TWI662373B - Exposure device - Google Patents
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- TWI662373B TWI662373B TW104116002A TW104116002A TWI662373B TW I662373 B TWI662373 B TW I662373B TW 104116002 A TW104116002 A TW 104116002A TW 104116002 A TW104116002 A TW 104116002A TW I662373 B TWI662373 B TW I662373B
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Abstract
提供能夠不在長形工件上造成瑕疵且縮短工站時間、又形成圖樣的連結精密度良好的卷對卷方式之曝光裝置。 Provides a roll-to-roll exposure system that does not cause defects on long workpieces, shortens the station time, and forms a pattern with good precision in connection.
曝光裝置，包括：保持長形工件的曝光台31、使曝光台31來回移動的台移動部32、設置於供給卷軸11的下游側且曝光手段51的上游側用以拘束長形工件W的供給側拘束輪15、設置於曝光手段51的下游側且捲取卷軸21的上游側用以拘束長形工件W的捲取側拘束輪25；在前述供給側拘束輪15及前述捲取側拘束輪的至少一方上，設有置輪驅動裝置。 The exposure device includes an exposure table 31 that holds a long workpiece, a table moving section 32 that moves the exposure table 31 back and forth, and a downstream side of the supply reel 11 and an upstream side of the exposure means 51 to restrict the supply of the long workpiece W Side restraint wheel 15; a take-up restraint wheel 25 provided on the downstream side of exposure means 51 and upstream of take-up reel 21 to restrain the elongated workpiece W; the supply-side restraint wheel 15 and the take-up-side restraint wheel On at least one side, a wheel drive device is provided.
Description
本發明是有關於，從供給側將長形工件(撓性基板)輸送至曝光部、在該曝光部將圖樣曝光於長形工件、將長形工件輸送至捲取側，之所謂的卷對卷(roll-to-roll)方式的曝光裝置。 The present invention relates to a so-called roll pair, which conveys a long workpiece (flexible substrate) from a supply side to an exposure section, exposes a pattern to the long workpiece at the exposure section, and conveys the long workpiece to a winding side. Roll-to-roll exposure device.
一般而言，用於行動電話、行動裝置等各種小型電子裝置的電子電路基板(印刷電路基板)之電子電路的基本材料，由於機體輕薄短小，所以使用薄且高精密度的長形工件。 In general, the basic materials of electronic circuits used in electronic circuit boards (printed circuit boards) of various small electronic devices such as mobile phones and mobile devices are thin, high-precision, and long-length workpieces because the body is thin and short.
這樣的長形工件材料，其厚度變成從0.1mm程度至0.06mm的薄型化傾向。此外，在最近被使用的是厚度0.05mm以下、寬度550mm且長度100mm之薄且寬的長形工件狀的非常長的長形工件。長形工件通常被捲成卷狀而運作。 Such a long workpiece material tends to be thinner from about 0.1 mm to 0.06 mm. In addition, a very long elongated workpiece having a thickness of 0.05 mm or less, a width of 550 mm, and a length of 100 mm has been used recently. Long workpieces are usually rolled and operated.
對於像這樣的長形工件，作為形成電子電路的裝置，具有供給卷軸、捲取卷軸、及位於此供給卷軸和捲取卷軸之間的曝光部；以一面將橋接於供給卷軸和捲取卷軸之間的長形工件沿長邊方向輸送、一面藉由曝光部將圖樣曝光於長形工件的表面，之所謂的卷對卷方式進行運作。 For a long workpiece like this, as a device for forming an electronic circuit, it has a supply reel, a take-up reel, and an exposure section located between the supply reel and the take-up reel; one side bridges between the supply reel and the take-up reel The so-called roll-to-roll method operates in which the elongated workpieces are conveyed along the longitudinal direction and the pattern is exposed on the surface of the elongated workpieces through an exposure unit.
又，在曝光部具有DMD(Digital Micro-mirror Device，數位微型反射鏡元件)等之光調變元件陣列的卷對卷方 式的無遮罩曝光裝置也為眾所周知。藉由無遮罩曝光，與長形工件同步地逐次切換光調變元件陣列的驅動資訊，能夠曝光形成例如像是超過1m的長形圖樣。 In addition, the exposure section includes a roll-to-roll side of a light modulation element array such as a DMD (Digital Micro-mirror Device). A maskless exposure apparatus of the type is also well known. By maskless exposure, driving information of the light modulation element array is sequentially switched in synchronization with the long workpiece, and it is possible to form a long pattern such as more than 1 m by exposure.
使用無遮罩曝光裝置時，由於一般的曝光光學焦 距深度的關係，有需要使用曝光台，在保持工件的平面的狀態下進行曝光。專利文件1的卷對卷方式的無遮罩曝光裝置中，將長形工件吸付固定於曝光台，在將曝光部和長形工件表面的光軸方向的距離保持一定的狀態下，一面讓光調變元件和長形工件相對地移動，一面將圖樣光投影至附著在長形工件表面的感光劑層。 When using a maskless exposure device, As for the relationship with the depth, it is necessary to use an exposure table to perform exposure while maintaining the plane of the workpiece. In the roll-to-roll unmasked exposure device of Patent Document 1, a long workpiece is sucked and fixed on an exposure table, and the distance between the exposure portion and the surface of the long workpiece in the optical axis direction is maintained at a constant state. The light modulating element and the elongated workpiece are moved relatively, and the pattern light is projected onto the photosensitive layer attached to the surface of the elongated workpiece.
[專利文件1]特開2006-102991號公報 [Patent Document 1] JP 2006-102991
如專利文件1的卷對卷方式的無遮罩曝光裝置，在長形工件的輸送方向上，1次的曝光距離係受限於曝光台的行程。為了形成超過限制長度的圖樣，在完成1次的曝光工序後，需要讓長形工件和曝光台各別的移動至分別的曝光開始位置。 For example, in the roll-to-roll unmasked exposure device of Patent Document 1, in the conveying direction of a long workpiece, the single exposure distance is limited by the stroke of the exposure table. In order to form a pattern that exceeds the limit length, after completing one exposure process, it is necessary to move the long workpiece and the exposure table to the respective exposure start positions.
但是，專利文件1的卷對卷方式的無遮罩曝光裝置，由於是以曝光台執行長形工件的移動，想要將曝光台高速地返回曝光開始位置時，設置在捲出部和捲取部的張力滾輪(dancer roller)無法追循基板的返回速度會發生打滑，而在長形 工件上產生刮傷。 However, in the roll-to-roll unmasked exposure device of Patent Document 1, since the long workpiece is moved by the exposure table, when the exposure table is to be returned to the exposure start position at high speed, it is provided in the unwinding section and the take-up section. The tension roller of the outer part cannot follow the return speed of the substrate, and slippage occurs. Scratches on the workpiece.
另一方面，為使張力滾輪能追循長形工件的返回 速度而降低曝光台的加速度時，會嚴重影響工站時間(tact time)，對量產會產生不良影響。 On the other hand, in order to make the tension roller follow the return of the long workpiece When the speed decreases the acceleration of the exposure table, the tact time will be seriously affected, which will have an adverse effect on mass production.
又，由於長形工件的返回量和曝光台的返回量不 同(曝光台大多返回約曝光台的輸送方向長度分量之程度)，所以有曝光台解除對長形工件的吸付固定、且只有曝光台移動的工序，但是，張力滾輪的重量和長形工件自身的重量不匹配，長形工件會向輸送方向移動。因此，被形成的圖樣的第1回的結束位置和次回的開始位置，有不一致的問題。 In addition, the return amount of the long workpiece and the return amount of the exposure table are not the same. The same (the exposure stage usually returns to about the length component of the exposure stage in the conveying direction), so there is a process that the exposure stage releases the suction of the long workpiece and only the exposure stage moves. However, the weight of the tension roller and the long workpiece The weight does not match, and the long workpiece will move in the conveying direction. Therefore, there is a problem that the end position of the first round and the start position of the second round of the formed pattern are inconsistent.
本發明的曝光裝置包括：輸送裝置，從供給卷軸到捲取卷軸，輸送長形有可塑性的被曝光體；曝光手段，設置於供給卷軸的更下游側的被曝光體上方，具有複數個空間光調變裝置；曝光台，保持被曝光體的一部分；以及，移動裝置，使曝光台沿著輸送裝置的被曝光體的輸送方向來回地移動。 The exposure device of the present invention includes a conveying device that conveys an elongated plastic object from a supply reel to a take-up reel; an exposure means is provided above the object to be exposed further downstream of the supply reel and has a plurality of spatial light A modulation device; an exposure table that holds a part of the object to be exposed; and a moving device that moves the exposure table back and forth along the conveyance direction of the object to be exposed by the conveyance device.
又，本發明的曝光裝置，具有供給側拘束輪，設置於供給卷軸的下游側且曝光手段的上游側，用以拘束被曝光體；以及，捲取側拘束輪，設置於曝光手段的下游側且捲取卷軸的上游側，用以拘束前述被曝光體；在供給側拘束輪及捲取側拘束輪的至少一方具有輪驅動裝置。 Further, the exposure apparatus of the present invention includes a supply-side restraint wheel provided on a downstream side of the supply reel and an upstream side of the exposure means for restraining an object to be exposed; and a take-up side restraint wheel provided on a downstream side of the exposure means The upstream side of the take-up reel is used to restrain the subject to be exposed; and at least one of the supply-side restraint wheel and the take-up restraint wheel includes a wheel drive device.
供給側拘束輪和捲取側拘束輪，當曝光台保持被曝光體時，解除被曝光體的拘束，不妨礙被曝光體伴隨曝光台的自由移動。 The supply-side restraint wheel and the take-up restraint wheel release the restraint of the exposed object when the exposure stage holds the exposed object, and does not prevent the exposed object from moving freely with the exposure stage.
又，本發明的曝光裝置，在曝光台，從輸送開始 位置直到輸送完成位置，維持在保持曝光體的狀態下而移動的期間，曝光手段將圖樣曝光於被曝光體上；曝光手段完成曝光後，當曝光台從輸送完成位置直到輸送開始位置，不保持被曝光體而移動。同時，供給側拘束輪讓前述被曝光體移動到供給側。 In the exposure apparatus of the present invention, the exposure stage starts from the conveyance. While moving from the position to the conveying completion position, the exposure means exposes the pattern to the object to be exposed while maintaining the state of the exposed body. After the exposure means completes the exposure, when the exposure table moves from the conveying completion position to the conveying start position, it does not maintain The object to be exposed moves. At the same time, the supply-side restraint wheel moves the subject to be exposed to the supply side.
曝光台具有將被曝光體的寬方向端面(沿輸送方向 的端面)抵壓在曝光台的夾具機構。藉由在夾具機構和曝光台之間夾持被曝光體的寬方向兩端面，被曝光體的曝光面被保持成為平面。 The exposure table has a wide end surface (in the conveying direction) of the object to be exposed. The end surface) of the clamp mechanism on the exposure table. By sandwiching the wide end surfaces of the exposed object between the jig mechanism and the exposure table, the exposed surface of the exposed object is kept flat.
又，本發明的曝光裝置，包括拍攝裝置、以及可 顯示拍攝裝置所拍攝影像的顯示裝置；拍攝裝置在位置決定步驟被用以拍攝被設置在被曝光體上的位置決定標記，同時在曝光圖樣確認步驟也被用於觀察圖樣。 The exposure device of the present invention includes an imaging device, and A display device that displays an image captured by the photographing device; the photographing device is used to photograph a position determination mark set on the subject in the position determination step, and is also used to observe the pattern in the exposure pattern confirmation step.
依據本發明，能夠不在長形工件上造成瑕疵而縮短工站時間，又能夠實現被形成的圖樣連結精密度良好的卷對卷方式的曝光裝置。 According to the present invention, it is possible to reduce the station time without causing defects on a long workpiece, and to realize a roll-to-roll exposure system with good pattern connection accuracy.
1‧‧‧曝光裝置 1‧‧‧Exposure device
2‧‧‧架台 2‧‧‧ stand
10‧‧‧供給部 10‧‧‧ Supply Department
11‧‧‧供給卷軸 11‧‧‧ Supply Scroll
12、14‧‧‧導輪 12, 14‧‧‧guide wheels
13‧‧‧供給側張力滾輪 13‧‧‧Supply-side tension roller
15‧‧‧供給側制動輪(供給側拘束輪) 15‧‧‧Supply-side brake wheel (supply-side restraint wheel)
16‧‧‧端面位置感測器 16‧‧‧End position sensor
21‧‧‧捲取卷軸 21‧‧‧ Reel
22、24‧‧‧導輪 22, 24‧‧‧Guide wheels
23‧‧‧捲取側張力滾輪 23‧‧‧ Take-up side tension roller
25‧‧‧捲取側制動輪(捲取側拘束輪) 25‧‧‧winding side brake wheel (winding side restraint wheel)
30‧‧‧曝光部 30‧‧‧Exposure Department
31‧‧‧曝光台 31‧‧‧Exposure Stage
32‧‧‧台移動部 32‧‧‧ mobile units
33‧‧‧導軌 33‧‧‧Guide
34‧‧‧昇降驅動裝置 34‧‧‧ Lift drive
35‧‧‧工件夾具機構 35‧‧‧Workholding mechanism
40‧‧‧對準部 40‧‧‧Alignment
41‧‧‧對準相機 41‧‧‧pointing at the camera
42‧‧‧監視器 42‧‧‧Monitor
50‧‧‧曝光處理部 50‧‧‧Exposure Processing Department
51‧‧‧曝光單元 51‧‧‧Exposure unit
W‧‧‧長形工件(感光性基板) W‧‧‧long work (photosensitive substrate)
A‧‧‧長形工件W上第1次的曝光開始位置(點A) A‧‧‧ the first exposure start position on the long workpiece W (point A)
B‧‧‧長形工件W上第2次的曝光開始位置(點B) B‧‧‧ The second exposure start position on the long workpiece W (point B)
第1圖顯示本發明一實施樣態之曝光裝置的概略架構的側面透視圖。 FIG. 1 is a side perspective view showing a schematic structure of an exposure apparatus according to an embodiment of the present invention.
第2圖顯示曝光台的工件夾持部的平面圖。 FIG. 2 is a plan view of a workpiece holding portion of the exposure table.
第3a圖是顯示曝光裝置的動作的第1工序圖。 Fig. 3a is a first step diagram showing the operation of the exposure device.
第3b圖是顯示曝光裝置的動作的第2工序圖。 Fig. 3b is a second step diagram showing the operation of the exposure device.
第3c圖是顯示曝光裝置的動作的第3工序圖。 Fig. 3c is a third step diagram showing the operation of the exposure device.
第3d圖是顯示曝光裝置的動作的第4工序圖。 FIG. 3d is a fourth step diagram showing the operation of the exposure device.
第3e圖是顯示曝光裝置的動作的第5工序圖。 Fig. 3e is a fifth step diagram showing the operation of the exposure device.
第3f圖是顯示曝光裝置的動作的第6工序圖。 FIG. 3f is a sixth step diagram showing the operation of the exposure device.
第3g圖是顯示曝光裝置的動作的第7工序圖。 Figure 3g is a seventh step diagram showing the operation of the exposure device.
第3h圖是顯示曝光裝置的動作的第8工序圖。 FIG. 3h is an eighth step diagram showing the operation of the exposure device.
第3i圖是顯示曝光裝置的動作的第9工序圖。 Fig. 3i is a ninth step diagram showing the operation of the exposure device.
第3j圖是顯示曝光裝置的動作的第10工序圖。 Fig. 3j is a tenth step diagram showing the operation of the exposure device.
參照第1~2圖，說明與本發明第1實施樣態相關的曝光裝置1。曝光裝置1是所謂的卷對卷方式的曝光裝置，包括從長形工件W的輸送方向的上游側朝下游側依序地供給長形工件的供給部10、在長形工件W的表面上將圖樣曝光以形成電子電路的曝光部30、回收曝光完成的長形工件W的捲取部20。 The exposure apparatus 1 according to the first embodiment of the present invention will be described with reference to FIGS. 1 to 2. The exposure device 1 is a so-called roll-to-roll exposure device. The exposure device 1 includes a supply unit 10 for sequentially supplying a long workpiece from an upstream side to a downstream side in a conveying direction of the long workpiece W, and applies The pattern is exposed to form an exposure portion 30 of an electronic circuit, and a winding portion 20 of the elongated workpiece W after the exposure is recovered.
長形工件W例如是，將用於行動電話和行動裝置等的電子電路基板(印刷電路基板)的基本材料所製成的感光性長形膜(表面上塗佈有感光物的合成樹脂製柔軟膜)作成卷狀的物件。塗佈有光阻等的感光材料的長形工件W，是由銅箔基板(Copper Clad Laminate)等以薄片狀所形成，長度有數十至數百公尺。以下，關於長形工件W的表背面，朝圖中上方的面稱為「表面」，朝圖中下方的面稱為「背面」。 The elongated workpiece W is, for example, a photosensitive elongated film (a synthetic resin coated with a photosensitive material coated on the surface) made of a basic material used in electronic circuit boards (printed circuit boards) for mobile phones and mobile devices. Film) as a rolled object. The long workpiece W coated with a photosensitive material such as a photoresist is formed in a sheet shape such as a copper foil substrate (Copper Clad Laminate) and has a length of several tens to hundreds of meters. Hereinafter, regarding the front and back surfaces of the elongated workpiece W, a surface facing upward in the drawing is referred to as a "surface", and a surface facing downward in the drawing is referred to as a "back surface".
以下，沿輸送方向M的方向表示為“X”，垂直於輸送方向M的長形工件W的寬方向表示為“Y”，與X和Y兩者垂直的方向(垂直方向)表示為“Z”。又，在表示曝光裝置1中必要的位置關係時，將靠近供給卷軸之側稱為上游側、將靠近捲取卷軸之側稱為下游側。 Hereinafter, the direction along the conveying direction M is referred to as "X", the width direction of the long workpiece W perpendicular to the conveying direction M is referred to as "Y", and the direction perpendicular to both X and Y (vertical direction) is referred to as "Z". ". When the necessary positional relationship in the exposure device 1 is shown, the side closer to the supply reel is referred to as the upstream side, and the side closer to the take-up reel is referred to as the downstream side.
<<供給部10及捲取部20的結構>> << Structure of the supply part 10 and the winding part 20 >>
供給部10從長形工件W的輸送方向的上游側向下游側依序地包括，供給卷軸11、導輪12、供給側張力滾輪13、導輪14、供給側制動輪15(供給側拘束輪)、及端面位置感測器16，構成用以將長形構件W供給至曝光部30的工件供給系統。捲取部20從長形工件W的輸送方向的上游側向下游側依序地包括，捲取側制動輪25(捲取側拘束輪)、導輪24、捲取側張力滾輪23、導輪22、及捲取卷軸21，構成用以將在曝光部30曝光後的長形構件W捲取的工件捲取系統。 The supply unit 10 includes, in order from the upstream side to the downstream side in the conveying direction of the elongated workpiece W, a supply reel 11, a guide wheel 12, a supply-side tension roller 13, a guide wheel 14, and a supply-side brake wheel 15 (supply-side restraint wheel ) And the end surface position sensor 16 constitute a workpiece supply system for supplying the elongated member W to the exposure section 30. The winding unit 20 includes a winding-side brake wheel 25 (winding-side restraint wheel), a guide wheel 24, a winding-side tension roller 23, and a guide wheel in order from the upstream side to the downstream side in the conveying direction of the long workpiece W. 22 and the winding reel 21 constitute a workpiece winding system for winding the elongated member W after the exposure portion 30 is exposed.
供給卷軸11用以保持被捲成成卷狀的長形工件W，以自身的旋轉軸為中心轉動，將長形工件W向下游側供給(送出)。捲取卷軸21以自身的旋轉軸為中心轉動，將從上游側供給而來的長形工件W捲成卷狀並且加以保持。供給卷軸11和捲取卷軸21具有將該供給卷軸11和捲取卷軸21斷續地旋轉驅動的轉動裝置(未圖示)。隨著長形工件W的輸送，該長形工件W的供給量和捲取量會變化，因此供給卷軸11和捲取卷軸21的外徑會改變。 The supply reel 11 is used to hold the elongated workpiece W rolled into a roll shape, and rotates around its own rotation axis to supply (send out) the elongated workpiece W to the downstream side. The take-up reel 21 is rotated around its own rotation axis, and the long workpiece W supplied from the upstream side is wound into a roll shape and held. The supply reel 11 and the take-up reel 21 include a rotation device (not shown) that intermittently drives the supply reel 11 and the take-up reel 21. As the elongated workpiece W is conveyed, the supply amount and the winding amount of the elongated workpiece W are changed, so the outer diameters of the supply reel 11 and the take-up reel 21 are changed.
導輪12、14、22、24、供給側制動輪15及捲取側制動輪25，將長形工件W在供給卷軸11和捲取卷軸21之間， 以自身的旋轉軸為中心轉動，而從供給卷軸11將長形工件W向捲取卷軸21輸送。 The guide wheels 12, 14, 22, 24, the supply-side brake wheel 15 and the take-up brake wheel 25 hold the long workpiece W between the supply reel 11 and the take-up reel 21, Rotating around its own rotation axis, the long workpiece W is conveyed from the supply reel 11 to the take-up reel 21.
供給側制動輪15及捲取側制動輪25各別的轉動 軸，以在水平方向上約略呈一直線地並列的方式而設置。供給制動輪15及捲動制動輪25，由包括夾持長形工件W且對向設置的2個滾輪的軋輥(nip roller)所構成。此2個滾輪以夾持或釋放長形工件W的方式，利用不圖示的機構，可在上下方向(Z方向)分別移動。 Rotation of the supply-side brake wheel 15 and the take-up brake wheel 25 The shafts are provided so as to be approximately parallel in a horizontal direction. The supply brake wheel 15 and the scroll brake wheel 25 are composed of a nip roller including two rollers that are opposed to each other and sandwich the elongated workpiece W. These two rollers can be moved in the vertical direction (Z direction) by a mechanism (not shown) to hold or release the long workpiece W.
供給側制動輪15及捲取側制動輪25，以軋輥夾持 長形工件且軋輥不轉動的方式而剎車，而能夠對長形工件W進行剎車。另一方面，在放開長形工件W的狀態下，為不妨礙長形工件W的移動，而將軋輥從長形工件W的表背面分離。 Supply side brake wheel 15 and take-up side brake wheel 25, held by rollers The long workpiece can be braked without rotating the rolls, and the long workpiece W can be braked. On the other hand, in a state where the long workpiece W is released, the roll is separated from the front and back surfaces of the long workpiece W so as not to hinder the movement of the long workpiece W.
又，供給側制動輪15及捲取側制動輪25分別具 有轉動驅動滾輪的轉動驅動裝置(未圖示)。在夾持長形工件W的狀態下，轉動驅動裝置以斷續地且約略相同的轉動驅動量，去轉動驅動供給側制動輪15及捲取側制動輪25，藉此能夠將橋接於供給卷軸11和捲取卷軸21之間的長形工件W重複每次以既定長輸送(一框接一框地輸送)。轉動驅動裝置例如使用步進馬達，而更精準地控制長形工件W的輸送量和加速度等。 The supply-side brake wheel 15 and the take-up brake wheel 25 are provided separately. There is a rotation driving device (not shown) for rotating the driving roller. In the state of holding the long workpiece W, the rotation driving device rotates and drives the supply-side brake wheel 15 and the take-up side brake wheel 25 intermittently and at approximately the same amount of rotation drive, thereby being able to bridge the supply roll The long workpiece W between 11 and the take-up reel 21 is repeatedly conveyed at a predetermined length (conveying frame by frame). The rotation driving device uses, for example, a stepping motor to control the conveyance amount and acceleration of the long workpiece W more accurately.
又，供給側制動輪15及捲取側制動輪25，可使用 具有吸附長形工件W背面之吸附裝置的吸附滾輪，以取代夾持長形工件W的軋輥。供給側制動輪15及捲取側制動輪25在吸附長形工件W背面的狀態下，藉由將轉動驅動裝置進行轉動驅動，能夠輸送長形工件W。 The supply-side brake wheel 15 and the take-up brake wheel 25 can be used. A suction roller having a suction device for sucking the back of the long workpiece W, instead of a roller holding the long workpiece W. The supply-side brake wheel 15 and the take-up-side brake wheel 25 are capable of conveying the long workpiece W by rotationally driving the rotation driving device in a state of sucking the back surface of the long workpiece W.
又，雖然所舉例子的是供給側制動輪15及捲取側制動輪25的雙方均有轉動驅動裝置，但是在制動輪僅在一方向上輸送長形工件W的情形下，只讓拉入側(供給側)的制動輪有轉動驅動裝置，也可讓另一方的制動輪只有剎車。在此情形下，拉入側的制動輪進行轉動驅動時，另一方的制動輪仍夾持長形工件而解除剎車，軋輥配合長形工件W的移動而連帶轉動。 In addition, although both the supply-side brake wheel 15 and the take-up brake wheel 25 have rotational driving devices as an example, when the brake wheel transports the long workpiece W only in one direction, only the pull-in side is allowed. The (supply side) brake wheel has a rotation drive device, and the other brake wheel can only be used for braking. In this case, when the brake wheel on the pull-in side is rotationally driven, the brake wheel on the other side still holds the long workpiece to release the brake, and the roller rotates in conjunction with the movement of the long workpiece W.
導輪12、14、22、24是將從供給卷軸11被供給(被送出)的長形工件W導引至下游側的輔助輪。所有導輪中，至少導輪14和24，其各別的轉動軸以在水平方向略呈一直線並列的方式而被設置。導輪12、14、22、24，可以有為防止長形工件W於寬方向(第1、3圖中與紙面垂直的方向、第2圖的左右方向)偏移的輪緣(未圖示)。 The guide wheels 12, 14, 22, and 24 are auxiliary wheels that guide the long workpiece W supplied (sent out) from the supply reel 11 to the downstream side. Among all the guide wheels, at least the guide wheels 14 and 24 are provided with their respective rotation shafts arranged side by side in a horizontal line. The guide wheels 12, 14, 22, and 24 may have rims (not shown) to prevent the long workpiece W from shifting in the wide direction (the direction perpendicular to the paper surface in Figs. 1 and 3 and the left-right direction in Fig. 2). ).
供給側張力滾輪13及捲取側張力滾輪23，依從長形工件W的輸送而昇降，對長形工件W施加張力以防止在長形工件W上產生鬆弛和皺紋，同時為了在後述曝光部的掃描曝光，有作為為了讓長形工件W在曝光部30移動之緩衝器的功能。 The supply-side tension roller 13 and the take-up-side tension roller 23 are raised and lowered in accordance with the conveyance of the elongated workpiece W, and apply tension to the elongated workpiece W to prevent slack and wrinkles on the elongated workpiece W. The scanning exposure has a function as a buffer for moving the long workpiece W in the exposure section 30.
供給部10具有用以檢測長形工件W的端面位置的端面位置感測器16。依據端面位置感測器16的輸出，供給部10藉由未圖示的機構，執行修正長形工件W之蜿蜒曲折的端面位置控制。端面位置控制，例如，以將從供給卷軸11至供給側制動輪15作為一體地設置支持框架(未圖示)，讓此框架在長形工件W的寬方向(Y方向)移動而執行。端面位置控制為已 知的技術，可以使用一般公知的控制器實現。 The supply unit 10 includes an end surface position sensor 16 for detecting an end surface position of the elongated workpiece W. Based on the output of the end surface position sensor 16, the supply unit 10 performs end surface position control to correct the meandering of the long workpiece W by a mechanism (not shown). The end surface position control is performed by, for example, providing a support frame (not shown) integrally from the supply reel 11 to the supply-side brake wheel 15 and moving the frame in the width direction (Y direction) of the long workpiece W. End position control Known techniques can be implemented using generally known controllers.
<<曝光部30的結構>> << Structure of Exposure Section 30 >>
曝光部30被設置於供給側制動輪15及捲取側制動輪25之間。曝光部30具有曝光台31、對準相機41及曝光單元51。 The exposure unit 30 is provided between the supply-side brake wheel 15 and the take-up-side brake wheel 25. The exposure unit 30 includes an exposure stage 31, an alignment camera 41, and an exposure unit 51.
曝光單元51具有複數個曝光頭(未圖示)，規則地設置在與長形工件W分隔既定距離的垂直上方的位置。對於各個曝光頭，設有光源和照明光學系統(未圖示)，從光源被發射的光，透過各自對應的照明光學系統，而被引導至對應的曝光頭。各個曝光頭具有2維配置的DMD(數位微型反射鏡元件)、及將DMD的像在長形工件上成像的成像光學系統。 The exposure unit 51 includes a plurality of exposure heads (not shown), and is regularly provided at a position vertically above a predetermined distance from the long workpiece W. Each exposure head is provided with a light source and an illumination optical system (not shown), and light emitted from the light source passes through the corresponding illumination optical system and is guided to the corresponding exposure head. Each exposure head has a two-dimensionally arranged DMD (digital micromirror element) and an imaging optical system that forms an image of the DMD on a long workpiece.
DMD的微形反射鏡，選擇性地被位置決定為將光導引至長形工件W的第1形勢與將光導引至長形工件W外的第2形勢，各個微形反射鏡是獨立地被控制。 The DMD micro-mirrors are selectively determined by the position of the first situation to direct light to the long workpiece W and the second situation to direct light outside the long workpiece W. Each micro-mirror is independent The ground is controlled.
於各個曝光頭，沿著長形工件W的輸送方向M分割，藉此被規範的曝光區域被分別指定，以規範對於各曝光頭的掃描區域。曝光區，是來自各曝光頭的光所照射的區域，是依各個掃描區域的寬而被形成，依據曝光區，光被照射向長形工件W。 Each exposure head is divided along the conveying direction M of the elongated workpiece W, whereby the standardized exposure areas are designated separately to regulate the scanning area for each exposure head. The exposure area is an area irradiated with light from each exposure head, and is formed in accordance with the width of each scanning area. According to the exposure area, the light is irradiated to the long workpiece W.
曝光台31，一面吸附長形工件W的背面，一面保持其平坦。曝光台31，藉由昇降驅動裝置34，能在曝光台31接觸長形工件W背面的上端位置和曝光台31離開長形工件W背面的下端位置之間昇降。又，曝光台31具有掃描或逐步重複的台移動部32。 The exposure stage 31 is flat while holding the back surface of the elongated workpiece W. The exposure table 31 can be raised and lowered between the upper end position where the exposure table 31 contacts the back surface of the elongated workpiece W and the lower end position where the exposure table 31 is separated from the back surface of the elongated workpiece W by the elevation driving device 34. The exposure stage 31 includes a stage moving unit 32 that is scanned or repeated step by step.
如第2圖所示，曝光台31具有夾持沿長形工件W 的輸送方向(X方向)的端面的工件夾具機構35。工件夾具機構35，由將長形工件W的輸送方向(X方向)的端面夾持於台之間的夾具35a和夾具35b所構成。夾具35a和夾具35b設置在未圖示的Y方向移動機構上，能夠對應長形工件W的寬而調整夾持位置。 As shown in FIG. 2, the exposure table 31 has a long work W The workpiece holder mechanism 35 at the end surface in the conveying direction (X direction). The work clamp mechanism 35 is composed of a clamp 35 a and a clamp 35 b that clamp an end surface in the conveyance direction (X direction) of the elongated workpiece W between the stages. The clamps 35a and 35b are provided on a Y-direction moving mechanism (not shown), and the clamping position can be adjusted in accordance with the width of the long workpiece W.
由於長形工件W是薄膜狀，在寬方向(Y方向)會產生彎曲。工件夾具機構35藉由將長形工件W抵壓在曝光台上而夾持，能夠平坦地校正保持長形工件W的被曝光區域。 Since the long workpiece W is a thin film, it bends in the wide direction (Y direction). The workpiece holder mechanism 35 can hold the elongated workpiece W against the exposure table and clamp it, and can evenly correct the exposed area holding the elongated workpiece W.
對準相機41設置於曝光單元51更上游側，藉由拍攝設置於長形工件W的對準標記，取得長形工件W的位置資訊。對準標記的拍攝，是讓長形工件W在X方向移動而同時執行。 The alignment camera 41 is disposed on the upstream side of the exposure unit 51, and acquires position information of the elongated workpiece W by photographing an alignment mark provided on the elongated workpiece W. The imaging of the alignment mark is performed while moving the long workpiece W in the X direction.
<<曝光裝置1的曝光輸送動作>> << Exposure Conveying Operation of Exposure Device 1 >>
參照第3a~3j圖的工序圖，詳細說明關於曝光裝置1的曝光輸送動作。又，圖中長形工件W附近的箭號是表示長形工件W的移動方向。又，長形工件W上的點A表示第1次曝光時的前頭位置，點B表示第1次曝光時的終端位置且表示第2次曝光時的前頭位置。 The exposure and conveyance operation of the exposure apparatus 1 will be described in detail with reference to the process diagrams in FIGS. 3a to 3j. The arrows near the long workpiece W in the figure indicate the moving direction of the long workpiece W. Further, point A on the elongated workpiece W indicates the front position at the first exposure, and point B indicates the end position at the first exposure and the front position at the second exposure.
步驟S1：將是加工前新材料的卷狀長形工件W，設定在供給卷軸11上，重複送出長形工件W的前端部，以橋接於導輪12、供給側張力滾輪13、導輪14、供給側制動輪15、捲取側制動輪25、導輪24、捲取側張力滾輪23、導輪22，而固定於捲取卷軸21。在此初期設定狀態中，在供給側張力滾輪13及捲取側張力滾輪23上，長形工件W並未被緩衝。(第3a 圖) Step S1: Set the rolled long workpiece W, which is a new material before processing, on the supply reel 11 and repeatedly send the front end of the long workpiece W to bridge the guide roller 12, the supply-side tension roller 13, and the guide roller 14. The supply-side brake wheel 15, the take-up side brake wheel 25, the guide wheel 24, the take-up side tension roller 23, and the guide wheel 22 are fixed to the take-up reel 21. In this initial setting state, the elongated workpiece W is not buffered on the supply-side tension roller 13 and the take-up-side tension roller 23. (Section 3a (Figure)
步驟S2：開始曝光裝置的自動運轉模式。在對準開始位置上待機的曝光台31上昇直到上端位置，一面吸附1個框分量的長形工件W的背面、一面保持其平坦。又，曝光台31的工件夾具機構35，將長形工件W夾持於其和台之間。(第3b圖) Step S2: The automatic operation mode of the exposure device is started. The exposure stage 31 waiting at the alignment start position rises to the upper end position, and keeps the back surface of the long workpiece W of one frame component flat while holding it. The workpiece holder mechanism 35 of the exposure table 31 clamps the long workpiece W between the workpiece and the table. (Figure 3b)
步驟S3：供給卷軸11的轉動驅動裝置(未圖示)，藉由僅只既定的轉動驅動量的轉動，供給卷軸11僅將長形工件W送出曝光台的1個行程分量(約2個框)。被送出的長形工件W經由導輪12而進入供給側張力滾輪13。在此，由於長形工件W在下游側中被以曝光台31吸附，長形工件W保持適度的張力，同時在張力滾輪13上被緩衝。(第3c圖) Step S3: The rotation driving device (not shown) of the supply reel 11 is used to rotate only a predetermined rotation drive amount, and the supply reel 11 sends out only one stroke component (about 2 frames) of the long workpiece W out of the exposure table. . The sent-out long workpiece W enters the supply-side tension roller 13 via the guide wheel 12. Here, since the elongated workpiece W is attracted by the exposure table 31 in the downstream side, the elongated workpiece W maintains a moderate tension while being buffered on the tension roller 13. (Figure 3c)
步驟S4：曝光台31在X方向上被驅動，保持在吸附長形工件W的狀態而通過對準相機的41的下方。此時，隨著曝光台31的移動，在供給側張力滾輪13被緩衝的長形工件W被拉出，同時在捲取側張力滾輪23處，長形工件W的U字形狀變深，長形工件W則被緩衝。(第3c圖→第3d圖) Step S4: The exposure table 31 is driven in the X direction, is held in a state where the long workpiece W is sucked, and passes under the 41 of the camera. At this time, as the exposure table 31 moves, the long workpiece W buffered by the supply-side tension roller 13 is pulled out, and at the same time, the U-shape of the long workpiece W becomes deeper and longer at the take-up tension roller 23. The shaped workpiece W is buffered. (Figure 3c → Figure 3d)
當長形工件內層有圖樣存在時(內建基板的第2層以後等)，為了曝光圖樣和內層圖樣的位置匹配，在長形工件W上設置有對準標記。結合曝光台31的移動，以對準相機41拍攝形成在長形工件W的對準標記。又，當長形工件W內層無圖樣時(內建基板的第1層等)，雖有未設置對準標記的情形，但是在此情形下曝光裝置1不執行對準(藉由曝光資料修正曝光位置)，所以不拍攝對準標記。 When a pattern exists on the inner layer of the long workpiece (such as the second layer of the built-in substrate or the like), an alignment mark is provided on the long workpiece W in order to match the positions of the exposure pattern and the inner layer pattern. In conjunction with the movement of the exposure table 31, an alignment mark formed on the elongated workpiece W is captured with the alignment camera 41. When there is no pattern on the inner layer of the long workpiece W (the first layer of the built-in substrate, etc.), although the alignment mark may not be set, in this case, the exposure device 1 does not perform the alignment (by the exposure data (Correct the exposure position), so the alignment mark is not taken.
步驟S5：基於透過拍攝對準標記而得的長形工件W的位置資訊，執行長形工件W和被曝光圖樣的對準。具體而言，長形工件W的位置資訊被傳送至曝光單元51的曝光控制部(未圖示)，曝光單元51，對為了將圖樣曝光在長形工件W的曝光資料的座標進行修正處理。曝光資料的修正處理被執行時，曝光台31仍保持長形工件W，而在曝光開始位置暫停。(第3d圖) Step S5: Perform alignment of the elongated workpiece W and the exposed pattern based on the position information of the elongated workpiece W obtained by photographing the alignment mark. Specifically, the position information of the long workpiece W is transmitted to an exposure control unit (not shown) of the exposure unit 51, and the exposure unit 51 corrects the coordinates of the exposure data for exposing the pattern to the long workpiece W. When the correction processing of the exposure data is performed, the exposure stage 31 still holds the long workpiece W, and pauses at the exposure start position. (Figure 3d)
步驟S6：曝光台31開始向下游方向移動，曝光部30中，藉由已知的多重曝光技術，曝光單元51將電子電路圖樣，掃描曝光在曝光台31吸附保持的長形工件W的表面的感光材料層(第3d圖→第3e圖)。從點A到點B的1個框分量的長形工件W的曝光完成後，曝光台31終止往下游方向的移動，停止在曝光終止位置。(第3e圖) Step S6: The exposure table 31 starts to move in the downstream direction. In the exposure section 30, by the known multiple exposure technology, the exposure unit 51 scans and exposes the electronic circuit pattern on the surface of the long workpiece W that is held and held by the exposure table 31. Photosensitive material layer (Figure 3d → Figure 3e). After the exposure of the long workpiece W of one frame component from the point A to the point B is completed, the exposure table 31 stops moving in the downstream direction and stops at the exposure termination position. (Figure 3e)
步驟S7：供給側制動輪15及捲取側制動輪25夾持長形工件W，將長形工件W固定(第3f圖)。之後，解除由曝光台31對長形工件W的吸附，同時解除工件夾具機構35對長形工件W的固定，昇降裝置34使曝光台31下降至下端位置(第3g圖)。長形工件W被制動輪15和25夾持，所以曝光台31從長形工件W離開時，長形工件W不會向X方向和Y方向移動而被制動，能夠保持在既定的位置。 Step S7: The supply-side brake wheel 15 and the take-up-side brake wheel 25 clamp the long workpiece W, and fix the long workpiece W (FIG. 3f). After that, the adsorption of the elongated workpiece W by the exposure table 31 is released, and the fixing of the elongated workpiece W by the workpiece holder mechanism 35 is released, and the lifting device 34 lowers the exposure table 31 to the lower end position (FIG. 3g). The long workpiece W is clamped by the brake wheels 15 and 25. Therefore, when the exposure table 31 is separated from the long workpiece W, the long workpiece W is not moved in the X direction and the Y direction and is braked, and can be maintained at a predetermined position.
步驟S8：供給側制動輪15及捲取側制動輪25的轉動驅動裝置(未圖示)，透過轉動僅只既定的轉動驅動量，供給側制動輪15及捲取側制動輪25將長形工件W捲回既定量，以長形工件W的曝光完成的1個框的下個1個框分量來到對 準開始位置(亦即點B來到在步驟S2的點A)的方式，讓長形工件W移動。在此時，使用端面位置感測器16的輸出，一面修正長形工件W的蜿蜒曲折、一面進行長形工件W的移動(第3g圖→第3h圖)。 Step S8: The rotation driving device (not shown) of the supply-side brake wheel 15 and the take-up side brake wheel 25 rotates only a predetermined rotational drive amount, and the supply-side brake wheel 15 and the take-up side brake wheel 25 turn the long workpiece. W rolls back to the given amount, and the next 1 frame component of 1 frame completed with the exposure of the long workpiece W comes to the right. The quasi-start position (that is, the point B comes to the point A in step S2) allows the long workpiece W to move. At this time, the output of the end surface position sensor 16 is used to correct the meandering of the long workpiece W while moving the long workpiece W (Figure 3g → Figure 3h).
供給制動輪15及捲取制動輪25讓長形工件W向返回方向移動，長形工件W在供給側張力滾輪13的U字形狀變深，同時長形工件W在捲取側張力滾輪23的U字形狀變淺。此時，驅動長形工件W的加速度是急劇變化的情形，張力滾輪在長形工件上滑行，恐會在長形工件W上造成瑕疵，因此供給側制動輪15及捲取側制動輪25是以執行適當加減速的方式而被轉動驅動。 The supply brake wheel 15 and the take-up brake wheel 25 move the elongated workpiece W in the returning direction, the U-shape of the elongated workpiece W is deepened on the supply-side tension roller 13, and the elongated workpiece W is rotated on the U-side tension roller 23 by U. The word shape becomes lighter. At this time, the acceleration that drives the long workpiece W changes sharply, and the tension roller slides on the long workpiece, which may cause defects in the long workpiece W. Therefore, the supply-side brake wheel 15 and the take-up side brake wheel 25 are It is rotationally driven to perform appropriate acceleration and deceleration.
又，在藉由供給側制動輪15及捲取側制動輪25而使長形工件W捲回的同時，曝光台31從曝光終止位置移動直到對準開始位置(第3g圖→第3h圖)。又，長形工件W曝光完成的1個框分量的返回量和曝光台31的返回量不同，要注意後者的返回量大的事。長形工件W的移動以緩和的加減速進行，對此，返回量大的曝光台31的移動是高加速度且高速地進行。因此，兩者大約同時完成返回移動。 In addition, while the long workpiece W is wound up by the supply-side brake wheel 15 and the take-up side brake wheel 25, the exposure table 31 moves from the exposure termination position to the alignment start position (Figure 3g → Figure 3h) . In addition, the return amount of one frame component after the exposure of the long workpiece W is different from the return amount of the exposure table 31. Note that the latter has a large return amount. The movement of the elongated workpiece W is performed with gentle acceleration and deceleration, and the exposure stage 31 with a large return amount is moved with high acceleration and high speed. Therefore, the two complete the return movement at about the same time.
步驟S9：藉由供給側制動輪15及捲取側制動輪25完成長形工件W的移動及曝光台31的移動之後，曝光台31上昇直到上端位置，一面吸附先前己曝光的1個框的下一位置的1個框分量的長形工件W的背面、一面將其保持平坦(第3i圖)。又，曝光台31的工件夾具機構35，將長形工件W夾持於其和台之間。此時，如第3i圖所示，可知點B來到在步 驟S2的點A位置。 Step S9: After the movement of the long workpiece W and the movement of the exposure table 31 are completed by the supply-side brake wheel 15 and the take-up side brake wheel 25, the exposure table 31 rises to the upper end position, while adsorbing the previously exposed frame The back surface and one side of the long workpiece W of one frame component at the next position hold it flat (Figure 3i). The workpiece holder mechanism 35 of the exposure table 31 clamps the long workpiece W between the workpiece and the table. At this time, as shown in Fig. 3i, it can be seen that point B has come to the step. Position A of step S2.
步驟S10：供給側制動輪15及捲取側制動輪25解除對長形工件W的夾持。供給卷軸11及捲取卷軸21的轉動驅動裝置(未圖示)透過轉動僅只既定的轉動驅動量，供給卷軸11將長形工件W送出僅只1個框分量至張力滾輪13，同時捲取卷軸21將1個框分量的長形工件W從張力滾輪23捲回。(第3i圖→第3j圖) Step S10: The supply-side brake wheel 15 and the take-up-side brake wheel 25 release the clamping of the long workpiece W. The rotation driving device (not shown) of the supply reel 11 and the take-up reel 21 only rotates through a predetermined rotation drive amount, and the supply reel 11 sends out the long workpiece W by only one frame component to the tension roller 13, and simultaneously takes up the reel 21 The long workpiece W of one frame component is wound back from the tension roller 23. (Figure 3i → Figure 3j)
之後，依序重複實施步驟S4~步驟S10直到生產完成。長形工件W的最後框的曝光完成後，回收在捲取卷軸21上被捲取成卷狀的長形工件W。 After that, steps S4 to S10 are repeatedly performed sequentially until production is completed. After the exposure of the last frame of the elongated workpiece W is completed, the elongated workpiece W wound into a roll shape on the take-up reel 21 is recovered.
如前所述的本實施樣態的曝光裝置1，通常利用透過供給側制動輪15及捲取側制動輪25的夾持或透過曝光台31的夾持，以維持長形工件W被制動的狀態而進行複數個框數的曝光。藉此，能夠高精密地連結前後框的曝光，特別是在沒有對準標記的長形工件W中發揮良好效果。 As described above, the exposure apparatus 1 of this embodiment generally uses a clamp through the supply-side brake wheel 15 and a take-up brake wheel 25 or a clamp through the exposure table 31 to maintain the long workpiece W being braked. State and perform exposure of a plurality of frames. Thereby, the exposure of the front and rear frames can be connected with high precision, and particularly good effects can be exhibited in the long workpiece W having no alignment mark.
又，當曝光1個框後的曝光台31和長形工件W返回移動時，由於是讓曝光台31和長形工件W分離而各別地移動，所以能夠讓移動距離長的曝光台31以高加速度地高速移動，另一方面，移動距離短的長形工件W，以不產生因張力滾輪而造成磨損的方式，能抑制加速度地讓其移動。藉此，增進曝光裝置1的產能。 In addition, when the exposure stage 31 and the long workpiece W are moved back after one frame is exposed, the exposure stage 31 and the long workpiece W are separated and moved separately. Therefore, the exposure stage 31 with a long moving distance can be moved to The high-speed, high-speed movement of the long workpiece W, on the other hand, allows the long-distance workpiece W to be moved while suppressing acceleration so as not to cause wear due to the tension roller. Thereby, the productivity of the exposure apparatus 1 is improved.
第2實施樣態，關於曝光裝置1的結構和第1實施樣態相同。本實施樣態中，透過曝光裝置1動作的步驟S6完成後， 分支進行以下的步驟。 In the second embodiment, the configuration of the exposure device 1 is the same as that in the first embodiment. In this embodiment, after step S6 of the operation of the exposure device 1 is completed, To branch, perform the following steps.
步驟S11：曝光台31維持吸附保持著長形工件W， 移動到對準相機41的下方。此時，曝光台31的移動，可以是自動移動到預定位置，也可以是由操作人員手動移動到任意位置。 Step S11: The exposure stage 31 maintains the adsorption and holding of the long workpiece W, Move below the alignment camera 41. At this time, the movement of the exposure table 31 may be automatically moved to a predetermined position, or may be manually moved to an arbitrary position by an operator.
步驟S12：曝光裝置1的操作人員，使用對準相機 41、及連接對準相機的監視器42，觀察透過步驟S6在長形工件W的感光材料上形成的潛影。觀察結果當被認為需要修正曝光位置和曝光量等時，曝光裝置1的操作人員依據觀察結果修正前述的參數。 Step S12: The operator of the exposure device 1 uses the alignment camera 41, and a monitor 42 connected to the camera, and observe a latent image formed on the photosensitive material of the long workpiece W through step S6. Observation Results When it is considered that it is necessary to correct the exposure position, the exposure amount, and the like, the operator of the exposure device 1 corrects the aforementioned parameters based on the observation results.
步驟S13：供給側制動輪15及捲取側制動輪25夾 持長形工件W且固定長形工件W。之後，解除由曝光台31對長形工件W的吸附，同時解除工件夾具機構35對長形工件W的固定，昇降驅動裝置34讓曝光台31下降至下端位置。 Step S13: Supply side brake wheel 15 and winding side brake wheel 25 The long workpiece W is held and fixed. After that, the adsorption of the elongated workpiece W by the exposure table 31 is released, and the fixing of the elongated workpiece W by the workpiece holder mechanism 35 is released, and the lift driving device 34 lowers the exposure table 31 to the lower end position.
步驟S14：基於在步驟S11從曝光台31的移動量 求得的長形工件W的現在位置，供給側制動輪15及捲取側制動輪25，以長形工件W曝光完成的1個框的下個1個框分量來到對準開始位置(亦即點B來到在步驟S2的點A位置)的方式，讓長形工件W移動到下游側。 Step S14: Based on the amount of movement from the exposure table 31 in step S11 The obtained current position of the long workpiece W is supplied to the side brake wheel 15 and the take-up side brake wheel 25, and the next 1 frame component of the 1 frame completed by the exposure of the long workpiece W comes to the alignment start position (also That is, the point B comes to the position of point A in step S2), and the long workpiece W is moved to the downstream side.
又，透過供給制動輪15及捲取制動輪25移動長 形工件W的同時，曝光台31在向上游方向被驅動，而移動到對準開始位置。如此，以供給制動輪15及捲取制動輪25讓長形工件W移動的話，容易讓長形工件W和曝光台31移動到別的方向。 In addition, the feed brake wheel 15 and the take-up brake wheel 25 move long. While the workpiece W is being shaped, the exposure table 31 is driven in the upstream direction and moved to the alignment start position. In this way, if the long workpiece W is moved by supplying the brake wheel 15 and the take-up brake wheel 25, it is easy to move the long workpiece W and the exposure table 31 to other directions.
步驟S15：完成透過供給制動輪15及捲取制動輪25讓長形工件W的移動和透過台移動部32讓曝光台31的移動之後，曝光台31上昇到上端位置，一面吸附在先前曝光過的1個框之下個位置的1個框分量的長形工件W的背面、一面保持其平坦。又，曝光台31的工件夾具機構35，將長形工件W的輸送方向(X方向)的端面夾持在其與台之間。 Step S15: After completing the movement of the long workpiece W through the supply brake wheel 15 and the winding brake wheel 25 and the movement of the exposure table 31 through the table moving section 32, the exposure table 31 rises to the upper end position, while adsorbing on the previously exposed The back surface and one side of the elongated workpiece W of one frame component at one position below the one frame are kept flat. The workpiece holder mechanism 35 of the exposure table 31 sandwiches the end surface in the conveying direction (X direction) of the elongated workpiece W between the workpiece and the table.
步驟S16：供給制動輪15及捲取制動輪25解除對長形工件W的夾持。供給卷軸11及捲取卷軸21的轉動驅動裝置(未圖示)，藉由轉動僅只既定的轉動驅動量，供給卷軸11將長形工件W送出僅只1個框分量到張力滾輪13，同時捲取卷軸21從張力滾輪23捲回1個框分量的長形工件W。 Step S16: The supply brake wheel 15 and the take-up brake wheel 25 release the clamping of the long workpiece W. The rotation driving device (not shown) of the supply reel 11 and the take-up reel 21 rotates only a predetermined rotational drive amount, and the supply reel 11 sends out the long workpiece W by only one frame component to the tension roller 13 and reels at the same time The reel 21 rolls back the elongated workpiece W of one frame component from the tension roller 23.
之後，與實施樣態1相同，依序重複實施步驟S4及其後的步驟。又，往步驟S11的動作分支，不只是在長形工件W的最初1個框的曝光後，也可以在任何的時點實施。 Thereafter, as in the first aspect, steps S4 and subsequent steps are repeatedly performed in sequence. The operation branching to step S11 may be performed at any time, not only after the exposure of the first frame of the elongated workpiece W.
以此方式，本實施樣態的曝光裝置1，具有在實施連續運轉時用以觀察曝光結果的工序(步驟S12)。觀察長形工件W最初的曝光結果，藉由調整曝光參數，能夠防止長形工件W的多數框的圖樣有不良形成，因此改善曝光裝置1的產能。又，曝光結果的觀察工序並非只是在長形工件W的最初曝光時，也可以在位任意的時點(例如每經過既定時間)實施。 In this way, the exposure apparatus 1 according to this aspect has a step for observing the exposure result when performing continuous operation (step S12). By observing the initial exposure result of the long workpiece W, and by adjusting the exposure parameters, it is possible to prevent the formation of a pattern of most frames of the long workpiece W, thereby improving the productivity of the exposure apparatus 1. In addition, the step of observing the exposure result is not limited to the initial exposure of the elongated workpiece W, and may be performed at an arbitrary timing (for example, every predetermined time).
又，觀察曝光結果的工序即使在連續運轉中被實施時，長形工件W由供給側制動輪15和捲取側制動輪25夾持、或是由曝光台31保持而被制動。藉此，能夠高精密地連結前後框的曝光，特別是在沒有對準標記的長形工件W中發 揮良好效果。 Further, even when the step of observing the exposure result is performed during continuous operation, the long workpiece W is held by the supply-side brake wheel 15 and the take-up brake wheel 25 or held by the exposure table 31 and braked. Thereby, the exposure of the front and rear frames can be connected with high precision, especially in a long workpiece W without an alignment mark. Good effect.
又，曝光結果的觀察和曝光參數的設定，雖說明是由操作人員藉由連接至對準相機41的監視器42以手動進行，但是也可以將未圖示的影像處理裝置連接到對準相機41，使曝光裝置1自動執行。 The observation of the exposure results and the setting of the exposure parameters are explained manually by the operator through the monitor 42 connected to the alignment camera 41, but an image processing device (not shown) may be connected to the alignment camera. 41. Automatically execute the exposure device 1.
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Also Published As
| Publication number | Publication date |
|---|---|
| TW201546574A (en) | 2015-12-16 |
| KR102333945B1 (en) | 2021-12-01 |
| JP6510768B2 (en) | 2019-05-08 |
| CN105093861A (en) | 2015-11-25 |
| JP2015222370A (en) | 2015-12-10 |
| KR20150135094A (en) | 2015-12-02 |
| CN105093861B (en) | 2017-12-19 |
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