JP2008244096A5 - - Google Patents

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Publication number
JP2008244096A5
JP2008244096A5 JP2007081747A JP2007081747A JP2008244096A5 JP 2008244096 A5 JP2008244096 A5 JP 2008244096A5 JP 2007081747 A JP2007081747 A JP 2007081747A JP 2007081747 A JP2007081747 A JP 2007081747A JP 2008244096 A5 JP2008244096 A5 JP 2008244096A5
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JP
Japan
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JP2007081747A
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JP2008244096A (ja
JP5035884B2 (ja
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Priority to JP2007081747A priority Critical patent/JP5035884B2/ja
Priority claimed from JP2007081747A external-priority patent/JP5035884B2/ja
Priority to US12/055,633 priority patent/US8702903B2/en
Publication of JP2008244096A publication Critical patent/JP2008244096A/ja
Publication of JP2008244096A5 publication Critical patent/JP2008244096A5/ja
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Publication of JP5035884B2 publication Critical patent/JP5035884B2/ja
Expired - Fee Related legal-status Critical Current
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JP2007081747A 2007-03-27 2007-03-27 熱伝導シート及びこれを用いた被処理基板の載置装置 Expired - Fee Related JP5035884B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2007081747A JP5035884B2 (ja) 2007-03-27 2007-03-27 熱伝導シート及びこれを用いた被処理基板の載置装置
US12/055,633 US8702903B2 (en) 2007-03-27 2008-03-26 Thermally conductive sheet and substrate mounting device including same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007081747A JP5035884B2 (ja) 2007-03-27 2007-03-27 熱伝導シート及びこれを用いた被処理基板の載置装置

Publications (3)

Publication Number Publication Date
JP2008244096A JP2008244096A (ja) 2008-10-09
JP2008244096A5 true JP2008244096A5 (ja) 2010-05-06
JP5035884B2 JP5035884B2 (ja) 2012-09-26

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JP2007081747A Expired - Fee Related JP5035884B2 (ja) 2007-03-27 2007-03-27 熱伝導シート及びこれを用いた被処理基板の載置装置

Country Status (2)

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US (1) US8702903B2 (ja)
JP (1) JP5035884B2 (ja)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
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US8524005B2 (en) * 2006-07-07 2013-09-03 Tokyo Electron Limited Heat-transfer structure and substrate processing apparatus
US20090221150A1 (en) * 2008-02-29 2009-09-03 Applied Materials, Inc. Etch rate and critical dimension uniformity by selection of focus ring material
JP5430136B2 (ja) * 2008-12-08 2014-02-26 電気化学工業株式会社 部材表面の改質方法。
JP5392617B2 (ja) * 2009-03-18 2014-01-22 株式会社リコー 画像形成装置
JP5587312B2 (ja) * 2009-07-02 2014-09-10 ニッタ株式会社 機能膜付粘着テープおよび機能膜の転写方法
JP5619486B2 (ja) 2010-06-23 2014-11-05 東京エレクトロン株式会社 フォーカスリング、その製造方法及びプラズマ処理装置
JP5762798B2 (ja) * 2011-03-31 2015-08-12 東京エレクトロン株式会社 天井電極板及び基板処理載置
KR20130011569A (ko) * 2011-07-22 2013-01-30 삼성전자주식회사 콘택홀 형성 방법 및 이를 형성하기에 적합한 식각 장치
US20130240142A1 (en) * 2012-03-15 2013-09-19 Globalfoundries Singapore Pte. Ltd. Isolation between a baffle plate and a focus adapter
JP2014107387A (ja) * 2012-11-27 2014-06-09 Tokyo Electron Ltd 載置台構造及びフォーカスリングを保持する方法
US20150001180A1 (en) * 2013-06-28 2015-01-01 Applied Materials, Inc. Process kit for edge critical dimension uniformity control
JP6215002B2 (ja) 2013-10-25 2017-10-18 東京エレクトロン株式会社 フォーカスリングの製造方法及びプラズマ処理装置の製造方法
JP6261287B2 (ja) * 2013-11-05 2018-01-17 東京エレクトロン株式会社 プラズマ処理装置
KR102401501B1 (ko) * 2014-12-19 2022-05-23 어플라이드 머티어리얼스, 인코포레이티드 기판 프로세싱 챔버를 위한 에지 링
KR102424818B1 (ko) * 2015-05-27 2022-07-25 도쿄엘렉트론가부시키가이샤 플라즈마 처리 장치 및 포커스 링
DE102015112036B4 (de) * 2015-07-23 2017-05-11 Schott Ag Monolithische Unterlage zur vollflächigen Unterstützung eines Werkstücks
JP3210105U (ja) * 2016-03-04 2017-04-27 アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated ユニバーサルプロセスキット
US10199252B2 (en) * 2017-06-30 2019-02-05 Taiwan Semiconductor Manufacturing Company, Ltd. Thermal pad for etch rate uniformity
JP6982701B2 (ja) * 2018-12-05 2021-12-17 株式会社アルバック 静電チャック、真空処理装置及び基板処理方法
KR102077974B1 (ko) * 2019-08-29 2020-02-14 주식회사 기가레인 플라즈마 처리 수직도가 향상된 포커스링을 포함하는 플라즈마 처리 장치
KR102077975B1 (ko) * 2019-10-15 2020-02-14 주식회사 기가레인 플라즈마 처리 수직도가 향상된 플라즈마 처리 장치
KR102322187B1 (ko) * 2019-12-03 2021-11-04 세메스 주식회사 기판 지지 장치 및 이를 포함하는 기판 처리 장치
JP7454976B2 (ja) * 2020-03-24 2024-03-25 東京エレクトロン株式会社 基板支持台、プラズマ処理システム及びエッジリングの交換方法
KR20220027509A (ko) * 2020-08-27 2022-03-08 삼성전자주식회사 플라즈마 공정 장치 및 플라즈마 공정 장치에서의 웨이퍼 디척킹 방법

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KR100238626B1 (ko) * 1992-07-28 2000-02-01 히가시 데쓰로 플라즈마 처리장치
JP4151749B2 (ja) * 1998-07-16 2008-09-17 東京エレクトロンAt株式会社 プラズマ処理装置およびその方法
KR100292410B1 (ko) * 1998-09-23 2001-06-01 윤종용 불순물 오염이 억제된 반도체 제조용 반응 챔버
JP4417574B2 (ja) * 2000-02-14 2010-02-17 東京エレクトロン株式会社 プラズマ処理装置及びプラズマ処理方法
JP2001291807A (ja) * 2000-04-10 2001-10-19 Three M Innovative Properties Co 熱伝導性シート
JP4592916B2 (ja) * 2000-04-25 2010-12-08 東京エレクトロン株式会社 被処理体の載置装置
JP4559595B2 (ja) * 2000-07-17 2010-10-06 東京エレクトロン株式会社 被処理体の載置装置及びプラズマ処理装置
JP2003133770A (ja) * 2001-10-29 2003-05-09 Inoac Corp 放熱シート
US7232591B2 (en) * 2002-04-09 2007-06-19 Matsushita Electric Industrial Co., Ltd. Method of using an adhesive for temperature control during plasma processing
US20040173314A1 (en) * 2003-03-05 2004-09-09 Ryoji Nishio Plasma processing apparatus and method
US20040261946A1 (en) * 2003-04-24 2004-12-30 Tokyo Electron Limited Plasma processing apparatus, focus ring, and susceptor
US7658816B2 (en) * 2003-09-05 2010-02-09 Tokyo Electron Limited Focus ring and plasma processing apparatus
US7244336B2 (en) * 2003-12-17 2007-07-17 Lam Research Corporation Temperature controlled hot edge ring assembly for reducing plasma reactor etch rate drift

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