JP2008251702A - 配線基板の製造方法及び半導体装置の製造方法及び配線基板 - Google Patents
配線基板の製造方法及び半導体装置の製造方法及び配線基板 Download PDFInfo
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- JP2008251702A JP2008251702A JP2007089019A JP2007089019A JP2008251702A JP 2008251702 A JP2008251702 A JP 2008251702A JP 2007089019 A JP2007089019 A JP 2007089019A JP 2007089019 A JP2007089019 A JP 2007089019A JP 2008251702 A JP2008251702 A JP 2008251702A
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- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
【解決手段】半導体装置100は、半導体チップ110が配線基板120にフリップチップ実装してなる構成である。配線基板120は、複数の配線層と複数の絶縁層が積層された多層構造であり、第1層122、第2層124、第3層126、第4層128の絶縁層が積層された構成になっている。第1絶縁層121と第2絶縁層123との境界面には、第2電極パッド132が第1電極パッド130の外径より半径方向(平面方向)に幅広に形成されている。第1電極パッド130とビア134との間に、第1電極パッド130よりも幅広に形成された第2電極パッド132が介在することにより、リフロー処理による熱応力の進行方向が遮断され、第1絶縁層121と第2絶縁層123との境界面の沿う方向で熱応力を吸収する。
【選択図】図2
Description
さらに、クラック20が拡大された場合には、第2絶縁層13に積層された配線部16を切断してしまうおそれがあった。
本発明は、前記第2工程が、前記第1絶縁層を積層する前に前記第1電極パッドの表面を粗面化する工程を含むことにより、上記課題を解決するものである。
本発明は、前記支持基板は金属からなり、前記第1工程は、前記支持基板と前記第1電極パッドとの間に前記支持基板と同種の金属層を形成する工程を含み、前記第6工程は、前記支持基板を除去すると共に、前記金属層を除去して前記第1電極パッドの端面が凹部を形成する工程を含むことにより、上記課題を解決するものである。
本発明は、前記請求項1乃至請求項3の何れか1項に記載された配線基板の製造方法を用いた半導体装置の製造方法であって、前記第1電極パッドにはんだバンプを介して半導体チップを実装する工程を有することにより上記課題を解決するものである。
本発明は、第1電極パッドと、前記第1電極パッドの外周を囲む第1絶縁層と、前記第1電極パッドの表面及び前記第1絶縁層の表面に積層される第2絶縁層と、を有する配線基板において、前記第1電極パッドと前記第2絶縁層との間に前記第1電極パッドの外周より平面方向に幅広な第2電極パッドを設けることにより上記課題を解決するものである。
第1電極パッド130は、はんだとの接合性が良好なAu層170、Ni層172、Cu層174が積層される三層構造になっている。配線基板120の上面側(半導体チップ実装側)には、Au層170が露出されており、このAu層170には半導体チップ110のはんだバンプ180が接続される。
ハーフエッチング処理)を施して支持基板200及び電極パッド130の表面を粗面化する。尚、粗化処理によって得られる表面粗さは、例えば、Ra=0.25μm〜0.75μm程度とすることが好ましい。
絶縁層230は、支持基板200及び電極パッド130の表面が粗面化されているので、電極パッド130に対する密着性が高められ、熱応力によるデラミネーションの発生を抑制することが可能になる。
尚、支持基板200としては、2枚の支持基板200を上下方向に貼り合わせたものを用い、その上面側及び下面側の両面に配線基板120を積層することも可能である。その場合は、2枚の支持基板200を2分割してからウェットエッチングにより支持基板200を除去する。
本発明は、上記はんだバンプ180を形成する構成の半導体装置に限らず、基板に電子部品が搭載された構成、あるいは基板に配線パターンが形成された構成でも良いので、例えば、はんだバンプを介して基板上に接合されるフリップチップ、あるいははんだバンプを介して回路基板を接合させる多層基板やインターポーザにも適用することができるのは勿論である。
110 半導体チップ
120 配線基板
121 第1絶縁層
122 第1層
123 第2絶縁層
124 第2層
126 第3層
128 第4層
130 第1電極パッド
132 第2電極パッド
134,142,152 ビア
140,150 配線パターン層
160 第3電極パッド
170 Au層
172 Ni層
174 Cu層
180 はんだバンプ
200 支持基板
220 第1電極パッド形成用開口
250 第2電極パッド形成用開口
Claims (5)
- 支持基板上に第1電極パッドを形成する第1工程と、
前記支持基板の表面に前記第1電極パッドの外周を囲む第1絶縁層を積層する第2工程と、
前記第1電極パッドの表面から前記第1絶縁層の表面にかけて前記第1電極パッドの外周より平面方向に幅広な第2電極パッドを形成する第3工程と、
前記第2電極パッド及び前記第1絶縁層の表面に第2絶縁層を積層する第4工程と、
前記第2絶縁層の表面に前記第2電極パッドと電気的に接続される配線層を形成する第5工程と、
前記支持基板を除去して前記第1電極パッドを露出する第6工程と、
を有することを特徴とする配線基板の製造方法。 - 前記第2工程は、前記第1絶縁層を積層する前に前記第1電極パッドの表面を粗面化する工程を含むことを特徴とする請求項1に記載の配線基板の製造方法。
- 前記支持基板は金属からなり、
前記第1工程は、前記支持基板と前記第1電極パッドとの間に前記支持基板と同種の金属層を形成する工程を含み、
前記第6工程は、前記支持基板を除去すると共に、前記金属層を除去して前記第1電極パッドの端面が凹部を形成する工程を含むことを特徴とする請求項1または2に記載の配線基板の製造方法。 - 前記請求項1乃至請求項3の何れか1項に記載された配線基板の製造方法を用いた半導体装置の製造方法であって、
前記第1電極パッドにはんだバンプを介して半導体チップを実装する工程を有することを特徴とする半導体装置の製造方法。 - 第1電極パッドと、
前記第1電極パッドの外周を囲む第1絶縁層と、
前記第1電極パッドの表面及び前記第1絶縁層の表面に積層される第2絶縁層と、
を有する配線基板において、
前記第1電極パッドと前記第2絶縁層との間に前記第1電極パッドの外周より平面方向に幅広な第2電極パッドを設けたことを特徴とする配線基板。
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KR1020080023686A KR20080088403A (ko) | 2007-03-29 | 2008-03-14 | 배선 기판의 제조 방법, 반도체 장치의 제조 방법 및 배선기판 |
TW097110349A TWI443791B (zh) | 2007-03-29 | 2008-03-24 | 佈線基板之製造方法、半導體裝置之製造方法及佈線基板 |
US12/056,514 US20080308308A1 (en) | 2007-03-29 | 2008-03-27 | Method of manufacturing wiring board, method of manufacturing semiconductor device and wiring board |
CNA200810089127XA CN101276761A (zh) | 2007-03-29 | 2008-03-28 | 制造配线基板的方法、制造半导体器件的方法及配线基板 |
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US20080308308A1 (en) | 2008-12-18 |
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TWI443791B (zh) | 2014-07-01 |
CN101276761A (zh) | 2008-10-01 |
KR20080088403A (ko) | 2008-10-02 |
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