JP2008100298A - Multi-wire saw apparatus, and method for adjusting multi-wire saw apparatus - Google Patents

Multi-wire saw apparatus, and method for adjusting multi-wire saw apparatus Download PDF

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JP2008100298A
JP2008100298A JP2006283022A JP2006283022A JP2008100298A JP 2008100298 A JP2008100298 A JP 2008100298A JP 2006283022 A JP2006283022 A JP 2006283022A JP 2006283022 A JP2006283022 A JP 2006283022A JP 2008100298 A JP2008100298 A JP 2008100298A
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wire
rollers
wire saw
main rollers
workpiece
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Junya Todoroki
潤也 等々力
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Seiko Epson Corp
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Seiko Epson Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a multi-wire saw apparatus which can equally carry out precise machining for a plurality of workpieces even when the rotary axis of a roller is tilted, and further to provide a method for adjusting the multi-wire saw apparatus. <P>SOLUTION: The multi-wire saw apparatus comprises two principal rollers and one auxiliary roller, wherein the base ends of the rotary shafts of the rollers is supported in a cantilever state by means of a supporting member. A plurality of grooves 25 are provided on the outer circumferential surfaces of the two principal rollers in the circumferential direction in parallel with each other in the axial direction of the rotary shafts. A wire is wound on the outer peripheries of the two principal rollers and the auxiliary roller along the grooves 25 several times. A workpiece 100 is machined by bringing the wire 45 running between the two principal rollers into contact with the workpiece 100 put on a table. The table is arranged between the wire 45 and the auxiliary roller. The groove 25 of the two principal rollers is formed so as to be shallow on the base end side of the rotary shafts and so as to be deep on the tip end side of the rotary shafts. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、マルチワイヤソー装置及びマルチワイヤソー装置の調整方法に関し、特に回転軸の基端が支持部材に片持支持されたローラを有するマルチワイヤソー装置及びマルチワイヤソー装置の調整方法に適用して有用なものである。   The present invention relates to a multi-wire saw device and a multi-wire saw device adjustment method, and particularly useful when applied to a multi-wire saw device having a roller whose base end of a rotating shaft is cantilevered by a support member and a multi-wire saw device adjustment method. Is.

シリコンウエハ上に形成された複数の半導体素子などの被加工物を複数同時に加工する装置として、マルチワイヤソー装置が知られている。マルチワイヤソー装置としては、例えば、２つの本ローラと補助ローラとを備え、本ローラの外周面に周方向に設けられた溝が回転軸の軸方向に沿って複数並設され、その溝に沿って２つの本ローラ及び補助ローラの外周にワイヤを複数回巻きかけ、本ローラ間を走行するワイヤを被加工物に接触走行させることによって複数の被加工物を加工するものが挙げられる（例えば、特許文献１〜３参照）。そして、このような構造をしたマルチワイヤソー装置の１つに、本ローラ及び補助ローラを支持部材に片持支持させることにより、作業効率やメンテナンス効率を向上させたものがある。   A multi-wire saw apparatus is known as an apparatus for simultaneously processing a plurality of workpieces such as a plurality of semiconductor elements formed on a silicon wafer. As the multi-wire saw device, for example, two main rollers and an auxiliary roller are provided, and a plurality of grooves provided in the circumferential direction on the outer peripheral surface of the main roller are arranged in parallel along the axial direction of the rotation shaft, and along the grooves. The wire is wound around the outer circumferences of the two main rollers and the auxiliary roller a plurality of times, and the plurality of workpieces are processed by causing the wire running between the main rollers to contact and run on the workpiece (for example, Patent Literatures 1 to 3). One of the multi-wire saw devices having such a structure is one in which the main roller and the auxiliary roller are cantilevered by a support member, thereby improving work efficiency and maintenance efficiency.

特開平７−１０６２８８号公報Japanese Patent Laid-Open No. 7-106288 特開平１１−２９１１５４号公報JP-A-11-291154 特開２００２−１６０１５２号公報JP 2002-160152 A

しかしながら、このような各ローラを片持支持する構造のマルチワイヤソー装置では、各ローラを回転軸の基端で支持することになるので、各ローラの外周に巻きかけられたワイヤの張力によって各ローラの回転軸の先端が他のローラが支持されている方向に傾斜してしまい、すべての被加工物に対して同様の精密加工をすることができないという問題があった。具体的には、２つの本ローラの先端が補助ローラが支持されている方向に傾斜してしまい、被加工物と本ローラ間を走行するワイヤとの距離が本ローラの基端から先端に向かって傾斜することになる。そして、このような状態のマルチワイヤソー装置を用いて複数の被加工物に対して切り込み加工を行うと、例えば図８に示すように、本ローラの基端側の被加工物への切り込みの深さと先端側の被加工物への切り込みの深さとが異なってしまい、複数の被加工物に対して同様の切り込み加工をすることができないという問題があった。   However, in such a multi-wire saw apparatus having a structure in which each roller is cantilevered, each roller is supported by the base end of the rotating shaft, so that each roller is caused by the tension of the wire wound around the outer periphery of each roller. The tip of the rotation shaft is inclined in the direction in which the other rollers are supported, and the same precision machining cannot be performed on all workpieces. Specifically, the tips of the two main rollers are inclined in the direction in which the auxiliary roller is supported, and the distance between the workpiece and the wire running between the main rollers is from the base end of the main roller to the tip. Will be inclined. When a multi-wire saw device in such a state is used to cut a plurality of workpieces, for example, as shown in FIG. 8, the depth of cut into the workpiece on the proximal end side of the roller is obtained. And the depth of the cut into the workpiece on the front end side are different, and there is a problem in that the same cutting process cannot be performed on a plurality of workpieces.

本発明は、このような事情に鑑み、本ローラの回転軸が傾斜していても、複数の被加工物に対して同様の精密加工をすることができるマルチワイヤソー装置及びマルチワイヤソー装置の調整方法を提供することを目的とする。   In view of such circumstances, the present invention provides a multi-wire saw apparatus and a multi-wire saw apparatus adjustment method capable of performing the same precision machining on a plurality of workpieces even when the rotation shaft of the present roller is inclined. The purpose is to provide.

本発明の態様は、回転軸の基端が支持部材に片持支持される２つの本ローラと、補助ローラとを有し、当該２つの本ローラの外周面に周方向に設けられた溝が回転軸の軸方向に沿って複数並設され、該溝に沿って前記２つの本ローラ及び前記補助ローラの外周にワイヤを複数回巻きかけて、前記２つの本ローラ間を走行するワイヤをテーブルに載置された被加工物に接触走行させることによって前記被加工物を加工するマルチワイヤソー装置であって、前記テーブルはワイヤと前記補助ローラとの間に配置され、前記２つの本ローラの溝は、回転軸の基端側が浅く、先端側が深くなるように形成されていることを特徴とするマルチワイヤソー装置にある。
かかる態様では、本ローラがワイヤの張力などによって傾斜しても、テーブルに対するワイヤの位置を水平にすることができるので、複数の被加工物に対して同様の精密加工をすることができる。 The aspect of the present invention includes two main rollers whose base ends of the rotating shaft are cantilevered and supported by a support member, and auxiliary rollers, and grooves provided in the circumferential direction on the outer peripheral surfaces of the two main rollers. A plurality of wires are arranged in parallel along the axial direction of the rotating shaft, and a wire that travels between the two main rollers is wound around the outer periphery of the two main rollers and the auxiliary roller along the groove. A multi-wire saw device for processing the workpiece by causing the workpiece placed on the substrate to contact and travel, wherein the table is disposed between the wire and the auxiliary roller, and the grooves of the two main rollers The multi-wire saw apparatus is characterized in that the base end side of the rotating shaft is shallow and the tip end side is deep.
In this aspect, even if the present roller is inclined due to the tension of the wire or the like, the position of the wire with respect to the table can be made horizontal, so that the same precision machining can be performed on a plurality of workpieces.

ここで、前記２つの本ローラの溝は、回転軸の基端から先端に向かって漸次深くなるように形成されていることが好ましい。
このようにしても、第１の態様と同様の効果が得られる。 Here, it is preferable that the grooves of the two main rollers are formed so as to gradually become deeper from the base end to the tip end of the rotating shaft.
Even if it does in this way, the effect similar to a 1st aspect will be acquired.

また、前記２つの本ローラの溝の深さは、前記２本の本ローラが傾斜した際の回転軸と前記テーブルの表面とがなす角度に基づいて設定されることが好ましい。
これによれば、複数の被加工物に対して同様の精密加工をすることができるマルチワイヤソー装置を容易に製造することができる。 Moreover, it is preferable that the depth of the groove of the two main rollers is set based on an angle formed between the rotation shaft and the surface of the table when the two main rollers are inclined.
According to this, the multi-wire saw apparatus which can perform the same precision processing with respect to several workpieces can be manufactured easily.

本発明の他の態様は、回転軸の基端が支持部材に片持支持される２つの本ローラと、補助ローラとを有し、当該２つの本ローラの外周面には周方向に設けられた溝が回転軸の軸方向に沿って複数並設され、該溝に沿って前記２つの本ローラ及び前記補助ローラの外周にワイヤを複数回巻きかけて、前記２つの本ローラ間を走行するワイヤをテーブルに載置された被加工物に接触走行させることによって前記被加工物を加工するマルチワイヤソー装置であって、ワイヤが前記被加工物に対して均等に接触走行できるように、前記２つの本ローラの溝の深さを調整することを特徴とするマルチワイヤソー装置の調整方法にある。
かかる態様では、複数の被加工物に対して同様の精密加工をすることができるように、マルチワイヤソー装置を調整することができる。 Another aspect of the present invention includes two main rollers whose base ends of the rotating shaft are cantilevered and supported by a support member, and an auxiliary roller, and the outer peripheral surfaces of the two main rollers are provided in the circumferential direction. A plurality of grooves are provided side by side along the axial direction of the rotary shaft, and a wire is wound around the outer periphery of the two main rollers and the auxiliary roller along the grooves to run between the two main rollers. A multi-wire saw device for processing a workpiece by causing the wire to contact and travel to a workpiece placed on a table, wherein the wire can be uniformly contacted and traveled to the workpiece. An adjustment method of a multi-wire saw device is characterized in that the depth of a groove of two main rollers is adjusted.
In this aspect, the multi-wire saw device can be adjusted so that the same precision machining can be performed on a plurality of workpieces.

以下に、本発明を実施形態に基づいて詳細に説明する。
（実施形態１）
図１は、実施形態１に係るマルチワイヤソー装置の概略正面図であり、図２は図１に示すＡ方向から見た際の本実施形態に係るマルチワイヤソー装置の拡大概略側面図である。なお、図２では、後述するテーブル及び被加工物は図示していない。 Hereinafter, the present invention will be described in detail based on embodiments.
(Embodiment 1)
FIG. 1 is a schematic front view of the multi-wire saw device according to the first embodiment, and FIG. 2 is an enlarged schematic side view of the multi-wire saw device according to the present embodiment when viewed from the direction A shown in FIG. In FIG. 2, a table and a workpiece to be described later are not shown.

図１及び図２に示すように、本実施形態に係るマルチワイヤソー装置１は、本ローラである第１及び第２の各ローラ１０、２０と、補助ローラである第３のローラ３０とを有している。第１〜第３の各ローラ１０〜３０は、各回転軸の基端が支持部材８０に片持支持されている。そして、第１及び第２の各ローラ１０、２０は水平に配置されると共に、第３のローラ３０は第１及び第２の各ローラ１０、２０よりも下方に配置されている。   As shown in FIGS. 1 and 2, the multi-wire saw device 1 according to the present embodiment includes first and second rollers 10 and 20 that are main rollers and a third roller 30 that is an auxiliary roller. is doing. In each of the first to third rollers 10 to 30, the base end of each rotating shaft is cantilevered by the support member 80. The first and second rollers 10 and 20 are disposed horizontally, and the third roller 30 is disposed below the first and second rollers 10 and 20.

そして、図２に示すように、第１のローラ１０の外周面には周方向に設けられた溝１５が回転軸の軸方向に沿って複数並設されると共に、第２のローラ２０の外周面には周方向に設けられた溝２５が回転軸の軸方向に沿って複数並設されている。これらの各溝１５、２５は一定間隔で形成されており、その間隔は後述する被加工物に形成される切り込みに対応して適宜設定される。なお、本実施形態では各溝１５、２５を一定間隔で形成したが、その間隔は一定でなくてもよい。   As shown in FIG. 2, a plurality of grooves 15 provided in the circumferential direction are provided side by side along the axial direction of the rotation shaft on the outer circumferential surface of the first roller 10, and the outer circumference of the second roller 20. A plurality of grooves 25 provided in the circumferential direction are arranged on the surface along the axial direction of the rotation shaft. Each of these grooves 15 and 25 is formed at a constant interval, and the interval is appropriately set corresponding to a cut formed in a workpiece to be described later. In the present embodiment, the grooves 15 and 25 are formed at regular intervals, but the intervals may not be constant.

第１〜第３の各ローラ１０〜３０の外周にはワイヤ４０が巻きかけられており、第１のローラ１０と第２のローラ２０との間に位置する部分のワイヤ４５の下側には、被加工物１００を複数載置した水平表面を有するテーブル５０が上下方向に移動自在に設けられている。そして、テーブル５０とワイヤ４５との距離を制御することによって被加工物１００に形成される切り込みの深さなどを制御することができるようになっている。   A wire 40 is wound around the outer periphery of each of the first to third rollers 10 to 30, and a portion located between the first roller 10 and the second roller 20 is below the wire 45. A table 50 having a horizontal surface on which a plurality of workpieces 100 are placed is provided so as to be movable in the vertical direction. The depth of the cut formed in the workpiece 100 can be controlled by controlling the distance between the table 50 and the wire 45.

ワイヤ４０は、第１及び第２の各ローラ１０、２０の各溝１５、２５に沿って第１〜第３の各ローラ１０〜３０の外周に一定間隔で複数回巻きかけられているが、ワイヤ４０の巻きかけられ方は部分的に異なっており、被加工物１００の切り込み位置を自在に設定することができるようになっている。すなわち、部分的にワイヤ４０の巻きかけられ方を変更することによって被加工物１００に対して自在に切り込み形成することができる。具体的には、ワイヤ４０を第１及び第２の各ローラ１０、２０の外周に巻きかけることによって被加工物１００に接触走行させて切り込みを形成する部分（ワイヤ４５）を形成すると共に、第１〜第３の各ローラ１０〜３０の外周に巻きかけることによって被加工物１００と接触しない部分（ワイヤ４７）を形成する。図２では、基端側に位置するワイヤ４０を第１〜第３の各ローラ１０〜３０の外周に巻きかけることによって、被加工物１００の基端側の部分に切り込みを形成しないようになっている。このようにワイヤ４０の巻きかけ方を変更するとによって、被加工物に対して自在に切り込みを形成することができる。なお、本実施形態では、１本のワイヤ４０が、第１〜第３の各ローラ１０〜３０に螺旋状に巻きかけられたマルチワイヤソー装置１を例示したが、勿論、複数のワイヤが第１〜第３の各ローラ１０〜３０に螺旋状に巻きかけられるようにしてもよい。   The wire 40 is wound around the outer circumferences of the first to third rollers 10 to 30 a plurality of times at regular intervals along the grooves 15 and 25 of the first and second rollers 10 and 20. The manner in which the wire 40 is wound is partially different, and the cutting position of the workpiece 100 can be freely set. That is, it is possible to freely cut and form the workpiece 100 by partially changing the manner in which the wire 40 is wound. Specifically, by winding the wire 40 around the outer periphery of each of the first and second rollers 10 and 20, a portion (wire 45) that forms a cut by contacting the workpiece 100 and forming a cut is formed. A portion (wire 47) that does not come into contact with the workpiece 100 is formed by winding the outer periphery of each of the first to third rollers 10-30. In FIG. 2, the wire 40 positioned on the base end side is wound around the outer periphery of each of the first to third rollers 10 to 30, so that the notch is not formed in the base end side portion of the workpiece 100. ing. By changing the winding method of the wire 40 in this manner, it is possible to freely form a cut on the workpiece. In the present embodiment, the multi-wire saw device 1 in which one wire 40 is spirally wound around each of the first to third rollers 10 to 30 is exemplified. Of course, a plurality of wires are the first. -You may make it wind around the 3rd rollers 10-30 spirally.

ここで、上述したようにワイヤ４０を第１〜第３の各ローラ１０〜３０に巻きかけると、ワイヤ４０の張力によって第１及び第２の各ローラ１０、２０の先端は下方に傾斜し、第３のローラ３０の先端は上方に傾斜することになる。図３にワイヤの張力によって傾斜した際の第２のローラの概略図を示し、図４に第２のローラの外周面に形成された溝の概略断面図を示す。   Here, when the wire 40 is wound around each of the first to third rollers 10 to 30 as described above, the tips of the first and second rollers 10 and 20 are inclined downward due to the tension of the wire 40, The tip of the third roller 30 is inclined upward. FIG. 3 shows a schematic view of the second roller when tilted by the tension of the wire, and FIG. 4 shows a schematic cross-sectional view of a groove formed on the outer peripheral surface of the second roller.

図３に示すように、第２のローラ２０の先端は、ワイヤ４０の張力によって、ワイヤ４０を巻きかける前の第２のローラ２０の回転軸（原回転軸Ｈ）に対して下方に角度θ傾斜する。したがって、第２のローラ２０は、原回転軸Ｈに対して下方に角度θ傾斜した回転軸Ｘを中心として回転することになる。なお、第２のローラ２０の先端は、さらに第１のローラ１０側、すなわち右側に傾斜していてもよい。   As shown in FIG. 3, the tip of the second roller 20 has an angle θ downward with respect to the rotation axis (original rotation axis H) of the second roller 20 before winding the wire 40 due to the tension of the wire 40. Tilt. Therefore, the second roller 20 rotates about the rotation axis X inclined downward by the angle θ with respect to the original rotation axis H. Note that the tip of the second roller 20 may be further inclined to the first roller 10 side, that is, the right side.

ここで、第２のローラ２０の外周面には、図４に示すように、第２のローラ２０の回転軸Ｘの基端から先端に向かって漸次深くなるような溝２５が形成されているので、複数（Ａ列〜Ｄ列）の被加工物１００に対して同じ深さの切り込みを形成することができるようになっている。すなわち、第２のローラ２０の外周面には、第２のローラ２０が傾斜した状態であっても、テーブル５０の表面に対してすべてのワイヤ４５の位置が水平になるような深さｈの溝２５が形成されているので、すべてのワイヤ４５をＡ列〜Ｄ列の被加工物１００に均等に接触させることができる。したがって、Ａ列〜Ｄ列の被加工物１００に対して同じ深さの切り込みを形成することができる。   Here, as shown in FIG. 4, a groove 25 is formed on the outer peripheral surface of the second roller 20 so as to gradually become deeper from the base end of the rotation axis X of the second roller 20 toward the tip end. Therefore, it is possible to form cuts having the same depth with respect to a plurality of workpieces 100 (rows A to D). That is, the outer peripheral surface of the second roller 20 has a depth h such that all the wires 45 are horizontal with respect to the surface of the table 50 even when the second roller 20 is inclined. Since the grooves 25 are formed, all the wires 45 can be evenly brought into contact with the workpieces 100 in the A to D rows. Therefore, the same depth of cut can be formed in the workpieces 100 in the A to D rows.

これらの溝２５の深さｈは、原回転軸Ｈと第２のローラ２０の回転軸Ｘとのなす角（θ）に基づいて形成してもよいし、マルチワイヤソー装置１を製作した後でテーブル５０の表面に対して、すべてのワイヤ４５位置が水平になるように形成してもよい。   The depths h of these grooves 25 may be formed based on the angle (θ) formed by the original rotary shaft H and the rotary shaft X of the second roller 20, or after the multi-wire saw device 1 is manufactured. You may form so that the position of all the wires 45 may become horizontal with respect to the surface of the table 50. FIG.

以上、第２のローラ２０について説明したが、第１のローラ１０についても同様である。   The second roller 20 has been described above, but the same applies to the first roller 10.

このようなマルチワイヤソー装置１は、第１〜第３の各ローラ１０〜３０を回転させて、ワイヤ４０を図１に示す図中矢印で示す方向に移動させながら、テーブル５０を図中上方に移動させ、スラリーを供給しながらワイヤ４５を被加工物１００に接触走行させることによって、Ａ列〜Ｄ列の被加工物に複数の切り込みを形成することができる。   Such a multi-wire saw device 1 rotates the first to third rollers 10 to 30 to move the wire 40 in the direction indicated by the arrow in FIG. 1 while moving the table 50 upward in the drawing. By moving and moving the wire 45 in contact with the workpiece 100 while supplying the slurry, a plurality of cuts can be formed in the workpieces in the A row to the D row.

（他の実施形態）
以上、本発明の一実施形態について説明したが、勿論、本発明は、この実施形態に限定されるものではない。例えば、実施形態１では、切り込み加工を一例にして本発明を説明したが、切断加工などはじめとして様々な加工処理においても適用することができる。 (Other embodiments)
As mentioned above, although one embodiment of the present invention was described, of course, the present invention is not limited to this embodiment. For example, in the first embodiment, the present invention has been described by taking a cutting process as an example. However, the present invention can be applied to various processing processes such as a cutting process.

また、実施形態１では、第１及び第２の各ローラ１０、２０の外周面に形成された溝２５の深さｈは、各ローラの回転軸の基端から先端に向かって漸次深くなるように形成されていたが、テーブル５０の表面に対してワイヤ４５の位置を水平にすることができるように、各ローラの回転軸の基端側が浅く、先端側が深くなるように形成されていれば特に限定されない。   In the first embodiment, the depth h of the groove 25 formed on the outer peripheral surface of each of the first and second rollers 10 and 20 is gradually increased from the base end to the front end of the rotation shaft of each roller. If the base end side of the rotation shaft of each roller is shallow and the tip end side is deep so that the position of the wire 45 can be horizontal with respect to the surface of the table 50 There is no particular limitation.

さらに、実施形態１では、第３のローラ、すなわち１つの補助ローラを有するマルチワイヤソー装置を例示したが、補助ローラは１つに限定されず、複数あってもよい。   Furthermore, in Embodiment 1, although the multi-wire saw apparatus which has a 3rd roller, ie, one auxiliary roller, was illustrated, the number of auxiliary rollers is not limited to one, and there may be a plurality.

＜実施例＞
図５に示すように、第１及び第２の各ローラ１０、２０の各溝１５、２５の深さを回転軸の基端から先端に向かって漸次深くなるように形成し、それらの各ローラ１０、２０を備えたマルチワイヤソー装置１を用いて、図３に示したようなＡ列〜Ｄ列の被加工物１００に切り込み加工を行なった。第１及び第２の各ローラ１０、２０が基端から先端に向けて漸次傾斜していることに対応して、第１及び第２の各ローラ１０、２０の各溝１５、２５の深さを回転軸の基端から先端に向かって漸次深くなるように形成しているので、被加工物１００に接触する複数のワイヤ４５は被加工面に対して水平になるような配置になる。よって、被加工物１００に複数の溝を形成する際に、深さばらつきが抑制された加工溝が形成できる。ここで、ワイヤ４０としては金属めっきを施したピアノ線を用い、被加工物１００としてはシリコン基板を用いた。 <Example>
As shown in FIG. 5, the grooves 15 and 25 of the first and second rollers 10 and 20 are formed so that the depth gradually increases from the base end to the tip end of the rotating shaft. Using the multi-wire saw device 1 including 10 and 20, the workpieces 100 in rows A to D as shown in FIG. Corresponding to the fact that the first and second rollers 10 and 20 are gradually inclined from the proximal end toward the distal end, the depths of the grooves 15 and 25 of the first and second rollers 10 and 20 respectively. Are formed so as to gradually become deeper from the base end to the tip end of the rotation shaft, so that the plurality of wires 45 contacting the workpiece 100 are arranged so as to be horizontal to the processing surface. Therefore, when forming a plurality of grooves on the workpiece 100, it is possible to form a processed groove in which variation in depth is suppressed. Here, a piano wire subjected to metal plating was used as the wire 40, and a silicon substrate was used as the workpiece 100.

＜比較例＞
第１及び第２の各ローラ１０、２０の各溝１５、２５の深さを一定としたこと以外は実施例と同様にして切り込み加工を行った。 <Comparative example>
Cutting was performed in the same manner as in the example except that the depths of the grooves 15 and 25 of the first and second rollers 10 and 20 were constant.

＜実験結果＞
図６及び図７に、実施例及び比較例における被加工物１００の切り込み差を示し、表１に実施例及び比較例における切り込み差の平均値、分散及びＣＰＫを示す。ここで、Ａ列〜Ｄ列の被加工物１００は、第１のローラ１０から第２のローラ２０を長手方向とする矩形状をしているので、各被加工物１００に対して第１のローラ１０側部分での切り込みの深さ、中央部での切り込みの深さ及び第２のローラ２０側部分での切り込みの深さをそれぞれ測定した。なお、図６及び図７では代表的な位置における切込みの深さを示している。また、表１におけるＣＰＫとは、量産化の指標となる数値であり、ＣＰＫ＝（平均値−規格値）／３σで算出され、１．０以上であれば量産化可能であることを示すものである。なお、ここでは規格値として、０．５を用いた。 <Experimental result>
6 and 7 show the cut difference of the workpiece 100 in the example and the comparative example, and Table 1 shows the average value, variance, and CPK of the cut difference in the example and the comparative example. Here, the workpieces 100 in the A row to the D row have a rectangular shape with the first roller 10 to the second roller 20 in the longitudinal direction. The depth of cut at the roller 10 side portion, the depth of cut at the center portion, and the depth of cut at the second roller 20 side portion were measured. 6 and 7 show the depth of cut at typical positions. Further, CPK in Table 1 is a numerical value that is an index for mass production, calculated as CPK = (average value−standard value) / 3σ, and indicates that mass production is possible if it is 1.0 or more. It is. Here, 0.5 is used as the standard value.

Figure 2008100298
Figure 2008100298

図６と図７とを比較すると、図７では各切り込みの深さはＡ列〜Ｄ列に向かうにつれて大きくなっているが、図６では各切り込みの深さが比較的均一であることが分かった。すなわち、第１及び第２の各ローラ１０、２０の溝の深さを回転軸の基端から先端に向かって漸次深くなるように形成することによって、被加工物１００に対して均一の深さで切り込み加工をすることができることが分かった。また、実施例のＣＰＫは１．０を超えており、量産化可能であることが分かった。   Comparing FIG. 6 and FIG. 7, in FIG. 7, the depth of each notch increases as it goes from row A to row D, but in FIG. 6, it can be seen that the depth of each notch is relatively uniform. It was. That is, by forming the depth of the grooves of the first and second rollers 10 and 20 so as to gradually become deeper from the base end to the tip end of the rotating shaft, a uniform depth with respect to the workpiece 100 is obtained. It was found that cutting can be done with Moreover, CPK of the Example exceeded 1.0, and it was found that mass production is possible.

実施形態１に係るマルチワイヤソー装置の概略正面図である。1 is a schematic front view of a multi-wire saw device according to Embodiment 1. FIG. 図１に示すＡ方向のマルチワイヤソー装置の拡大概略側面図である。It is an expansion schematic side view of the multi-wire saw apparatus of the A direction shown in FIG. ワイヤの張力によって傾斜した際の第２のローラの概略図である。It is the schematic of the 2nd roller at the time of inclining with the tension | tensile_strength of a wire. 第２のローラに形成された溝の概略断面図である。It is a schematic sectional drawing of the groove | channel formed in the 2nd roller. 実施例における第１及び第２の各ローラの溝の深さを示すグラフである。It is a graph which shows the depth of the groove | channel of each 1st and 2nd roller in an Example. 実施例における被加工物の表面からの切り込みの深さを示すグラフである。It is a graph which shows the depth of the incision from the surface of the workpiece in an Example. 比較例における被加工物の表面からの切り込みの深さを示すグラフである。It is a graph which shows the depth of the incision from the surface of the workpiece in a comparative example. 傾斜したローラを用いて被加工物に切り込み加工をした際の概略図である。It is the schematic at the time of carrying out the cutting process to the to-be-processed object using the inclined roller.

符号の説明Explanation of symbols

１ マルチワイヤソー装置、 １０〜３０ ローラ、 １５，２５ 溝、 ４０，４５，４７ ワイヤ、 ５０ テーブル、 ８０ 支持部材、 １００ 被加工物、 θ 傾斜角、 ｈ 溝の深さ   1 Multi-wire saw device, 10-30 rollers, 15, 25 grooves, 40, 45, 47 wires, 50 tables, 80 support members, 100 work piece, θ inclination angle, h groove depth

Claims (4)

回転軸の基端が支持部材に片持支持される２つの本ローラと、補助ローラとを有し、当該２つの本ローラの外周面に周方向に設けられた溝が回転軸の軸方向に沿って複数並設され、該溝に沿って前記２つの本ローラ及び前記補助ローラの外周にワイヤを複数回巻きかけて、前記２つの本ローラ間を走行するワイヤをテーブルに載置された被加工物に接触走行させることによって前記被加工物を加工するマルチワイヤソー装置であって、前記テーブルはワイヤと前記補助ローラとの間に配置され、前記２つの本ローラの溝は、回転軸の基端側が浅く、先端側が深くなるように形成されていることを特徴とするマルチワイヤソー装置。 The main shaft of the rotating shaft has two main rollers that are cantilevered and supported by a support member, and an auxiliary roller. A groove provided in the circumferential direction on the outer peripheral surface of the two main rollers extends in the axial direction of the rotating shaft A plurality of wires are juxtaposed along the groove, a wire is wound around the outer periphery of the two main rollers and the auxiliary roller a plurality of times, and the wire traveling between the two main rollers is placed on a table. A multi-wire saw apparatus for processing the workpiece by causing the workpiece to contact and travel, wherein the table is disposed between a wire and the auxiliary roller, and the grooves of the two main rollers are formed on a base of a rotating shaft. A multi-wire saw device characterized in that the end side is shallow and the tip side is deep. 前記２つの本ローラの溝は、回転軸の基端から先端に向かって漸次深くなるように形成されていることを特徴とする請求項１に記載のマルチワイヤソー装置。 2. The multi-wire saw device according to claim 1, wherein the grooves of the two main rollers are formed so as to gradually become deeper from the base end to the tip end of the rotation shaft. 前記２つの本ローラの溝の深さは、前記２本の本ローラが傾斜した際の回転軸と前記テーブルの表面とがなす角度に基づいて設定されることを特徴とする請求項１又は２に記載のマルチワイヤソー装置。 The depth of the groove of the two main rollers is set based on an angle formed by a rotation shaft and the surface of the table when the two main rollers are inclined. A multi-wire saw device according to claim 1. 回転軸の基端が支持部材に片持支持される２つの本ローラと、補助ローラとを有し、当該２つの本ローラの外周面には周方向に設けられた溝が回転軸の軸方向に沿って複数並設され、該溝に沿って前記２つの本ローラ及び前記補助ローラの外周にワイヤを複数回巻きかけて、前記２つの本ローラ間を走行するワイヤをテーブルに載置された被加工物に接触走行させることによって前記被加工物を加工するマルチワイヤソー装置であって、ワイヤが前記被加工物に対して均等に接触走行できるように、前記２つの本ローラの溝の深さを調整することを特徴とするマルチワイヤソー装置の調整方法。 The main shaft of the rotating shaft has two main rollers that are cantilevered and supported by a support member, and an auxiliary roller. A circumferential groove is formed on the outer peripheral surface of the two main rollers in the axial direction of the rotating shaft. A plurality of wires are juxtaposed along the groove, a wire is wound around the outer periphery of the two main rollers and the auxiliary roller a plurality of times, and the wire traveling between the two main rollers is placed on the table. A multi-wire saw device that processes the workpiece by causing the workpiece to contact and travel, and the depth of the grooves of the two main rollers so that the wire can uniformly travel and contact the workpiece. A method of adjusting a multi-wire saw device, characterized by adjusting
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