JP2008076949A - Film fixing and aligning device for alignment - Google Patents
Film fixing and aligning device for alignment Download PDFInfo
- Publication number
- JP2008076949A JP2008076949A JP2006258685A JP2006258685A JP2008076949A JP 2008076949 A JP2008076949 A JP 2008076949A JP 2006258685 A JP2006258685 A JP 2006258685A JP 2006258685 A JP2006258685 A JP 2006258685A JP 2008076949 A JP2008076949 A JP 2008076949A
- Authority
- JP
- Japan
- Prior art keywords
- film
- alignment
- tension
- roll
- control function
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
Description
本発明は、位置のアライメントが必要なフィルム供給における、フィルムの位置制御及び張力制御フィルムの流れ方向及び幅方向で行なう事により光学的に読み取るアライメントマークによる位置決めを高精度に、再現性良く安定的にフィルムを固定するアライメント用フィルム固定位置決め装置を実現するものである。 The present invention provides a highly accurate, reproducible and stable positioning with an optically read alignment mark by performing film position control and tension control in the film flow direction and width direction in film supply that requires position alignment. An alignment film fixing / positioning device for fixing the film to the substrate is realized.
フィルムのアライメント方式としては、アライメント用の吸着プレート上にフィルムに張力をかけない状態でフィルムを吸着固定し、フィルム上のアライメントマークが所定の位置へ来るように吸着プレートを移動し位置決めを行っている。この方法の場合フィルムの張力がかからぬ状態なので吸着プレートに吸着されたときのアライメントマークの位置でその位置決め精度が左右されてしまう。又テンションが抜けた位置決めユニットの前後のフィルムのたるみが次の位置決めの精度悪化の要因のひとつになってしまっていた。 As the film alignment method, the film is sucked and fixed on the alignment suction plate without applying tension to the film, and the suction plate is moved and positioned so that the alignment mark on the film is at the specified position. Yes. In this method, since the tension of the film is not applied, the positioning accuracy depends on the position of the alignment mark when the film is sucked on the suction plate. In addition, the slack of the film before and after the positioning unit where the tension has been released has become one of the causes of the next deterioration in positioning accuracy.
張力を掛けた場合のアライメント方式の場合の多くはフィルム流れ方向の張力のみかかった状態で行うもので、その張力の強弱によりフィルム流れ方向の伸びと幅方向のしわ等を引き起こす場合があり安定した位置決めを行うことが難しい。又フィルムの幅方向の厚みムラも流れ方向に発生するシワの発生の一因となり、位置決め精度の低下につながる。 In most alignment methods when tension is applied, only the tension in the film flow direction is applied, and the strength of the tension may cause elongation in the film flow direction and wrinkles in the width direction, etc., and is stable. It is difficult to perform positioning. In addition, uneven thickness in the width direction of the film also contributes to the generation of wrinkles that occur in the flow direction, leading to a decrease in positioning accuracy.
本発明の目的は、位置のアライメントが必要なフィルム供給装置におけるアライメント用フィルム固定位置決め装置において、フィルム流れ方向の位置制御行なう張力制御機能のあるロールユニットと幅方向の張力を一定に保つ為のフィルム両サイドに設置した圧力制御機能のあるクランプユニットを持つアライメント用フィルム固定位置決め装置を提供する事にある。 An object of the present invention is to provide a roll unit having a tension control function for performing position control in the film flow direction and a film for keeping the tension in the width direction constant in an alignment film fixed positioning apparatus in a film supply apparatus that requires position alignment. An object of the present invention is to provide an alignment film fixing and positioning device having a clamp unit having a pressure control function installed on both sides.
上記課題を解決するため本発明は、フィルム流れ方向の位置制御行なう張力制御機能のあるロールユニットと幅方向の張力を一定に保つ為のフィルム両サイドに設置した圧力制御機能のあるクランプユニットを持つにより、フィルムの張力を一定に保ち、且つ位置決めの動作を行う事にある。フィルムの流れ方向だけでなく幅方向の張力を安定させ、一定に保つことでフィルム上にあるアライメントマークの位置精度、再現性を高めることができる。このアライメントマークの位置精度、再現性を高めることで、処理される露光によるパターニング、インクジェットノズル等による描画、転写印刷等の加工精度を高める事につながる。 In order to solve the above problems, the present invention has a roll unit having a tension control function for controlling the position in the film flow direction and a clamp unit having a pressure control function installed on both sides of the film for keeping the tension in the width direction constant. Thus, the tension of the film is kept constant and the positioning operation is performed. The positional accuracy and reproducibility of the alignment marks on the film can be improved by stabilizing and maintaining the tension in the width direction as well as the film flow direction. By improving the positional accuracy and reproducibility of the alignment mark, it is possible to increase processing accuracy such as patterning by exposure to be processed, drawing by an inkjet nozzle or the like, and transfer printing.
具体的には、請求項1に係る発明は、位置のアライメントが必要なフィルム供給装置におけるアライメント用フィルム固定位置決め装置において、フィルム流れ方向の位置制御機能と張力制御機能のあるロールユニットと、幅方向の張力を一定に保つ為のフィルム両サイドに設置した張力制御機能と位置制御機能のあるクランプユニット、アライメントマークを確認する光学ユニット、フィルムを吸着する吸着テーブルを有する事を特徴とするアライメント用フィルム固定位置決め装置を提供するものである。 Specifically, the invention according to claim 1 is the film fixing apparatus for alignment in a film supply apparatus that requires position alignment, a roll unit having a position control function in the film flow direction and a tension control function, and a width direction. Alignment film characterized by having a tension control function and a position control function clamp unit installed on both sides of the film to keep the tension of the film constant, an optical unit for checking alignment marks, and a suction table for sucking the film A fixed positioning device is provided.
請求項2に係る発明は、請求項1記載のロールユニットは、吸着テーブルの上流部にあるニップロールとアライメントロールによりフィルムを挟み、保持し、フィルム上にあるアライメントマークの位置を所定の位置へと傾きと流れ方向の位置を補正する機能を持つ
事を特徴とするアライメント用フィルム固定位置決め装置を提供するものである。
According to a second aspect of the present invention, in the roll unit of the first aspect, the film is sandwiched and held by the nip roll and the alignment roll at the upstream portion of the suction table, and the position of the alignment mark on the film is changed to a predetermined position. It is an object of the present invention to provide an alignment film fixing / positioning device characterized by having a function of correcting the position of the inclination and the flow direction.
請求項3に係る発明は、請求項2記載のフィルム流れ方向の位置制御行なうロールユニットの補正する移動量によるフィルムの張力の変動を抑えるダンサー機構を吸着テーブルの下流部に有する事を特徴とするアライメント用フィルム固定位置決め装置を提供するものである。 The invention according to claim 3 is characterized in that a dancer mechanism that suppresses fluctuations in film tension due to the amount of movement corrected by the roll unit performing position control in the film flow direction according to claim 2 is provided in the downstream portion of the suction table. An alignment film fixing and positioning apparatus is provided.
請求項4に係る発明は、請求項1記載のクランプユニットによりフィルム両端を平行に保持し、一定の張力でフィルムを引っ張る事でフィルムのアライメント性を安定させる事を特徴とするアライメント用フィルム固定位置決め装置を提供するものである。 The invention according to claim 4 is characterized in that the film unit for alignment is fixed by holding the film in parallel with the clamp unit according to claim 1 and stabilizing the alignment of the film by pulling the film with a constant tension. A device is provided.
請求項5に係る発明は、請求項1記載のアライメントテーブルにおいて吸着テーブルの上昇位置の制御をフィルムの張力の変動をトリガーとし停止する事を特徴とするアライメント用フィルム固定位置決め装置を提供するものである。 According to a fifth aspect of the present invention, there is provided an alignment film fixing and positioning device characterized in that in the alignment table according to the first aspect, the control of the raising position of the suction table is stopped by using a change in the tension of the film as a trigger. is there.
本発明のアライメント用フィルム固定位置決め装置により、フィルム上にあるアライメントマークの位置精度、再現性を高めることができる。このアライメントマークの位置精度、再現性を高めることで、処理される露光によるパターニング、インクジェットノズル等による描画、転写印刷等の加工精度を高める事が可能となる。 With the film fixing and positioning apparatus for alignment of the present invention, the positional accuracy and reproducibility of the alignment marks on the film can be enhanced. By improving the position accuracy and reproducibility of the alignment mark, it is possible to increase the processing accuracy of patterning by exposure to be processed, drawing by an inkjet nozzle or the like, transfer printing, and the like.
図1、図2に本発明のアライメント用フィルム固定装置の例を示す。図中に示す装置の構成は、アライメントロール1、ニップロール2、吸着テーブル3、上流ダンサーロール4、上流サクションロール5、下流ダンサーロール6、下流サクションロール7、アライメント用光学カメラ8、フィルム9、サイドクランプユニット10A、10Bからなる。
1 and 2 show an example of the alignment film fixing device of the present invention. The configuration of the apparatus shown in the figure includes an alignment roll 1, a nip roll 2, a suction table 3, an upstream dancer roll 4, an
本発明は、まず一定のピッチで描かれ若しくは印字されたアライメントマークがアライメント用光学カメラ8の視野角内に収まるようフィルム9を巻き出し軸及び巻き取り軸の制御により移動させる。
In the present invention, first, the film 9 is moved by controlling the unwinding axis and the winding axis so that the alignment marks drawn or printed at a constant pitch fall within the viewing angle of the alignment
次にフィルム9の流れ方向のアライメントを行なう。この時上流サクションロール5及び下流サクションロール7により、このアライメント工程の前後の工程からの影響が無い様、張力をカットし、又上流ダンサーロール4及び下流ダンサーロール6によりこのアライメント工程のフィルム9の張力は一定に保たれている。
Next, alignment in the flow direction of the film 9 is performed. At this time, the
次に、アライメントロール1とニップロール2によりフィルム9がニップされ、保持される。この保持された状態でフィルム9上のアライメントマークの流れ方向のずれと傾きを光学カメラにて確認する。このデータに基づきアライメントロール1とニップロール2によりフィルム9の流れ方向と傾きを補正する。この時下流側には下流ダンサーロール6があるのでアライメントを行なうフィルム9には一定の張力が加わっている。 Next, the film 9 is nipped and held by the alignment roll 1 and the nip roll 2. In this held state, the shift and inclination of the alignment mark on the film 9 in the flow direction are confirmed with an optical camera. Based on this data, the flow direction and inclination of the film 9 are corrected by the alignment roll 1 and the nip roll 2. At this time, since there is a downstream dancer roll 6 on the downstream side, a certain tension is applied to the film 9 to be aligned.
次に、図2に示すサイドクランプユニット10A、10Bによりフィルム9の両サイドをクランプし、一定の張力をかける。最後にアライメント用光学カメラ8にてアライメントマークを確認し幅方向の位置をクランプユニット10A、10Bにより補正する。
Next, both sides of the film 9 are clamped by the
フィルム9上のアライメントマークの位置決めが終わったところで吸着テーブル3が上昇、フィルム8に接したところで張力の変動による信号をトリガーとし上昇を停止する。この為吸着テーブル3の上昇によるフィルム9の乱れ、位置の変化を抑える事が出来る。
When the positioning of the alignment mark on the film 9 is finished, the suction table 3 is raised, and when it is in contact with the
1 アライメントロール
2 ニップロール
3 吸着テーブル
4 上流ダンサーロール
5 上流サクションロール
6 下流ダンサーロール
7 下流サクションロール
8 アライメント用光学カメラ
9 フィルム
10A、10B クランプユニット
DESCRIPTION OF SYMBOLS 1 Alignment roll 2 Nip roll 3 Suction table 4
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006258685A JP4888002B2 (en) | 2006-09-25 | 2006-09-25 | Film fixing and positioning device for alignment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006258685A JP4888002B2 (en) | 2006-09-25 | 2006-09-25 | Film fixing and positioning device for alignment |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008076949A true JP2008076949A (en) | 2008-04-03 |
JP4888002B2 JP4888002B2 (en) | 2012-02-29 |
Family
ID=39349041
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006258685A Expired - Fee Related JP4888002B2 (en) | 2006-09-25 | 2006-09-25 | Film fixing and positioning device for alignment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4888002B2 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010014939A (en) * | 2008-07-03 | 2010-01-21 | Nikon Corp | Manufacturing apparatus and manufacturing method for circuit element |
JP2011221537A (en) * | 2010-04-13 | 2011-11-04 | Nikon Corp | Exposure device, substrate processing device, and method of manufacturing device |
WO2013065429A1 (en) * | 2011-11-04 | 2013-05-10 | 株式会社ニコン | Substrate processing apparatus and substrate processing method |
CN114577610A (en) * | 2022-04-06 | 2022-06-03 | 安徽省通达新材料有限公司 | Device and method for detecting tensile strength performance of packaging film |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101334405B1 (en) | 2011-10-05 | 2013-11-29 | 주식회사 나래나노텍 | Improved Apparatus and Method of Aligning Film, and Film Printing Apparatus and Method Having the Same |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10187937A (en) * | 1996-12-25 | 1998-07-21 | Ushio Inc | Projection and exposure apparatus for band-shaped work |
JP2003084374A (en) * | 2001-09-10 | 2003-03-19 | Fuji Photo Film Co Ltd | Image recording device |
JP2003091069A (en) * | 2001-09-17 | 2003-03-28 | Ushio Inc | Device for exposure for belt shape work having zigzag correction mechanism |
JP2004347964A (en) * | 2003-05-23 | 2004-12-09 | Ushio Inc | Double-sided projection exposure apparatus for belt-like work |
JP2006098727A (en) * | 2004-09-29 | 2006-04-13 | Fuji Photo Film Co Ltd | Long flexible recording medium provided with detecting means for contraction/expansion state, and method and apparatus capable of drawing image by correcting contraction/expanding state of the flexible recording medium |
JP2006098726A (en) * | 2004-09-29 | 2006-04-13 | Fuji Photo Film Co Ltd | Correction method of alignment unit, drawing apparatus capable of correcting alignment, and carrying device |
JP2006098725A (en) * | 2004-09-29 | 2006-04-13 | Fuji Photo Film Co Ltd | Correction method of drawing position, and drawing apparatus capable of correcting drawing position |
-
2006
- 2006-09-25 JP JP2006258685A patent/JP4888002B2/en not_active Expired - Fee Related
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10187937A (en) * | 1996-12-25 | 1998-07-21 | Ushio Inc | Projection and exposure apparatus for band-shaped work |
JP2003084374A (en) * | 2001-09-10 | 2003-03-19 | Fuji Photo Film Co Ltd | Image recording device |
JP2003091069A (en) * | 2001-09-17 | 2003-03-28 | Ushio Inc | Device for exposure for belt shape work having zigzag correction mechanism |
JP2004347964A (en) * | 2003-05-23 | 2004-12-09 | Ushio Inc | Double-sided projection exposure apparatus for belt-like work |
JP2006098727A (en) * | 2004-09-29 | 2006-04-13 | Fuji Photo Film Co Ltd | Long flexible recording medium provided with detecting means for contraction/expansion state, and method and apparatus capable of drawing image by correcting contraction/expanding state of the flexible recording medium |
JP2006098726A (en) * | 2004-09-29 | 2006-04-13 | Fuji Photo Film Co Ltd | Correction method of alignment unit, drawing apparatus capable of correcting alignment, and carrying device |
JP2006098725A (en) * | 2004-09-29 | 2006-04-13 | Fuji Photo Film Co Ltd | Correction method of drawing position, and drawing apparatus capable of correcting drawing position |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010014939A (en) * | 2008-07-03 | 2010-01-21 | Nikon Corp | Manufacturing apparatus and manufacturing method for circuit element |
JP2011221537A (en) * | 2010-04-13 | 2011-11-04 | Nikon Corp | Exposure device, substrate processing device, and method of manufacturing device |
WO2013065429A1 (en) * | 2011-11-04 | 2013-05-10 | 株式会社ニコン | Substrate processing apparatus and substrate processing method |
JPWO2013065429A1 (en) * | 2011-11-04 | 2015-04-02 | 株式会社ニコン | Substrate processing apparatus and substrate processing method |
JP2016029484A (en) * | 2011-11-04 | 2016-03-03 | 株式会社ニコン | Pattern forming method and pattern forming apparatus |
JP2016197241A (en) * | 2011-11-04 | 2016-11-24 | 株式会社ニコン | Pattern forming method and device |
CN106919003A (en) * | 2011-11-04 | 2017-07-04 | 株式会社尼康 | Pattern formation method and device, pattern exposure method and manufacturing method |
JP2018109786A (en) * | 2011-11-04 | 2018-07-12 | 株式会社ニコン | Pattern exposure device |
CN114577610A (en) * | 2022-04-06 | 2022-06-03 | 安徽省通达新材料有限公司 | Device and method for detecting tensile strength performance of packaging film |
CN114577610B (en) * | 2022-04-06 | 2022-08-16 | 安徽省通达新材料有限公司 | Device and method for detecting tensile strength performance of packaging film |
Also Published As
Publication number | Publication date |
---|---|
JP4888002B2 (en) | 2012-02-29 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TWI662373B (en) | Exposure device | |
KR100505086B1 (en) | Exposure apparatus for a band-type work | |
JP4888002B2 (en) | Film fixing and positioning device for alignment | |
US7969553B2 (en) | Exposure device with mechanism for forming alignment marks and exposure process conducted by the same | |
JP5117243B2 (en) | Exposure equipment | |
WO2013146184A1 (en) | Substrate processing device, processing device, and method for manufacturing device | |
KR101507915B1 (en) | high speed and resolution Substrate Alignment Apparatus in Roll to Roll System | |
US20060174792A1 (en) | Method for registering patterns on a web | |
JP2006098726A (en) | Correction method of alignment unit, drawing apparatus capable of correcting alignment, and carrying device | |
JP2019061279A (en) | Apparatus for processing substrate and method for manufacturing device | |
JP2007310209A (en) | Exposure device | |
JP2006098718A (en) | Drawing apparatus | |
JP2004347964A (en) | Double-sided projection exposure apparatus for belt-like work | |
JP5114061B2 (en) | Projection exposure equipment | |
JP2010265062A (en) | Sheet conveyance device and sheet meandering correction method | |
JP6337486B2 (en) | Substrate processing equipment | |
JP6723831B2 (en) | Exposure equipment | |
JP2007039161A (en) | Conveying device, recording system and conveying method | |
KR102410347B1 (en) | Apparatus for processing substrate and Method for processing substrate | |
JP4407333B2 (en) | Strip workpiece exposure system | |
JP2006276398A (en) | Exposure device | |
KR102267473B1 (en) | Fine pattern roll manufacturing system via tension control, and method of manufacturing fine pattern roll using the same | |
US10754197B2 (en) | Correction system and method for alignment film printing plate | |
JP2004352435A (en) | Transport device for band-shaped work | |
KR101697661B1 (en) | Apparatus for fabricating double-sided patterned film |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20090825 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20100825 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20110805 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20110816 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20111004 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20111115 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20111128 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20141222 Year of fee payment: 3 |
|
LAPS | Cancellation because of no payment of annual fees |