JP2009054939A - 導電性ボール搭載装置 - Google Patents
導電性ボール搭載装置 Download PDFInfo
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- JP2009054939A JP2009054939A JP2007222586A JP2007222586A JP2009054939A JP 2009054939 A JP2009054939 A JP 2009054939A JP 2007222586 A JP2007222586 A JP 2007222586A JP 2007222586 A JP2007222586 A JP 2007222586A JP 2009054939 A JP2009054939 A JP 2009054939A
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- 230000003028 elevating effect Effects 0.000 claims abstract description 5
- 230000004907 flux Effects 0.000 claims description 30
- 238000003825 pressing Methods 0.000 claims description 17
- 230000002093 peripheral effect Effects 0.000 claims description 4
- 229910000679 solder Inorganic materials 0.000 abstract description 45
- 238000003860 storage Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009415 formwork Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
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- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
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- H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
- H05K3/3457—Solder materials or compositions; Methods of application thereof
- H05K3/3478—Applying solder preforms; Transferring prefabricated solder patterns
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- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
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- H01L2224/02—Bonding areas; Manufacturing methods related thereto
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- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
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- H01L2224/11—Manufacturing methods
- H01L2224/113—Manufacturing methods by local deposition of the material of the bump connector
- H01L2224/1133—Manufacturing methods by local deposition of the material of the bump connector in solid form
- H01L2224/11334—Manufacturing methods by local deposition of the material of the bump connector in solid form using preformed bumps
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- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
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- H01L2924/151—Die mounting substrate
- H01L2924/156—Material
- H01L2924/15786—Material with a principal constituent of the material being a non metallic, non metalloid inorganic material
- H01L2924/15787—Ceramics, e.g. crystalline carbides, nitrides or oxides
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- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
Abstract
【課題】
配列マスク上面と被搭載物上面との間隔を適正距離に制御することにより、ダブルボールの発生や半田ボールの切断若しくは損傷などの生じない導電性ボール搭載装置とする。
【解決手段】
導電性ボール搭載装置に次の手段を採用する。
第1に、被搭載物を吸着支持する載置面を上面に有するステージと、被搭載物の供給位置と導電性ボールの搭載位置との間のステージ移動手段と、配列マスクを介して導電性ボールを被搭載物に搭載する手段と、配列マスクと上記ステージの載置面との距離を変更可能な昇降手段とを備える。
第2に、上記供給位置に、載置面に載置された被搭載物の厚さ測定手段を設け、該供給位置で被搭載物の厚さを測定する。
第3に、上記測定した厚さに応じて搭載位置での被搭載物上面と配列マスク上面との距離が所定距離になるよう昇降手段を制御して導電性ボールを搭載する。
【選択図】 図3
Description
第1に、導電性ボールが搭載される被搭載物を吸着支持する載置面を上面に有するステージと、被搭載物が供給される供給位置と被搭載物に導電性ボールが搭載される搭載位置との間でステージを移動させるステージ移動手段と、搭載位置にて配列マスクを有し、該配列マスクを介して導電性ボールを被搭載物に搭載する搭載手段と、搭載手段の配列マスクと上記ステージの載置面との距離を変更可能な昇降手段とを備えた導電性ボールの搭載装置とする。
第2に、上記供給位置に、載置面に載置された被搭載物の厚さを測定する厚さ測定手段を設け、該供給位置で被搭載物の厚さを測定する。
第3に、上記測定した厚さに応じて搭載位置での被搭載物上面と配列マスク上面との距離が所定距離になるよう昇降手段を制御して導電性ボールを搭載する。
2......ウエハ供給部
3......フラックス印刷部
4......ボール搭載部
5......ウエハ受渡部
6......ウエハ収容部
7......一次アライメント部
8......搬入用ロボット
10.....ウエハ収納部
11.....搬出用ロボット
12.....ウエハ搬送ステージ
13.....搬送路
14.....ウエハ
15.....印刷マスク
16.....フラックス供給装置
17,37.型枠
18.....貫通孔
19.....ボール配列マスク
20.....半田ボール供給装置
21.....半田ボール
22.....吸着ステージ
23.....ボールカップ
24.....反り矯正装置
25.....厚さ測定装置
26.....アライメントマーク認識装置
27.....円形押圧部材
28.....Y軸駆動機構
29.....θ軸駆動機構
30.....Z軸駆動機構
31.....フレーム
32.....カセット
33.....クリーニングユニット
34.....ガイド
35.....ガイドピン
36.....貫通孔形成領域
38.....フラックス
39.....ナット
40.....当接面
41.....ねじ軸
42.....支持面
50.....マスク認識カメラ
Claims (4)
- 導電性ボールが搭載される被搭載物を吸着支持する載置面を上面に有するステージと、
被搭載物が供給される供給位置と被搭載物に導電性ボールが搭載される搭載位置との間でステージを移動させるステージ移動手段と、
搭載位置にて配列マスクを有し、該配列マスクを介して導電性ボールを被搭載物に搭載する搭載手段と、
搭載手段の配列マスクと上記ステージの載置面との距離を変更可能な昇降手段と
を備えた導電性ボールの搭載装置において、
供給位置に、載置面に載置された被搭載物の厚さを測定する厚さ測定手段を設け、
供給位置で被搭載物の厚さを測定し、その測定した厚さに応じて搭載位置での被搭載物上面と配列マスク上面との距離が所定距離になるよう昇降手段を制御して導電性ボールを搭載することを特徴とする導電性ボール搭載装置。
- 上記供給位置にてステージに載置された被搭載物の反りを矯正する反り矯正手段を設け、供給位置で反りを矯正してから、被搭載物の厚さを測定する請求項1に記載の導電性ボール搭載装置。
- 上記反り矯正手段は被搭載物の導電性ボールが載置される位置に形成された電極のない周辺部に当接して押さえつける押圧部材を有し、押圧部材の上面の高さを測定することにより被搭載物の厚さを測定するようにした請求項2に記載の導電性ボール搭載装置。
- 上記搭載位置に隣接して、印刷用マスクを有し、該印刷用マスクを介してフラックスを被搭載物に印刷する印刷手段を設け、上記供給位置で測定した被搭載物の厚さに応じて、被搭載物上面と印刷マスクの上面との距離が所定距離になるよう昇降手段を制御する請求項1乃至3のいずれかに記載の導電性ボール搭載装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007222586A JP5273428B2 (ja) | 2007-08-29 | 2007-08-29 | 導電性ボール搭載装置 |
US12/200,002 US20090057372A1 (en) | 2007-08-29 | 2008-08-28 | Conductive ball mounting apparatus |
DE102008044740A DE102008044740A1 (de) | 2007-08-29 | 2008-08-28 | Apparat zum Montieren leitender Kugeln |
TW097132855A TWI423354B (zh) | 2007-08-29 | 2008-08-28 | 導電球安裝裝置 |
KR1020080085040A KR101453102B1 (ko) | 2007-08-29 | 2008-08-29 | 도전성 볼 탑재 장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007222586A JP5273428B2 (ja) | 2007-08-29 | 2007-08-29 | 導電性ボール搭載装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009054939A true JP2009054939A (ja) | 2009-03-12 |
JP5273428B2 JP5273428B2 (ja) | 2013-08-28 |
Family
ID=40405815
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007222586A Active JP5273428B2 (ja) | 2007-08-29 | 2007-08-29 | 導電性ボール搭載装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20090057372A1 (ja) |
JP (1) | JP5273428B2 (ja) |
KR (1) | KR101453102B1 (ja) |
DE (1) | DE102008044740A1 (ja) |
TW (1) | TWI423354B (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101407983B1 (ko) * | 2013-10-29 | 2014-06-17 | 주식회사 포스텔 | 솔더볼 어태치용 플럭스 공급툴 |
CN112789705A (zh) * | 2018-09-28 | 2021-05-11 | 波士顿制程技术有限公司 | 多模块芯片制造装置 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101711497B1 (ko) * | 2010-10-29 | 2017-03-02 | 삼성전자주식회사 | 반도체 칩 실장 장치 |
US8523046B1 (en) * | 2012-10-18 | 2013-09-03 | International Business Machines Corporation | Forming an array of metal balls or shapes on a substrate |
JP6109609B2 (ja) * | 2013-03-14 | 2017-04-05 | Aiメカテック株式会社 | ハンダボール印刷機およびハンダボール印刷方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2004338248A (ja) * | 2003-05-16 | 2004-12-02 | Hitachi Industries Co Ltd | スクリーン印刷機 |
JP2005166908A (ja) * | 2003-12-02 | 2005-06-23 | Athlete Fa Kk | ボール搭載装置 |
JP2007088344A (ja) * | 2005-09-26 | 2007-04-05 | Athlete Fa Kk | ステージおよびこれを用いたボール充填装置 |
JP2007144397A (ja) * | 2005-09-29 | 2007-06-14 | Applied Materials Inc | 非平坦基板上でのインクジェット印刷のための方法及び装置。 |
JP2007157992A (ja) * | 2005-12-05 | 2007-06-21 | Athlete Fa Kk | 導電性ボールの搭載方法、装置、およびその制御方法 |
JP2007157741A (ja) * | 2005-11-30 | 2007-06-21 | Shibuya Kogyo Co Ltd | 導電性ボールの配列装置 |
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US6432744B1 (en) * | 1997-11-20 | 2002-08-13 | Texas Instruments Incorporated | Wafer-scale assembly of chip-size packages |
JP2006302921A (ja) * | 2005-04-15 | 2006-11-02 | Shibuya Kogyo Co Ltd | 導電性ボール搭載装置 |
JP2007222586A (ja) | 2006-02-23 | 2007-09-06 | Zenkan:Kk | 太握り洗浄ブラシ |
KR100818109B1 (ko) * | 2007-03-15 | 2008-03-31 | 주식회사 하이닉스반도체 | 볼 그리드 어레이 패키지 제조용 볼 어태치 장치 |
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JP2004338248A (ja) * | 2003-05-16 | 2004-12-02 | Hitachi Industries Co Ltd | スクリーン印刷機 |
JP2005166908A (ja) * | 2003-12-02 | 2005-06-23 | Athlete Fa Kk | ボール搭載装置 |
JP2007088344A (ja) * | 2005-09-26 | 2007-04-05 | Athlete Fa Kk | ステージおよびこれを用いたボール充填装置 |
JP2007144397A (ja) * | 2005-09-29 | 2007-06-14 | Applied Materials Inc | 非平坦基板上でのインクジェット印刷のための方法及び装置。 |
JP2007157741A (ja) * | 2005-11-30 | 2007-06-21 | Shibuya Kogyo Co Ltd | 導電性ボールの配列装置 |
JP2007157992A (ja) * | 2005-12-05 | 2007-06-21 | Athlete Fa Kk | 導電性ボールの搭載方法、装置、およびその制御方法 |
Cited By (3)
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KR101407983B1 (ko) * | 2013-10-29 | 2014-06-17 | 주식회사 포스텔 | 솔더볼 어태치용 플럭스 공급툴 |
CN112789705A (zh) * | 2018-09-28 | 2021-05-11 | 波士顿制程技术有限公司 | 多模块芯片制造装置 |
JP2022514137A (ja) * | 2018-09-28 | 2022-02-10 | ボストン プロセス テクノロジーズ,インコーポレイテッド | 複数のモジュールチップ製造構成 |
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TWI423354B (zh) | 2014-01-11 |
US20090057372A1 (en) | 2009-03-05 |
KR101453102B1 (ko) | 2014-10-27 |
TW200913104A (en) | 2009-03-16 |
JP5273428B2 (ja) | 2013-08-28 |
DE102008044740A1 (de) | 2009-04-16 |
KR20090023268A (ko) | 2009-03-04 |
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