JP2009105295A5 - - Google Patents
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- Publication number
- JP2009105295A5 JP2009105295A5 JP2007277162A JP2007277162A JP2009105295A5 JP 2009105295 A5 JP2009105295 A5 JP 2009105295A5 JP 2007277162 A JP2007277162 A JP 2007277162A JP 2007277162 A JP2007277162 A JP 2007277162A JP 2009105295 A5 JP2009105295 A5 JP 2009105295A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007277162A JP4857239B2 (ja) | 2007-10-25 | 2007-10-25 | ウェハ保持装置 |
US12/288,284 US7923990B2 (en) | 2007-10-25 | 2008-10-17 | Wafer holder |
KR1020080104839A KR100998552B1 (ko) | 2007-10-25 | 2008-10-24 | 웨이퍼 홀더 |
TW097140908A TW200919626A (en) | 2007-10-25 | 2008-10-24 | Wafer holder |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007277162A JP4857239B2 (ja) | 2007-10-25 | 2007-10-25 | ウェハ保持装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2009105295A JP2009105295A (ja) | 2009-05-14 |
JP2009105295A5 true JP2009105295A5 (ja) | 2010-12-02 |
JP4857239B2 JP4857239B2 (ja) | 2012-01-18 |
Family
ID=40583061
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007277162A Expired - Fee Related JP4857239B2 (ja) | 2007-10-25 | 2007-10-25 | ウェハ保持装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7923990B2 (ja) |
JP (1) | JP4857239B2 (ja) |
KR (1) | KR100998552B1 (ja) |
TW (1) | TW200919626A (ja) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011029217A (ja) * | 2009-07-21 | 2011-02-10 | Okawa Kanagata Sekkei Jimusho:Kk | ウェーハ用ホルダ |
EP2515322A4 (en) * | 2009-12-18 | 2017-03-01 | Nikon Corporation | Pair of substrate holders, method for manufacturing device, separation device, method for separating substrates, substrate holder, and device for positioning substrate |
RU2523356C2 (ru) * | 2012-10-16 | 2014-07-20 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Новгородский государственный университет имени Ярослава Мудрого" | Конструкция электродов для снятия электрокардиограммы |
TW201714243A (zh) * | 2015-10-05 | 2017-04-16 | Els System Technology Co Ltd | 承載裝置 |
US9881820B2 (en) * | 2015-10-22 | 2018-01-30 | Lam Research Corporation | Front opening ring pod |
JP6842948B2 (ja) * | 2017-02-24 | 2021-03-17 | リンテック株式会社 | 位置決め装置および位置決め方法 |
ES2884373T3 (es) * | 2017-06-28 | 2021-12-10 | Meyer Burger Germany Gmbh | Dispositivo para el transporte de un sustrato, dispositivo de tratamiento con una placa de alojamiento adaptada a un soporte de sustrato de tal dispositivo y procedimiento para el procesado de un sustrato bajo utilización de tal dispositivo para el transporte de un sustrato, así como planta de tratamiento |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07201948A (ja) * | 1993-12-29 | 1995-08-04 | Dainippon Screen Mfg Co Ltd | 基板搬送治具 |
US6137303A (en) * | 1998-12-14 | 2000-10-24 | Sony Corporation | Integrated testing method and apparatus for semiconductor test operations processing |
JP4128023B2 (ja) * | 2002-04-26 | 2008-07-30 | 株式会社トプコン | ウェーハ保持装置 |
JP4471747B2 (ja) * | 2004-06-24 | 2010-06-02 | アピックヤマダ株式会社 | 半導体装置の製造装置 |
JP2007109771A (ja) * | 2005-10-12 | 2007-04-26 | Matsushita Electric Ind Co Ltd | プラズマ処理装置用のトレイ |
-
2007
- 2007-10-25 JP JP2007277162A patent/JP4857239B2/ja not_active Expired - Fee Related
-
2008
- 2008-10-17 US US12/288,284 patent/US7923990B2/en not_active Expired - Fee Related
- 2008-10-24 KR KR1020080104839A patent/KR100998552B1/ko not_active IP Right Cessation
- 2008-10-24 TW TW097140908A patent/TW200919626A/zh unknown
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