JP2013018190A - 積層体及び積層体の製造方法 - Google Patents
積層体及び積層体の製造方法 Download PDFInfo
- Publication number
- JP2013018190A JP2013018190A JP2011153198A JP2011153198A JP2013018190A JP 2013018190 A JP2013018190 A JP 2013018190A JP 2011153198 A JP2011153198 A JP 2011153198A JP 2011153198 A JP2011153198 A JP 2011153198A JP 2013018190 A JP2013018190 A JP 2013018190A
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- JP
- Japan
- Prior art keywords
- metal
- intermediate layer
- aluminum
- layer
- brazing material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 22
- 239000000463 material Substances 0.000 claims abstract description 110
- 229910052751 metal Inorganic materials 0.000 claims abstract description 78
- 239000002184 metal Substances 0.000 claims abstract description 78
- 239000000919 ceramic Substances 0.000 claims abstract description 76
- 238000000034 method Methods 0.000 claims abstract description 37
- 239000000843 powder Substances 0.000 claims abstract description 29
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 26
- 239000000956 alloy Substances 0.000 claims abstract description 26
- 238000009413 insulation Methods 0.000 claims abstract 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 85
- 229910052782 aluminium Inorganic materials 0.000 claims description 84
- 239000000758 substrate Substances 0.000 claims description 67
- 238000005219 brazing Methods 0.000 claims description 60
- 239000010949 copper Substances 0.000 claims description 40
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 34
- 229910052802 copper Inorganic materials 0.000 claims description 33
- 239000011888 foil Substances 0.000 claims description 30
- 239000007789 gas Substances 0.000 claims description 24
- 238000010438 heat treatment Methods 0.000 claims description 18
- 150000004767 nitrides Chemical class 0.000 claims description 10
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 7
- 238000000151 deposition Methods 0.000 claims description 7
- 229910052710 silicon Inorganic materials 0.000 claims description 7
- 239000010703 silicon Substances 0.000 claims description 7
- 239000007787 solid Substances 0.000 claims description 7
- 238000005507 spraying Methods 0.000 claims description 7
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims description 6
- 229910052732 germanium Inorganic materials 0.000 claims description 6
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 6
- 229910052749 magnesium Inorganic materials 0.000 claims description 6
- 239000011777 magnesium Substances 0.000 claims description 6
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 5
- 239000011261 inert gas Substances 0.000 claims description 5
- 229910052709 silver Inorganic materials 0.000 claims description 5
- 239000004332 silver Substances 0.000 claims description 5
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 4
- 229910052737 gold Inorganic materials 0.000 claims description 4
- 239000010931 gold Substances 0.000 claims description 4
- 229910052759 nickel Inorganic materials 0.000 claims description 4
- 238000004544 sputter deposition Methods 0.000 claims description 3
- 238000007740 vapor deposition Methods 0.000 claims description 3
- 239000007921 spray Substances 0.000 abstract description 26
- 238000001816 cooling Methods 0.000 abstract description 19
- 239000007790 solid phase Substances 0.000 abstract description 2
- 238000007664 blowing Methods 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 110
- 238000012360 testing method Methods 0.000 description 11
- 239000011247 coating layer Substances 0.000 description 10
- 230000000052 comparative effect Effects 0.000 description 9
- 229910052581 Si3N4 Inorganic materials 0.000 description 8
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 8
- 230000000694 effects Effects 0.000 description 6
- 238000009864 tensile test Methods 0.000 description 6
- 239000000853 adhesive Substances 0.000 description 5
- 230000001070 adhesive effect Effects 0.000 description 5
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 3
- 229910000679 solder Inorganic materials 0.000 description 3
- 230000035882 stress Effects 0.000 description 3
- 238000007751 thermal spraying Methods 0.000 description 3
- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- -1 alumina Chemical compound 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000005336 cracking Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 229910001316 Ag alloy Inorganic materials 0.000 description 1
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 239000003570 air Substances 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052576 carbides based ceramic Inorganic materials 0.000 description 1
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 229910052839 forsterite Inorganic materials 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 238000003698 laser cutting Methods 0.000 description 1
- HCWCAKKEBCNQJP-UHFFFAOYSA-N magnesium orthosilicate Chemical compound [Mg+2].[Mg+2].[O-][Si]([O-])([O-])[O-] HCWCAKKEBCNQJP-UHFFFAOYSA-N 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910052863 mullite Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229910052574 oxide ceramic Inorganic materials 0.000 description 1
- 239000011224 oxide ceramic Substances 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/02—Processes for applying liquids or other fluent materials performed by spraying
- B05D1/12—Applying particulate materials
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- B32B18/00—Layered products essentially comprising ceramics, e.g. refractory products
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- C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
- C04B37/02—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles
- C04B37/023—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles characterised by the interlayer used
- C04B37/026—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles characterised by the interlayer used consisting of metals or metal salts
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- C23C24/00—Coating starting from inorganic powder
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
- H01L21/4846—Leads on or in insulating or insulated substrates, e.g. metallisation
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
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Abstract
【解決手段】積層体は、絶縁性を有するセラミックス基材10と、該セラミックス基材10の表面に形成された金属又は合金を主成分とする中間層50と、該中間層50の表面に、金属又は合金からなる粉末をガスと共に加速し、表面に固相状態のままで吹き付けて堆積させることによって形成された金属皮膜層(回路層20、冷却フィン40)とを備える。
【選択図】図2
Description
図1は、本発明の実施の形態に係る積層体であるパワーモジュールの構成を示す模式図である。また、図2は、図1に示す積層体の要部を拡大して示す断面図である。
図1に示すパワーモジュール1は、絶縁基板であるセラミックス基材10と、セラミックス基材10の一方の面に形成された回路層20と、回路層20上に半田C1によって接合されたチップ30と、セラミックス基材10の回路層20とは反対側の面に設けられた冷却フィン40とを備える。
本実施の形態においては、板状の金属部材としてアルミニウムを用いており、この場合、中間層50は全体として、アルミニウムを主成分とする層となる。
まず、工程S1において、図4Aに示すように、好ましくは窒化物系のセラミックス基材10の表面にアルミニウム(Al)ろう材51を配置する。
一方、粉末供給装置62に供給された圧縮ガスは、粉末供給装置62内の材料粉末をスプレーガン63に所定の吐出量となるように供給する。
従って、このような積層体をパワーモジュール1に適用することにより、モジュール全体の機械的強度を向上させることができる。
実施例1として、窒化アルミニウム(AlN)基材上に、アルミニウムろう材、及び厚さ約0.2mmのアルミニウム(Al)箔を配置し、590℃の真空中で4時間熱処理を施すことにより中間層を形成した。この中間層上に、コールドスプレー法により厚さ約1.0mmの銅(Cu)皮膜を形成した。この際の成膜条件は、窒素ガス(N2)の温度を400℃、噴射圧力を5MPaとした。
図7に示すように、実施例1の場合、基材81と皮膜層83との間において、60MPa以上の密着強度が得られていた。
これらの図8A〜8Cのいずれにも、引張試験による剥離や破断の形跡は見られなかった。
実施例2として、窒化珪素(Si3N4)基材上に、アルミニウムろう材、及び厚さ約0.2mmのアルミニウム(Al)箔を配置し、590℃の真空中で4時間熱処理を施すことにより中間層を形成した。この中間層上に、コールドスプレー法により厚さ約1.0mmの銅(Cu)皮膜を形成した。この際の成膜条件は実施例1と同様である。
図7に示すように、実施例2の場合も、基材81と皮膜層83との間において、60MPa以上の密着強度が得られていた。
比較例1として、窒化アルミニウム(AlN)基材上に、コールドスプレー法により銅(Cu)皮膜を直接形成した。また、比較例2として、窒化珪素(Si3N4)基材上に、コールドスプレー法により銅(Cu)皮膜を直接形成した。なお、比較例における成膜条件は、実施例1と同様である。
図7に示すように、比較例1及び2においては、基材に対して銅皮膜があまり付着せず、テストピースの作製後、基材から銅皮膜が剥離してしまい、引張試験を行うことができなかった。
10 セラミックス基材
20 回路層
30 チップ
40 冷却フィン
50 中間層
51 アルミニウムろう材
52 アルミニウム箔
60 コールドスプレー装置
61 ガス加熱器
62 粉末供給装置
63 スプレーガン
64 ガスノズル
65 バルブ
70 試験装置
71 固定台
71a 孔部
72 アルミピン
73 接着剤
80 テストピース
81 基材
82 中間層
83 皮膜層(銅皮膜)
Claims (13)
- 絶縁性を有するセラミックス基材と、
前記セラミックス基材の表面に形成された金属又は合金を主成分とする中間層と、
前記中間層の表面に、金属又は合金からなる粉末をガスと共に加速し、前記表面に固相状態のままで吹き付けて堆積させることによって形成された金属皮膜層と、
を備えることを特徴とする積層体。 - 前記中間層は、板状の金属又は合金部材を前記セラミックス基材にろう付することにより形成されていることを特徴とする請求項1に記載の積層体。
- 前記セラミックス基材は窒化物系セラミックスからなることを特徴とする請求項1又は2に記載の積層体。
- 前記中間層は、少なくとも、アルミニウムを主成分とする層を含むことを特徴とする請求項1〜3のいずれか1項に記載の積層体。
- 前記中間層は、ゲルマニウム、マグネシウム、珪素、銅の内のいずれかの金属からなる群より選択される少なくとも1種類を含有することを特徴とする請求項4に記載の積層体。
- 前記中間層は、銀、ニッケル、金、銅の内のいずれかの金属を主成分とする層をさらに含むことを特徴とする請求項5に記載の積層体。
- 前記金属皮膜層は、銅又はアルミニウムからなることを特徴とする請求項1〜6のいずれか1項に記載の積層体。
- 絶縁性を有するセラミックス基材の表面に、金属又は合金を主成分とする中間層を形成する中間層形成工程と、
前記中間層の表面に、金属又は合金からなる粉末をガスと共に加速し、前記表面に固相状態のままで吹き付けて堆積させることによって金属皮膜層を形成する皮膜形成工程と、
を含むことを特徴とする積層体の製造方法。 - 前記中間層形成工程は、
前記セラミックス基材の表面にアルミニウムろう材を配置するろう材配置工程と、
前記アルミニウムろう材上に板状の金属又は合金部材を配置する金属部材配置工程と、
前記アルミニウムろう材及び前記金属又は合金部材が順次配置された前記セラミックス基材を熱処理する熱処理工程と、
を含むことを特徴とする請求項8に記載の積層体の製造方法。 - 前記ろう材配置工程は、ろう材ペーストの前記セラミックス基材への塗布と、ろう材箔の前記セラミックス基材上への載置と、蒸着法若しくはスパッタ法による前記セラミックス基材へのろう材の付着との内のいずれかの工程を含むことを特徴とする請求項9に記載の積層体の製造方法。
- 前記熱処理工程は真空中又は不活性ガス雰囲気中で行われることを特徴とする請求項9又は10に記載の積層体の製造方法。
- 前記アルミニウムろう材は、ゲルマニウム、マグネシウム、珪素、銅の内のいずれかの金属からなる群より選択される少なくとも1種類を含有することを特徴とする請求項11に記載の積層体。
- 前記金属又は合金部材の厚さが1mm以下であることを特徴とする請求項9〜12のいずれか1項に記載の積層体の製造方法。
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GB202004947D0 (en) * | 2020-04-03 | 2020-05-20 | Rolls Royce Plc | Joining component bodies |
KR102649715B1 (ko) * | 2020-10-30 | 2024-03-21 | 세메스 주식회사 | 표면 처리 장치 및 표면 처리 방법 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0517248A (ja) * | 1991-07-04 | 1993-01-26 | Nippon Cement Co Ltd | セラミツクスと金属との接合方法 |
JP2009110989A (ja) * | 2007-10-26 | 2009-05-21 | Kyocera Corp | 金具付き回路基板の製造方法 |
JP2009197294A (ja) * | 2008-02-25 | 2009-09-03 | Honda Motor Co Ltd | 積層体の製造方法 |
JP2010129934A (ja) * | 2008-11-30 | 2010-06-10 | Sintokogio Ltd | ガラス回路基板及びガラス回路基板の製造方法 |
JP5191527B2 (ja) * | 2010-11-19 | 2013-05-08 | 日本発條株式会社 | 積層体および積層体の製造方法 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1935143C3 (de) * | 1969-07-11 | 1975-04-17 | Semikron Gesellschaft Fuer Gleichrichterbau Und Elektronik Mbh, 8500 Nuernberg | Hartlotverbindung bei Halbleiter-Bauelementen und Verfahren zu ihrer Herstellung |
US4602731A (en) * | 1984-12-24 | 1986-07-29 | Borg-Warner Corporation | Direct liquid phase bonding of ceramics to metals |
US4854495A (en) * | 1986-06-20 | 1989-08-08 | Hitachi, Ltd. | Sealing structure, method of soldering and process for preparing sealing structure |
WO1991019016A1 (en) | 1990-05-19 | 1991-12-12 | Institut Teoreticheskoi I Prikladnoi Mekhaniki Sibirskogo Otdelenia Akademii Nauk Sssr | Method and device for coating |
JP3171234B2 (ja) | 1997-03-26 | 2001-05-28 | 三菱マテリアル株式会社 | ヒートシンク付セラミック回路基板 |
US6033787A (en) * | 1996-08-22 | 2000-03-07 | Mitsubishi Materials Corporation | Ceramic circuit board with heat sink |
JP3837688B2 (ja) * | 1999-02-04 | 2006-10-25 | 同和鉱業株式会社 | アルミニウム−窒化アルミニウム絶縁回路基板 |
JP4387658B2 (ja) * | 2002-10-30 | 2009-12-16 | 三菱マテリアル株式会社 | ヒートシンク付セラミック回路基板及びその製造方法 |
EP1667508B1 (en) * | 2003-09-25 | 2012-07-11 | Kabushiki Kaisha Toshiba | Ceramic circuit board, method for making the same, and power module |
US20070215677A1 (en) * | 2006-03-14 | 2007-09-20 | Honeywell International, Inc. | Cold gas-dynamic spraying method for joining ceramic and metallic articles |
JP5359644B2 (ja) * | 2009-07-23 | 2013-12-04 | 三菱マテリアル株式会社 | パワーモジュール用基板、パワーモジュール及びパワーモジュール用基板の製造方法 |
JP5504842B2 (ja) | 2009-11-20 | 2014-05-28 | 三菱マテリアル株式会社 | パワーモジュール用基板、ヒートシンク付パワーモジュール用基板、パワーモジュール及びパワーモジュール用基板の製造方法 |
JP5141676B2 (ja) * | 2009-12-17 | 2013-02-13 | Tdk株式会社 | 端子電極の製造方法 |
-
2011
- 2011-07-11 JP JP2011153198A patent/JP5548167B2/ja active Active
-
2012
- 2012-07-11 EP EP12810573.1A patent/EP2732967A4/en not_active Withdrawn
- 2012-07-11 WO PCT/JP2012/067752 patent/WO2013008865A1/ja active Application Filing
- 2012-07-11 KR KR1020147000588A patent/KR101572586B1/ko not_active IP Right Cessation
- 2012-07-11 US US14/130,566 patent/US20140134448A1/en not_active Abandoned
- 2012-07-11 CN CN201280034470.9A patent/CN103648766B/zh not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0517248A (ja) * | 1991-07-04 | 1993-01-26 | Nippon Cement Co Ltd | セラミツクスと金属との接合方法 |
JP2009110989A (ja) * | 2007-10-26 | 2009-05-21 | Kyocera Corp | 金具付き回路基板の製造方法 |
JP2009197294A (ja) * | 2008-02-25 | 2009-09-03 | Honda Motor Co Ltd | 積層体の製造方法 |
JP2010129934A (ja) * | 2008-11-30 | 2010-06-10 | Sintokogio Ltd | ガラス回路基板及びガラス回路基板の製造方法 |
JP5191527B2 (ja) * | 2010-11-19 | 2013-05-08 | 日本発條株式会社 | 積層体および積層体の製造方法 |
Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2015064430A1 (ja) * | 2013-10-28 | 2015-05-07 | 日本発條株式会社 | 積層体、絶縁性冷却板、パワーモジュールおよび積層体の製造方法 |
JP2015086085A (ja) * | 2013-10-28 | 2015-05-07 | 日本発條株式会社 | 積層体、絶縁性冷却板、パワーモジュールおよび積層体の製造方法 |
WO2017082368A1 (ja) * | 2015-11-11 | 2017-05-18 | 日本発條株式会社 | 積層体および積層体の製造方法 |
JPWO2017082368A1 (ja) * | 2015-11-11 | 2018-08-30 | 日本発條株式会社 | 積層体および積層体の製造方法 |
JPWO2018135490A1 (ja) * | 2017-01-17 | 2019-12-19 | デンカ株式会社 | セラミックス回路基板の製造方法 |
WO2018135490A1 (ja) | 2017-01-17 | 2018-07-26 | デンカ株式会社 | セラミックス回路基板の製造方法 |
US11160172B2 (en) | 2017-01-17 | 2021-10-26 | Denka Company Limited | Method for producing ceramic circuit board |
EP3424893A1 (en) | 2017-07-03 | 2019-01-09 | Tatsuta Electric Wire & Cable Co., Ltd. | Metal-ceramic base material, metal-ceramic joint structure, method for producing metal-ceramic joint structure, and mixed powder material |
US11060192B2 (en) | 2017-07-03 | 2021-07-13 | Tatsuta Electric Wire & Cable Co., Ltd. | Metal-ceramic base material, metal-ceramic joint structure, method for producing metal-ceramic joint structure, and mixed powder material |
JP2019033131A (ja) * | 2017-08-04 | 2019-02-28 | デンカ株式会社 | セラミックス回路基板 |
JP2019033130A (ja) * | 2017-08-04 | 2019-02-28 | デンカ株式会社 | セラミックス回路基板 |
JP7369508B2 (ja) | 2017-08-04 | 2023-10-26 | デンカ株式会社 | セラミックス回路基板 |
JP2019067804A (ja) * | 2017-09-28 | 2019-04-25 | デンカ株式会社 | セラミックス回路基板 |
JP2019067803A (ja) * | 2017-09-28 | 2019-04-25 | デンカ株式会社 | セラミックス回路基板及びその製造方法 |
JP7027095B2 (ja) | 2017-09-28 | 2022-03-01 | デンカ株式会社 | セラミックス回路基板 |
Also Published As
Publication number | Publication date |
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JP5548167B2 (ja) | 2014-07-16 |
KR101572586B1 (ko) | 2015-11-27 |
CN103648766B (zh) | 2016-02-03 |
WO2013008865A1 (ja) | 2013-01-17 |
EP2732967A1 (en) | 2014-05-21 |
US20140134448A1 (en) | 2014-05-15 |
CN103648766A (zh) | 2014-03-19 |
KR20140022102A (ko) | 2014-02-21 |
EP2732967A4 (en) | 2015-02-18 |
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