JP2009200483A - シリコン酸化膜の形成方法 - Google Patents
シリコン酸化膜の形成方法 Download PDFInfo
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- JP2009200483A JP2009200483A JP2009013724A JP2009013724A JP2009200483A JP 2009200483 A JP2009200483 A JP 2009200483A JP 2009013724 A JP2009013724 A JP 2009013724A JP 2009013724 A JP2009013724 A JP 2009013724A JP 2009200483 A JP2009200483 A JP 2009200483A
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- silicon oxide
- oxide film
- plasma
- processing
- thickness
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 143
- 229910052814 silicon oxide Inorganic materials 0.000 title claims abstract description 137
- 238000000034 method Methods 0.000 title claims description 111
- 238000012545 processing Methods 0.000 claims abstract description 170
- 239000007789 gas Substances 0.000 claims abstract description 117
- 238000007254 oxidation reaction Methods 0.000 claims abstract description 115
- 230000003647 oxidation Effects 0.000 claims abstract description 114
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 47
- 239000001301 oxygen Substances 0.000 claims abstract description 46
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 43
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 42
- 239000010703 silicon Substances 0.000 claims abstract description 42
- 230000008569 process Effects 0.000 claims description 58
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 40
- 230000007246 mechanism Effects 0.000 claims description 25
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 19
- 230000015572 biosynthetic process Effects 0.000 claims description 18
- 239000001257 hydrogen Substances 0.000 claims description 15
- 229910052739 hydrogen Inorganic materials 0.000 claims description 15
- 238000003860 storage Methods 0.000 claims description 10
- 230000005855 radiation Effects 0.000 abstract description 15
- 230000001788 irregular Effects 0.000 abstract description 4
- 239000010408 film Substances 0.000 description 226
- 239000000758 substrate Substances 0.000 description 30
- 238000005530 etching Methods 0.000 description 23
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 21
- 229920005591 polysilicon Polymers 0.000 description 20
- 239000010410 layer Substances 0.000 description 18
- 150000002500 ions Chemical class 0.000 description 14
- 230000000052 comparative effect Effects 0.000 description 12
- 239000000463 material Substances 0.000 description 12
- 229910052751 metal Inorganic materials 0.000 description 12
- 239000002184 metal Substances 0.000 description 12
- 230000005540 biological transmission Effects 0.000 description 11
- 229910052581 Si3N4 Inorganic materials 0.000 description 10
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 10
- 229910004298 SiO 2 Inorganic materials 0.000 description 8
- 239000011261 inert gas Substances 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 8
- -1 A1 2 0 3 Substances 0.000 description 7
- 239000010453 quartz Substances 0.000 description 6
- 238000005229 chemical vapour deposition Methods 0.000 description 5
- 239000004020 conductor Substances 0.000 description 5
- 230000001590 oxidative effect Effects 0.000 description 5
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 4
- MWUXSHHQAYIFBG-UHFFFAOYSA-N Nitric oxide Chemical compound O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 4
- 229910001882 dioxygen Inorganic materials 0.000 description 4
- 238000002955 isolation Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 239000000498 cooling water Substances 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 3
- 238000001020 plasma etching Methods 0.000 description 3
- 238000005498 polishing Methods 0.000 description 3
- 230000000644 propagated effect Effects 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- GQPLMRYTRLFLPF-UHFFFAOYSA-N Nitrous Oxide Chemical compound [O-][N+]#N GQPLMRYTRLFLPF-UHFFFAOYSA-N 0.000 description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
- 238000004380 ashing Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 230000005672 electromagnetic field Effects 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 229910052736 halogen Inorganic materials 0.000 description 2
- 150000002366 halogen compounds Chemical class 0.000 description 2
- 150000002367 halogens Chemical class 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 230000001737 promoting effect Effects 0.000 description 2
- 230000008439 repair process Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910004541 SiN Inorganic materials 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical group [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229960001730 nitrous oxide Drugs 0.000 description 1
- 235000013842 nitrous oxide Nutrition 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000009279 wet oxidation reaction Methods 0.000 description 1
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- H—ELECTRICITY
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
- H01L21/02274—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition in the presence of a plasma [PECVD]
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- H—ELECTRICITY
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- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32192—Microwave generated discharge
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- H—ELECTRICITY
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- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32192—Microwave generated discharge
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- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/02164—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material being a silicon oxide, e.g. SiO2
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- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/02227—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process
- H01L21/0223—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate
- H01L21/02233—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate of the semiconductor substrate or a semiconductor layer
- H01L21/02236—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate of the semiconductor substrate or a semiconductor layer group IV semiconductor
- H01L21/02238—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate of the semiconductor substrate or a semiconductor layer group IV semiconductor silicon in uncombined form, i.e. pure silicon
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/28008—Making conductor-insulator-semiconductor electrodes
- H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
- H01L21/28158—Making the insulator
- H01L21/28167—Making the insulator on single crystalline silicon, e.g. using a liquid, i.e. chemical oxidation
- H01L21/28211—Making the insulator on single crystalline silicon, e.g. using a liquid, i.e. chemical oxidation in a gaseous ambient using an oxygen or a water vapour, e.g. RTO, possibly through a layer
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- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
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- H01L21/314—Inorganic layers
- H01L21/316—Inorganic layers composed of oxides or glassy oxides or oxide based glass
- H01L21/3165—Inorganic layers composed of oxides or glassy oxides or oxide based glass formed by oxidation
- H01L21/31654—Inorganic layers composed of oxides or glassy oxides or oxide based glass formed by oxidation of semiconductor materials, e.g. the body itself
- H01L21/31658—Inorganic layers composed of oxides or glassy oxides or oxide based glass formed by oxidation of semiconductor materials, e.g. the body itself by thermal oxidation, e.g. of SiGe
- H01L21/31662—Inorganic layers composed of oxides or glassy oxides or oxide based glass formed by oxidation of semiconductor materials, e.g. the body itself by thermal oxidation, e.g. of SiGe of silicon in uncombined form
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- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
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- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/32105—Oxidation of silicon-containing layers
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- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/76224—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials
- H01L21/76232—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials of trenches having a shape other than rectangular or V-shape, e.g. rounded corners, oblique or rounded trench walls
- H01L21/76235—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials of trenches having a shape other than rectangular or V-shape, e.g. rounded corners, oblique or rounded trench walls trench shape altered by a local oxidation of silicon process step, e.g. trench corner rounding by LOCOS
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- H01L29/42312—Gate electrodes for field effect devices
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
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- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
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- Electrodes Of Semiconductors (AREA)
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- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
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- Drying Of Semiconductors (AREA)
Abstract
【解決手段】 複数のマイクロ波放射孔32を有する平面アンテナ板31によりチャンバー1内にマイクロ波を導入するプラズマ処理装置100を用い、載置台2に高周波電力を印加しながら、処理ガス中の酸素の割合が0.1%以上50%以下の範囲内であり、かつ処理圧力が1.3Pa異常667Pa以下の範囲内の条件でプラズマを生成させる。このプラズマにより、ウエハW上に形成された凹凸形状のシリコンの側壁面に形成されるシリコン酸化膜の膜厚と、凹部の底壁面に形成されるシリコン酸化膜の膜厚との比[側壁面の膜厚/底壁面の膜厚]が0.6以下の範囲内となるようにする。
【選択図】図1
Description
ここで、プラズマ処理装置100において行なわれるプラズマ酸化処理の好ましい条件について説明を行う。処理ガスとしては、希ガスとしてArガスを、酸素含有ガスとしてO2ガスをそれぞれ使用することが好ましい。このとき、処理ガス中に含まれるO2ガスの流量比率(体積比率)は、プラズマ処理の異方性を高め、凹凸の側壁の酸化を抑制しつつ、凹部の底部の酸化を促進させる観点から、0.1%以上50%以下の範囲内が好ましく、0.5%以上25%以下の範囲内がより好ましく、0.5%以上10%以下の範囲内がさらに好ましく、0.5%以上1%以下の範囲内が望ましい。つまり、チャンバー内の酸素分圧を低くしてプラズマを生成することによって、凹凸の内部はさらに酸素(イオン)分圧が低くなるので、バイアス印加により、酸素イオンが底部に引き込まれ、側壁部への酸素イオンの作用が抑制されるからである。
高周波バイアスの周波数:13.56MHz
高周波バイアスのパワー:600W(パワー密度0.702W/cm2)
マイクロ波パワー:1200W(パワー密度0.614W/cm2)
処理温度:465℃
目標膜厚:6nm(トップ膜厚aとして)
ウエハ径:300mm
<比較例1の条件>
高周波バイアスを印加しない点以外は、実施例1〜4と同じである。
高周波バイアスの周波数:13.56MHz
マイクロ波パワー:1200W(パワー密度0.614W/cm2)
処理温度:465℃
目標膜厚:6nm(トップ膜厚aとして)
ウエハ径:300mm
<比較例2の条件>
高周波バイアスを印加しない点以外は、実施例5〜8、比較例3と同じである。
Claims (11)
- プラズマ処理装置の処理室内で、凹凸形状を有する被処理体の表面に露出したシリコン部分に処理ガスのプラズマを作用させて酸化処理を施し、シリコン酸化膜を形成するシリコン酸化膜の形成方法であって、
前記処理室内で被処理体を載置する載置台に被処理体の面積当り0.2W/cm2以上2.3W/cm2以下の範囲内の出力で高周波電力を印加しながら、前記処理ガス中の酸素の割合が体積比で0.1%以上50%以下の範囲内であり、処理圧力が1.3Pa以上667Pa以下の範囲内の条件で前記プラズマを生成させることにより、前記凹凸形状の側壁面に形成される前記シリコン酸化膜の膜厚と、凹部の底壁面に形成される前記シリコン酸化膜の膜厚との比[側壁面の膜厚/底壁面の膜厚]を0.6以下とすることを特徴とするシリコン酸化膜の形成方法。 - 請求項1に記載の方法において、前記処理ガス中の酸素の割合を体積比で0.5%以上50%以下とし、かつ前記処理圧力を6.7Pa以上133Pa以下とすることによって、前記凹凸形状の側壁面の前記シリコン酸化膜の膜厚と、前記凹部の底壁面の前記シリコン酸化膜の膜厚との比[側壁面の膜厚/底壁面の膜厚]を0.01以上0.6以下とすることを特徴とするシリコン酸化膜の形成方法。
- 請求項1に記載の方法において、前記処理ガス中の酸素の割合を体積比で0.5%以上25%以下とし、かつ前記処理圧力を20Pa以上60Pa以下とすることによって、前記凹凸形状の側壁面の前記シリコン酸化膜の膜厚と、前記凹部の底壁面の前記シリコン酸化膜の膜厚との比[側壁面の膜厚/底壁面の膜厚]を0.01以上0.4以下とすることを特徴とするシリコン酸化膜の形成方法。
- 請求項1に記載の方法において、前記処理ガス中に水素を含有させることを特徴とするシリコン酸化膜の形成方法。
- 請求項4に記載の方法において、前記処理ガス中の水素と酸素の合計流量に対する水素流量の体積比率が1%以上90%以下の範囲内であることを特徴とするシリコン酸化膜の形成方法。
- 請求項1に記載の方法において、前記高周波電力の周波数は、100kHz以上60MHz以下の範囲内であることを特徴とするシリコン酸化膜の形成方法。
- 請求項1に記載の方法において、処理温度が室温以上600℃以下の範囲内であることを特徴とするシリコン酸化膜の形成方法。
- 請求項1に記載の方法において、前記プラズマは、前記処理ガスと、複数のスロットを有する平面アンテナにより前記処理室内に導入されるマイクロ波と、によって形成されるマイクロ波励起プラズマであることを特徴とするシリコン酸化膜の形成方法。
- 請求項8に記載の方法において、前記マイクロ波のパワー密度が、被処理体の面積あたり0.255W/cm2以上2.55W/cm2以下の範囲内であることを特徴とするシリコン酸化膜の形成方法。
- コンピュータ上で動作する制御プログラムが記憶されたコンピュータ読み取り可能な記憶媒体であって、
前記制御プログラムは、実行時に、プラズマ処理装置の処理室内で、凹凸形状を有する被処理体の表面に露出したシリコン部分に対し、被処理体を載置する載置台に被処理体の面積当り0.2W/cm2以上2.3W/cm2以下の範囲内の出力で高周波電力を印加しながら、処理ガス中の酸素の割合が体積比で0.1%以上50%以下の範囲内であり、かつ処理圧力が1.3Pa以上667Pa以下の範囲内である条件で生成させた処理ガスのプラズマを作用させることによって酸化処理を施し、前記凹凸形状の側壁面に形成される前記シリコン酸化膜の膜厚と、凹部の底壁面に形成される前記シリコン酸化膜の膜厚との比[側壁面の膜厚/底壁面の膜厚]が0.6以下になるようにシリコン酸化膜を形成するシリコン酸化膜の形成方法が行われるようにコンピュータに前記プラズマ処理装置を制御させるものであることを特徴とするコンピュータ読み取り可能な記憶媒体。 - プラズマを用いて被処理体を処理する上部が開口した処理室と、
前記処理室の前記開口部を塞ぐ誘電体部材と、
前記誘電体部材の外側に設けられ、前記処理室内に電磁波を導入するためのアンテナと、
前記処理室内に原料ガスを供給するガス供給機構と、
前記処理室内を減圧排気する排気機構と、
前記処理室内で被処理体を載置する載置台と、
前記載置台に接続された高周波電源と、
前記処理室内で、凹凸形状を有する被処理体表面に露出したシリコン部分に処理ガスのプラズマによる酸化処理を施してシリコン酸化膜を形成するにあたり、
前記載置台に被処理体の面積当り0.2W/cm2以上2.3W/cm2以下の範囲内の出力で高周波電力を印加するとともに、前記ガス供給機構によって供給される前記処理ガス中の酸素の割合を体積比で0.1%以上50%以下の範囲内とし、かつ前記排気機構により処理圧力を1.3Pa以上667Pa以下の範囲内としながら、前記アンテナによって前記処理室内に電磁波を導入することにより前記プラズマを生成させて、前記凹凸形状の側壁面に形成される前記シリコン酸化膜の膜厚と、凹部の底壁面に形成される前記シリコン酸化膜の膜厚との比[側壁面の膜厚/底壁面の膜厚]が0.6以下となるように制御する制御部と、
を備えたことを特徴とするプラズマ処理装置。
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