JP2007243181A - インプリンティングによる基板の製造方法 - Google Patents
インプリンティングによる基板の製造方法 Download PDFInfo
- Publication number
- JP2007243181A JP2007243181A JP2007048563A JP2007048563A JP2007243181A JP 2007243181 A JP2007243181 A JP 2007243181A JP 2007048563 A JP2007048563 A JP 2007048563A JP 2007048563 A JP2007048563 A JP 2007048563A JP 2007243181 A JP2007243181 A JP 2007243181A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- layer
- thin film
- imprinting
- metal thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/04—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed mechanically, e.g. by punching
- H05K3/045—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed mechanically, e.g. by punching by making a conductive layer having a relief pattern, followed by abrading of the raised portions
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/107—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by filling grooves in the support with conductive material
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/01—Tools for processing; Objects used during processing
- H05K2203/0104—Tools for processing; Objects used during processing for patterning or coating
- H05K2203/0108—Male die used for patterning, punching or transferring
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/108—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by semi-additive methods; masks therefor
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/38—Improvement of the adhesion between the insulating substrate and the metal
- H05K3/386—Improvement of the adhesion between the insulating substrate and the metal by the use of an organic polymeric bonding layer, e.g. adhesive
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/887—Nanoimprint lithography, i.e. nanostamp
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
- Y10T428/24917—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.] including metal layer
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing Of Printed Wiring (AREA)
Abstract
【解決手段】本発明は、(a)樹脂層の上部に金属薄膜層を積層する段階と、(b)上記樹脂層と上記金属薄膜層を配線パターンに応ずるパターンを有する面を含むインプリンティングモールド(imprinting mold)で加圧する段階と、(c)上記樹脂層を構成する樹脂を硬化させる段階と、(d)上記樹脂層及び上記金属薄膜層から上記インプリンティングモールドを除去する段階と、を含むインプリンティングによる基板の製造方法を提供する。
【選択図】図1
Description
302 離型層
303 金属薄膜層
305 樹脂層
307 下部基材
309 導電層
Claims (12)
- (a)樹脂層の上部に金属薄膜層を積層する段階と、
(b)前記樹脂層と前記金属薄膜層を配線パターンに応ずるパターンを有する面を含むインプリンティングモールド(imprinting mold)で加圧する段階と、
(c)前記樹脂層を構成する樹脂を硬化させる段階と、
(d)前記樹脂層及び前記金属薄膜層から前記インプリンティングモールドを除去する段階と、を含むインプリンティングによる基板の製造方法。 - 前記樹脂層は熱硬化性樹脂を含む層である請求項1に記載のインプリンティングによる基板の製造方法。
- 前記熱硬化性樹脂はエポキシ樹脂である請求項2に記載のインプリンティングによる基板の製造方法。
- 前記金属薄膜層は、金(Au)、銀(Ag)、ニッケル(Ni)、アルミニウム(Al)、銅(Cu)及びこれらの合金の中の少なくとも一つを含む請求項1に記載のインプリンティングによる基板の製造方法。
- 前記金属薄膜層の厚みが0.1ないし100μmである請求項1に記載のインプリンティングによる基板の製造方法。
- 前記段階(a)は、前記熱硬化樹脂が熱流れ性を有して前記金属薄膜層と結合することができる温度で行われる請求項2に記載のインプリンティングによる基板の製造方法。
- 前記段階(a)は、60ないし120℃で行われる請求項6に記載のインプリンティングによる基板の製造方法。
- 前記段階(c)は、80ないし250℃で行われる請求項2に記載のインプリンティングによる基板の製造方法。
- (e)前記金属薄膜層に転写された前記配線パターンの中の陰刻部に導電層を形成する段階と、
(f)前記樹脂層の高さに相当するように前記導電層と前記金属薄膜層を除去する段階と、をさらに含む請求項1に記載のインプリンティングによる基板の製造方法。 - 前記段階(e)の導電層が、電解めっきにより形成される請求項9に記載のインプリンティングによる基板の製造方法。
- 請求項1ないし10に記載のインプリンティングによる基板の製造方法により製造される基板。
- 幅が50nmないし15μmである導電性配線を含む請求項11に記載の基板。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020060020853A KR100741677B1 (ko) | 2006-03-06 | 2006-03-06 | 임프린팅에 의한 기판의 제조방법 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2007243181A true JP2007243181A (ja) | 2007-09-20 |
Family
ID=38471796
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007048563A Pending JP2007243181A (ja) | 2006-03-06 | 2007-02-28 | インプリンティングによる基板の製造方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US8187518B2 (ja) |
JP (1) | JP2007243181A (ja) |
KR (1) | KR100741677B1 (ja) |
CN (1) | CN101035412B (ja) |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009123379A (ja) * | 2007-11-12 | 2009-06-04 | Tokyo Ohka Kogyo Co Ltd | 負極基材 |
JP2010010500A (ja) * | 2008-06-30 | 2010-01-14 | Hitachi Ltd | 銅回路部品およびその製造方法 |
CN102236252A (zh) * | 2010-05-04 | 2011-11-09 | 乐金显示有限公司 | 薄膜图案的制造设备和方法 |
US8101519B2 (en) | 2008-08-14 | 2012-01-24 | Samsung Electronics Co., Ltd. | Mold, manufacturing method of mold, method for forming patterns using mold, and display substrate and display device manufactured by using method for forming patterns |
JP2014505942A (ja) * | 2011-01-13 | 2014-03-06 | エルジー イノテック カンパニー リミテッド | タッチパネル、その製造方法、及びタッチパネルを含む液晶表示装置 |
US8835050B2 (en) | 2007-11-12 | 2014-09-16 | Tokyo Ohka Kogyo Co., Ltd | Anode substrate |
JP2014189001A (ja) * | 2013-03-28 | 2014-10-06 | Fujitsu Ltd | 樹脂凸部形成方法及び配線板製造方法 |
JP2014229820A (ja) * | 2013-05-24 | 2014-12-08 | 富士通株式会社 | 配線基板の製造方法および配線基板製造用の型 |
JP2015504547A (ja) * | 2011-12-23 | 2015-02-12 | コリア インスティチュート オブ インダストリアル テクノロジー | マルチタッチ用タッチスクリーンパネル及びその製造方法 |
JP2015513150A (ja) * | 2013-02-06 | 2015-04-30 | 南昌欧菲光科技有限公司Nanchang O−Film Tech. Co., Ltd. | 導電膜、その製造方法、および導電膜を含むタッチスクリーン |
Families Citing this family (17)
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JP5096223B2 (ja) * | 2008-05-08 | 2012-12-12 | 日東電工株式会社 | 配線回路基板の製造方法 |
KR20090129927A (ko) * | 2008-06-13 | 2009-12-17 | 주식회사 엘지화학 | 발열체 및 이의 제조방법 |
JP5021842B2 (ja) * | 2008-06-13 | 2012-09-12 | エルジー・ケム・リミテッド | 発熱体およびその製造方法 |
KR101042117B1 (ko) | 2008-11-06 | 2011-06-16 | 안복만 | 금형성형에 의한 두께동 전자회로 형성방법 |
JP2010287625A (ja) * | 2009-06-09 | 2010-12-24 | Toshiba Corp | テンプレート及びパターン形成方法 |
WO2011037285A1 (ko) * | 2009-09-24 | 2011-03-31 | Hwang Choon Seob | 전극 제조방법 |
KR20110038521A (ko) * | 2009-10-08 | 2011-04-14 | 엘지이노텍 주식회사 | 인쇄회로기판 및 그 제조방법 |
KR101373721B1 (ko) * | 2012-01-27 | 2014-03-14 | 한국기계연구원 | 나노 금속패턴 형성방법 |
US9313896B2 (en) | 2013-02-04 | 2016-04-12 | Nanchang O-Film Tech. Co., Ltd. | Double-layered transparent conductive film and manufacturing method thereof |
CN103426500B (zh) * | 2013-02-04 | 2016-03-09 | 南昌欧菲光科技有限公司 | 双层透明导电膜及其制备方法 |
US8828503B1 (en) * | 2013-02-28 | 2014-09-09 | Eastman Kodak Company | Making multi-layer micro-wire structure |
US8895429B2 (en) * | 2013-03-05 | 2014-11-25 | Eastman Kodak Company | Micro-channel structure with variable depths |
JP6574757B2 (ja) | 2013-04-19 | 2019-09-11 | インクテック カンパニー, リミテッドInktec Co., Ltd. | ディスプレイ用透明電極フィルムの製造方法およびディスプレイ用透明電極フィルム |
CN106034373B (zh) * | 2015-03-10 | 2018-09-25 | 上海量子绘景电子股份有限公司 | 高密度多层铜线路板及其制备方法 |
KR102179729B1 (ko) * | 2018-03-27 | 2020-11-17 | 주식회사 엘지화학 | 블랙 격벽 패턴 필름 및 이의 제조방법 |
KR20240001274A (ko) * | 2019-01-07 | 2024-01-03 | 비아비 솔루션즈 아이엔씨. | 유기층을 포함하는 다층 물품 |
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JP2000114719A (ja) * | 1998-10-09 | 2000-04-21 | Ibiden Co Ltd | 多層プリント配線板の製造方法 |
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JP2002290010A (ja) * | 2001-03-23 | 2002-10-04 | Toppan Printing Co Ltd | プリント配線板及びその製造方法 |
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2006
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-
2007
- 2007-02-28 JP JP2007048563A patent/JP2007243181A/ja active Pending
- 2007-03-05 US US11/713,608 patent/US8187518B2/en not_active Expired - Fee Related
- 2007-03-06 CN CN2007100867045A patent/CN101035412B/zh not_active Expired - Fee Related
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JP2000114719A (ja) * | 1998-10-09 | 2000-04-21 | Ibiden Co Ltd | 多層プリント配線板の製造方法 |
JP2002270997A (ja) * | 2001-03-08 | 2002-09-20 | Hitachi Ltd | 配線基板の製造方法 |
JP2002290010A (ja) * | 2001-03-23 | 2002-10-04 | Toppan Printing Co Ltd | プリント配線板及びその製造方法 |
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Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009123379A (ja) * | 2007-11-12 | 2009-06-04 | Tokyo Ohka Kogyo Co Ltd | 負極基材 |
US8835050B2 (en) | 2007-11-12 | 2014-09-16 | Tokyo Ohka Kogyo Co., Ltd | Anode substrate |
JP2010010500A (ja) * | 2008-06-30 | 2010-01-14 | Hitachi Ltd | 銅回路部品およびその製造方法 |
US8101519B2 (en) | 2008-08-14 | 2012-01-24 | Samsung Electronics Co., Ltd. | Mold, manufacturing method of mold, method for forming patterns using mold, and display substrate and display device manufactured by using method for forming patterns |
CN102236252A (zh) * | 2010-05-04 | 2011-11-09 | 乐金显示有限公司 | 薄膜图案的制造设备和方法 |
JP2014505942A (ja) * | 2011-01-13 | 2014-03-06 | エルジー イノテック カンパニー リミテッド | タッチパネル、その製造方法、及びタッチパネルを含む液晶表示装置 |
JP2015504547A (ja) * | 2011-12-23 | 2015-02-12 | コリア インスティチュート オブ インダストリアル テクノロジー | マルチタッチ用タッチスクリーンパネル及びその製造方法 |
JP2015513150A (ja) * | 2013-02-06 | 2015-04-30 | 南昌欧菲光科技有限公司Nanchang O−Film Tech. Co., Ltd. | 導電膜、その製造方法、および導電膜を含むタッチスクリーン |
JP2014189001A (ja) * | 2013-03-28 | 2014-10-06 | Fujitsu Ltd | 樹脂凸部形成方法及び配線板製造方法 |
JP2014229820A (ja) * | 2013-05-24 | 2014-12-08 | 富士通株式会社 | 配線基板の製造方法および配線基板製造用の型 |
Also Published As
Publication number | Publication date |
---|---|
CN101035412B (zh) | 2012-06-20 |
KR100741677B1 (ko) | 2007-07-23 |
US20070207297A1 (en) | 2007-09-06 |
CN101035412A (zh) | 2007-09-12 |
US8187518B2 (en) | 2012-05-29 |
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