JP2009004161A5 - - Google Patents
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- Publication number
- JP2009004161A5 JP2009004161A5 JP2007162528A JP2007162528A JP2009004161A5 JP 2009004161 A5 JP2009004161 A5 JP 2009004161A5 JP 2007162528 A JP2007162528 A JP 2007162528A JP 2007162528 A JP2007162528 A JP 2007162528A JP 2009004161 A5 JP2009004161 A5 JP 2009004161A5
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- JP
- Japan
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Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007162528A JP5156276B2 (ja) | 2007-06-20 | 2007-06-20 | 試料表面上の異物除去方法及びこれに用いる荷電粒子線装置 |
TW097110481A TWI435361B (zh) | 2007-04-16 | 2008-03-25 | 電子射線裝置及使用該電子射線裝置之試料觀察方法 |
US12/103,354 US9194826B2 (en) | 2007-04-16 | 2008-04-15 | Electron beam apparatus and sample observation method using the same |
KR1020080034830A KR101549093B1 (ko) | 2007-04-16 | 2008-04-15 | 전자선장치 및 이것을 이용한 시료관찰방법 |
JP2013032082A JP5719391B2 (ja) | 2007-06-20 | 2013-02-21 | 電子線装置及びこれを用いた試料観察方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007162528A JP5156276B2 (ja) | 2007-06-20 | 2007-06-20 | 試料表面上の異物除去方法及びこれに用いる荷電粒子線装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2009004161A JP2009004161A (ja) | 2009-01-08 |
JP2009004161A5 true JP2009004161A5 (ja) | 2009-08-27 |
JP5156276B2 JP5156276B2 (ja) | 2013-03-06 |
Family
ID=40320332
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007162528A Expired - Fee Related JP5156276B2 (ja) | 2007-04-16 | 2007-06-20 | 試料表面上の異物除去方法及びこれに用いる荷電粒子線装置 |
JP2013032082A Active JP5719391B2 (ja) | 2007-06-20 | 2013-02-21 | 電子線装置及びこれを用いた試料観察方法 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013032082A Active JP5719391B2 (ja) | 2007-06-20 | 2013-02-21 | 電子線装置及びこれを用いた試料観察方法 |
Country Status (1)
Country | Link |
---|---|
JP (2) | JP5156276B2 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101842101B1 (ko) * | 2010-08-03 | 2018-03-26 | 가부시키가이샤 에바라 세이사꾸쇼 | 이물질 부착 방지 기능을 구비한 전자선 검사 장치 및 방법 |
US9134261B2 (en) | 2013-04-22 | 2015-09-15 | Ebara Corporation | Inspection apparatus |
CN106769162B (zh) * | 2017-02-20 | 2023-06-06 | 广西大学 | 一种透射电镜磁性样品预处理器 |
US10861666B1 (en) * | 2020-01-30 | 2020-12-08 | ICT Integrated Circuit Testing Gesellschaft für Halbletterprüftechnik mbH | Method of operating a charged particle gun, charged particle gun, and charged particle beam device |
CN114555235A (zh) * | 2020-09-24 | 2022-05-27 | 株式会社创意科技 | 集尘器及集尘方法 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6431339A (en) * | 1987-07-27 | 1989-02-01 | Nikon Corp | Charged particle beam device |
JPH07161598A (ja) * | 1993-12-09 | 1995-06-23 | Tel Varian Ltd | 真空処理装置 |
JPH08298093A (ja) * | 1995-04-27 | 1996-11-12 | Topcon Corp | 走査型電子顕微鏡及び走査型電子顕微鏡における荷電粒子検出方法 |
JP3452422B2 (ja) * | 1995-05-26 | 2003-09-29 | 東京エレクトロン株式会社 | 真空処理装置 |
JP3071730B2 (ja) * | 1997-06-25 | 2000-07-31 | 九州日本電気株式会社 | イオン注入装置及びイオン注入方法 |
JP4239350B2 (ja) * | 2000-03-13 | 2009-03-18 | 株式会社ニコン | 荷電粒子ビーム装置 |
US7241993B2 (en) * | 2000-06-27 | 2007-07-10 | Ebara Corporation | Inspection system by charged particle beam and method of manufacturing devices using the system |
JP2004279163A (ja) * | 2003-03-14 | 2004-10-07 | Sony Corp | 基板検査装置及びその基板検査方法 |
JP4248382B2 (ja) * | 2003-12-04 | 2009-04-02 | 株式会社日立ハイテクノロジーズ | 荷電粒子ビームによる検査方法および検査装置 |
JP2006156134A (ja) * | 2004-11-30 | 2006-06-15 | Hitachi Ltd | 反射結像型電子顕微鏡 |
JP4679299B2 (ja) * | 2005-08-18 | 2011-04-27 | 富士通セミコンダクター株式会社 | 検査方法、検査装置および半導体装置の製造方法 |
-
2007
- 2007-06-20 JP JP2007162528A patent/JP5156276B2/ja not_active Expired - Fee Related
-
2013
- 2013-02-21 JP JP2013032082A patent/JP5719391B2/ja active Active
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