JP2009256805A - Cleaning device, cleaning method and object to be cleaned - Google Patents

Cleaning device, cleaning method and object to be cleaned Download PDF

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JP2009256805A
JP2009256805A JP2009182712A JP2009182712A JP2009256805A JP 2009256805 A JP2009256805 A JP 2009256805A JP 2009182712 A JP2009182712 A JP 2009182712A JP 2009182712 A JP2009182712 A JP 2009182712A JP 2009256805 A JP2009256805 A JP 2009256805A
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cleaning
cleaned
tank
cleaning liquid
oil
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Makoto Miyamoto
誠 宮本
Tomotsugu Kamiyama
智嗣 上山
Kazuhiro Takishita
和弘 滝下
Haruki Sonoda
治毅 園田
Tomoya Tonogaki
智也 殿柿
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SPC Electronics Corp
Mitsubishi Electric Corp
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SPC Electronics Corp
Mitsubishi Electric Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a compact high-operability cleaning device in which the cleaning effect of a fine bubble cleaning method is more enhanced and the service life of a cleaning liquid is prolonged. <P>SOLUTION: The cleaning device comprises: a cleaning tank 21 storing a cleaning liquid into which an object to be cleaned is immersed; a cleaning nozzle by which fine bubbles are generated in the cleaning liquid, and the object is cleaned; an air blowing part 26 blowing air to the curved surface 33 at the upper part of the cleaning tank 21; and an overflow tank 27 into which oil floated up on the face of the cleaning liquid is driven out by the air at the air blowing part 26. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は、生産工程における、各種部材の洗浄を行う洗浄装置に係り、詳しくは、微細気泡洗浄方式における洗浄装置に関する。   The present invention relates to a cleaning device for cleaning various members in a production process, and more particularly to a cleaning device in a fine bubble cleaning system.

電子機器に用いられる電子部品及び機構部品の洗浄は、フロンやトリクロロエタンの使用が禁止されたため、洗浄液と気泡により洗浄効果を高める洗浄方法が開発されてきた。特許文献1には、洗浄液が満たされた浸漬槽の底に、洗浄液を攪拌し得る比較的大きな気泡を発生させる送気パイプと、微細気泡を発生させる送気パイプとを設け、ワークを降下させ浸漬槽内に浸漬させると、まず微細気泡を発生させ、その後比較的大きな気泡を発生させる旨の記載がある。また引用文献2には、注入手段により洗浄室内に満たした洗浄液中で洗浄される被洗浄物を回転させる回転台を洗浄室の底部に設置し、回転台の上に載置された被洗浄物を十分高速回転させるために回転押さえ板を設け、且つ回転台の下から無数の気泡を被洗浄物に向けて吹き上げる旨の記載がある。   Since cleaning of electronic parts and mechanism parts used in electronic devices is prohibited from using chlorofluorocarbon or trichloroethane, cleaning methods have been developed that enhance the cleaning effect with cleaning liquid and bubbles. In Patent Document 1, an air supply pipe that generates relatively large bubbles that can stir the cleaning liquid and an air supply pipe that generates fine bubbles are provided at the bottom of the immersion tank filled with the cleaning liquid, and the work is lowered. There is a description that when immersed in an immersion bath, fine bubbles are first generated and then relatively large bubbles are generated. In the cited document 2, a rotating table for rotating an object to be cleaned in a cleaning liquid filled in the cleaning chamber by an injection means is installed at the bottom of the cleaning chamber, and the object to be cleaned placed on the rotating table. There is a description that a rotation pressing plate is provided to rotate the plate at a sufficiently high speed, and countless bubbles are blown from the bottom of the turntable toward the object to be cleaned.

しかし特許文献2は、回転台に被洗浄物を固定して高速回転させて洗浄効果を高めるため、洗浄物が高速回転に耐え得るものに限定される。特許文献1は、被洗浄物は回転しないため、洗浄物は限定されないが、微細気泡が一方向だけから供給され、その方向も制御できないため、複雑な形状を有する洗浄物に対して微細気泡が十分に行き渡らない。電子機器類の構成要素は、構造が複雑で比較的機械的な強度が低いものも多いため、洗浄効果が同等以上で、被洗浄物を自由に選択できる洗浄装置の開発が必要となる。   However, Patent Document 2 is limited to those in which the cleaning object can withstand high-speed rotation because the object to be cleaned is fixed on the turntable and rotated at high speed to enhance the cleaning effect. In Patent Document 1, since the object to be cleaned does not rotate, the object to be cleaned is not limited. However, since fine bubbles are supplied from only one direction and the direction cannot be controlled, fine bubbles are generated for the object to be cleaned having a complicated shape. Not enough. Since many components of electronic devices have a complicated structure and relatively low mechanical strength, it is necessary to develop a cleaning device that has a cleaning effect that is equal to or greater than that and can freely select an object to be cleaned.

特開平6−179991号公報JP-A-6-177991 特開平7−227582号公報JP-A-7-227582

本発明は、このような問題を解決するためになされたものであり、その目的は、被洗浄物を自由に選択でき、且つ被洗浄物の所望の箇所を選択的に洗浄でき、微細気泡洗浄方法の洗浄効果をより高め、洗浄液の長寿命化を図り、コンパクトで操作性の良い洗浄装置を提供する。   The present invention has been made to solve such problems, and its purpose is to freely select an object to be cleaned and to selectively clean a desired portion of the object to be cleaned. The cleaning effect of the method is further enhanced, the life of the cleaning liquid is extended, and a compact cleaning device with good operability is provided.

本発明の洗浄装置は、洗浄液に被洗浄物を浸漬させる洗浄槽と、洗浄液に微細気泡を発生させ被洗浄物を洗浄する洗浄ノズルと、洗浄槽の上部の曲面にエアを吹き付けるエア吹付け部と、エア吹付け部のエアにより洗浄液面に浮上した油が追い出させるオーバーフロー槽を備えたことを特徴とする。また、前記オーバーフロー槽は、油を分離する上部隔壁と、沈殿物を分離する下部隔壁とを設けたことを特徴とする。   The cleaning apparatus of the present invention includes a cleaning tank that immerses the object to be cleaned in the cleaning liquid, a cleaning nozzle that generates fine bubbles in the cleaning liquid and cleans the object to be cleaned, and an air spray unit that blows air onto the curved surface at the top of the cleaning tank. And an overflow tank in which oil floating on the cleaning liquid surface is expelled by the air of the air blowing section. The overflow tank is provided with an upper partition wall for separating oil and a lower partition wall for separating precipitates.

本発明の洗浄方法は、洗浄槽の洗浄液中に被洗浄物を浸漬させる工程と、洗浄液中に微細気泡を発生させる気泡発生工程と、被洗浄物を微細気泡の洗浄液で洗浄する工程と、洗浄槽の上部に曲面を設けて曲面にエアを吹き付けるエア吹付け工程と、洗浄液面に浮上した油をオーバーフロー槽に追い出す工程とを含むことを特徴とする。また、前記オーバーフロー槽では、上部隔壁による油の分離工程と、下部隔壁による沈殿物の分離工程とを設けたことを特徴とする。   The cleaning method of the present invention includes a step of immersing an object to be cleaned in a cleaning liquid in a cleaning tank, a bubble generating step for generating fine bubbles in the cleaning liquid, a step of cleaning the object to be cleaned with a cleaning liquid for fine bubbles, and a cleaning The method includes an air blowing step in which a curved surface is provided on the upper portion of the tank and air is blown onto the curved surface, and a step of expelling oil floating on the cleaning liquid surface to the overflow tank. In the overflow tank, an oil separation step using an upper partition and a precipitate separation step using a lower partition are provided.

本発明の被洗浄物は、本願発明の洗浄装置によって洗浄された被洗浄物であることを特徴とする。   An object to be cleaned according to the present invention is an object to be cleaned that has been cleaned by the cleaning apparatus according to the present invention.

本発明の洗浄装置によれば、洗浄のための各種部材に対し、ノズルの角度と長さが調整可能で、且つ洗浄槽の任意の方向から微細気泡の洗浄液を所望の箇所に供給することができるため、被洗浄部材に対し微細気泡が当たらない影の部分が無くなり洗浄効果が向上する。また、使用中の洗浄液は、油回収装置により浄化されて、長期間使用することが可能となる。   According to the cleaning apparatus of the present invention, the angle and length of the nozzle can be adjusted with respect to various members for cleaning, and the cleaning liquid of fine bubbles can be supplied to a desired location from any direction of the cleaning tank. Therefore, the shadow portion where the fine bubbles do not hit the member to be cleaned is eliminated, and the cleaning effect is improved. In addition, the cleaning liquid in use is purified by the oil recovery device and can be used for a long time.

本発明による洗浄装置の構成を示す装置構成図。The apparatus block diagram which shows the structure of the washing | cleaning apparatus by this invention. 本発明による洗浄ノズルの詳細な構成を示す洗浄ノズル構成図。FIG. 2 is a configuration diagram of a cleaning nozzle showing a detailed configuration of the cleaning nozzle according to the present invention. 本発明による油水分離タンク部の構成を示す油水分離タンク部構成図。The oil-water separation tank part block diagram which shows the structure of the oil-water separation tank part by this invention. 本発明の洗浄装置を組み込んだ自動洗浄システムを示すシステム構成図。The system block diagram which shows the automatic washing | cleaning system incorporating the washing | cleaning apparatus of this invention. 本発明によるオーバーフロー層の詳細構成図。The detailed block diagram of the overflow layer by this invention. 制御ノズルと被洗浄物との距離による洗浄特性図Cleaning characteristics according to the distance between the control nozzle and the object to be cleaned 制御ノズルによる噴射流の中心からの広がり距離と洗浄の均一特性図Spreading distance from center of jet flow by control nozzle and uniform characteristics of cleaning 本発明によるエア吹付け部の詳細構成図。The detailed block diagram of the air spraying part by this invention.

本発明による実施の形態について、図を用いて説明する。図1は、本発明の洗浄装置の構成を示す装置構成図である。図1において、洗浄装置10は、洗浄部20、油水分離タンク部30及びポンプ部40から構成されている。洗浄部20は、洗浄槽21と、洗浄ノズル部22と、エア吹付け部26と、オーバーフロー槽28とを有する。油水分離タンク部30は、エア吹付け部26からドライエアが吹付けられて、洗浄液24の表面に浮かぶ液面油膜25と洗浄液24とがオーバーフロー槽27へ溢れて成る循環用洗浄液28を浄化して循環させるため、オーバーフロー槽27とポンプ部40とに接続されている。ポンプ部40は、油水分離タンク部30で浄化された循環用洗浄液28を洗浄槽21へ供給するため、洗浄槽21の左右、前後及び底面の5つの部位に所定の数だけ装着された洗浄ノズル部22に洗浄液パイプ23を介してそれぞれ接続されている。また被洗浄物を限定することで、洗浄ノズル部22は一箇所で、且つ1つのノズルで構成することもできる。図5は、オーバーフロー層の詳細構成図である。オーバーフロー槽27には、隔壁29を設け、流路を長くしても良い。これにより、より多くの気泡が浮上し油の分離が良くなる。また、固形物の沈殿も増加する。これらにより洗浄水の浄化度が上がる。固形物の除去のための穴とふた(沈殿物ドレイン31)をオーバーフロー槽の底部に設けてもよい。油を抜くための油ドレイン32を設けてもよい。沈殿用及び油用ドレイン31、32は、一つに限らず、隔壁に遮られた各部屋に設けてもよい。オーバーフロー槽27の洗浄のために、隔壁29はレール等で仮留めするなどして、必ずしも固定する必要はない。   Embodiments according to the present invention will be described with reference to the drawings. FIG. 1 is an apparatus configuration diagram showing the configuration of the cleaning apparatus of the present invention. In FIG. 1, the cleaning device 10 includes a cleaning unit 20, an oil / water separation tank unit 30, and a pump unit 40. The cleaning unit 20 includes a cleaning tank 21, a cleaning nozzle part 22, an air blowing part 26, and an overflow tank 28. The oil / water separation tank unit 30 purifies the cleaning liquid 28 for circulation, in which dry air is sprayed from the air spray unit 26, and the liquid oil film 25 floating on the surface of the cleaning liquid 24 and the cleaning liquid 24 overflow into the overflow tank 27. In order to circulate, it is connected to the overflow tank 27 and the pump part 40. The pump unit 40 supplies a cleaning liquid 28 for circulation purified by the oil / water separation tank unit 30 to the cleaning tank 21, and a predetermined number of cleaning nozzles are attached to the left, right, front, rear, and bottom of the cleaning tank 21. Each part 22 is connected to each other via a cleaning liquid pipe 23. Further, by limiting the objects to be cleaned, the cleaning nozzle unit 22 can be configured at one place and one nozzle. FIG. 5 is a detailed configuration diagram of the overflow layer. The overflow tank 27 may be provided with a partition wall 29 to lengthen the flow path. As a result, more bubbles rise and oil separation is improved. Also, solids precipitation increases. These increase the degree of purification of the washing water. You may provide the hole and cover (precipitate drain 31) for the removal of a solid substance in the bottom part of an overflow tank. An oil drain 32 for draining oil may be provided. The precipitation and oil drains 31 and 32 are not limited to one, and may be provided in each room blocked by the partition wall. In order to clean the overflow tank 27, the partition wall 29 is not necessarily fixed by temporarily fastening it with a rail or the like.

図2は、図1の洗浄ノズル部22を構成している各洗浄ノズルの詳細な構成を示す洗浄ノズル構成図である。各洗浄ノズルは、制御ノズル50とソケット52とミキシングノズル53とから成る。ソケット52は、洗浄槽21の左右、前後及び底面の5つの部位に所定の数だけ装着され、その両端は雌ネジが切られている。制御ノズル50の一端は雄ネジが切られており、ソケット52に捩じ込まれて取り付けられる。制御ノズル50の他端は湾曲し、任意の方向に設定できるよう回転部を有する。ミキシングノズル53の一端は雄ネジが切られており、ソケット52に捩じ込まれて取り付けられる。ミキシングノズル53の他端には、洗浄液パイプ23が接続されており、中央部には、気体を注入するガス用パイプ54が接続されている。制御ノズル50の長さ及び湾曲角度は任意に設定して製作できるため、所定の長さと角度を有する複数の制御ノズル50を用意することで、微細気泡の洗浄液の流れを任意に設定することが可能となる。   FIG. 2 is a cleaning nozzle configuration diagram showing a detailed configuration of each cleaning nozzle constituting the cleaning nozzle portion 22 of FIG. Each cleaning nozzle includes a control nozzle 50, a socket 52, and a mixing nozzle 53. A predetermined number of sockets 52 are mounted on the left and right, front and rear, and bottom of the cleaning tank 21, and both ends thereof are internally threaded. One end of the control nozzle 50 is male threaded and is screwed into the socket 52 for attachment. The other end of the control nozzle 50 is curved and has a rotating portion so that it can be set in any direction. One end of the mixing nozzle 53 is male threaded and is screwed into the socket 52 for attachment. A cleaning liquid pipe 23 is connected to the other end of the mixing nozzle 53, and a gas pipe 54 for injecting gas is connected to the center portion. Since the length and the bending angle of the control nozzle 50 can be arbitrarily set and manufactured, the flow of the cleaning liquid of fine bubbles can be arbitrarily set by preparing a plurality of control nozzles 50 having a predetermined length and angle. It becomes possible.

次に図6に示す制御ノズル50と被洗浄物との距離と洗浄度に関して説明する。図6に示すように、制御ノズル50と被洗浄物との距離を長くするに従い、洗浄度が指数関数的に悪くなる。従って、制御ノズル50と被洗浄物との距離は、なるべく近接させたほうがよく、少なくとも100mm以内がよく、好ましくは50mm以内がよい。   Next, the distance between the control nozzle 50 shown in FIG. As shown in FIG. 6, as the distance between the control nozzle 50 and the object to be cleaned increases, the degree of cleaning decreases exponentially. Therefore, the distance between the control nozzle 50 and the object to be cleaned should be as close as possible, and should be at least 100 mm or less, preferably 50 mm or less.

図3は、図1の油水分離タンク部30の構成を示す油水分離タンク部構成図である。油水分離タンク部30は、循環用洗浄液槽60と油回収装置61とから成り、オーバーフロー槽27とポンプ部40とに接続されている。図1のエア吹付け部26からドライエアが吹付けられて、洗浄液24の表面に浮かぶ液面油膜25と洗浄液24とがオーバーフロー槽27へ溢れて成る循環用洗浄液28を、パイプを介して循環用洗浄液槽60へ運び、油回収装置61により浄化する。所定の純度に浄化された循環用洗浄液28は、パイプを介してポンプ部40に運ばれ、再び洗浄槽21へ供給される。オーバーフロー槽27が油水分離タンク部30を兼ねることにより、油水分離タンク部30を省くことも可能である。この場合、油回収装置61はオーバーフロー槽27に設置しても良い。なお、油回収装置61は、アスピレーターなどの吸引装置や匙状のものによる掻き取り装置などを用いることができる。分離された油の形状により使い分けることも可能である。   FIG. 3 is an oil / water separation tank unit configuration diagram showing the configuration of the oil / water separation tank unit 30 of FIG. 1. The oil / water separation tank unit 30 includes a circulation cleaning liquid tank 60 and an oil recovery device 61, and is connected to the overflow tank 27 and the pump unit 40. A circulating cleaning liquid 28, which is formed by blowing dry air from the air spraying section 26 in FIG. 1 and overflowing the liquid oil film 25 floating on the surface of the cleaning liquid 24 and the cleaning liquid 24 into the overflow tank 27, is circulated through a pipe. It is carried to the cleaning liquid tank 60 and purified by the oil recovery device 61. The circulating cleaning liquid 28 purified to a predetermined purity is transported to the pump unit 40 through the pipe and supplied to the cleaning tank 21 again. Since the overflow tank 27 also serves as the oil / water separation tank section 30, the oil / water separation tank section 30 can be omitted. In this case, the oil recovery device 61 may be installed in the overflow tank 27. Note that the oil recovery device 61 may be a suction device such as an aspirator or a scraping device using a bowl. It is also possible to use properly according to the shape of the separated oil.

図1に戻り、洗浄工程を詳しく説明する。図1の洗浄装置10において、例えば超音波などの強い物理力が使用できない精密機械部品や電子部品、又は回転できない立方体の形状に孔が空いた金属部品、自動車のエンジン部品、板ガラス、レンズ、リードフレームなどを平カゴに入れ、洗浄部20の洗浄槽21の所定場所にセットする。洗浄槽21の左右、前後及び底面の5つの部位に所定の数だけ装着された洗浄ノズル部22の制御ノズル50は、洗浄目的に合わせたノズルが取り付けられ、所定の長さ、角度、方向が調整されて、被洗浄部材に対して微細気泡が当たらない影の部分が生じないようにセットされる。例えば孔の空いた被洗浄物には、孔の部分を狙い撃ちすることが可能である。また、ノズルの何本かを直角ノズルとし、洗浄液24が一定方向に循環するように設定することも可能である。   Returning to FIG. 1, the cleaning process will be described in detail. In the cleaning device 10 of FIG. 1, for example, precision mechanical parts and electronic parts that cannot use strong physical force such as ultrasonic waves, or metal parts that are perforated in a cube shape that cannot be rotated, automobile engine parts, sheet glass, lenses, leads A frame or the like is put in a flat basket and set in a predetermined place of the cleaning tank 21 of the cleaning unit 20. The control nozzle 50 of the cleaning nozzle unit 22 mounted in a predetermined number on the left, right, front, back, and bottom of the cleaning tank 21 is equipped with a nozzle that is suitable for the purpose of cleaning, and has a predetermined length, angle, and direction. It is adjusted so that a shadow portion where fine bubbles do not strike the member to be cleaned does not occur. For example, an object to be cleaned with holes can be aimed at a hole. It is also possible to set so that several of the nozzles are right angle nozzles and the cleaning liquid 24 circulates in a certain direction.

制御ノズル50の長さは、200mm以下であり、角度の標準は45度である。ただし、被洗浄物に合わせていかようにも調整することが可能である。またノズルの数は、側面や底面の1面に対して最大10個が取り付け可能であるため、各種形状の違う被洗浄物に合わせてノズルの形、数、位置を選択できる。制御ノズル50から噴出される流量の調整範囲は、3〜20L/minである。通常、制御ノズル50から噴出される流量は6L/minに設定されて、ノズルの数も4〜10個の範囲で使用される。ノズルは、被洗浄物の位置や大きさに合わせることができるように着脱自由にすることが望ましい。使用しないノズル設置位置には止め蓋をする。   The length of the control nozzle 50 is 200 mm or less, and the standard angle is 45 degrees. However, it is possible to make adjustments according to the object to be cleaned. In addition, since a maximum of 10 nozzles can be attached to one of the side surface and the bottom surface, the shape, number and position of the nozzles can be selected according to the objects to be cleaned having various shapes. The adjustment range of the flow rate ejected from the control nozzle 50 is 3 to 20 L / min. Usually, the flow rate ejected from the control nozzle 50 is set to 6 L / min, and the number of nozzles is also used in the range of 4 to 10. It is desirable that the nozzle be freely detachable so that it can be adjusted to the position and size of the object to be cleaned. Cover the nozzle installation position when not in use.

次に図7に示す制御ノズル50による噴射流の中心からの広がり距離と洗浄の均一性に関して説明する。図7に示すように制御ノズル50の噴射流の中心からの広がり距離に従って洗浄度は低下する。またノズルの先端と被洗浄物との相対位置によって広がり距離は変化する。ノズル径よりも大きな被洗浄物を洗浄しようとする場合には1個のノズルでは均一に洗浄することはできない。そこで複数のノズルを所定間隔で配置することが必要となる。   Next, the spread distance from the center of the jet flow by the control nozzle 50 shown in FIG. 7 and the uniformity of cleaning will be described. As shown in FIG. 7, the degree of cleaning decreases according to the spread distance of the control nozzle 50 from the center of the jet flow. Further, the spreading distance varies depending on the relative position between the tip of the nozzle and the object to be cleaned. When an object to be cleaned that is larger than the nozzle diameter is to be cleaned, it is not possible to uniformly clean with one nozzle. Therefore, it is necessary to arrange a plurality of nozzles at predetermined intervals.

次に気泡発生部から供給した高密度のマイクロバブルを含んだ洗浄水の流れと被洗浄物の角度の関係に関して説明する。洗浄効果は洗浄水の流れが被洗浄物面と直角を成す場合が最も洗浄効果が高い。その角度が小さくなるほど洗浄度は悪化するので、望ましくは45度以上がよい。   Next, the relationship between the flow of cleaning water containing high-density microbubbles supplied from the bubble generating unit and the angle of the object to be cleaned will be described. The cleaning effect is highest when the flow of cleaning water is perpendicular to the surface of the object to be cleaned. Since the degree of cleaning becomes worse as the angle becomes smaller, 45 degrees or more is desirable.

界面制御剤を0.5%添加された水溶液からなる洗浄液24の場合、直径200μm以下の気泡を多く含む高密度微細気泡を発生させると、洗浄液は白濁化し、水位は20%程度上昇する。このため所定の水位は、高密度微細気泡による水位の増加分を見込んで所定の水位まで洗浄液24を満たす。   In the case of the cleaning liquid 24 made of an aqueous solution to which 0.5% of an interface control agent is added, if high-density fine bubbles containing many bubbles having a diameter of 200 μm or less are generated, the cleaning liquid becomes cloudy and the water level rises by about 20%. For this reason, the predetermined water level fills the cleaning liquid 24 to the predetermined water level in anticipation of an increase in the water level due to the high density fine bubbles.

洗浄をスタートさせると、各洗浄ノズル部22のミキシングノズル53では、洗浄液24が、洗浄液パイプ23から供給される。この洗浄液24に、ガス用パイプ54から例えばエアが供給され、高密度微細気泡が発生し、制御ノズル50から噴出して洗浄が開始される。汚れの主因である油汚れは、高密度微細気泡が被洗浄物に噴射されると、微細気泡はその表面に油を吸着することで被洗浄物から油を除去するように働くことにより洗浄される。除去された油は、気泡に吸着したままで液面まで到達し、気液界面で気泡が破れると水よりも比重の軽い油は油膜25として浮遊する。この表面浮遊物である液面油膜25は、基本的にはオーバーフロー槽27へ溢れ出す。しかしながら、洗浄槽表面の液のながれを均一に制御することは容易ではなく、液面油膜を円滑にオーバーフロー槽27へ移動させることはできない。そこで、エア吹付け部26からドライエアを吹きつけると、液面に洗浄槽21からオーバーフロー槽27への一定の流れを容易に作り出すことができる。この流れによって液面油膜25は円滑にオーバーフロー槽27へ溢れ出させることができる。これにより洗浄槽21の液面は、常に汚れのない状態を維持することができる。エア吹付け部26は、例えば、図8に示すように、洗浄漕21の上部に曲面33を設け、さらには、エア吹付け装置34を用いて、エアを曲面に向けるようにしても良い。これにより、水面に浮上した油が洗浄槽21内の壁面やエア吹付け部26などに付着することなく効率的にオーバーフロー槽27に追い出すことが可能となる。なお、オーバーフロー槽27から油水分離タンク部30へのパイプ設置位置は、必ずしもオーバーフロー槽27の底面にある必要はなく、側面でも良い。側面であれば、油や沈殿物の混入を減少させる。   When cleaning is started, the cleaning liquid 24 is supplied from the cleaning liquid pipe 23 at the mixing nozzle 53 of each cleaning nozzle section 22. For example, air is supplied to the cleaning liquid 24 from the gas pipe 54, high density fine bubbles are generated, and the cleaning liquid 24 is ejected from the control nozzle 50 to start cleaning. Oil stains, which are the main cause of dirt, are cleaned by high-density fine bubbles being jetted onto the object to be cleaned, by the fine bubbles adsorbing oil on the surface to remove the oil from the object to be cleaned. The The removed oil reaches the liquid level while adsorbed to the bubbles, and when the bubbles are broken at the gas-liquid interface, the oil having a specific gravity lower than that of the water floats as the oil film 25. The liquid oil film 25 which is this surface floating substance basically overflows into the overflow tank 27. However, it is not easy to uniformly control the flow of the liquid on the surface of the cleaning tank, and the liquid oil film cannot be smoothly moved to the overflow tank 27. Therefore, when dry air is blown from the air blowing section 26, a constant flow from the cleaning tank 21 to the overflow tank 27 can be easily created on the liquid surface. This flow allows the liquid oil film 25 to smoothly overflow into the overflow tank 27. As a result, the liquid level of the cleaning tank 21 can always be kept clean. For example, as shown in FIG. 8, the air blowing unit 26 may be provided with a curved surface 33 on the upper part of the cleaning bowl 21, and further, air may be directed to the curved surface using an air blowing device 34. As a result, the oil floating on the water surface can be efficiently expelled to the overflow tank 27 without adhering to the wall surface in the cleaning tank 21 or the air spraying portion 26. In addition, the pipe installation position from the overflow tank 27 to the oil / water separation tank unit 30 does not necessarily need to be on the bottom surface of the overflow tank 27, and may be a side surface. On the side, it reduces oil and sediment contamination.

循環用洗浄液28は、パイプを介して油水分離タンク部30へと重力落下する。送出された循環用洗浄液28が油水分離タンク部30の循環用洗浄液槽60に溜まる。循環用洗浄液28の液面油膜25は、水と混合することなく循環用洗浄液槽60表面に浮遊し、時間と共に気泡がはじけて水と油に分離する。所定の水位になると、油回収装置61が動作を開始し、所定の純度に浄化された循環用洗浄液28は、パイプを介してポンプ部40に運ばれ、洗浄槽21の洗浄ノズル部22へ供給されて再利用される。   The circulation cleaning liquid 28 falls by gravity to the oil / water separation tank unit 30 through the pipe. The sent circulation cleaning liquid 28 accumulates in the circulation cleaning liquid tank 60 of the oil / water separation tank unit 30. The liquid oil film 25 of the circulation cleaning liquid 28 floats on the surface of the circulation cleaning liquid tank 60 without being mixed with water, and bubbles break up with time to separate the water and oil. When the water level reaches a predetermined level, the oil recovery device 61 starts operating, and the circulating cleaning liquid 28 purified to a predetermined purity is conveyed to the pump unit 40 through the pipe and supplied to the cleaning nozzle unit 22 of the cleaning tank 21. To be reused.

高密度微細気泡による油除去効果の確認のため、リング状の被洗浄物10個を1ロットとし、30ロットの連続処理による油除去量を測定した。10ロット目の油除去率は、67.6%、20ロット目は74.2%、30ロット目は69.6%であった。また回収された油成分は、抽出されて再利用することもできる。なお、除去すべき油の性状によっては、洗浄水の温度を例えば70℃程度に上げる方が良い。よって、洗浄槽21または洗浄水配管に加温装置を設けてもよい。また、被洗浄物が鉄など酸化されやすい物質の場合には、ガスとして窒素やアルゴンなどを用いることが望ましい。界面制御剤としては、例えば、特開2004−283683に示される物質を用いることができる。洗浄液に、アルカリ剤、防錆剤、などを含んでも良い。   In order to confirm the oil removal effect by the high-density fine bubbles, 10 ring-shaped objects to be cleaned were taken as 1 lot, and the oil removal amount by continuous treatment of 30 lots was measured. The oil removal rate of the 10th lot was 67.6%, the 20th lot was 74.2%, and the 30th lot was 69.6%. The recovered oil component can also be extracted and reused. Depending on the properties of the oil to be removed, it is better to raise the temperature of the washing water to about 70 ° C., for example. Therefore, you may provide a heating apparatus in the washing tank 21 or washing water piping. Further, when the object to be cleaned is a substance that is easily oxidized, such as iron, it is desirable to use nitrogen or argon as a gas. As the interface control agent, for example, a substance disclosed in JP-A-2004-283683 can be used. The cleaning liquid may contain an alkali agent, a rust preventive agent, and the like.

図4は、本発明の洗浄装置を組み込んだ自動洗浄システムを示すシステム構成図である。図4において、自動洗浄システム700は、入り口コンベア100、本発明の洗浄装置10、洗剤による超音波洗浄装置200、市水による超音波洗浄装置300、熱風乾燥装置400、及び出口コンベア500が搬送ユニット600により連続して接続されている。搬送容器に入れられた被洗浄物(図示せず)が入り口コンベア100から供給され、搬送ユニット600により各装置に搬送され、それぞれの洗浄工程における処理が行われた後、洗浄が完了した被洗浄物が出口コンベア500から取り出される。   FIG. 4 is a system configuration diagram showing an automatic cleaning system incorporating the cleaning device of the present invention. In FIG. 4, an automatic cleaning system 700 includes an entrance conveyor 100, a cleaning apparatus 10 according to the present invention, an ultrasonic cleaning apparatus 200 using a detergent, an ultrasonic cleaning apparatus 300 using city water, a hot air drying apparatus 400, and an outlet conveyor 500. 600 are continuously connected. The object to be cleaned (not shown) put in the transport container is supplied from the entrance conveyor 100, transported to each device by the transport unit 600, processed in each cleaning process, and then cleaned. Objects are removed from the exit conveyor 500.

この自動洗浄システム700によれば、高密度微細気泡によりおよそ70%の油除去が行われた後、洗剤による超音波洗浄装置200により残りの30%程度の油を除去する。洗浄装置10において、油水分離により油成分が回収されるため、洗浄液24の寿命を大幅に向上させることが可能となる。これに続く、洗剤による超音波洗浄装置200では、残り30%の油成分の除去で良いため、洗浄液の負担も軽くなり、洗剤による洗浄液の廃液処理に伴う負担が軽減され、ランニングコストの低減を図ることが可能となる。   According to the automatic cleaning system 700, after about 70% of oil removal is performed by high-density fine bubbles, the remaining 30% of oil is removed by the ultrasonic cleaning apparatus 200 using a detergent. In the cleaning device 10, the oil component is recovered by the oil-water separation, so that the life of the cleaning liquid 24 can be significantly improved. In the subsequent ultrasonic cleaning apparatus 200 with detergent, the remaining 30% of the oil component can be removed, so the burden on the cleaning liquid is reduced, the burden associated with the waste liquid treatment of the cleaning liquid with the detergent is reduced, and the running cost is reduced. It becomes possible to plan.

以上説明したように、本発明の洗浄装置によれば、洗浄のための各種部材に対し、ノズルの角度と長さと方向とが調整可能で、且つ洗浄槽の5方向から微細気泡の洗浄液を供給することができるため、被洗浄部材に対し微細気泡が当たらない影の部分が無くなり洗浄効果が向上する。また使用中の洗浄液は、油回収装置により浄化されて、長期間使用することが可能となる。また自動洗浄システムに適用することより、洗浄のランニングコストの低減を図ることが可能となる。   As described above, according to the cleaning apparatus of the present invention, the angle, length, and direction of the nozzle can be adjusted with respect to various members for cleaning, and fine bubble cleaning liquid is supplied from five directions of the cleaning tank. Therefore, there is no shadow portion where fine bubbles do not hit the member to be cleaned, and the cleaning effect is improved. In addition, the cleaning liquid in use is purified by the oil recovery device and can be used for a long time. Moreover, it is possible to reduce the running cost of cleaning by applying to an automatic cleaning system.

10 洗浄装置
20 洗浄部
21 洗浄層
22 洗浄ノズル部
23 洗浄液パイプ
24 洗浄液(微細気泡)
25 液面油膜
26 エア吹付け部
27 オーバーフロー槽
28 循環用洗浄液
29 隔壁
30 油水分離タンク部
31 沈殿物ドレイン
32 油ドレイン
33 曲面
34 エア吹付け装置
40 ポンプ部
50 制御ノズル
51 回転部
52 ソケット
53 ミキシングノズル
54 ガス用パイプ
60 循環用洗浄液槽
61 油回収装置
70 液体タンク
71 送液ポンプ
72 気体導入口
73 エジェクタ
74 気泡生成槽
75 排水バルブ
76 排気口
700 自動洗浄システム
DESCRIPTION OF SYMBOLS 10 Cleaning apparatus 20 Cleaning part 21 Cleaning layer 22 Cleaning nozzle part 23 Cleaning liquid pipe 24 Cleaning liquid (fine bubble)
25 Liquid surface oil film 26 Air spraying part 27 Overflow tank 28 Circulating cleaning liquid 29 Bulkhead 30 Oil / water separation tank part 31 Sediment drain 32 Oil drain 33 Curved surface 34 Air spraying device 40 Pump part 50 Control nozzle 51 Rotating part 52 Socket 53 Mixing Nozzle 54 Gas pipe 60 Circulating cleaning liquid tank 61 Oil recovery device 70 Liquid tank 71 Liquid feed pump 72 Gas inlet 73 Ejector 74 Bubble generation tank 75 Drain valve 76 Exhaust outlet 700 Automatic cleaning system

Claims (5)

洗浄液に被洗浄物を浸漬させる洗浄槽と、
前記洗浄液に微細気泡を発生させ前記被洗浄物を洗浄する洗浄ノズルと、
前記洗浄槽の上部の曲面にエアを吹き付けるエア吹付け部と、
前記エア吹付け部のエアにより前記洗浄液面に浮上した油が追い出させるオーバーフロー槽を備えたことを特徴とする洗浄装置。
A cleaning tank in which the object to be cleaned is immersed in the cleaning liquid;
A cleaning nozzle for generating fine bubbles in the cleaning liquid and cleaning the object to be cleaned;
An air blowing section for blowing air to the upper curved surface of the cleaning tank;
A cleaning apparatus, comprising: an overflow tank in which oil floating on the cleaning liquid surface is expelled by air from the air blowing unit.
前記オーバーフロー槽は、油を分離する上部隔壁と、沈殿物を分離する下部隔壁とを設けたことを特徴とする請求項1記載の洗浄装置。   The cleaning apparatus according to claim 1, wherein the overflow tank is provided with an upper partition wall for separating oil and a lower partition wall for separating precipitates. 洗浄槽の洗浄液中に被洗浄物を浸漬させる工程と、
前記洗浄液中に微細気泡を発生させる気泡発生工程と、
前記被洗浄物を前記微細気泡の前記洗浄液で洗浄する工程と、
前記洗浄槽の上部に曲面を設けて前記曲面にエアを吹き付けるエア吹付け工程と、
前記洗浄液面に浮上した油をオーバーフロー槽に追い出す工程とを含むことを特徴とする洗浄方法。
Immersing the object to be cleaned in the cleaning liquid of the cleaning tank;
A bubble generating step for generating fine bubbles in the cleaning liquid;
Cleaning the object to be cleaned with the cleaning liquid of the fine bubbles;
An air blowing step of providing a curved surface on the upper part of the cleaning tank and blowing air onto the curved surface;
And a step of expelling oil floating on the surface of the cleaning liquid to an overflow tank.
前記オーバーフロー槽では、上部隔壁による油の分離工程と、下部隔壁による沈殿物の分離工程とを設けたことを特徴とする請求項3記載の洗浄方法。   The cleaning method according to claim 3, wherein the overflow tank includes an oil separation step using an upper partition and a precipitate separation step using a lower partition. 請求項1または2に記載の洗浄装置によって洗浄された被洗浄物。   An object to be cleaned which is cleaned by the cleaning device according to claim 1.
JP2009182712A 2009-08-05 2009-08-05 Cleaning device, cleaning method and object to be cleaned Pending JP2009256805A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020015941A (en) * 2018-07-24 2020-01-30 日本製鉄株式会社 Ultrasonic processing device and method of supplying fine bubble
JP7422429B1 (en) 2022-10-05 2024-01-26 小▲柳▼津 清 Anilox roll cleaning equipment and anilox roll cleaning method

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0592186A (en) * 1991-04-04 1993-04-16 Daiwa Kogyo Kk Device for purifying surface of liquid in washing tank
JPH07214014A (en) * 1994-01-28 1995-08-15 Ishikawa Seisakusho:Kk Washing device
JPH08117645A (en) * 1994-10-27 1996-05-14 Fukusuke Kogyo Kk Nozzle device for aeration mechanism, member washing device and water treatment device
JPH11214342A (en) * 1998-01-23 1999-08-06 Sony Corp Semiconductor rinsing apparatus
JP2002373881A (en) * 2001-06-14 2002-12-26 Owada Sekiei:Kk Washing tank

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0592186A (en) * 1991-04-04 1993-04-16 Daiwa Kogyo Kk Device for purifying surface of liquid in washing tank
JPH07214014A (en) * 1994-01-28 1995-08-15 Ishikawa Seisakusho:Kk Washing device
JPH08117645A (en) * 1994-10-27 1996-05-14 Fukusuke Kogyo Kk Nozzle device for aeration mechanism, member washing device and water treatment device
JPH11214342A (en) * 1998-01-23 1999-08-06 Sony Corp Semiconductor rinsing apparatus
JP2002373881A (en) * 2001-06-14 2002-12-26 Owada Sekiei:Kk Washing tank

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020015941A (en) * 2018-07-24 2020-01-30 日本製鉄株式会社 Ultrasonic processing device and method of supplying fine bubble
JP7024646B2 (en) 2018-07-24 2022-02-24 日本製鉄株式会社 Ultrasonic processing equipment and fine bubble supply method
JP7422429B1 (en) 2022-10-05 2024-01-26 小▲柳▼津 清 Anilox roll cleaning equipment and anilox roll cleaning method

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