JP2008108844A - トレンチ構造またはメサ構造を有するiii族窒化物半導体装置およびその製造方法 - Google Patents
トレンチ構造またはメサ構造を有するiii族窒化物半導体装置およびその製造方法 Download PDFInfo
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- JP2008108844A JP2008108844A JP2006289056A JP2006289056A JP2008108844A JP 2008108844 A JP2008108844 A JP 2008108844A JP 2006289056 A JP2006289056 A JP 2006289056A JP 2006289056 A JP2006289056 A JP 2006289056A JP 2008108844 A JP2008108844 A JP 2008108844A
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 82
- 150000004767 nitrides Chemical class 0.000 title claims abstract description 19
- 238000004519 manufacturing process Methods 0.000 title claims description 15
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 claims abstract description 36
- 238000005530 etching Methods 0.000 claims abstract description 14
- 239000007864 aqueous solution Substances 0.000 claims description 17
- 238000001039 wet etching Methods 0.000 claims description 17
- 238000000034 method Methods 0.000 claims description 8
- 239000000243 solution Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 abstract description 7
- 229910052594 sapphire Inorganic materials 0.000 abstract description 6
- 239000010980 sapphire Substances 0.000 abstract description 6
- 230000015556 catabolic process Effects 0.000 description 12
- 238000001312 dry etching Methods 0.000 description 9
- 229910002704 AlGaN Inorganic materials 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000012670 alkaline solution Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000003776 cleavage reaction Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 238000007788 roughening Methods 0.000 description 1
- 230000007017 scission Effects 0.000 description 1
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Abstract
【解決手段】C面サファイア基板1上にGaN層2を成長させ、GaN層2上にT字型のUSG膜3を、USG膜3の側面がGaN層2のA面とM面に平行となるように作製した。その後、USG膜3をマスクとしてGaN層2をドライエッチングした。図2a、bのように、A面よりもM面の方が荒れが少ないことが分かる。次に、TMAH水溶液でウェットエッチングした。図2c、dのように、A面、M面ともに荒れが解消されていて、特にM面は鏡面状になっている。したがって、トレンチ溝側面またはメサエッチング側面をM面とすれば、III 族窒化物半導体装置のリーク電流や耐圧低下を防止できる。
【選択図】図2
Description
2:GaN層
3:USG膜
10、20:n−GaN層
11、34、42:p−GaN層
12、22、31、40、41:n+ −GaN層
13、26、37、44:絶縁膜
14、25、32:トレンチ溝
17、28:ゲート電極
21:i−GaN層
27:n−AlGaN層
33:MQW層
43:スーパージャンクション構造
Claims (14)
- Gaを必須とするIII 族窒化物半導体で構成され、トレンチ構造またはメサ構造を有する半導体装置において、
トレンチ溝側面またはメサエッチング側面のうち、少なくとも前記半導体装置を機能させる面はM面であることを特徴とする半導体装置。 - 前記トレンチ溝側面または前記メサエッチング側面すべてがM面であることを特徴とする請求項1に記載の半導体装置。
- 前記トレンチ溝側面または前記メサエッチング側面は、ウェットエッチングにより荒れが除去されていることを特徴とする請求項1または請求項2に記載の半導体装置。
- 前記ウェットエッチングに用いられる溶液は、TMAH水溶液であることを特徴とする請求項3に記載の半導体装置。
- 前記トレンチ構造または前記メサ構造により形成されたハニカム構造を有することを特徴とする請求項2ないし請求項4のいずれか1項に記載の半導体装置。
- 前記トレンチ構造または前記メサ構造により形成されたスーパージャンクション構造を有することを特徴とする請求項1ないし請求項4のいずれか1項に記載の半導体装置。
- 前記半導体装置は、HEMT、U−MOS、LED、レーザーダイオードであることを特徴とする請求項1ないし請求項6のいずれか1項に記載の半導体装置。
- 前記半導体装置は、pnダイオード、ショットキーダイオードであることを特徴とする請求項6に記載の半導体装置。
- 前記トレンチ構造または前記メサ構造により形成されたブラッグ反射鏡、レーザーダイオードの共振器に用いる鏡面、導波路を有することを特徴とする請求項1ないし請求項4のいずれか1項に記載の半導体装置。
- Gaを必須とするIII 族窒化物半導体で構成され、トレンチ構造またはメサ構造を有する半導体装置において、
トレンチ溝側面またはメサエッチング側面のうち、少なくとも前記半導体装置を機能させる面はA面であり、
前記トレンチ溝側面または前記メサエッチング側面は、TMAH水溶液により荒れが除去されていること、
を特徴とする半導体装置。 - Gaを必須とするIII 族窒化物半導体で構成され、トレンチ構造またはメサ構造を有する半導体装置の製造方法において、
トレンチ溝側面またはメサエッチング側面のうち、少なくとも半導体装置を機能させる面はM面となるようにトレンチ構造またはメサ構造を形成する工程、
を有することを特徴とする半導体装置の製造方法。 - 前記トレンチ溝側面または前記メサエッチング側面は、すべてM面であることを特徴とする請求項11に記載の半導体装置の製造方法。
- 前記トレンチ構造またはメサ構造を形成する工程の後、前記トレンチ溝側面または前記メサエッチング側面をウェットエッチングすることでダメージを除去する工程、を有することを特徴とする請求項11または請求項12に記載の半導体装置の製造方法。
- 前記ウェットエッチングに用いられる溶液は、TMAH水溶液であることを特徴とする請求項11ないし請求項13のいずれか1項に記載の半導体装置の製造方法。
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