973773B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016080504A (ja) * | 2014-10-16 | 2016-05-16 | 株式会社トプコン | 変位測定方法及び変位測定装置 |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2005119368A2 (en) * | 2004-06-04 | 2005-12-15 | Carl Zeiss Smt Ag | System for measuring the image quality of an optical imaging system |
JP5973773B2 (ja) | 2012-04-26 | 2016-08-23 | 株式会社トプコン | 回転角検出装置 |
JP6147038B2 (ja) * | 2013-03-15 | 2017-06-14 | キヤノン株式会社 | 位置検出装置、レンズ装置、撮像システム、および、工作装置 |
WO2018121523A1 (en) | 2016-12-28 | 2018-07-05 | Zhejiang Dahua Technology Co., Ltd. | Methods, systems, and media for evaluating images |
CN106803067B (zh) * | 2016-12-28 | 2020-12-08 | 浙江大华技术股份有限公司 | 一种人脸图像质量评估方法及装置 |
DE102017113419A1 (de) * | 2017-06-19 | 2018-12-20 | Keba Ag | Vorrichtung und Verfahren zum Bestimmen eines Winkels zwischen zwei Werkstückflächen |
JP6867244B2 (ja) * | 2017-06-28 | 2021-04-28 | 株式会社トプコン | 測量機の通信管理システム |
CN113027697A (zh) * | 2019-12-24 | 2021-06-25 | 新疆金风科技股份有限公司 | 一种风力发电机组叶片桨距角的测量***、方法和装置 |
KR20220117496A (ko) | 2021-02-17 | 2022-08-24 | 삼성전기주식회사 | 회전체 장치 및 회전체 각위치 검출 장치 |
CN113533392B (zh) * | 2021-07-12 | 2022-08-26 | 重庆大学 | 一种组合扫描cl成像方法 |
CN113639674B (zh) * | 2021-10-13 | 2022-01-14 | 成都宏明电子股份有限公司 | 基于光折射原理的非接触式旋转电位器 |
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EP2275782A1 (en) * | 2009-07-15 | 2011-01-19 | Baader, Thomas | High resolution absolute rotary encoder |
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EP2366091B1 (en) * | 2008-12-05 | 2018-08-01 | Mycronic AB | Cartesian coordinate measurement for a rotating system |
JP5973773B2 (ja) | 2012-04-26 | 2016-08-23 | 株式会社トプコン | 回転角検出装置 |
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2012
- 2012-04-26 JP JP2012101786A patent/JP5973773B2/ja active Active
-
2013
- 2013-04-23 US US13/868,521 patent/US8937278B2/en active Active
- 2013-04-23 EP EP13164847.9A patent/EP2657654B1/en active Active
-
2014
- 2014-12-23 US US14/580,339 patent/US9228858B2/en active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH0810145B2 (ja) * | 1989-07-28 | 1996-01-31 | オ−クマ株式会社 | 光学式エンコーダ及びその光学スケール |
JPH09196641A (ja) * | 1996-01-17 | 1997-07-31 | Mitsubishi Electric Corp | 芯ずれ調整装置及び調整方法 |
JP2007212457A (ja) * | 2006-02-09 | 2007-08-23 | Avago Technologies General Ip (Singapore) Private Ltd | バックグラウンドノイズを低減した反射型エンコーダ |
EP2275782A1 (en) * | 2009-07-15 | 2011-01-19 | Baader, Thomas | High resolution absolute rotary encoder |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2016080504A (ja) * | 2014-10-16 | 2016-05-16 | 株式会社トプコン | 変位測定方法及び変位測定装置 |
Also Published As
Publication number | Publication date |
---|---|
US20150108338A1 (en) | 2015-04-23 |
US20130284909A1 (en) | 2013-10-31 |
EP2657654A3 (en) | 2017-10-18 |
US8937278B2 (en) | 2015-01-20 |
EP2657654B1 (en) | 2020-06-24 |
EP2657654A2 (en) | 2013-10-30 |
JP5973773B2 (ja) | 2016-08-23 |
US9228858B2 (en) | 2016-01-05 |
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