JP2008047864A - 窒化物系半導体発光素子の製造方法 - Google Patents
窒化物系半導体発光素子の製造方法 Download PDFInfo
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- 150000004767 nitrides Chemical class 0.000 title claims abstract description 96
- 239000004065 semiconductor Substances 0.000 title claims abstract description 92
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 47
- 239000000758 substrate Substances 0.000 claims abstract description 57
- 238000000034 method Methods 0.000 claims abstract description 50
- 239000012298 atmosphere Substances 0.000 claims abstract description 24
- 238000001039 wet etching Methods 0.000 claims abstract description 18
- 239000013078 crystal Substances 0.000 claims abstract description 7
- 230000001737 promoting effect Effects 0.000 claims abstract description 4
- 239000010410 layer Substances 0.000 claims description 110
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 62
- 239000011241 protective layer Substances 0.000 claims description 40
- 239000011787 zinc oxide Substances 0.000 claims description 30
- 229910052594 sapphire Inorganic materials 0.000 claims description 19
- 239000010980 sapphire Substances 0.000 claims description 19
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims description 17
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 16
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 15
- 239000007789 gas Substances 0.000 claims description 11
- 238000004544 sputter deposition Methods 0.000 claims description 9
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 8
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 8
- 229910052757 nitrogen Inorganic materials 0.000 claims description 8
- 238000005240 physical vapour deposition Methods 0.000 claims description 8
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 8
- 238000005530 etching Methods 0.000 claims description 7
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 6
- 238000005229 chemical vapour deposition Methods 0.000 claims description 6
- 239000001301 oxygen Substances 0.000 claims description 6
- 229910052760 oxygen Inorganic materials 0.000 claims description 6
- 229910002704 AlGaN Inorganic materials 0.000 claims description 5
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 claims description 5
- 239000002253 acid Substances 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 5
- 229910017604 nitric acid Inorganic materials 0.000 claims description 5
- 239000011701 zinc Substances 0.000 claims description 5
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 4
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 4
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 claims description 4
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims description 4
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 4
- 229910052786 argon Inorganic materials 0.000 claims description 4
- -1 InGaN Inorganic materials 0.000 claims description 3
- 229910003363 ZnMgO Inorganic materials 0.000 claims description 3
- 239000000395 magnesium oxide Substances 0.000 claims description 3
- 229910052709 silver Inorganic materials 0.000 claims description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 2
- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 claims description 2
- 229910005191 Ga 2 O 3 Inorganic materials 0.000 claims description 2
- 229910005793 GeO 2 Inorganic materials 0.000 claims description 2
- 229910000673 Indium arsenide Inorganic materials 0.000 claims description 2
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- 229910000147 aluminium phosphate Inorganic materials 0.000 claims description 2
- 238000001704 evaporation Methods 0.000 claims description 2
- RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 claims description 2
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 claims description 2
- 229910052751 metal Inorganic materials 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- 238000001451 molecular beam epitaxy Methods 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- 239000010409 thin film Substances 0.000 description 93
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 14
- 239000001257 hydrogen Substances 0.000 description 11
- 229910052739 hydrogen Inorganic materials 0.000 description 11
- 239000000463 material Substances 0.000 description 10
- 238000006243 chemical reaction Methods 0.000 description 7
- 239000000243 solution Substances 0.000 description 6
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 4
- 229910052733 gallium Inorganic materials 0.000 description 4
- 239000011259 mixed solution Substances 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000012159 carrier gas Substances 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 3
- 238000011161 development Methods 0.000 description 3
- 229910000041 hydrogen chloride Inorganic materials 0.000 description 3
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 239000004593 Epoxy Substances 0.000 description 2
- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 2
- AJNVQOSZGJRYEI-UHFFFAOYSA-N digallium;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Ga+3].[Ga+3] AJNVQOSZGJRYEI-UHFFFAOYSA-N 0.000 description 2
- 229910001195 gallium oxide Inorganic materials 0.000 description 2
- 230000020169 heat generation Effects 0.000 description 2
- 238000005286 illumination Methods 0.000 description 2
- 239000012299 nitrogen atmosphere Substances 0.000 description 2
- 238000004151 rapid thermal annealing Methods 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- 229910052984 zinc sulfide Inorganic materials 0.000 description 2
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- 108010015780 Viral Core Proteins Proteins 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 229910007717 ZnSnO Inorganic materials 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- KYKLWYKWCAYAJY-UHFFFAOYSA-N oxotin;zinc Chemical compound [Zn].[Sn]=O KYKLWYKWCAYAJY-UHFFFAOYSA-N 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- XCZXGTMEAKBVPV-UHFFFAOYSA-N trimethylgallium Chemical compound C[Ga](C)C XCZXGTMEAKBVPV-UHFFFAOYSA-N 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 1
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Abstract
【解決手段】基板上に、湿式エッチング特性を有する犠牲層を形成する工程と、前記犠牲層上に保護層を形成して、結晶成長のための反応ガス雰囲気下で前記犠牲層を保護し、前記保護層上に形成される半導体層のエピタキシャル成長を促進させる工程と、前記保護層上に、n型半導体層、活性層及びp型半導体層を含む半導体素子を形成する工程と、前記犠牲層を湿式エッチングして、前記基板を前記半導体素子から分離及び除去する工程と、を含む窒化物系半導体発光素子の製造方法である。
【選択図】図1
Description
12 犠牲層、
14 保護層、
22 n型半導体層、
24 活性層、
26 p型半導体層、
30 半導体素子、
50 n−電極、
60 p−電極。
Claims (21)
- 基板上に、湿式エッチング特性を有する犠牲層を形成する工程と、
前記犠牲層上に保護層を形成して、結晶成長のための反応ガス雰囲気下で前記犠牲層を保護し、前記保護層上に形成される半導体層のエピタキシャル成長を促進させる工程と、
前記保護層上に、n型半導体層、活性層及びp型半導体層を含む半導体素子を形成する工程と、
前記犠牲層を湿式エッチングして、前記基板を前記半導体素子から分離及び除去する工程と、
を含む、窒化物系半導体発光素子の製造方法。 - 前記犠牲層が、SiO2、GeO2及びSnOからなる群から選択される一種以上を含む第1酸化物、ZnO、MgO、BeO、CaO、CdO、MnO、NiO、CuO、Cu2O、AgO、Ag2O及びWO3からなる群から選択される一種以上を含む第2酸化物、Cr2O3、CrO3、Al2O3、In2O3、B2O3、Ga2O3、Ti2O3及びCoOからなる群から選択される一種以上を含む第3酸化物、並びに酸化インジウムスズ(ITO)、InxZn(1−x)O(0<X≦1)(IZO)、アルミニウムドープ酸化亜鉛(AZO)及びZnMgOからなる群から選択されるいずれか一種を含む第4酸化物からなる群から選択される、第1酸化物〜第4酸化物のいずれかから形成される、請求項1に記載の製造方法。
- 前記犠牲層が、窒化シリコン(SiN)、窒酸化シリコン(SiON)及びZnSからなる群から選択されるいずれか一種から形成される、請求項1に記載の製造方法。
- 前記犠牲層が、化学気相蒸着(CVD)または物理気相蒸着(PVD)によって形成される、請求項1〜3のいずれか1項に記載の製造方法。
- 前記犠牲層が、0.01〜20μmの厚さに形成される、請求項1〜4のいずれか1項に記載の製造方法。
- 前記保護層は、SiC、GaAs、AlAs、InAs、AlGaAs、III族の窒化物及びIV族の窒化物からなる群から選択されるいずれか一種から形成される、請求項1〜5のいずれか1項に記載の製造方法。
- 前記III族の窒化物が、GaN、AlN、InN、TiN、BN、TiN、InGaN及びAlGaNからなる群から選択される一種以上を含む、請求項6に記載の製造方法。
- 前記IV族の窒化物が、SiN、CN及びSiCNからなる群から選択される一種以上を含む、請求項6または7に記載の製造方法。
- 前記保護層が、PVDによって形成される、請求項1〜8のいずれか1項に記載の製造方法。
- 前記PVDが、スパッタ法、分子線エピタキシー(MBE)または蒸発法である、請求項9に記載の製造方法。
- 前記保護層が、0.01〜20μmの厚さに形成される、請求項1〜10のいずれか1項に記載の製造方法。
- 前記湿式エッチングの工程は、前記犠牲層を選択的にエッチング可能な、酸系またはアルカリ系のエッチング液を使用することを含む、請求項1〜11のいずれか1項に記載の製造方法。
- 前記酸系のエッチング液は、フッ酸、塩酸、硫酸、硝酸またはリン酸溶液を含む、請求項12に記載の製造方法。
- 前記犠牲層を形成する工程と前記保護層を形成する工程との間に、
前記犠牲層を窒素、酸素及びアルゴンからなる群から選択される一種以上を含むガス雰囲気または真空雰囲気下で熱処理する工程を更に含む、請求項1〜13のいずれか1項に記載の製造方法。 - 前記熱処理は、前記犠牲層を100〜1400℃の温度で0.1〜180分間維持させる、請求項14に記載の製造方法。
- 前記基板の周囲の温度を1秒当たり1〜100℃の割合で上昇させて、前記熱処理の温度に到達させる、請求項15に記載の製造方法。
- 前記保護層を形成する工程と前記半導体素子を形成する工程との間に、
前記保護層を窒素、酸素及びアルゴンからなる群から選択される一種以上を含むガス雰囲気または真空雰囲気下で熱処理する工程を更に含む、請求項1〜16のいずれか1項に記載の製造方法。 - 前記熱処理は、前記保護層を100〜1400℃の温度で0.1〜180分間維持させる、請求項17に記載の製造方法。
- 前記基板の周囲の温度を1秒当たり1〜100℃の割合で上昇させて、前記熱処理の温度に到達させる、請求項18に記載の製造方法。
- 前記半導体素子が、有機金属気相成長(MOCVD)によって形成される、請求項1〜19のいずれか1項に記載の製造方法。
- 前記基板が、サファイア基板、Si基板、GaAs基板またはSiC基板である、請求項1〜20のいずれか1項に記載の製造方法。
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Cited By (7)
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WO2009110539A1 (ja) * | 2008-03-06 | 2009-09-11 | 住友金属鉱山株式会社 | 半導体発光素子、該半導体発光素子の製造方法および該半導体発光素子を用いたランプ |
JP2009260003A (ja) * | 2008-04-16 | 2009-11-05 | Stanley Electric Co Ltd | 半導体素子の製造方法 |
JP2010021546A (ja) * | 2008-07-08 | 2010-01-28 | Seoul Opto Devices Co Ltd | 発光素子及びその製造方法 |
JP2010093186A (ja) * | 2008-10-10 | 2010-04-22 | Showa Denko Kk | 窒化ガリウム系化合物半導体発光素子の製造方法、窒化ガリウム系化合物半導体素子の積層構造及び窒化ガリウム系化合物半導体発光素子、並びにランプ |
JP2012224539A (ja) * | 2011-04-19 | 2012-11-15 | Samsung Electronics Co Ltd | GaN薄膜構造物、その製造方法、及びそれを含む半導体素子 |
US8816354B2 (en) | 2012-06-21 | 2014-08-26 | Toyoda Gosei Co., Ltd. | Group III nitride semiconductor light-emitting device and production method therefor |
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US7989244B2 (en) | 2011-08-02 |
US20080038857A1 (en) | 2008-02-14 |
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