JP2008084920A - 半導体装置およびその製造方法 - Google Patents
半導体装置およびその製造方法 Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 39
- 238000004519 manufacturing process Methods 0.000 title claims description 12
- 238000007789 sealing Methods 0.000 claims abstract description 125
- 239000000945 filler Substances 0.000 claims abstract description 21
- 238000000034 method Methods 0.000 claims description 35
- 239000011347 resin Substances 0.000 claims description 33
- 229920005989 resin Polymers 0.000 claims description 33
- 239000007788 liquid Substances 0.000 claims description 17
- 239000000758 substrate Substances 0.000 claims description 16
- 238000007650 screen-printing Methods 0.000 claims description 9
- 238000010438 heat treatment Methods 0.000 claims description 6
- 229910000679 solder Inorganic materials 0.000 claims description 5
- 238000004528 spin coating Methods 0.000 claims description 4
- 238000005498 polishing Methods 0.000 claims 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 15
- 230000001681 protective effect Effects 0.000 abstract description 15
- 230000015572 biosynthetic process Effects 0.000 abstract description 9
- 239000003822 epoxy resin Substances 0.000 abstract description 8
- 229920000647 polyepoxide Polymers 0.000 abstract description 8
- 235000012431 wafers Nutrition 0.000 description 125
- 239000002184 metal Substances 0.000 description 16
- 229910052751 metal Inorganic materials 0.000 description 16
- 238000007639 printing Methods 0.000 description 14
- 238000005755 formation reaction Methods 0.000 description 8
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 6
- 229910052802 copper Inorganic materials 0.000 description 6
- 239000010949 copper Substances 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 239000010953 base metal Substances 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 230000002093 peripheral effect Effects 0.000 description 4
- 239000004850 liquid epoxy resins (LERs) Substances 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000007517 polishing process Methods 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 239000009719 polyimide resin Substances 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
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Abstract
【解決手段】 配線8を含む保護膜5の上面において柱状電極9の周囲には第1、第2の封止膜10、11がこの順で設けられている。第1の封止膜10はエポキシ樹脂のみからなっている。第2の封止膜11はエポキシ樹脂11a中にフィラー11bが混入されたものからなっている。この場合、配線8間は第1の封止膜形成用膜10Aにより完全に埋められているので、フィラー11bの径が配線8間の間隔よりも大きく、フィラー11bが隣接する配線8上に跨って配置されても、この配置されたフィラー11b下における配線8間に空間が形成されることがなく、この空間に起因する気泡の発生を確実に防止することができる。
【選択図】 図1
Description
請求項4に記載の発明に係る半導体装置の製造方法は、ウエハの上面側に複数の配線を形成し、該配線の接続パッド部上に柱状電極を形成する工程と、大気中において前記ウエハ上に液状樹脂からなる第1の封止膜形成用膜を前記配線間を完全に埋めるように形成する工程と、前記第1の封止膜形成用膜に対して真空脱泡を行なう工程と、大気中において前記第1の封止膜形成用膜上にフィラーを含む液状樹脂からなる第2の封止膜形成用膜を形成する工程と、前記第2の封止膜形成用膜に対して真空脱泡を行なう工程と、加熱処理により前記第1、第2の封止膜形成用膜を硬化させて第1、第2の封止膜を形成する工程と、前記ウエハおよび前記第1、第2の封止膜を切断して複数個の半導体装置を得る工程と、を有することを特徴とする。
2 接続パッド
3 絶縁膜
5 保護膜
7 下地金属層
8 配線
9 柱状電極
10 第1の封止膜
11 第2の封止膜
12 半田ボール
1A ウエハ
10A 第1の封止膜形成用膜
11A 第2の封止膜形成用膜
21 ウエハ移動手段
26 ウエハカセット
27 スピンコータ
36 印刷ステージ
38 メタルマスク
40 スキージ
41 真空脱泡用筐体
43 脱泡用ウエハカセット
Claims (9)
- 半導体基板と、前記半導体基板上に設けられた複数の配線と、前記配線の接続パッド部上に設けられた柱状電極と、前記半導体基板上において前記柱状電極の周囲に設けられた第1、第2の封止膜とを備え、前記第1の封止膜は、樹脂のみからなり、前記配線間を完全に埋めるように設けられ、前記第2の封止膜は樹脂中にフィラーが混入されたものからなっていることを特徴とする半導体装置。
- 請求項1に記載の発明において、前記第1の封止膜は前記配線を覆うように設けられ、その上面が平坦となっていることを特徴とする半導体装置。
- 請求項1に記載の発明において、前記柱状電極上に半田ボールが設けられていることを特徴とする半導体装置。
- ウエハの上面側に複数の配線を形成し、該配線の接続パッド部上に柱状電極を形成する工程と、
大気中において前記ウエハ上に液状樹脂からなる第1の封止膜形成用膜を前記配線間を完全に埋めるように形成する工程と、
前記第1の封止膜形成用膜に対して真空脱泡を行なう工程と、
大気中において前記第1の封止膜形成用膜上にフィラーを含む液状樹脂からなる第2の封止膜形成用膜を形成する工程と、
前記第2の封止膜形成用膜に対して真空脱泡を行なう工程と、
加熱処理により前記第1、第2の封止膜形成用膜を硬化させて第1、第2の封止膜を形成する工程と、
前記ウエハおよび前記第1、第2の封止膜を切断して複数個の半導体装置を得る工程と、
を有することを特徴とする半導体装置の製造方法。 - 請求項4に記載の発明において、前記第1の封止膜形成用膜を形成する工程は、前記配線を覆い、且つ、その上面が平坦となるように形成する工程であることを特徴とする半導体装置の製造方法。
- 請求項5に記載の発明において、前記第1の封止膜形成用膜はスピンコーティングにより形成することを特徴とする半導体装置の製造方法。
- 請求項4に記載の発明において、前記第2の封止膜形成用膜はスクリーン印刷により形成することを特徴とする半導体装置の製造方法。
- 請求項4に記載の発明において、前記第1、第2の封止膜を形成する工程後に、前記第2の封止膜および前記柱状電極の上面側を研磨する工程を有することを特徴とする半導体装置の製造方法。
- 請求項8に記載の発明において、前記研磨工程後に、前記柱状電極上に半田ボールを形成する工程を有することを特徴とする半導体装置の製造方法。
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JP2006260349A JP4222400B2 (ja) | 2006-09-26 | 2006-09-26 | 半導体装置の製造方法 |
US11/903,677 US20080073785A1 (en) | 2006-09-26 | 2007-09-24 | Semiconductor device having sealing film and manufacturing method thereof |
US12/727,406 US8354349B2 (en) | 2006-09-26 | 2010-03-19 | Semiconductor device having sealing film and manufacturing method thereof |
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JP2009289849A (ja) * | 2008-05-28 | 2009-12-10 | Shinko Electric Ind Co Ltd | 配線基板及び半導体パッケージ |
EP2302672A2 (en) | 2009-09-25 | 2011-03-30 | Kabushiki Kaisha Toshiba | Semiconductor device with electrode pad and method for manufacturing same |
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JP4449824B2 (ja) * | 2005-06-01 | 2010-04-14 | カシオ計算機株式会社 | 半導体装置およびその実装構造 |
JP4222400B2 (ja) * | 2006-09-26 | 2009-02-12 | カシオ計算機株式会社 | 半導体装置の製造方法 |
EP2245413A2 (en) | 2008-02-21 | 2010-11-03 | Mbda Uk Limited | Missile training system |
JP2010062170A (ja) * | 2008-09-01 | 2010-03-18 | Casio Comput Co Ltd | 半導体装置およびその製造方法 |
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FR2980917B1 (fr) * | 2011-09-30 | 2013-09-27 | St Microelectronics Crolles 2 | Procede de realisation d'une liaison traversante electriquement conductrice |
US10763199B2 (en) * | 2018-12-24 | 2020-09-01 | Nanya Technology Corporation | Semiconductor package structure and method for preparing the same |
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AU4902897A (en) * | 1996-11-08 | 1998-05-29 | W.L. Gore & Associates, Inc. | Method for improving reliability of thin circuit substrates by increasing the T of the substrate |
US6103992A (en) * | 1996-11-08 | 2000-08-15 | W. L. Gore & Associates, Inc. | Multiple frequency processing to minimize manufacturing variability of high aspect ratio micro through-vias |
JP3287310B2 (ja) | 1998-06-30 | 2002-06-04 | カシオ計算機株式会社 | 半導体装置及びその製造方法 |
MY131961A (en) * | 2000-03-06 | 2007-09-28 | Hitachi Chemical Co Ltd | Resin composition, heat-resistant resin paste and semiconductor device using them and method for manufacture thereof |
JP3611561B2 (ja) * | 2002-11-18 | 2005-01-19 | 沖電気工業株式会社 | 半導体装置 |
JP2005286146A (ja) | 2004-03-30 | 2005-10-13 | Sanyo Electric Co Ltd | 半導体装置および半導体装置の製造方法 |
JP3925809B2 (ja) * | 2004-03-31 | 2007-06-06 | カシオ計算機株式会社 | 半導体装置およびその製造方法 |
US7808073B2 (en) * | 2004-03-31 | 2010-10-05 | Casio Computer Co., Ltd. | Network electronic component, semiconductor device incorporating network electronic component, and methods of manufacturing both |
JP4119866B2 (ja) | 2004-05-12 | 2008-07-16 | 富士通株式会社 | 半導体装置 |
JP2006173232A (ja) * | 2004-12-14 | 2006-06-29 | Casio Comput Co Ltd | 半導体装置およびその製造方法 |
JP4222400B2 (ja) * | 2006-09-26 | 2009-02-12 | カシオ計算機株式会社 | 半導体装置の製造方法 |
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Cited By (3)
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JP2009289849A (ja) * | 2008-05-28 | 2009-12-10 | Shinko Electric Ind Co Ltd | 配線基板及び半導体パッケージ |
EP2302672A2 (en) | 2009-09-25 | 2011-03-30 | Kabushiki Kaisha Toshiba | Semiconductor device with electrode pad and method for manufacturing same |
US8319246B2 (en) | 2009-09-25 | 2012-11-27 | Kabushiki Kaisha Toshiba | Semiconductor device and method for manufacturing same |
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US8354349B2 (en) | 2013-01-15 |
US20080073785A1 (en) | 2008-03-27 |
JP4222400B2 (ja) | 2009-02-12 |
US20100173455A1 (en) | 2010-07-08 |
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