JP2007114187A - Defect inspection method and device therefor - Google Patents
Defect inspection method and device therefor Download PDFInfo
- Publication number
- JP2007114187A JP2007114187A JP2006245056A JP2006245056A JP2007114187A JP 2007114187 A JP2007114187 A JP 2007114187A JP 2006245056 A JP2006245056 A JP 2006245056A JP 2006245056 A JP2006245056 A JP 2006245056A JP 2007114187 A JP2007114187 A JP 2007114187A
- Authority
- JP
- Japan
- Prior art keywords
- light
- defect inspection
- defect
- imaging
- irradiation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000007547 defect Effects 0.000 title claims abstract description 126
- 238000007689 inspection Methods 0.000 title claims abstract description 93
- 238000000034 method Methods 0.000 title claims abstract description 21
- 239000012510 hollow fiber Substances 0.000 claims abstract description 96
- 239000012528 membrane Substances 0.000 claims abstract description 96
- 230000003287 optical effect Effects 0.000 claims abstract description 4
- 238000003384 imaging method Methods 0.000 claims description 86
- 230000001678 irradiating effect Effects 0.000 claims description 38
- 239000000835 fiber Substances 0.000 abstract description 45
- 238000010586 diagram Methods 0.000 description 11
- 239000000463 material Substances 0.000 description 9
- 239000011162 core material Substances 0.000 description 6
- 238000005286 illumination Methods 0.000 description 6
- 238000000926 separation method Methods 0.000 description 6
- 229910052736 halogen Inorganic materials 0.000 description 4
- 150000002367 halogens Chemical class 0.000 description 4
- 230000001902 propagating effect Effects 0.000 description 4
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 230000001066 destructive effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000002033 PVDF binder Substances 0.000 description 1
- 229920002845 Poly(methacrylic acid) Polymers 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004695 Polyether sulfone Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229920002678 cellulose Polymers 0.000 description 1
- 239000001913 cellulose Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000000502 dialysis Methods 0.000 description 1
- 238000010291 electrical method Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000008204 material by function Substances 0.000 description 1
- 229910001507 metal halide Inorganic materials 0.000 description 1
- 150000005309 metal halides Chemical class 0.000 description 1
- 238000001471 micro-filtration Methods 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 238000005373 pervaporation Methods 0.000 description 1
- 229920001643 poly(ether ketone) Polymers 0.000 description 1
- 229920002492 poly(sulfone) Polymers 0.000 description 1
- 229920002239 polyacrylonitrile Polymers 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920006393 polyether sulfone Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920000098 polyolefin Polymers 0.000 description 1
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000000108 ultra-filtration Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
Abstract
Description
本発明は、内部に略均一な連続した導光部を持つ長尺状の対象物の欠陥を検査する方法及び装置に関するものである。 The present invention relates to a method and an apparatus for inspecting a defect of a long object having a substantially uniform continuous light guide inside.
従来、内部にほぼ均一な中空部を持つ筒状の機能性材料として、中空糸膜等がフィルターや分離膜、隔膜等として多用されているが、その形状が筒状であり、また不透明であるため、製造後の品質は外部からの表面状態の検査、または内圧をかけての破壊検査等により確認するしかなかった。 Conventionally, hollow fiber membranes and the like are often used as filters, separation membranes, diaphragms, etc., as cylindrical functional materials having a substantially uniform hollow portion inside, but the shape is cylindrical and opaque. For this reason, the quality after production can only be confirmed by an external surface condition inspection or a destructive inspection by applying internal pressure.
一方、平面状の不透明物体に対する検査として、表面から光を入射して物体の実質部分内の伝播状態のばらつきにより欠陥を検査する技術が特許文献１〜３により提案されている。 On the other hand, as inspection for a planar opaque object, Patent Documents 1 to 3 propose a technique in which light is incident from the surface and a defect is inspected by variation in a propagation state in a substantial part of the object.
また、特許文献４には走行する円柱状物体または円筒状物体の欠陥を検出する技術が提案されている。 Patent Document 4 proposes a technique for detecting a traveling columnar object or a defect of a cylindrical object.
しかしながら、前述の特許文献１〜３の技術では、中空糸膜のような筒状の対象物では表面における反射方向が一定しないことや筒部の厚さが非常に薄いため、入射光と染み出してくる光の分離が困難であるため筒状の対象物には適用出来なかった。 However, in the techniques of Patent Documents 1 to 3 described above, the cylindrical object such as a hollow fiber membrane has a non-constant reflection direction on the surface and the thickness of the cylindrical portion is very thin. It was difficult to separate the incoming light, so it could not be applied to cylindrical objects.
従来技術では物体の実質を光が伝搬して検査に有効に使える光の入射位置からの距離は２ｍｍ程度であり、遮光構造の強度や遮光構造貫通部での被検査物の保護を考えた場合に現実的と思われる遮光構造の厚みを考えると、遮光構造を通過中に光は衰弱してしまうため検査できなかった。 In the prior art, the distance from the incident position of light that can be effectively used for inspection by the propagation of light through the object is about 2 mm. Considering the strength of the light shielding structure and the protection of the inspection object at the light shielding structure penetration Considering the thickness of the light shielding structure, which is considered to be realistic, the light was weakened while passing through the light shielding structure, so that the inspection could not be performed.
また、特許文献４の技術では、物体表面の反射光のみを検出するため物体表面に付着した異物や黒点、或いは表面傷は検出出来ても内部欠陥までは検出出来なかった。 Further, in the technique of Patent Document 4, since only the reflected light from the object surface is detected, foreign matter, black spots, or surface scratches attached to the object surface can be detected, but internal defects cannot be detected.
このように、近年、品質向上や歩留まり向上の要求から、筒状構造物等の内部に略均一な連続した導光部を持つ長尺状の対象物が完成した時点での全量検査が望まれているが、中空糸膜等の場合には不透明であるがゆえに、表面のみの検査、もしくは破壊検査しか出来ないという問題があり、内部に略均一な連続した導光部を持つ長尺状の対象物の欠陥検査が望まれていた。 As described above, in recent years, due to demands for quality improvement and yield improvement, it is desired to inspect the entire quantity when a long object having a substantially uniform continuous light guide portion inside a cylindrical structure or the like is completed. However, in the case of a hollow fiber membrane or the like, there is a problem that only a surface inspection or a destructive inspection can be performed because it is opaque, and a long shape having a substantially uniform continuous light guide portion inside. A defect inspection of the object has been desired.
この問題に対して鋭意工夫し観察を行った結果、内部に導光部をもつ中空糸のような検査対象では外部から導入した光は実質部のみを伝わるより長い距離を伝搬しながら外部へ漏れ出してくる事を見出し、実用的遮光構造と組み合わせる事によって、内部伝搬光による光と表面での反射光を分離し実用的な検査方法を発明するに至った。 As a result of diligent observation of this problem, light introduced from the outside leaks to the outside while propagating a longer distance than only the substantial part in the inspection object such as a hollow fiber having a light guide inside. By finding out the light and combining it with a practical light-shielding structure, the light by the internal propagation light and the reflected light from the surface are separated, and a practical inspection method has been invented.
本発明は前記課題を解決するものであり、その目的とするところは、内部に略均一な連続した導光部を持つ長尺状の対象物の内部欠陥をも検査可能な欠陥検査方法及び欠陥検査装置を提供せんとするものである。 SUMMARY OF THE INVENTION The present invention solves the above-mentioned problems, and its object is to provide a defect inspection method and defect capable of inspecting an internal defect of a long object having a substantially uniform continuous light guide inside. It is intended to provide inspection equipment.
前記目的を達成するための本発明に係る欠陥検査方法は、内部に略均一な連続した導光部を持つ長尺状の対象物の欠陥を検査する方法であって、照射手段により前記対象物に対して外側から光を照射すると共に、該照射手段から出射される直接光及び該照射手段により照射された光が前記対象物の外表面を反射した反射光及び前記対象物を透過して一旦外部に出た透過光が撮像手段に入射しないように遮光手段により遮光し、前記照射手段により照射された光が前記対象物内の導光部に導かれて該導光部から該対象物の外側に出射する光像を前記撮像手段により撮像し、該撮像手段の出力信号を処理して前記対象物の欠陥を検出することを特徴とする。 In order to achieve the above object, a defect inspection method according to the present invention is a method for inspecting a defect of a long object having a substantially uniform continuous light guide inside, and the object is irradiated by an irradiation means. Irradiates light from the outside, and the direct light emitted from the irradiating means and the light irradiated by the irradiating means pass through the reflected light reflected from the outer surface of the object and the object once. The light transmitted from the outside is blocked by the light blocking means so that the transmitted light does not enter the imaging means, and the light irradiated by the irradiation means is guided to the light guide section in the object and is guided from the light guide section to the object. A light image emitted outward is picked up by the image pickup means, and an output signal of the image pickup means is processed to detect a defect of the object.
また、本発明に係る欠陥検査装置の第１の構成は、内部に略均一な連続した導光部を持つ長尺状の対象物の欠陥を検査する装置であって、前記対象物に対して外側から光を照射する第１の照射手段と、前記第１の照射手段により照射された光が前記対象物内の導光部に導かれて該導光部から対象物の外側に出射する光像を撮像する第１の撮像手段と、前記長尺状の対象物の長手方向における前記第１の照射手段と前記第１の撮像手段との間に設けられ、前記第１の照射手段から出射される直接光及び前記第１の照射手段により照射された光が前記対象物の外表面を反射した反射光及び前記対象物を透過して一旦外部に出た透過光が前記第１の撮像手段に入射しないように遮光する遮光手段と、前記第１の撮像手段の出力信号を処理して前記対象物の欠陥を検出する第１の画像処理手段とを有することを特徴とする。 Moreover, the first configuration of the defect inspection apparatus according to the present invention is an apparatus for inspecting a defect of a long object having a substantially uniform continuous light guide inside, and for the object First irradiating means for irradiating light from the outside, and light emitted by the first irradiating means being guided to the light guide section in the object and emitted from the light guide section to the outside of the object A first imaging unit that captures an image; and a first imaging unit that is provided between the first irradiation unit and the first imaging unit in a longitudinal direction of the elongated object, and is emitted from the first irradiation unit. The direct imaging light and the reflected light reflected from the outer surface of the object and the transmitted light that has passed through the object and once exited to the outside are the first imaging means. A light shielding means for shielding light so as not to be incident on the light, and an output signal of the first imaging means to process the pair. And having a first image processing means for detecting defects in objects.
また、本発明に係る欠陥検査装置の第２の構成は、前記第１の構成において、前記長尺状の対象物の長手方向における前記第１の照射手段と前記第１の撮像手段との離間間隔は、０．１mm以上、且つ１００mm以下に設定したことを特徴とする。 According to a second configuration of the defect inspection apparatus of the present invention, in the first configuration, the first irradiation unit and the first imaging unit are separated in the longitudinal direction of the elongated object. The interval is set to 0.1 mm or more and 100 mm or less.
また、本発明に係る欠陥検査装置の第３の構成は、前記第１の構成において、前記第１の照射手段は、直線状に配列された出射口を持つ光源を有して構成したことを特徴とする。 According to a third configuration of the defect inspection apparatus of the present invention, in the first configuration, the first irradiation unit includes a light source having emission ports arranged in a straight line. Features.
また、本発明に係る欠陥検査装置の第４の構成は、前記第３の構成において、前記対象物を挟んで前記第１の照射手段に対向して反射面を有する反射部材を配置し、該反射面により第１の照射手段から出射された光を反射して該対象物に照射することを特徴とする。 According to a fourth configuration of the defect inspection apparatus of the present invention, in the third configuration, a reflective member having a reflective surface is disposed opposite to the first irradiation unit with the object interposed therebetween, The light emitted from the first irradiating means is reflected by the reflecting surface and irradiated to the object.
また、本発明に係る欠陥検査装置の第５の構成は、前記第１の構成において、前記第１の照射手段は、環状の出射口を持つ光源を有して構成され、該環状の出射口の内側に前記対象物を設置することを特徴とする。 According to a fifth configuration of the defect inspection apparatus of the present invention, in the first configuration, the first irradiation unit includes a light source having an annular exit port, and the annular exit port The object is installed on the inside.
また、本発明に係る欠陥検査装置の第６の構成は、前記第１の構成において、前記対象物に対して外側から光を照射する第２の照射手段と、前記第２の照射手段により照射され、前記対象物の外表面を反射した反射光による光像を撮像する第２の撮像手段と、前記第２の撮像手段の出力信号を処理して前記対象物の欠陥を検出する第２の画像処理手段とを有することを特徴とする。 According to a sixth configuration of the defect inspection apparatus of the present invention, in the first configuration, the second irradiation unit that irradiates the object with light from the outside and the second irradiation unit irradiates the object. A second imaging unit that captures a light image of the reflected light reflected from the outer surface of the object, and a second that detects a defect of the object by processing an output signal of the second imaging unit. And image processing means.
また、本発明に係る欠陥検査装置の第７の構成は、前記第６の構成において、前記第１、第２の画像処理手段は、前記第１、第２の撮像手段の出力信号を相互に組み合わせて処理して前記対象物の欠陥を検出することを特徴とする。 According to a seventh configuration of the defect inspection apparatus of the present invention, in the sixth configuration, the first and second image processing means mutually output the output signals of the first and second imaging means. It is characterized by detecting defects of the object by processing in combination.
また、本発明に係る欠陥検査装置の第８の構成は、前記第６の構成において、前記第１の照射手段が前記第２の照射手段を兼ねており、前記長尺状の対象物の長手方向における前記第１の撮像手段と前記第２の撮像手段との間に前記第１の照射手段を配置したことを特徴とする。 According to an eighth configuration of the defect inspection apparatus of the present invention, in the sixth configuration, the first irradiation unit also serves as the second irradiation unit, and the length of the elongated object is long. The first irradiation unit is disposed between the first imaging unit and the second imaging unit in a direction.
また、本発明に係る欠陥検査装置の第９の構成は、前記第６の構成において、前記第１、第２の撮像手段が１台のカラーカメラにより構成され、前記長尺状の対象物の長手方向における前記第１の照射手段と前記第２の照射手段との間に前記カラーカメラを配置し、前記第１の照射手段と前記第２の照射手段とは前記カラーカメラで区別することの出来るそれぞれ異なる波長を持つ光を照射するように構成され、前記カラーカメラの出力信号から電気的に分離した前記第１の照射手段に割り当てられた光による第１の画像を前記第１の撮像手段の出力信号とし、前記第２の照射手段に割り当てられた光による第２の画像を前記第２の撮像手段の出力信号としたことを特徴とする。 According to a ninth configuration of the defect inspection apparatus of the present invention, in the sixth configuration, the first and second imaging means are configured by a single color camera, and the long object is The color camera is disposed between the first irradiation unit and the second irradiation unit in the longitudinal direction, and the first irradiation unit and the second irradiation unit are distinguished by the color camera. The first imaging unit is configured to irradiate light having different wavelengths as possible, and the first image by the light assigned to the first irradiating unit electrically separated from the output signal of the color camera. And the second image by the light assigned to the second irradiation means is used as the output signal of the second imaging means.
また、本発明に係る欠陥検査装置の第１０の構成は、前記第６の構成において、前記第２の照射手段は、直線状に配列された出射口を持つ光源を有して構成したことを特徴とする。 According to a tenth configuration of the defect inspection apparatus of the present invention, in the sixth configuration, the second irradiation unit includes a light source having an emission port arranged in a straight line. Features.
また、本発明に係る欠陥検査装置の第１１の構成は、前記第６の構成において、前記第２の照射手段は、環状の出射口を持つ光源を有して構成され、該環状の出射口の内側に前記対象物を設置することを特徴とする。 According to an eleventh configuration of the defect inspection apparatus of the present invention, in the sixth configuration, the second irradiation unit includes a light source having an annular emission port, and the annular emission port. The object is installed on the inside.
また、本発明に係る欠陥検査装置の第１２の構成は、前記第１〜１１の構成において、前記対象物は中空糸膜であることを特徴とする。 The twelfth configuration of the defect inspection apparatus according to the present invention is characterized in that, in the first to eleventh configurations, the object is a hollow fiber membrane.
本発明に係る欠陥検査方法によれば、内部に略均一な連続した導光部を持つ長尺状の対象物である例えば中空糸膜や、内部に略均一な連続した導光部からなる芯材と、その芯材を被覆する鞘材からなる芯鞘構造繊維や、或いは鞘材の内部に略均一な連続した導光部からなる芯材を複数有する海島状繊維等の表面のみならず内部の状態や欠陥を検査することが出来る。 According to the defect inspection method of the present invention, for example, a hollow fiber membrane which is a long object having a substantially uniform continuous light guide inside, or a core made of a substantially uniform continuous light guide inside. Not only the surface of the core-sheath structure fiber comprising the material and the sheath material covering the core material, or the sea island-like fiber having a plurality of core materials comprising the substantially uniform continuous light guide part inside the sheath material. It is possible to inspect the state and defects.
また、本発明に係る欠陥検査装置の第１の構成によれば、第１の照射手段により照射され、該対象物内部に侵入した後に、内部の連続した導光部を反射し、該対象物外部へ漏れながら伝播している光により、あたかも対象物内部から照射され対象物の外側に出射する光像を第１の撮像手段により撮像することが出来る。このとき、遮光手段により第１の照射手段から出射される直接光および第１の照射手段により照射された光が対象物の外表面を反射した反射光及び対象物を透過して一旦外部に出た透過光が第１の撮像手段に入射しないように遮光することが出来、第１の照射手段から出射され対象物の外表面や外部空間を伝わる光を遮断した状態で第１の撮像手段により該対象物の内部及び表面の状態を反映した画像を該第１の撮像手段により撮像することが出来、第１の画像処理手段により第１の撮像手段の出力信号を処理することで、対象物の内部及び表面の異物や欠陥を検査することが出来る。 Further, according to the first configuration of the defect inspection apparatus according to the present invention, after being irradiated by the first irradiation means and entering the inside of the object, the internal light guide is reflected, and the object is reflected. A light image that is emitted from the inside of the object and emitted to the outside of the object by the light propagating while leaking to the outside can be captured by the first imaging unit. At this time, the direct light emitted from the first irradiating means by the light shielding means and the light emitted from the first irradiating means are transmitted through the reflected light reflected from the outer surface of the object and the object, and are temporarily emitted to the outside. The transmitted light can be shielded so that it does not enter the first imaging means, and the first imaging means blocks the light emitted from the first irradiation means and transmitted through the outer surface or external space of the object. An image reflecting the state of the inside and the surface of the object can be captured by the first imaging unit, and the output signal of the first imaging unit is processed by the first image processing unit, whereby the object It is possible to inspect foreign matter and defects inside and on the surface.
また、本発明に係る欠陥検査装置の第２の構成によれば、対象物の内部構造や表面状態による光の内部伝播状態の違いや検出すべき異物や欠陥の種類に対応して、長尺状の対象物の長手方向における第１の照射手段と第１の撮像手段との離間間隔を０．１mm以上、且つ１００mm以下の間で適切な場所に設定し、良好な画像を取得することが出来る。 In addition, according to the second configuration of the defect inspection apparatus according to the present invention, a long length corresponding to the difference in the internal propagation state of light depending on the internal structure or surface state of the object and the type of foreign matter or defect to be detected. A distance between the first irradiation unit and the first imaging unit in the longitudinal direction of the object is set to an appropriate place between 0.1 mm and 100 mm to obtain a good image. I can do it.
また、本発明に係る欠陥検査装置の第３の構成によれば、複数の対象物を並んだ状態にして、まとめて第１の照射手段により光を照射する構成とすることが出来る。 Moreover, according to the 3rd structure of the defect inspection apparatus which concerns on this invention, it can be set as the structure which irradiates light by a 1st irradiation means collectively in the state in which the several target object was located in a line.
また、本発明に係る欠陥検査装置の第４の構成によれば、一旦、対象物を透過した光や対象物の側方を通過した光を反射面により反射して対象物を再度照明することにより、光を効率良く対象物内部に侵入させることが出来る。 Moreover, according to the 4th structure of the defect inspection apparatus which concerns on this invention, the light which permeate | transmitted the target object once or the light which passed the side of the target object is reflected by a reflective surface, and illuminates a target object again. As a result, light can efficiently enter the object.
また、本発明に係る欠陥検査装置の第５の構成によれば、環状の出射口の内側に対象物を設置することにより中空糸膜等の円筒状、或いは円柱状の対象物に対して、第１の照射手段により全周面から均一に光を照射することが出来る。 Further, according to the fifth configuration of the defect inspection apparatus according to the present invention, by installing the object inside the annular exit port, for a cylindrical object such as a hollow fiber membrane, or a columnar object, The first irradiation means can uniformly irradiate light from the entire circumferential surface.
また、本発明に係る欠陥検査装置の第６の構成によれば、第１の撮像手段により撮像した対象物の表面及び内部の異物や欠陥に起因する画像による検査結果に加えて、第２の撮像手段により対象物の表面の異物や欠陥のみを示す画像を撮像することで、表面のみの異物や欠陥に起因する画像の検査結果を同時に提供することが出来、更にそれらの差異を比較することで、対象物内部の異物や欠陥のみに起因する検査結果を得ることが出来る。 Further, according to the sixth configuration of the defect inspection apparatus according to the present invention, in addition to the inspection result by the image caused by the surface of the target object and the foreign matter or defect inside the object imaged by the first imaging means, By capturing an image showing only the foreign matter or defect on the surface of the object by the imaging means, it is possible to simultaneously provide the inspection result of the image caused by the foreign matter or defect on the surface only, and to compare the differences Thus, it is possible to obtain an inspection result caused only by a foreign matter or a defect inside the object.
また、本発明に係る欠陥検査装置の第７の構成によれば、第１の撮像手段により撮像した対象物の表面及び内部の異物や欠陥に起因する画像出力信号と、第２の撮像手段により撮像した対象物の表面の異物や欠陥に起因する画像出力信号と、を比較、演算する画像処理を行うことで、対象物の表面のみの異物や欠陥、或いは対象物の内部のみの異物や欠陥をそれぞれ検出することが出来る。 According to the seventh configuration of the defect inspection apparatus of the present invention, the image output signal caused by the surface of the target object and the foreign matter or defect inside the object imaged by the first imaging unit, and the second imaging unit. By performing image processing that compares and calculates the image output signal caused by the foreign matter or defect on the surface of the imaged object, the foreign material or defect only on the surface of the object, or the foreign material or defect only inside the object Can be detected respectively.
また、本発明に係る欠陥検査装置の第８の構成によれば、第１の撮像手段と第２の撮像手段との間に第２の照射手段を兼ねる第１の照射手段を配置することで、一台の照射手段を用いて第１の撮像手段と第２の撮像手段とにより両画像を一度に撮像することが出来る。 Moreover, according to the 8th structure of the defect inspection apparatus which concerns on this invention, by arrange | positioning the 1st irradiation means which serves as a 2nd irradiation means between the 1st imaging means and the 2nd imaging means. Both images can be picked up at once by the first image pickup means and the second image pickup means using a single irradiation means.
また、本発明に係る欠陥検査装置の第９の構成によれば、１台のカラーカメラの出力信号から、電気的な手法により異なる波長の画像を取り出すことで、第１の撮像手段と第２の撮像手段によって撮像する画像と等価な画像を得ることが出来る。またこの際に第１の撮像手段と第２の撮像手段とによって撮像する場所が同じ場所であることを容易に確保することが出来る。 According to the ninth configuration of the defect inspection apparatus of the present invention, the first imaging unit and the second imaging unit can be obtained by extracting images of different wavelengths from the output signal of one color camera by an electrical method. An image equivalent to the image picked up by the image pickup means can be obtained. Further, at this time, it is possible to easily ensure that the place where the first image pickup means and the second image pickup means are picked up is the same place.
また、本発明に係る欠陥検査装置の第１０の構成によれば、複数の対象物を並んだ状態にして、まとめて第２の照射手段により光を照射する構成とすることが出来る。 Moreover, according to the 10th structure of the defect inspection apparatus which concerns on this invention, it can be set as the structure which irradiates light by a 2nd irradiation means collectively in the state in which the several target object was located in a line.
また、本発明に係る欠陥検査装置の第１１の構成によれば、環状の出射口の内側に対象物を設置することにより中空糸膜等の円筒状、或いは円柱状の対象物に対して、第２の照射手段により全周面から均一に光を照射することが出来る。 Further, according to the eleventh configuration of the defect inspection apparatus according to the present invention, by installing the object inside the annular exit port, for a cylindrical object such as a hollow fiber membrane, or a columnar object, Light can be uniformly irradiated from the entire circumferential surface by the second irradiation means.
また、本発明に係る欠陥検査装置の第１２の構成によれば、対象物が中空糸膜の場合に該中空糸膜の内部の中空部を導光部として好適に適用出来る。 Moreover, according to the 12th structure of the defect inspection apparatus which concerns on this invention, when a target object is a hollow fiber membrane, the hollow part inside this hollow fiber membrane can be applied suitably as a light guide part.
図により本発明に係る欠陥検査方法及び欠陥検査装置の一実施形態を具体的に説明する。先ず、図１〜図５を用いて本発明に係る欠陥検査方法及び欠陥検査装置の第１実施形態の構成について説明する。図１（ａ）は本発明に係る欠陥検査装置の第１実施形態の構成を示す模式図、図１（ｂ）は図１（ａ）の部分説明図、図１（ｃ）は対象物の断面説明図、図２及び図３は遮光手段の一例を示す図、図４（ａ）は第１の撮像手段により撮像した対象物の内部の欠陥の一例を示す図、図４（ｂ）は第２の撮像手段により撮像した対象物の外観上の欠陥の一例を示す図、図５は撮像手段と対象物の種々の配置の例を示す模式図である。 An embodiment of a defect inspection method and a defect inspection apparatus according to the present invention will be specifically described with reference to the drawings. First, the configuration of the first embodiment of the defect inspection method and the defect inspection apparatus according to the present invention will be described with reference to FIGS. FIG. 1A is a schematic diagram showing the configuration of the first embodiment of the defect inspection apparatus according to the present invention, FIG. 1B is a partial explanatory view of FIG. 1A, and FIG. Cross-sectional explanatory views, FIGS. 2 and 3 are diagrams illustrating an example of a light shielding unit, FIG. 4A is a diagram illustrating an example of an internal defect of an object imaged by the first imaging unit, and FIG. The figure which shows an example of the defect on the external appearance of the target object imaged with the 2nd imaging means, FIG. 5: is a schematic diagram which shows the example of various arrangement | positioning of an imaging means and a target object.
図１（ａ）において、19は内部に略均一な連続した導光部１ａを持つ長尺状の対象物となる中空糸膜１の欠陥を検査する欠陥検査装置であり、対象物となる中空糸膜１に対して外側から光を照射する第１の照射手段となるハロゲンランプを光源とするライン型ファイバー照明装置２と、該ライン型ファイバー照明装置２により照射された光が対象物となる中空糸膜１内の導光部となる中空部１ａに導かれて該中空部１ａから中空糸膜１の外側に出射する光像を撮像する第１の撮像手段となるカメラ６ａ，６ｂと、長尺状の対象物となる中空糸膜１の長手方向におけるライン型ファイバー照明装置２とカメラ６ａ，６ｂとの間に設けられ、ライン型ファイバー照明装置２から出射される直接光及び該ライン型ファイバー照明装置２により照射された光が中空糸膜１の外表面を反射した反射光及び中空糸膜１を透過して一旦外部に出た透過光がカメラ６ａ，６ｂに入射しないように遮光する遮光手段となる遮光構造物５、カメラ６ａ，６ｂのそれぞれの出力信号を処理して対象物となる中空糸膜１の欠陥を検出する第１の画像処理手段となる画像処理装置12ａ，12ｂ等を有して構成されている。 In FIG. 1A, reference numeral 19 denotes a defect inspection apparatus for inspecting a defect of the hollow fiber membrane 1 which is a long object having a substantially uniform continuous light guide portion 1a therein. A line type fiber illuminating device 2 having a halogen lamp as a first irradiating means for irradiating the yarn film 1 with light from the outside, and light irradiated by the line type fiber illuminating device 2 is an object. Cameras 6a and 6b serving as first imaging means for capturing a light image guided to the hollow portion 1a serving as a light guide portion in the hollow fiber membrane 1 and emitted from the hollow portion 1a to the outside of the hollow fiber membrane 1, Direct light emitted from the line type fiber illuminating device 2 and the line type is provided between the line type fiber illuminating device 2 and the cameras 6a and 6b in the longitudinal direction of the hollow fiber membrane 1 as a long object. Irradiated by fiber illuminator 2 The light-shielding structure that serves as a light-shielding means that shields the reflected light reflected from the outer surface of the hollow fiber membrane 1 and the transmitted light that has passed through the hollow fiber membrane 1 and has once exited outside the camera 6a, 6b 5. The image processing apparatuses 12a and 12b serving as first image processing means for detecting defects of the hollow fiber membrane 1 as a target by processing the output signals of the cameras 6a and 6b. Yes.
長尺状の対象物となる中空糸膜１の長手方向におけるライン型ファイバー照明装置２とカメラ６ａ，６ｂとの離間間隔ｄは０．１mm以上、且つ１００mm以下に設定されており、ライン型ファイバー照明装置２は直線状に配列された出射口３を持つ光源を有して構成される。本実施形態のカメラ６ａ，６ｂはエリアカメラを有して構成されている。エリアカメラによりエリアをまとめて撮像することで、対象物となる中空糸膜１が比較的低速で連続移動する場合や間欠的に移動する場合に比較的簡便な撮像系により検査装置が構成出来る。 The distance d between the line-type fiber illumination device 2 and the cameras 6a, 6b in the longitudinal direction of the hollow fiber membrane 1 that is a long object is set to 0.1 mm or more and 100 mm or less, and the line-type fiber The illuminating device 2 includes a light source having emission ports 3 arranged in a straight line. The cameras 6a and 6b of the present embodiment are configured with area cameras. By imaging the area together with the area camera, the inspection apparatus can be configured with a relatively simple imaging system when the hollow fiber membrane 1 as an object moves continuously at a relatively low speed or intermittently.
また、対象物となる中空糸膜１を挟んでライン型ファイバー照明装置２に対向して反射面を有する反射部材となる反射板４が配置されており、該反射板４によりライン型ファイバー照明装置２から出射された光を反射して中空糸膜１に照射するように構成されている。 In addition, a reflecting plate 4 serving as a reflecting member having a reflecting surface is disposed opposite to the line type fiber lighting device 2 with the hollow fiber membrane 1 serving as an object interposed therebetween. 2 is configured to reflect the light emitted from 2 to irradiate the hollow fiber membrane 1.
本実施形態において、被検体となる中空糸膜１は外観上は白色不透明である直径１．３mmの中空糸膜を採用している。この中空糸膜１は、図１（ｃ）に示すように、内部中心に直径０．７mmの連続した導光部となる中空部１ａを持ち、該中空部１ａの周りが厚さ０．３mmの円筒部分に囲まれているものである。 In the present embodiment, the hollow fiber membrane 1 as the subject employs a hollow fiber membrane having a diameter of 1.3 mm that is white and opaque in appearance. As shown in FIG. 1 (c), the hollow fiber membrane 1 has a hollow portion 1a serving as a continuous light guide portion having a diameter of 0.7 mm at the inner center, and the thickness around the hollow portion 1a is 0.3 mm. It is surrounded by the cylindrical part.
中空糸膜１の材質としては、ポリカーボネート、ポリオレフィン、ポリアミド系、ポリイミド系、セルロース系、ポリスルフォン、ポリエーテルスルフォン、ポリメタクリル酸系、ポリアクリロニトリル、ポリフッ化ビニリデン、ポリエーテルケトン系等の有機系高分子及びアルミナ、ジルコニア、チタニア、シリコンカーバイト等のセラミックスに適用出来、限外濾過膜、精密濾過膜、気体分離膜、パーベーパレーション膜、透析膜等としてして採用される中空糸膜１に適用出来る。 The material of the hollow fiber membrane 1 is organic, such as polycarbonate, polyolefin, polyamide, polyimide, cellulose, polysulfone, polyethersulfone, polymethacrylic acid, polyacrylonitrile, polyvinylidene fluoride, polyetherketone. It can be applied to molecules and ceramics such as alumina, zirconia, titania, silicon carbide, etc., and to hollow fiber membranes 1 used as ultrafiltration membranes, microfiltration membranes, gas separation membranes, pervaporation membranes, dialysis membranes, etc. Applicable.
第１の照射手段となるハロゲンランプを光源とするライン型ファイバー照明装置２は、出射口３から対象物となる中空糸膜１に対して効率良く光を当てるために該中空糸膜１に近接して設置してある。 A line type fiber illuminating device 2 using a halogen lamp as a light source as a first irradiating means is close to the hollow fiber membrane 1 in order to efficiently radiate light from the exit port 3 to the hollow fiber membrane 1 as an object. Installed.
また、中空糸膜１を挟んでライン型ファイバー照明装置２に対向して反射板４を設置することにより、中空糸膜１の両側を通過した光や中空糸膜１を透過した光を反射板４により反射させ、再度中空糸膜１に入射させることで中空糸膜１に効率良く光を送り込むことが出来る。 Further, the reflector 4 is installed opposite to the line type fiber illuminator 2 with the hollow fiber membrane 1 interposed therebetween, so that the light passing through both sides of the hollow fiber membrane 1 and the light transmitted through the hollow fiber membrane 1 are reflected by the reflector. The light can be efficiently sent into the hollow fiber membrane 1 by being reflected by 4 and entering the hollow fiber membrane 1 again.
中空糸膜１内部に送り込まれた光は導光部となる中空糸膜１の中空部１ａを伝播する。遮光手段となる遮光構造物５を設置することにより中空糸膜１の中空部１ａを伝播してから漏れ出した光以外のライン型ファイバー照明装置２の出射口３から出射された直接の照明光や中空糸膜１の表面で反射した光や中空糸膜１を一旦透過した光がカメラ６ａ，６ｂの視野に影響しないようにしている。 The light sent into the hollow fiber membrane 1 propagates through the hollow portion 1a of the hollow fiber membrane 1 serving as a light guide portion. Direct illumination light emitted from the exit port 3 of the line type fiber illumination device 2 other than the light leaking after propagating through the hollow portion 1a of the hollow fiber membrane 1 by installing the light shielding structure 5 serving as a light shielding means. In addition, the light reflected by the surface of the hollow fiber membrane 1 or the light once transmitted through the hollow fiber membrane 1 is prevented from affecting the visual field of the cameras 6a and 6b.
エリアカメラからなるカメラ６ａ，６ｂにより、図１（ｂ）に示すように、中空糸膜１を上下両方向から撮像し、中空糸膜１の上下両面を撮像して検査する。図４（ａ）は中空糸膜１の欠陥部分をカメラ６ａにより撮影した画像である。後述する通常の外光で撮影された図４（ｂ）の画像と比較すると、図４（ｂ）では外観上の欠陥９のみが撮像されているのに対して、図４（ａ）では外観上の欠陥９の外側に内部欠陥10も捉えられていることが分かる。 As shown in FIG. 1B, the hollow fiber membrane 1 is imaged from both the upper and lower directions, and the upper and lower surfaces of the hollow fiber membrane 1 are imaged and inspected by the cameras 6a and 6b comprising area cameras. FIG. 4A is an image obtained by photographing the defective portion of the hollow fiber membrane 1 with the camera 6a. Compared with the image of FIG. 4B taken with normal outside light, which will be described later, only the appearance defect 9 is captured in FIG. 4B, whereas in FIG. It can be seen that the internal defect 10 is also captured outside the upper defect 9.
そして、図４（ａ）に示す撮像画像からなるカメラ６ａの出力信号を画像処理装置12ａで処理することにより、中空糸膜１に存在する欠陥を検出することが出来る。 And the defect which exists in the hollow fiber membrane 1 is detectable by processing the output signal of the camera 6a which consists of a captured image shown to Fig.4 (a) with the image processing apparatus 12a.
図４（ａ）に示す内部欠陥10の中心はライン型ファイバー照明装置２の出射口３の中心から３．５mm離れた位置にある。このような内部欠陥10を撮像するための長尺状の対象物となる中空糸膜１の長手方向におけるライン型ファイバー照明装置２の中心とカメラ６ａ，６ｂの中心との離間間隔ｄは２mm以上且つ５mm以下の間が好適である。撮像毎に中空糸膜１を３mmずつ移動させることで、該中空糸膜１の全面を検査し、中空糸膜１に存在する内部及び外周部の欠陥を検出することが出来る。 The center of the internal defect 10 shown in FIG. 4A is at a position 3.5 mm away from the center of the exit port 3 of the line type fiber illuminating device 2. The distance d between the center of the line type fiber illuminating device 2 and the center of the cameras 6a and 6b in the longitudinal direction of the hollow fiber membrane 1 which is a long object for imaging such an internal defect 10 is 2 mm or more. And it is preferable that it is 5 mm or less. By moving the hollow fiber membrane 1 by 3 mm for each imaging, the entire surface of the hollow fiber membrane 1 can be inspected, and defects in the inner and outer peripheral portions existing in the hollow fiber membrane 1 can be detected.
本実施形態では第１の撮像手段としてエリアカメラからなるカメラ６ａ，６ｂを採用した場合の一例について説明したが、中空糸膜１が連続して移動している状態で検査する場合には、第１の撮像手段であるカメラ６ａ，６ｂとして、ライン（センサー）カメラを使用する構成が好適である。この場合も長尺状の対象物となる中空糸膜１の長手方向におけるライン型ファイバー照明装置２の中心とカメラ６ａ，６ｂの中心との離間間隔ｄは２mm以上且つ５mm以下の間が好適である。ラインカメラにより撮像することで、対象物となる中空糸膜１が比較的高速で連続移動する場合でも、取りこぼしのない検査が出来る。 In the present embodiment, an example in which the cameras 6a and 6b including area cameras are employed as the first imaging unit has been described. However, in the case where inspection is performed while the hollow fiber membrane 1 is continuously moving, A configuration in which a line (sensor) camera is used as the cameras 6a and 6b, which are one imaging means, is preferable. Also in this case, the separation distance d between the center of the line type fiber illuminating device 2 and the centers of the cameras 6a and 6b in the longitudinal direction of the hollow fiber membrane 1 which is a long object is preferably between 2 mm and 5 mm. is there. By taking an image with a line camera, even when the hollow fiber membrane 1 as an object moves continuously at a relatively high speed, it is possible to inspect without missing.
遮光手段となる遮光構造物５は、対象物となる中空糸膜１が挿通される貫通孔５ａを有する遮光板５ｂと、外光を防ぐためにカメラ６ａ，６ｂ及び該カメラ６ａ，６ｂによる中空糸膜１の撮像領域を覆う覆い部材５ｇとを有して構成されている。 The light shielding structure 5 serving as a light shielding means includes a light shielding plate 5b having a through hole 5a through which the hollow fiber membrane 1 serving as an object is inserted, cameras 6a and 6b and hollow fibers formed by the cameras 6a and 6b to prevent external light. And a covering member 5g that covers the imaging region of the film 1.
遮光手段となる遮光構造物５としては、図２に示すように中空糸膜１が通る貫通孔５ａが遮光板５ｂに設けられた遮光構造物５を採用することも出来、図３（ａ）に示すように、２分割された遮光板５ｃ，５ｄがヒンジ部材５ｅにより回動可能に連結され、各遮光板５ｃ，５ｄを回動してオーバーラップ部5c1，5d1をオーバーラップさせた際に溝部5c2，5d2により円形状に形成された貫通孔を中空糸膜１が通るように構成することも出来る。また、図３（ｂ）に示すように、３分割された遮光板５ｃ，５ｄ，５ｆがヒンジ部材５ｅにより回動可能に連結され、各遮光板５ｃ，５ｄ，５ｆを回動してオーバーラップ部5c1，5c3，5d1，5f1，5f3をオーバーラップさせた際に溝部5c2，5d2，5f2により円形状に形成された貫通孔を中空糸膜１が通るように構成することも出来る。 As the light shielding structure 5 serving as the light shielding means, a light shielding structure 5 in which a through hole 5a through which the hollow fiber membrane 1 passes as shown in FIG. 2 is provided in the light shielding plate 5b can also be adopted, as shown in FIG. As shown in FIG. 4, when the light shielding plates 5c and 5d divided into two are rotatably connected by the hinge member 5e, the light shielding plates 5c and 5d are rotated to overlap the overlap portions 5c1 and 5d1. It can also be configured such that the hollow fiber membrane 1 passes through a through-hole formed in a circular shape by the grooves 5c2, 5d2. Further, as shown in FIG. 3B, the light shielding plates 5c, 5d, 5f divided into three are rotatably connected by a hinge member 5e, and the light shielding plates 5c, 5d, 5f are rotated to overlap each other. When the portions 5c1, 5c3, 5d1, 5f1, and 5f3 are overlapped, the hollow fiber membrane 1 can be configured to pass through a through-hole formed in a circular shape by the groove portions 5c2, 5d2, and 5f2.
また、図１（ａ）に示す反射部材となる反射板４は平板状のものを好適な例として図示したが、対象物の形状や表面状態によってこれ以外の形状を好適なものとして選定することが出来る。 Moreover, although the reflecting plate 4 used as the reflecting member shown in FIG. 1 (a) is illustrated as a flat plate as a suitable example, other shapes are preferably selected depending on the shape and surface state of the object. I can do it.
前記実施形態では第１の撮像手段としてカメラ６ａ，６ｂを２台配置する構成を示したが、対象物の導光部として中空糸膜１の中空部１ａ内部を伝播する光は入射した方向と関係ないため、照射手段となるライン型ファイバー照明装置２の配置とは関係なく、例えば、図５（ａ）に示すように、撮像手段となるカメラ６ａを１台とし、対象物となる中空糸膜１を挟んでカメラ６ａに対向して反射面を有する反射部材となる鏡16を断面Ｖ形状に配置して中空糸膜１の全周を検査する構成としても良く、図５（ｂ）に示すように、撮像手段となるカメラ６ａ，６ｂ，６ｃを３台とし、各カメラ６ａ，６ｂ，６ｃを対象物となる中空糸膜１を中心に１２０度づつ角度をずらせて配置して中空糸膜１の全周を検査する構成としても良く、図５（ｃ）に示すように、撮像手段となるカメラ６ａを１台とし、対象物となる中空糸膜１を２本並設し、中空糸膜１を挟んでカメラ６ａに対向して反射面を有する反射部材となる鏡16を断面Ｗ形状に配置して並設した２本の中空糸膜１のそれぞれの全周を検査する構成としても良い。尚、図５（ａ），（ｃ）において、各鏡16相互の成す角度は１２０度に設定されている。 In the above-described embodiment, the configuration in which two cameras 6a and 6b are arranged as the first imaging unit is shown. However, the light propagating through the hollow portion 1a of the hollow fiber membrane 1 as the light guide portion of the object is incident on the direction. For example, as shown in FIG. 5 (a), there is one camera 6a serving as an imaging means and a hollow fiber serving as an object, regardless of the arrangement of the line type fiber illumination device 2 serving as an irradiation means. A mirror 16 serving as a reflecting member having a reflecting surface facing the camera 6a across the membrane 1 may be arranged in a V-shaped cross section to inspect the entire circumference of the hollow fiber membrane 1, as shown in FIG. As shown in the figure, three cameras 6a, 6b, and 6c serving as imaging means are provided, and the cameras 6a, 6b, and 6c are arranged at an angle of 120 degrees around the hollow fiber membrane 1 serving as an object to form a hollow fiber. It is good also as a structure which test | inspects the perimeter of the film | membrane 1 in FIG.5 (c). As described above, a single camera 6a serving as an imaging unit is provided, and two hollow fiber membranes 1 serving as an object are arranged side by side, and a reflecting member having a reflecting surface facing the camera 6a with the hollow fiber membrane 1 interposed therebetween, It is good also as a structure which test | inspects each perimeter of the two hollow fiber membranes 1 which arrange | positioned the mirror 16 which becomes a cross-section in W shape, and arranged in parallel. 5A and 5C, the angle between the mirrors 16 is set to 120 degrees.
また、図５（ｂ）の形態の場合はカメラを３台配置したが、カメラを４台以上としてそれぞれ等角度ずつずらして配置し、更に細かい検査をすることも出来る。また、図１（ａ）の構成において、対象物となる中空糸膜１を２本以上並べて同時に検査する構成とすることも出来る。 In the case of the configuration shown in FIG. 5B, three cameras are arranged. However, four or more cameras can be arranged and shifted by an equal angle, and further inspection can be performed. Moreover, in the structure of Fig.1 (a), it can also be set as the structure which test | inspects simultaneously the two or more hollow fiber membranes 1 used as a target object.
尚、第１の照射手段としては、図６に示して後述するリング型ファイバー照明装置７のように、環状の出射口を持つ光源を有して構成し、該環状の出射口の内側に対象物となる中空糸膜１を設置することも出来る。 The first irradiating means includes a light source having an annular exit port as in the ring-type fiber illuminator 7 shown in FIG. 6 and described later, and the object is placed inside the annular exit port. The hollow fiber membrane 1 which becomes a thing can also be installed.
次に図６を用いて本発明に係る欠陥検査方法及び欠陥検査装置の第２実施形態の構成について説明する。図６は本発明に係る欠陥検査装置の第２実施形態の構成を示す模式図である。尚、前記第１実施形態と同様に構成したものは同一の符号を付して説明を省略する。 Next, the configuration of the second embodiment of the defect inspection method and the defect inspection apparatus according to the present invention will be described with reference to FIG. FIG. 6 is a schematic diagram showing the configuration of the second embodiment of the defect inspection apparatus according to the present invention. In addition, what was comprised similarly to the said 1st Embodiment attaches | subjects the same code | symbol, and abbreviate | omits description.
本実施形態では、図６に示すように、前記第１実施形態の構成に加えて、対象物となる中空糸膜１に対して外側から光を照射する第２の照射手段となるハロゲンランプを光源とするリング型ファイバー照明装置７と、該リング型ファイバー照明装置７により照射され中空糸膜１の外表面を反射した反射光による光像を撮像する第２の撮像手段となるカメラ８ａ，８ｂと、該カメラ８ａ，８ｂの出力信号を処理して対象物となる中空糸膜１の欠陥を検出する第２の画像処理手段となる画像処理装置13ａ，13ｂが設けられている。 In the present embodiment, as shown in FIG. 6, in addition to the configuration of the first embodiment, a halogen lamp serving as a second irradiation means for irradiating light from the outside to the hollow fiber membrane 1 serving as an object is provided. A ring-type fiber illuminating device 7 as a light source, and cameras 8a and 8b serving as second imaging means for capturing a light image by reflected light that is irradiated by the ring-type fiber illuminating device 7 and reflected from the outer surface of the hollow fiber membrane 1. And image processing devices 13a and 13b serving as second image processing means for processing the output signals of the cameras 8a and 8b to detect defects in the hollow fiber membrane 1 as the object.
本実施形態では、第２の照射手段として、環状の出射口を持つ光源を有するリング型ファイバー照明装置７により構成し、該環状の出射口の内側に対象物となる中空糸膜１を設置する構成としたが、第２の照射手段を図１に示して前述した直線状に配列された出射口３を持つ光源を有するライン型ファイバー照明装置２により構成することも出来る。 In the present embodiment, the second irradiating means is constituted by a ring-type fiber illuminating device 7 having a light source having an annular exit port, and the hollow fiber membrane 1 as an object is installed inside the annular exit port. However, the second irradiating means may be constituted by the line type fiber illuminating device 2 having the light source having the emission ports 3 arranged linearly as shown in FIG.
また、第２の撮像手段となるカメラ８ａ，８ｂはエリアカメラ、ラインカメラの何れかで構成することが出来る。エリアカメラによりエリアをまとめて撮像することで、対象物が比較的低速で連続移動する場合や間欠的に移動する場合に比較的簡便な撮像系により検査装置が構成出来る。また、ラインカメラにより撮像することで、対象物が比較的高速で連続移動する場合でも、取りこぼしのない検査が出来る。また、第２の撮像手段として用いるカメラの配置も図５に示したと同様な構成とすることが出来る。 Further, the cameras 8a and 8b serving as the second imaging means can be constituted by either area cameras or line cameras. By imaging the area together with the area camera, the inspection apparatus can be configured with a relatively simple imaging system when the object moves continuously at a relatively low speed or moves intermittently. In addition, by taking an image with a line camera, even when an object moves continuously at a relatively high speed, inspection without missing can be performed. The arrangement of the cameras used as the second imaging means can be the same as that shown in FIG.
また、第１、第２の画像処理手段となる画像処理装置12ａ，12ｂ，13ａ，13ｂの出力信号は画像検出手段となる画像検査装置14ａ，14ｂにより比較処理されることで、第１、第２の撮像手段となるカメラ６ａ，６ｂ，８ａ，８ｂの出力信号を相互に組み合わせて処理して対象物となる中空糸膜１の内部欠陥10のみを検出することも出来るように構成されている。 Further, the output signals of the image processing devices 12a, 12b, 13a, and 13b serving as the first and second image processing means are compared and processed by the image inspection devices 14a and 14b serving as the image detecting means, whereby the first and second image processing devices are used. The output signals of the cameras 6a, 6b, 8a, and 8b serving as the two image pickup means are processed in combination with each other to detect only the internal defect 10 of the hollow fiber membrane 1 that is the object. .
本実施形態の構成では、対象物となる中空糸膜１の外観上の欠陥と内部の欠陥を区別する必要がある場合に特に好適である。本実施形態では第２の照射手段として、ハロゲンランプを光源とするリング型ファイバー照明装置７を設け、第２の撮像手段となるカメラ８ａ，８ｂはエリアカメラからなり、リング型ファイバー照明装置７により光が照射された領域を撮像するようにする。 The configuration of the present embodiment is particularly suitable when it is necessary to distinguish the appearance defect and the internal defect of the hollow fiber membrane 1 as the object. In the present embodiment, a ring type fiber illuminating device 7 using a halogen lamp as a light source is provided as the second irradiating means, and the cameras 8a and 8b as the second imaging means are composed of area cameras. An area irradiated with light is imaged.
対象物となる中空糸膜１の外表面を反射した反射光による光像は、遮光構造物５を用いて第１の撮像手段となるカラーカメラ６ａ，６ｂにより撮像する該中空糸膜１の内部を伝播する光による像に比べて非常に明るいため、遮光構造物５を用いない第２の撮像手段となるカメラ８ａ，８ｂでは実質的に中空糸膜１の外表面の反射光による光像が撮像されることになる。 The optical image of the reflected light reflected from the outer surface of the hollow fiber membrane 1 that is the target is the inside of the hollow fiber membrane 1 that is imaged by the color cameras 6a and 6b that are the first imaging means using the light blocking structure 5. Therefore, in the cameras 8a and 8b serving as the second imaging means that does not use the light shielding structure 5, the light image due to the reflected light on the outer surface of the hollow fiber membrane 1 is substantially the same. It will be imaged.
第１の撮像手段となるカメラ６ａ，６ｂにより対象物となる中空糸膜１の内部及び外観の欠陥を撮像すると共に、第２の撮像手段となるカメラ８ａ，８ｂにより該中空糸膜１の外観の欠陥を撮像し、第１の画像処理手段となる画像処理装置12ａ，12ｂ、第２の画像処理手段となる画像処理装置13ａ，13ｂによりそれぞれの欠陥を検出して、その結果を画像検査手段となる画像検査装置14ａ，14ｂにより比較することで対象物となる中空糸膜１の外観の欠陥と内部の欠陥とを区別して検出することが出来る。尚、カメラ６ａ，６ｂとカメラ８ａ，８ｂとによる対象物となる中空糸膜１の同じ部位での画像取り込みの時間差は、図示しない位置検出手段となるエンコーダーにより対象物となる中空糸膜１の移動量を検知して補正している。他の構成は前記第１実施形態と同様に構成され、同様の効果を得ることが出来る。 The inside and appearance defects of the hollow fiber membrane 1 as the object are imaged by the cameras 6a and 6b as the first imaging means, and the appearance of the hollow fiber membrane 1 by the cameras 8a and 8b as the second imaging means. The image processing device 12a, 12b serving as the first image processing means and the image processing devices 13a 13b serving as the second image processing means detect the respective defects, and the results are image inspection means. By comparing with the image inspection apparatuses 14a and 14b, the defect of the appearance of the hollow fiber membrane 1 as the object and the defect inside can be distinguished and detected. In addition, the time difference of the image capture in the same part of the hollow fiber membrane 1 which is the object by the cameras 6a and 6b and the cameras 8a and 8b is different from that of the hollow fiber membrane 1 which is the object by an encoder which is a position detection unit (not shown). The amount of movement is detected and corrected. Other configurations are the same as those in the first embodiment, and the same effects can be obtained.
次に図７を用いて本発明に係る欠陥検査方法及び欠陥検査装置の第３実施形態の構成について説明する。図７は本発明に係る欠陥検査装置の第３実施形態の構成を示す模式図である。尚、前記各実施形態と同様に構成したものは同一の符号を付して説明を省略する。 Next, the configuration of the third embodiment of the defect inspection method and the defect inspection apparatus according to the present invention will be described with reference to FIG. FIG. 7 is a schematic view showing the configuration of the third embodiment of the defect inspection apparatus according to the present invention. In addition, what was comprised similarly to each said embodiment attaches | subjects the same code | symbol, and abbreviate | omits description.
本実施形態では、図７に示すように、図６に示す第２の照射手段となるリング型ファイバー照明装置７を省略し、第１の照射手段となるライン型ファイバー照明装置２が第２の照射手段を兼ねるものである。即ち、第１の照射手段となるライン型ファイバー照明装置２が長尺状の対象物となる中空糸膜１の長手方向における第１の撮像手段となるカメラ６ａ，６ｂと、第２の撮像手段となるカメラ８ａ，８ｂとの間に配置され、両者の照明装置として構成される。 In this embodiment, as shown in FIG. 7, the ring-type fiber illuminating device 7 serving as the second irradiating means shown in FIG. 6 is omitted, and the line-type fiber illuminating device 2 serving as the first irradiating means is used as the second irradiating means. It also serves as an irradiation means. That is, the cameras 6a and 6b serving as the first imaging means in the longitudinal direction of the hollow fiber membrane 1 in which the line type fiber illuminating device 2 serving as the first irradiating means is a long object, and the second imaging means. It is arrange | positioned between camera 8a, 8b used as above, and is comprised as both illuminating devices.
そして、ライン型ファイバー照明装置２により照射された光が対象物内の導光部となる中空糸膜１の中空部１ａに導かれて該中空部１ａから中空糸膜１の外側に出射する光像を第１の撮像手段となるカメラ６ａ，６ｂにより撮像し、同じくライン型ファイバー照明装置２により照射され、対象物となる中空糸膜１の外表面を反射した反射光による光像を第２の撮像手段となるカメラ８ａ，８ｂにより撮像することが出来る。他の構成は前記各実施形態と同様に構成され、同様の効果を得ることが出来る。 And the light irradiated by the line type | mold fiber illuminating device 2 is guide | induced to the hollow part 1a of the hollow fiber membrane 1 used as the light guide part in a target object, and is radiate | emitted from the hollow part 1a to the outer side of the hollow fiber membrane 1 An image is picked up by the cameras 6a and 6b serving as the first image pickup means, and is also irradiated with the line-type fiber illuminating device 2, and a second light image is generated by the reflected light reflected from the outer surface of the hollow fiber membrane 1 serving as the object. Images can be taken by the cameras 8a and 8b serving as the imaging means. Other configurations are the same as those in the above embodiments, and the same effects can be obtained.
次に図８を用いて本発明に係る欠陥検査方法及び欠陥検査装置の第４実施形態の構成について説明する。図８は本発明に係る欠陥検査装置の第４実施形態の構成を示す模式図である。尚、前記各実施形態と同様に構成したものは同一の符号を付して説明を省略する。 Next, the configuration of the fourth embodiment of the defect inspection method and the defect inspection apparatus according to the present invention will be described with reference to FIG. FIG. 8 is a schematic view showing the configuration of the fourth embodiment of the defect inspection apparatus according to the present invention. In addition, what was comprised similarly to each said embodiment attaches | subjects the same code | symbol, and abbreviate | omits description.
本実施形態では、第１、第２の撮像手段が１台のカラーカメラ６ａ，６ｂにより構成され、長尺状の対象物となる中空糸膜１の長手方向における第１の照射手段となるライン型ファイバー照明装置２と、第２の照射手段となるリング型ファイバー照明装置７との間にカラーカメラ６ａ，６ｂが配置され、カラーカメラ６ａ，６ｂ及びリング型ファイバー照明装置７が遮光構造物５の内部に配置される。 In the present embodiment, the first and second imaging means are constituted by a single color camera 6a, 6b, and are lines that serve as first irradiation means in the longitudinal direction of the hollow fiber membrane 1 that is a long object. The color cameras 6a and 6b are arranged between the type fiber illuminating device 2 and the ring type fiber illuminating device 7 as the second irradiating means, and the color cameras 6a and 6b and the ring type fiber illuminating device 7 serve as the light shielding structure 5. Placed inside.
第１の照射手段となるライン型ファイバー照明装置２と、第２の照射手段となるリング型ファイバー照明装置７とは１台のカラーカメラ６ａ，６ｂで区別することの出来るそれぞれ異なる波長を持つ光を照射するように構成されている。そして、カラーカメラ６ａ，６ｂの出力信号から電気的に分離した第１の照射手段となるライン型ファイバー照明装置２に割り当てられた光による第１の画像をカラーカメラ６ａ，６ｂの第１の撮像手段の出力信号とし、第２の照射手段となるリング型ファイバー照明装置７に割り当てられた光による第２の画像をカラーカメラ６ａ，６ｂの第２の撮像手段の出力信号とする。 The line-type fiber illuminating device 2 serving as the first irradiating means and the ring-type fiber illuminating device 7 serving as the second irradiating means have different wavelengths that can be distinguished by one color camera 6a, 6b. It is comprised so that it may irradiate. Then, the first image of the color cameras 6a and 6b is obtained as a first image by the light assigned to the line type fiber illuminating device 2 as the first irradiation means electrically separated from the output signals of the color cameras 6a and 6b. The output signal of the second imaging means of the color cameras 6a and 6b is used as the output signal of the means, and the second image by the light assigned to the ring type fiber illuminating device 7 serving as the second irradiation means.
例えば、第１の照射手段であるライン型ファイバー照明装置２に中心波長６４０ｎｍ、半値幅３０ｎｍ（赤）のフィルターを挿入し、第２の照射手段であるリング型ファイバー照明装置７に中心波長４５０ｎｍ、半値幅３０ｎｍ（青）のフィルターを挿入する。 For example, a filter having a center wavelength of 640 nm and a half-value width of 30 nm (red) is inserted into the line type fiber illuminator 2 as the first irradiating means, and a center wavelength of 450 nm is inserted into the ring type fiber illuminator 7 as the second irradiating means. A filter with a half width of 30 nm (blue) is inserted.
カラーカメラ６ａ，６ｂからのカラー画像信号を色画像分離手段となる色画像分離装置18ａ，18ｂにより分離した赤画像を第１の画像処理手段となる画像処理装置12ａ，12ｂにより処理すると共に、青画像を第２の画像処理手段となる画像処理装置13ａ，13ｂにより処理することで、対象物となる中空糸膜１の内部欠陥及び外観上の欠陥を検出することが出来る。尚、ここで半値幅とは、中心波長を中心とする釣鐘状の光の強度のピーク値の半値における波長の幅のことである。 The red image obtained by separating the color image signals from the color cameras 6a and 6b by the color image separation devices 18a and 18b serving as the color image separation means is processed by the image processing devices 12a and 12b serving as the first image processing means. By processing the image by the image processing devices 13a and 13b serving as the second image processing means, it is possible to detect internal defects and appearance defects of the hollow fiber membrane 1 serving as the object. Here, the half width is the width of the wavelength at the half value of the peak value of the intensity of the bell-shaped light with the center wavelength as the center.
また、第５実施形態として図９に示すような形態によっても良好な結果を得ることができる。この第５実施形態では、光源２として、幅１２０ｍｍのライン型照明をメタルハライド光源に接続したものを用い、この出射口の周りを反射板４と貫通口５ａをもつ遮光構造物５を組み合わせて囲んだ構造となっている。貫通口５ａは１６個設けてあり、１６本の被検査対象物を同時に検査できる。この構造のうち、出射口と対向する反射板４および貫通口５ａの半分を成す切れ込みを持った遮光構造５ｂは組み合わさって蓋状のカバー21として、図１０の様に取り外す事ができ、被検査対象である中空糸を本検査装置にセットしやすいようになっている。該カバー21と組み合わせて使用する光源本体側カバー22は、ライン型照明と貫通口５ａの残り半分を成す切れ込みを持った遮光構造５ｂの組合せである。 Also, good results can be obtained by the fifth embodiment as shown in FIG. In the fifth embodiment, a light source 2 having a 120 mm width line type illumination connected to a metal halide light source is used, and the light exit structure is surrounded by a light shielding structure 5 having a reflecting plate 4 and a through hole 5a. It has a structure. Sixteen through-holes 5a are provided, and 16 inspection objects can be inspected simultaneously. Of this structure, the light-shielding structure 5b having a cutout that forms a half of the reflecting plate 4 and the through-hole 5a facing the exit port can be combined and removed as a cover 21 as shown in FIG. The hollow fiber to be inspected can be easily set in the inspection apparatus. The light source body side cover 22 used in combination with the cover 21 is a combination of a line-type illumination and a light shielding structure 5b having a notch forming the remaining half of the through hole 5a.
カバー21と22は組み合わせた時にお互いを固定する、図示しない固定構造（図示しない）を設けることもできる。カバー21と22を組み合わせたときに構成される貫通口５ａの直径は、被検査対象である中空糸の直径よりも０．１〜２ｍｍ程度大きく設定し、ラインセンサーカメラ23により観察する位置は貫通口５ａの出口から０．１〜５ｍｍ程度の位置に設定することが望ましい。 The covers 21 and 22 may be provided with a fixing structure (not shown) that fixes each other when combined. The diameter of the through-hole 5a formed when the covers 21 and 22 are combined is set to be about 0.1 to 2 mm larger than the diameter of the hollow fiber to be inspected, and the position observed by the line sensor camera 23 is through. It is desirable to set it at a position of about 0.1 to 5 mm from the outlet of the mouth 5a.
また、撮影の背景として背景部20を設けて、撮影時に余計な背景が写らないようになっている。図示しない糸ガイドによって、被検体は貫通口５ａのカメラ側に接触しながら通過し、撮影する側での光の漏洩を防ぐように導かれている。遮光構造５ｂを成す構造体の厚みは１ｍｍ程度とし、中空糸が接触しても傷つかないように貫通口５ａの周囲はその厚みを利用して丸みを帯びた断面形状になっている。被検査対象の両面の検査は図９の構造を被検査対象に対して２つ用いて行うことができる。このような第５の実施形態によっても本特許を好適に実施することができる。本実施例において、ラインセンサーカメラ23により観察する位置は、光源2の出射口3から12mm程度である。 In addition, a background portion 20 is provided as a background for shooting so that no extra background is captured during shooting. The subject passes through the thread guide (not shown) while contacting the camera side of the through-hole 5a, and is guided so as to prevent light leakage on the imaging side. The thickness of the structure constituting the light-shielding structure 5b is about 1 mm, and the periphery of the through-hole 5a has a rounded cross-sectional shape using the thickness so as not to be damaged even if the hollow fiber contacts. The double-sided inspection of the inspection object can be performed by using two structures of FIG. 9 for the inspection object. This patent can be suitably implemented also by the fifth embodiment. In this embodiment, the position observed by the line sensor camera 23 is about 12 mm from the emission port 3 of the light source 2.
尚、前記各実施形態では好適な具体例を挙げて本発明を詳細に説明したが、本発明がこれらの好適な具体例に限定されないことはもちろんである。特に照射手段となる光源や、撮像手段となるカメラについては各種のものが市販されており、光源については出射光量や形状寸法等で、カメラについては感度や撮像時間、分解能等で適宜好適なものを選択することが出来る。 In the above embodiments, the present invention has been described in detail with specific examples. However, the present invention is not limited to these preferable examples. In particular, various types of light sources serving as irradiating means and cameras serving as imaging means are commercially available. The light source is appropriately selected in terms of the amount of emitted light, shape dimensions, etc., and the camera is suitably suitable for sensitivity, imaging time, resolution, etc. Can be selected.
また、遮光手段となる遮光構造物５についても種々の対象物の特性に応じて、接触型や非接触型など各種の形状を取ることが出来る。また検査の対象となる対象物についても、照射する光をすべて吸収するような材質のものでなければ、内部に均一な連続した導光部を持つ構造の物体であれば太さや表面形状等に係らず適用することが出来る。例えば、内部に略均一な連続した導光部からなる芯材と、その芯材を被覆する鞘材からなる芯鞘構造繊維や、或いは鞘材の内部に略均一な連続した導光部からなる芯材を複数有する海島状繊維等が適用可能である。 Further, the light shielding structure 5 serving as the light shielding means can take various shapes such as a contact type and a non-contact type according to the characteristics of various objects. Also, if the object to be inspected is not made of a material that absorbs all of the light to be irradiated, the thickness and surface shape of the object should be such as an object having a structure with a uniform continuous light guide inside. It can be applied regardless. For example, a core material composed of a substantially uniform continuous light guide portion inside and a core-sheath structure fiber composed of a sheath material covering the core material, or a substantially uniform continuous light guide portion inside the sheath material. Sea-island fibers having a plurality of core materials are applicable.
欠陥としては、導光部の外側部分のピンホールや、導光部の外側部分に含まれる異物、導光部の外側部分の厚みむらなどが対象となるが、これらに限らず他の欠陥も光学的に捉えられる欠陥ならば対象とすることが出来る。 Defects include pinholes in the outer part of the light guide part, foreign substances contained in the outer part of the light guide part, uneven thickness of the outer part of the light guide part, etc. Any defect that can be captured optically can be targeted.
また、前記各実施形態では、第１、第２の照射手段として各照明装置を１台ずつ設けた場合について説明したが、これらの台数や照射方向は対象物の種類や検査対象となる欠陥の種類に応じて適宜選択出来る。 In each of the above-described embodiments, the case where each of the lighting devices is provided as the first and second irradiating means has been described. However, the number and the irradiation direction of these are the types of objects and the defects to be inspected. It can be selected appropriately according to the type.
本発明の活用例として、内部に略均一な連続した導光部を持つ長尺状の対象物の欠陥を検査する方法及び装置に適用することが出来、特に中空糸膜の欠陥を検査する場合に好適である。 As an application example of the present invention, it can be applied to a method and apparatus for inspecting a defect of a long object having a substantially uniform continuous light guide inside, particularly when inspecting a defect of a hollow fiber membrane. It is suitable for.
１…中空糸膜
１ａ…中空部
２…ライン型ファイバー照明装置
３…出射口
４…反射板
５…遮光構造物
５ａ…貫通孔
５ｂ，５ｃ，５ｄ…遮光板
５ｃ１，５ｃ３，５ｄ１…オーバーラップ部
５ｃ２，５ｄ２…溝部
５ｅ…ヒンジ部材
５ｆ…遮光板
５ｆ１，５ｆ３…オーバーラップ部
５ｆ２…溝部
５ｇ…覆い部材
６ａ，６ｂ…カメラ（カラーカメラ）
７…リング型ファイバー照明装置
８ａ，８ｂ…カメラ（カラーカメラ）
９…外観上の欠陥
10…内部欠陥
12ａ，12ｂ…画像処理装置
13ａ，13ｂ…画像処理装置
14ａ，14ｂ…画像検査装置
16…鏡
18ａ，18ｂ…色画像分離装置
19…欠陥検査装置
20…撮像時の背景部
21…カバー側
22…本体側
23…ラインセンサーカメラ
24…カメラ視線
DESCRIPTION OF SYMBOLS 1 ... Hollow fiber membrane 1a ... Hollow part 2 ... Line type | mold fiber illuminating device 3 ... Outlet 4 ... Reflection plate 5 ... Light-shielding structure 5a ... Through-hole 5b, 5c, 5d ... Light-shielding plate 5c1, 5c3, 5d1 ... Overlap part 5c2, 5d2 ... groove portion 5e ... hinge member 5f ... light shielding plate 5f1, 5f3 ... overlap portion 5f2 ... groove portion 5g ... covering member 6a, 6b ... camera (color camera)
7 ... Ring type fiber illuminator 8a, 8b ... Camera (color camera)
9: Defect in appearance
10 ... Internal defect
12a, 12b ... Image processing device
13a, 13b ... Image processing device
14a, 14b ... Image inspection equipment
16 ... Mirror
18a, 18b ... color image separation device
19 ... Defect inspection equipment
20 ... Background during imaging
21… Cover side
22 ... Body side
23 ... Line sensor camera
24 ... Camera gaze
Claims (13)
照射手段により前記対象物に対して外側から光を照射すると共に、該照射手段から出射される直接光及び該照射手段により照射された光が前記対象物の外表面を反射した反射光及び前記対象物を透過して一旦外部に出た透過光が撮像手段に入射しないように遮光手段により遮光し、前記照射手段により照射された光が前記対象物内の導光部に導かれて該導光部から該対象物の外側に出射する光像を前記撮像手段により撮像し、該撮像手段の出力信号を処理して前記対象物の欠陥を検出することを特徴とする欠陥検査方法。 A method for inspecting a defect in a long object having a substantially uniform continuous light guide inside,
Irradiation means irradiates light on the object from outside, and direct light emitted from the irradiation means and reflected light in which the light emitted by the irradiation means reflects the outer surface of the object and the object The transmitted light that has passed through the object and has once exited to the outside is shielded by the light shielding means so that it does not enter the imaging means, and the light irradiated by the irradiation means is guided to the light guide section in the object and the light guide A defect inspection method comprising: picking up an optical image emitted from a section to the outside of the object by the imaging means, and processing a signal output from the imaging means to detect a defect of the object.
前記対象物に対して外側から光を照射する第１の照射手段と、
前記第１の照射手段により照射された光が前記対象物内の導光部に導かれて該導光部から対象物の外側に出射する光像を撮像する第１の撮像手段と、
前記長尺状の対象物の長手方向における前記第１の照射手段と前記第１の撮像手段との間に設けられ、前記第１の照射手段から出射される直接光及び前記第１の照射手段により照射された光が前記対象物の外表面を反射した反射光及び前記対象物を透過して一旦外部に出た透過光が前記第１の撮像手段に入射しないように遮光する遮光手段と、
前記第１の撮像手段の出力信号を処理して前記対象物の欠陥を検出する第１の画像処理手段と、
を有することを特徴とする欠陥検査装置。 An apparatus for inspecting a defect of a long object having a substantially uniform continuous light guide inside,
First irradiating means for irradiating the object with light from outside;
First imaging means for imaging a light image emitted from the light guide section to the outside of the object by the light emitted by the first irradiation section being guided to the light guide section in the object;
Direct light emitted from the first irradiation means and the first irradiation means provided between the first irradiation means and the first imaging means in the longitudinal direction of the elongated object. Light shielding means for shielding light so that the reflected light reflected by the outer surface of the object and the transmitted light that has passed through the object and once exited to the outside do not enter the first imaging means;
First image processing means for processing an output signal of the first imaging means to detect a defect of the object;
A defect inspection apparatus comprising:
前記第２の照射手段により照射され、前記対象物の外表面を反射した反射光による光像を撮像する第２の撮像手段と、
前記第２の撮像手段の出力信号を処理して前記対象物の欠陥を検出する第２の画像処理手段と、
を有することを特徴とする請求項２に記載の欠陥検査装置。 A second irradiating means for irradiating the object with light from outside;
A second imaging unit that captures an optical image of reflected light that is irradiated by the second irradiation unit and reflected from the outer surface of the object;
Second image processing means for processing the output signal of the second imaging means to detect a defect of the object;
The defect inspection apparatus according to claim 2, further comprising:
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006245056A JP4707632B2 (en) | 2005-09-21 | 2006-09-11 | Defect inspection equipment |
| TW96109777A TW200839223A (en) | 2005-09-21 | 2007-03-21 | Method and apparatus for defect test of hollow fiber porous membrane and production method of the same |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005273793 | 2005-09-21 | ||
| JP2005273793 | 2005-09-21 | ||
| JP2006245056A JP4707632B2 (en) | 2005-09-21 | 2006-09-11 | Defect inspection equipment |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2007114187A true JP2007114187A (en) | 2007-05-10 |
| JP2007114187A5 JP2007114187A5 (en) | 2008-10-16 |
| JP4707632B2 JP4707632B2 (en) | 2011-06-22 |
Family
ID=38096499
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006245056A Expired - Fee Related JP4707632B2 (en) | 2005-09-21 | 2006-09-11 | Defect inspection equipment |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP4707632B2 (en) |
| TW (1) | TW200839223A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007175641A (en) * | 2005-12-28 | 2007-07-12 | Mitsubishi Rayon Co Ltd | Manufacturing method of hollow fiber membrane |
| WO2008126186A1 (en) * | 2007-03-16 | 2008-10-23 | Asahi Kasei Chemicals Corporation | Method for inspecting defect of hollow fiber porous membrane, defect inspection equipment and production method |
| JP2012026890A (en) * | 2010-07-23 | 2012-02-09 | Mitsubishi Cable Ind Ltd | Surface defect inspection device and method thereof |
| WO2012039298A1 (en) * | 2010-09-21 | 2012-03-29 | 東レ株式会社 | Inspection device and inspection method for thread-like product |
| JPWO2020194567A1 (en) * | 2019-03-27 | 2020-10-01 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111788066B (en) * | 2018-07-08 | 2022-08-26 | 洛希亚有限公司 | Apparatus and method for managing defects in web material on a converting line |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05149894A (en) * | 1991-11-28 | 1993-06-15 | Shigeki Maeda | Flaw detector |
| JPH05312727A (en) * | 1992-05-13 | 1993-11-22 | Fujikura Ltd | Method and apparatus for detecting bubble in optical fiber |
| JPH08282920A (en) * | 1995-04-13 | 1996-10-29 | Fujikura Ltd | Apparatus and method for detecting abnormalities in coating layer on travelling line-like body |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0414829B1 (en) * | 1988-10-31 | 1994-05-25 | SCHOEPS, Wilfried | A device for the simultaneous contactless testing of a plurality of points on a test sample and its application |
-
2006
- 2006-09-11 JP JP2006245056A patent/JP4707632B2/en not_active Expired - Fee Related
-
2007
- 2007-03-21 TW TW96109777A patent/TW200839223A/en unknown
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05149894A (en) * | 1991-11-28 | 1993-06-15 | Shigeki Maeda | Flaw detector |
| JPH05312727A (en) * | 1992-05-13 | 1993-11-22 | Fujikura Ltd | Method and apparatus for detecting bubble in optical fiber |
| JPH08282920A (en) * | 1995-04-13 | 1996-10-29 | Fujikura Ltd | Apparatus and method for detecting abnormalities in coating layer on travelling line-like body |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007175641A (en) * | 2005-12-28 | 2007-07-12 | Mitsubishi Rayon Co Ltd | Manufacturing method of hollow fiber membrane |
| WO2008126186A1 (en) * | 2007-03-16 | 2008-10-23 | Asahi Kasei Chemicals Corporation | Method for inspecting defect of hollow fiber porous membrane, defect inspection equipment and production method |
| JPWO2008126186A1 (en) * | 2007-03-16 | 2010-07-22 | 旭化成ケミカルズ株式会社 | Hollow fiber porous membrane defect inspection method, defect inspection apparatus and manufacturing method |
| AU2007351270B2 (en) * | 2007-03-16 | 2011-03-17 | Asahi Kasei Chemicals Corporation | Method for inspecting defect of hollow fiber porous membrane, defect inspection equipment and production method |
| US7940382B2 (en) | 2007-03-16 | 2011-05-10 | Asahi Kasei Chemicals Corporation | Method for inspecting defect of hollow fiber porous membrane, defect inspection equipment and production method |
| JP2012026890A (en) * | 2010-07-23 | 2012-02-09 | Mitsubishi Cable Ind Ltd | Surface defect inspection device and method thereof |
| WO2012039298A1 (en) * | 2010-09-21 | 2012-03-29 | 東レ株式会社 | Inspection device and inspection method for thread-like product |
| JPWO2020194567A1 (en) * | 2019-03-27 | 2020-10-01 |
Also Published As
| Publication number | Publication date |
|---|---|
| TW200839223A (en) | 2008-10-01 |
| JP4707632B2 (en) | 2011-06-22 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4707632B2 (en) | Defect inspection equipment | |
| JP4913210B2 (en) | Hollow fiber porous membrane defect inspection method, defect inspection apparatus and manufacturing method | |
| JP4847128B2 (en) | Surface defect inspection equipment | |
| JP2007114187A5 (en) | ||
| US20150009320A1 (en) | Visually inspecting optical fibers | |
| JP2008502929A (en) | Inspection apparatus or inspection method for fine structure by reflected or transmitted infrared light | |
| JPH08128959A (en) | Optical inspection method and optical inspection device | |
| JP2008139052A (en) | Method and device for inspecting crack of honeycomb structure | |
| JP2012026858A (en) | Device for inspecting inner peripheral surface of cylindrical container | |
| JP2008026060A (en) | Flaw inspection device of insulating film covered belt-like body | |
| US11499921B2 (en) | Inspection method and inspection system for pillar-shaped honeycomb structure | |
| JP2002214158A (en) | Defect detecting method and detecting device for transparent plate-like body | |
| JP4847187B2 (en) | Inspection apparatus and inspection method | |
| JP2002090258A (en) | Method, apparatus and system for inspection of lens | |
| WO2012039298A1 (en) | Inspection device and inspection method for thread-like product | |
| KR101745764B1 (en) | Apparatus and Method for Optically Inspecting Surface of Plate Member | |
| JP6870262B2 (en) | Flat glass inspection method and flat glass inspection equipment | |
| KR100826126B1 (en) | Apparatus for detecting suzi mura using spectral camera | |
| US20220390384A1 (en) | Product Inspection System, Imaging System and Mirror | |
| JP2002014058A (en) | Method and apparatus for checking | |
| KR20120017314A (en) | Optical detection module for wafer inspection | |
| JPH11224515A (en) | Lighting system and defect inspecting device using it | |
| JP2006292695A (en) | Defect inspection device and defect inspection method | |
| KR20220054785A (en) | skin test device | |
| JP2001208701A (en) | Transparent panel inspection apparatus |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RD02 | Notification of acceptance of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7422 Effective date: 20080201 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20080829 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20080829 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20110112 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20110118 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20110223 |
|
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20110315 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20110315 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140325 Year of fee payment: 3 |
|
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313117 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140325 Year of fee payment: 3 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313115 |
|
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313115 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| LAPS | Cancellation because of no payment of annual fees |