JP2007194322A - 車載用gmr角度センサ - Google Patents
車載用gmr角度センサ Download PDFInfo
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- JP2007194322A JP2007194322A JP2006009660A JP2006009660A JP2007194322A JP 2007194322 A JP2007194322 A JP 2007194322A JP 2006009660 A JP2006009660 A JP 2006009660A JP 2006009660 A JP2006009660 A JP 2006009660A JP 2007194322 A JP2007194322 A JP 2007194322A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/142—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
- G01D5/145—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the relative movement between the Hall device and magnetic fields
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Hall/Mr Elements (AREA)
- Measuring Magnetic Variables (AREA)
Abstract
【解決手段】 外部磁界に応じて素子抵抗が変化するGMR素子と、前記GMR素子の両端に接続したリード導体と、GMR素子及びリード導体を封止する保護層とを備えた車載用GMR角度センサにおいて、上記保護層を、GMR素子及びリード導体の絶縁性を確保し、耐酸化性を有する無機膜と、この無機膜の上に積層されるシリコーン系の有機膜との積層構造で形成する。
【選択図】図4
Description
前記保護層は、前記巨大磁気抵抗効果素子及び前記リード導体の絶縁性を確保する無機膜と、シリコーン系の有機膜との積層構造を有して形成されていることを特徴としている。
2 回転軸
3 回転磁石
10 GMR素子
11 基板
12 反強磁性層
13 固定磁性層
14 非磁性導電層
15 フリー磁性層
16 キャップ層
18 絶縁層
30 リード導体
31 Au電極パッド
40 保護層
41 無機膜
42 アルミナ(Al2O3)膜
43 シリカ(SiO2)膜
45 有機膜
Claims (7)
- 外部磁界に応じて素子抵抗が変化する巨大磁気抵抗効果素子と、前記巨大磁気抵抗効果素子に接続したリード導体と、前記巨大磁気抵抗効果素子及び前記リード導体を封止する保護層とを備えた車載用GMR角度センサにおいて、
前記保護層は、前記巨大磁気抵抗効果素子及び前記リード導体の絶縁性を確保する無機膜と、シリコーン系の有機膜との積層構造を有して形成されていることを特徴とする車載用GMR角度センサ。 - 前記有機膜は、200〜250℃で硬化可能なシリコーン系感光樹脂によって形成される請求項1記載の車載用GMR角度センサ。
- 前記有機膜は、少なくとも5μmの厚みを有する請求項1または2記載の車載用GMR角度センサ。
- 前記有機膜は、フォトリソグラフィを利用したパターニングにより形成されている請求項1ないし3のいずれかに記載の車載用GMR角度センサ。
- 前記無機膜は、シリカ(SiO2)膜と、前記シリカ膜の上及び下の少なくとも一方に積層した酸化防止膜とを有して形成される請求項1ないし4のいずれかに記載の車載用GMR角度センサ。
- 前記酸化防止膜は、アルミナ(Al2O3)膜である請求項5記載の車載用GMR角度センサ。
- 前記巨大磁気抵抗効果素子及び前記リード導体上に前記無機膜が形成され、前記無機膜上に前記有機膜が形成される請求項1ないし6のいずれかに記載の車載用GMR角度センサ。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006009660A JP4739963B2 (ja) | 2006-01-18 | 2006-01-18 | 車載用gmr角度センサ |
US11/651,899 US7405560B2 (en) | 2006-01-18 | 2007-01-09 | GMR angle sensor for vehicles |
EP07000690A EP1813917B1 (en) | 2006-01-18 | 2007-01-15 | GMR Angle sensor for vehicles |
DE602007001282T DE602007001282D1 (de) | 2006-01-18 | 2007-01-15 | GMR-Winkelsensor für Fahrzeuge |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006009660A JP4739963B2 (ja) | 2006-01-18 | 2006-01-18 | 車載用gmr角度センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007194322A true JP2007194322A (ja) | 2007-08-02 |
JP4739963B2 JP4739963B2 (ja) | 2011-08-03 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2006009660A Active JP4739963B2 (ja) | 2006-01-18 | 2006-01-18 | 車載用gmr角度センサ |
Country Status (4)
Country | Link |
---|---|
US (1) | US7405560B2 (ja) |
EP (1) | EP1813917B1 (ja) |
JP (1) | JP4739963B2 (ja) |
DE (1) | DE602007001282D1 (ja) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2009078296A1 (ja) * | 2007-12-14 | 2009-06-25 | Alps Electric Co., Ltd. | 磁気センサ |
JP2011521223A (ja) * | 2008-05-14 | 2011-07-21 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | Gmrによる酸素濃度測定 |
JP2016523008A (ja) * | 2013-04-01 | 2016-08-04 | 江▲蘇▼多▲維▼科技有限公司Multidimension Technology Co., Ltd. | プッシュプル式フリップチップハーフブリッジ磁気抵抗スイッチ |
JP2016149418A (ja) * | 2015-02-10 | 2016-08-18 | アルプス電気株式会社 | 磁気センサ |
US10761150B2 (en) | 2016-10-25 | 2020-09-01 | Tdk Corporation | Magnetic field detection device |
Families Citing this family (21)
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DE102006018627A1 (de) * | 2006-04-21 | 2007-10-25 | Siemens Ag | Magnetischer Drehwinkelgeber |
JP4485499B2 (ja) * | 2006-09-04 | 2010-06-23 | アルプス電気株式会社 | 磁気検出装置およびその製造方法 |
JP2008249556A (ja) * | 2007-03-30 | 2008-10-16 | Tdk Corp | 磁気センサ |
US20090066465A1 (en) * | 2007-09-06 | 2009-03-12 | Udo Ausserlechner | Magnetic core for testing magnetic sensors |
US7923987B2 (en) | 2007-10-08 | 2011-04-12 | Infineon Technologies Ag | Magnetic sensor integrated circuit with test conductor |
US8559139B2 (en) | 2007-12-14 | 2013-10-15 | Intel Mobile Communications GmbH | Sensor module and method for manufacturing a sensor module |
US8857464B2 (en) | 2008-01-30 | 2014-10-14 | Flowserve Management Company | Valve actuators having magnetic angle sensors |
US7965077B2 (en) * | 2008-05-08 | 2011-06-21 | Everspin Technologies, Inc. | Two-axis magnetic field sensor with multiple pinning directions |
US9606194B2 (en) | 2008-09-08 | 2017-03-28 | Infineon Technologies Ag | Off-center angle measurement system |
US8058866B2 (en) * | 2008-09-08 | 2011-11-15 | Infineon Technologies Ag | Off-center angle measurement system |
US8269486B2 (en) | 2008-11-12 | 2012-09-18 | Infineon Technologies Ag | Magnetic sensor system and method |
US9121880B2 (en) | 2011-11-04 | 2015-09-01 | Infineon Technologies Ag | Magnetic sensor device |
US9201123B2 (en) * | 2011-11-04 | 2015-12-01 | Infineon Technologies Ag | Magnetic sensor device and a method for fabricating the same |
US9529060B2 (en) | 2014-01-09 | 2016-12-27 | Allegro Microsystems, Llc | Magnetoresistance element with improved response to magnetic fields |
US9812637B2 (en) | 2015-06-05 | 2017-11-07 | Allegro Microsystems, Llc | Spin valve magnetoresistance element with improved response to magnetic fields |
JP6759751B2 (ja) * | 2016-06-23 | 2020-09-23 | 日立金属株式会社 | 回転検出装置及びセンサ付きケーブル |
US10620279B2 (en) | 2017-05-19 | 2020-04-14 | Allegro Microsystems, Llc | Magnetoresistance element with increased operational range |
US11022661B2 (en) | 2017-05-19 | 2021-06-01 | Allegro Microsystems, Llc | Magnetoresistance element with increased operational range |
CN108955509B (zh) * | 2018-09-19 | 2024-04-09 | 湖北米朗科技股份有限公司 | 一种具有高密封性能的磁拖式碳膜直线位移传感器 |
US10825984B1 (en) | 2019-08-21 | 2020-11-03 | Globalfoundries Singapore Pte. Ltd. | Sensors including dummy elements arranged about a sensing element |
US11719771B1 (en) | 2022-06-02 | 2023-08-08 | Allegro Microsystems, Llc | Magnetoresistive sensor having seed layer hysteresis suppression |
Citations (4)
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JPH03263886A (ja) * | 1990-03-14 | 1991-11-25 | Fujitsu Ltd | 磁気抵抗素子とその製造方法 |
WO2001046708A1 (fr) * | 1999-12-22 | 2001-06-28 | Mitsubichi Denki Kabushiki Kaisha | Equipement de detection et son procede de fabrication |
WO2004025745A1 (ja) * | 2002-09-13 | 2004-03-25 | Matsushita Electric Industrial Co., Ltd. | 磁気抵抗効果素子およびこの製造方法並びに使用方法 |
JP2004247408A (ja) * | 2003-02-12 | 2004-09-02 | Sony Precision Technology Inc | 磁気検出センサ |
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JP3260921B2 (ja) | 1993-08-25 | 2002-02-25 | 株式会社デンソー | 可動体変位検出装置 |
JPH0870148A (ja) | 1994-08-30 | 1996-03-12 | Mitsubishi Materials Corp | 磁気抵抗素子 |
JP3560713B2 (ja) | 1995-01-27 | 2004-09-02 | アルプス電気株式会社 | 磁気抵抗効果素子用多層薄膜材料および磁性層の磁化の調整方法 |
JPH11287669A (ja) | 1998-03-31 | 1999-10-19 | Tdk Corp | 磁界センサ |
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JP3523797B2 (ja) | 1999-01-25 | 2004-04-26 | Ykk株式会社 | 磁気式エンコーダ |
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JP3626469B2 (ja) | 2002-04-19 | 2005-03-09 | 三菱電機株式会社 | 磁気抵抗センサ装置 |
JP2004363157A (ja) * | 2003-06-02 | 2004-12-24 | Res Inst Electric Magnetic Alloys | 薄膜磁気センサ及びその製造方法 |
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2006
- 2006-01-18 JP JP2006009660A patent/JP4739963B2/ja active Active
-
2007
- 2007-01-09 US US11/651,899 patent/US7405560B2/en active Active
- 2007-01-15 DE DE602007001282T patent/DE602007001282D1/de active Active
- 2007-01-15 EP EP07000690A patent/EP1813917B1/en active Active
Patent Citations (4)
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JPH03263886A (ja) * | 1990-03-14 | 1991-11-25 | Fujitsu Ltd | 磁気抵抗素子とその製造方法 |
WO2001046708A1 (fr) * | 1999-12-22 | 2001-06-28 | Mitsubichi Denki Kabushiki Kaisha | Equipement de detection et son procede de fabrication |
WO2004025745A1 (ja) * | 2002-09-13 | 2004-03-25 | Matsushita Electric Industrial Co., Ltd. | 磁気抵抗効果素子およびこの製造方法並びに使用方法 |
JP2004247408A (ja) * | 2003-02-12 | 2004-09-02 | Sony Precision Technology Inc | 磁気検出センサ |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2009078296A1 (ja) * | 2007-12-14 | 2009-06-25 | Alps Electric Co., Ltd. | 磁気センサ |
JP2011521223A (ja) * | 2008-05-14 | 2011-07-21 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | Gmrによる酸素濃度測定 |
JP2016523008A (ja) * | 2013-04-01 | 2016-08-04 | 江▲蘇▼多▲維▼科技有限公司Multidimension Technology Co., Ltd. | プッシュプル式フリップチップハーフブリッジ磁気抵抗スイッチ |
JP2016149418A (ja) * | 2015-02-10 | 2016-08-18 | アルプス電気株式会社 | 磁気センサ |
US10761150B2 (en) | 2016-10-25 | 2020-09-01 | Tdk Corporation | Magnetic field detection device |
US10782362B2 (en) | 2016-10-25 | 2020-09-22 | Tdk Corporation | Magnetic field detection device |
US11333717B2 (en) | 2016-10-25 | 2022-05-17 | Tdk Corporation | Magnetic field detection device |
US11808825B2 (en) | 2016-10-25 | 2023-11-07 | Tdk Corporation | Magnetic field detection device |
Also Published As
Publication number | Publication date |
---|---|
DE602007001282D1 (de) | 2009-07-30 |
US20070164734A1 (en) | 2007-07-19 |
US7405560B2 (en) | 2008-07-29 |
EP1813917A1 (en) | 2007-08-01 |
JP4739963B2 (ja) | 2011-08-03 |
EP1813917B1 (en) | 2009-06-17 |
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