JP2002214158A - Defect detecting method and detecting device for transparent plate-like body - Google Patents
Defect detecting method and detecting device for transparent plate-like bodyInfo
- Publication number
- JP2002214158A JP2002214158A JP2001011724A JP2001011724A JP2002214158A JP 2002214158 A JP2002214158 A JP 2002214158A JP 2001011724 A JP2001011724 A JP 2001011724A JP 2001011724 A JP2001011724 A JP 2001011724A JP 2002214158 A JP2002214158 A JP 2002214158A
- Authority
- JP
- Japan
- Prior art keywords
- illuminator
- transparent plate
- defect
- light
- image
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、板ガラスや透明プ
ラスチック板などの透明板状体の製造や２次加工におけ
るキズなどの欠点検査方法および装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and apparatus for inspecting defects such as scratches in the production of a transparent plate such as a sheet glass or a transparent plastic plate or in secondary processing.
【０００２】[0002]
【従来の技術】板ガラスに光を照射し、板ガラスを透過
する光あるいは板ガラスの表面で反射する光を用いて板
ガラスの内部および表面のキズや異物などの欠点を検査
する方法は、欠点で光が散乱することを利用するもので
ある。欠点のところで光が散乱するため、その部分が光
の２次光源となり、カメラでその部分を画像としてとら
えることが可能であり、欠点がないところは光が散乱し
ないので結像することが無く、画像には欠点が像として
形成される。2. Description of the Related Art A method of irradiating a sheet glass with light and inspecting defects such as scratches and foreign substances inside and on the surface of the sheet glass using light transmitted through the sheet glass or light reflected on the surface of the sheet glass is one of the drawbacks. Scattering is used. Because the light is scattered at the defect, the part becomes a secondary light source of light, and it is possible to capture the part as an image with a camera, and where there is no defect, the light is not scattered, so that no image is formed. Defects are formed as images in the image.
【０００３】欠点で散乱される光の強さは、キズなどの
欠点の大きさと形状に依存する。特に、ヘアラインと呼
ばれるような非常に微細なキズにおいては、キズの散乱
光は、照明器の光線と同じ方向に強く散乱される。この
ため、キズの観察は、照明器を見る方向が最も有利にな
る。The intensity of light scattered by a defect depends on the size and shape of the defect such as a flaw. In particular, in a very fine flaw such as a hairline, the scattered light of the flaw is strongly scattered in the same direction as the light beam of the illuminator. For this reason, the observation of the scratch is most advantageous in the direction in which the illuminator is viewed.
【０００４】本発明者は、あらゆるキズの方向に対して
も光が散乱するように、散乱光を照明に用い、透明板状
体に対し、該照明器とは反対側にＣＣＤカメラを配置
し、該ＣＣＤカメラで、キズなどの欠点の像を撮影する
という方法において、照明器とＣＣＤカメラとを結ぶ直
線上に遮光板を配置して、照明光が直接ＣＣＤカメラに
入射しないようにして、かなり微細なキズなどの欠点を
検出可能にする方法について先に特許出願（特願２００
０ー３４７７１０号）した。The present inventor uses scattered light for illumination so that light is scattered in all directions of flaws, and arranges a CCD camera on the transparent plate-like body on the side opposite to the illuminator. In the method of taking an image of a defect such as a scratch with the CCD camera, a light-shielding plate is arranged on a straight line connecting the illuminator and the CCD camera so that illumination light does not directly enter the CCD camera. Prior to the patent application (Japanese Patent Application 200
No. 0-347710).
【０００５】[0005]
【発明が解決しようとする課題】上記出願の発明は、散
乱光により欠点を検出する方法において、微細な線状の
欠点をもれなく検出するために、散乱光を用いて欠点を
照明するものであり、図９はこの光学系の側面図を示し
たものである。SUMMARY OF THE INVENTION The invention of the above-mentioned application is a method of detecting a defect by scattered light, wherein the defect is illuminated by using the scattered light in order to detect all fine linear defects. FIG. 9 is a side view of the optical system.
【０００６】散乱光で照明された欠点検出方法において
は、欠点による散乱光は、照明光の進む方向とほぼ同じ
方向に進む光が強い。このため、透明板状体に対して垂
直に近い角度で照明する照明器ａ６を用い、照明された
透明板状体３をＣＣＤカメラ１で観察し、透明板状体３
の欠点で散乱する光が形成する画像を得ることにより、
欠点を検出している。このとき、照明器ａ６の照明光が
直接ＣＣＤカメラに入射しないようにしている。In the defect detection method illuminated with scattered light, the scattered light due to the defect is such that the light traveling in the same direction as the direction of the illumination light is strong. For this reason, the illuminator a6 that illuminates the transparent plate at an angle nearly perpendicular to the transparent plate is used to observe the illuminated transparent plate 3 with the CCD camera 1, and the transparent plate 3
By obtaining an image formed by light scattered due to the disadvantage of
The fault has been detected. At this time, the illumination light of the illuminator a6 is prevented from directly entering the CCD camera.
【０００７】前述の方法は、微細なキズは検出可能であ
るが、透明板状体の表面に付着した汚れも欠点として検
出するため、洗浄によって商品となるものも不良品と判
定し、生産歩留まりがよくないという問題がある。In the above-mentioned method, although fine scratches can be detected, dirt adhering to the surface of the transparent plate is also detected as a defect. There is a problem that is not good.
【０００８】[0008]
【課題を解決するための手段】本発明の欠点検出方法
は、透明板状体に光を当て、欠点での散乱光を検知し
て、透明板状体の欠点を検出する方法において、透明板
状体の面に対し、垂直に近い角度で照明する照明器ａと
平行に近い角度で照明する照明器ｂとで、透明板状体に
散乱光を帯状に当て、照明器ｂによる照明は、透明板状
体の表裏両側あるいは片側のみで行い、透明板状体に対
して照明器ａとは反対側にＣＣＤカメラが配置され、該
ＣＣＤカメラで散乱光を帯状に当てられた透明板状体を
撮影し、照明器ａで得られた画像から照明器ｂで得られ
た画像を画像処理技術によって削除することを特徴とす
る欠点検出方法である。According to the present invention, there is provided a method for detecting a defect in a transparent plate, which comprises irradiating a transparent plate with light and detecting scattered light at the defect to detect a defect in the transparent plate. The illuminator a that illuminates the surface of the body at an angle close to perpendicular and the illuminator b that illuminates at an angle close to parallel apply the scattered light to the transparent plate-like body in a strip shape. The operation is performed on both sides or only one side of the transparent plate, and a CCD camera is disposed on the opposite side of the transparent plate from the illuminator a, and the CCD camera applies a scattered light in a strip shape to the transparent plate. The defect detection method is characterized in that an image obtained by the illuminator a is deleted from the image obtained by the illuminator a by an image processing technique.
【０００９】また、前述の欠点検出方法において、透明
板状体に対する、照明器ａの照明光の入射角度を３０度
以下にし、照明器ｂの照明光の入射角度を４０度から８
５度とすることを特徴とする。In the above-described defect detection method, the angle of incidence of the illumination light of the illuminator a on the transparent plate is set to 30 degrees or less, and the angle of incidence of the illumination light of the illuminator b is changed from 40 degrees to 8 degrees.
It is characterized by 5 degrees.
【００１０】また、前述の欠点検出方法において、透明
板状体とＣＣＤカメラとの間に遮光板を設けて、照明器
ａの照明光が、直接ＣＣＤカメラに入射しないようにす
ることを特徴とし、照明器ａと照明器ｂとは中心波長が
異なることを特徴とする。Further, in the above-mentioned defect detecting method, a light-shielding plate is provided between the transparent plate and the CCD camera so that the illumination light from the illuminator a does not directly enter the CCD camera. The illuminators a and b have different center wavelengths.
【００１１】また、ＣＣＤカメラで撮影した画像におい
て、照度分布補正処理、２値化処理、形状処理を行っ
て、透明板状体の欠点を検知することを特徴とする欠点
検出方法である。[0011] A defect detection method is characterized in that an image captured by a CCD camera is subjected to illuminance distribution correction processing, binarization processing, and shape processing to detect a defect in a transparent plate.
【００１２】さらに、照明器ａと照明器ｂとが、透明板
状体の同じ場所を照明し、少なくとも、照明器ａと照明
器ｂとは中心波長が異なることを特徴とする前述の欠点
検出方法による検出装置である。Further, the illuminator a and the illuminator b illuminate the same place of the transparent plate, and at least the illuminator a and the illuminator b have different center wavelengths. A detection device according to the method.
【００１３】また、照明器ａと照明器ｂとが、透明板状
体の異なる場所を照明し、照明器ａで得られる画像と照
明器ｂで得られる画像とを用いることを特徴とする前述
の欠点検出方法による検出装置である。Further, the illuminator a and the illuminator b illuminate different places on the transparent plate, and use an image obtained by the illuminator a and an image obtained by the illuminator b. This is a detection device based on the defect detection method of (1).
【００１４】[0014]
【作用】本発明の欠点検出方法は、図１のような光学系
を用いて行う。すなわち、透明板状体の面に対し、垂直
に近い角度で照明する照明器ａ６とは別に、透明板状体
３の面に対し、平行に近い角度で照明する照明器ｂ６’
を用い、透明板状体３を斜めから照明する。照明器ｂ
６’の照明で得られる画像は、表面に付着している汚れ
で散乱される光で形成される。The defect detecting method of the present invention is performed using an optical system as shown in FIG. That is, apart from the illuminator a6 which illuminates the surface of the transparent plate-like body at an angle nearly perpendicular, the illuminator b6 'which illuminates the surface of the transparent plate-like body 3 at an angle close to parallel.
Is used to illuminate the transparent plate 3 from an oblique direction. Illuminator b
The image obtained with 6 'illumination is formed by light scattered by dirt adhering to the surface.
【００１５】照明器ａ６で得られた画像から、照明器ｂ
６’で得られた画像を画像処理技術によって削除するこ
とにより、キズなどの、透明板状体の表面および内部に
存在する欠点のみが検出できる。From the image obtained by the illuminator a6, the illuminator b
By deleting the image obtained in 6 ′ by the image processing technique, only defects such as scratches existing on the surface and inside of the transparent plate can be detected.
【００１６】[0016]
【発明の実施の形態】透明板状体の照明に用いる照明器
ａと照明器ｂは、照明する方向が異なるのみで、同じも
のを使用することができ、照明器ａと照明器ｂは、透明
板状体を帯状に照明する。BEST MODE FOR CARRYING OUT THE INVENTION The illuminator a and the illuminator b used for illuminating a transparent plate-shaped body can be the same, except that the illuminating direction is different, and the illuminator a and the illuminator b are The transparent plate is illuminated in a strip shape.
【００１７】照明器にはハロゲンランプ、キセノンラン
プ、高圧水銀灯、ナトリウムランプなどの光源を用い、
光源の光を遮光したり、板状あるいはロッド状の光ガイ
ドを用いて、透明板状体を帯状に照明する。透明板状体
に入射する光は磨りガラスなどのディフューザーを用い
るか、光ガイドの射出側に凹凸処理をして散乱光にす
る。また光源に棒状の蛍光灯を用いることができる。Light sources such as a halogen lamp, a xenon lamp, a high-pressure mercury lamp, and a sodium lamp are used for the illuminator.
The light from the light source is shielded, or the plate-shaped or rod-shaped light guide is used to illuminate the transparent plate-like body in a band-like manner. The light incident on the transparent plate is made to be a scattered light by using a diffuser such as frosted glass or by subjecting the exit side of the light guide to an uneven treatment. Further, a rod-shaped fluorescent lamp can be used as a light source.
【００１８】照明器ａと照明器ｂの中心波長を異なるよ
うにするには、照明器に色の異なる着色フィルターを用
いるか、あるいはナトリウムと高圧水銀灯、あるいは発
振波長の異なるレーザーなど、光源の波長が異なるもの
を用いればよい。In order to make the center wavelengths of the illuminator a and the illuminator b different, a colored filter having a different color is used for the illuminator, or a wavelength of a light source such as a sodium and a high-pressure mercury lamp or a laser having a different oscillation wavelength. May be used.
【００１９】透明板状体の照明された部分を、透明板状
体の照明器とは反対側に設置されたＣＣＤカメラで撮影
する。ＣＣＤカメラと透明板状体との間に、２枚の遮光
板をスリット状に設け、照明器ａの光がＣＣＤカメラに
直接は入らず、また迷光をも遮蔽するので好ましい。The illuminated portion of the transparent plate is photographed by a CCD camera installed on the opposite side of the transparent plate illuminator. Between the CCD camera and the transparent plate, two light-shielding plates are provided in a slit shape, so that the light of the illuminator a does not directly enter the CCD camera, and also stray light is shielded, which is preferable.
【００２０】遮光板は、欠点の像との明るさの差異を大
きくするため、黒色であることが好ましい。また、遮光
板の端部で光が散乱しないように、スリットを形成する
遮光板の辺は、なめらかな直線の形状であることが好ま
しく、ナイフエッジの形状であることが望ましい。また
スリットの間隔は５ｍｍ以下、望ましくは１〜２ｍｍ程
度にすることが好ましい。The light shielding plate is preferably black in order to increase the difference in brightness from the defect image. Further, in order to prevent light from being scattered at the end of the light-shielding plate, the side of the light-shielding plate forming the slit is preferably a smooth straight line, and more preferably a knife edge. The interval between the slits is preferably 5 mm or less, more preferably about 1 to 2 mm.
【００２１】ＣＣＤカメラの位置は、スリットを通して
照明器ａの照明光が直接ＣＣＤカメラに入射しない範囲
内にあればよい。好ましくは、透明板状体の法線上に位
置させる。The position of the CCD camera may be within a range where the illumination light from the illuminator a does not directly enter the CCD camera through the slit. Preferably, it is located on the normal line of the transparent plate.
【００２２】照明器ａは、前述の遮光板により、照明器
ａの照明光が直接ＣＣＤカメラに入射しないように位置
させる。照明器ａには、２個以上の光源を用いて、透明
板状体を多方向から照明することが好ましく、１個の光
源の光を、鏡などを用いて多方向から透明板状体を照明
してもよい。The illuminator a is positioned by the above-mentioned light shielding plate so that the illumination light of the illuminator a does not directly enter the CCD camera. For the illuminator a, it is preferable to illuminate the transparent plate from multiple directions using two or more light sources, and to illuminate the light from one light source from multiple directions using a mirror or the like. It may be illuminated.
【００２３】照明器ａの照明の入射角度は、スリットに
よって遮光される状態で、透明板状体の面に垂直（０
度）に近い角度にすることが望ましく、板ガラスの場合
入射角が０度から３０度迄の間は透過率がほとんど変わ
らないので、３０度以下にすることが望ましい。また、
板ガラスの場合、入射角度が４０度を超えると反射率が
急激に大きくなるので、４０度以下であればよい。The angle of incidence of the illumination of the illuminator a is perpendicular to the surface of the transparent plate (0
(Degree), and in the case of a sheet glass, the transmittance is hardly changed between the incident angle of 0 ° and 30 °, so that it is preferably 30 ° or less. Also,
In the case of sheet glass, if the incident angle exceeds 40 degrees, the reflectance sharply increases.
【００２４】照明器ｂの照明光は、透明板状体の表面の
汚れで散乱させて、汚れのみの画像を形成するためのも
のであるから、透明板状体の面に対し、なるべく入射角
度を大きくして、透明板状体の表面で反射する光量を大
きくすることが望ましい。板ガラスの場合は、入射角度
が４０度を超えると反射率が増大するので、４０度以上
にし、平行に近い角度、すなわち８５度程度までとする
ことが好ましい。また、照明器ｂの照明は、透明板状体
の表裏両側から行うことが望ましい。The illumination light from the illuminator b is used to form an image of only the dirt by scattering the dirt on the surface of the transparent plate, so that the incident angle with respect to the surface of the transparent plate is preferably as small as possible. It is desirable to increase the amount of light reflected on the surface of the transparent plate-like body by increasing the value of. In the case of sheet glass, if the incident angle exceeds 40 degrees, the reflectance increases. Therefore, it is preferable to set the angle to 40 degrees or more, and to set the angle close to parallel, that is, to about 85 degrees. It is desirable that the illumination of the illuminator b is performed from both the front and back sides of the transparent plate.
【００２５】照明器ａと照明器ｂは、透明板状体の同じ
場所を照明しても良いが、照明器ａが照明する場所と照
明器ｂが照明する場所を別にしても良い。The illuminator a and the illuminator b may illuminate the same place of the transparent plate-shaped body, but the illuminator a and the illuminator b may illuminate different places.
【００２６】照明器ａと照明器ｂが同じ場所を照明する
場合は、照明器ａと照明器ｂの両方あるいは照明器ａの
みを、狭い波長範囲の照明器として、中心波長を持つよ
うにすることが好ましく、中心波長は光の三原色（赤、
緑、青）に近いことが望ましい。照明器が中心波長を持
つことにより、撮影はＣＣＤカラーカメラを用い、ＣＣ
Ｄカラーカメラのフィルター処理によって、照明器ａに
よって得られる画像と照明器ｂによって得られる画像と
が分離できる。照明器ａで透明板状体の欠点と表面の汚
れとの画像を得、照明器ｂで表面の汚れの画像を得、２
つの画像から、透明板状体の欠点のみの画像が得られ
る。この場合は、ＣＣＤカメラが１台でも欠点の検出が
可能である。When the illuminator a and the illuminator b illuminate the same place, both the illuminator a and the illuminator b or only the illuminator a are used as illuminators in a narrow wavelength range and have a center wavelength. Preferably, the center wavelength is the three primary colors of light (red,
Green, blue). Since the illuminator has a central wavelength, shooting is performed using a CCD color camera and CC
By the filtering process of the D color camera, the image obtained by the illuminator a and the image obtained by the illuminator b can be separated. An image of the defect of the transparent plate and the stain on the surface is obtained by the illuminator a, and an image of the stain on the surface is obtained by the illuminator b.
From the two images, an image of only the defect of the transparent plate is obtained. In this case, the defect can be detected even with one CCD camera.
【００２７】また、照明器ａのみを点灯して画像を得、
さらに照明器ｂのみを点灯して画像を得ても良い。この
場合は、ＣＣＤカメラは像の輝度のみがわかるものであ
れば良く、白黒の画像の方が好ましい。Further, an image is obtained by lighting only the illuminator a,
Further, an image may be obtained by lighting only the illuminator b. In this case, the CCD camera only needs to know the brightness of the image, and a monochrome image is more preferable.
【００２８】照明器ａによって得られる欠点と汚れの画
像と照明器ｂによって得られる汚れのみの画像とは、照
明器ａが照明する場所と照明器ｂが照明する場所を変え
ることによっても、得ることもできる。この場合は、照
明器ａと照明器ｂの照明場所それぞれにＣＣＤカメラを
設置して撮影するほうが、照明器ａと照明器ｂそれぞれ
の照明場所に対して、ＣＣＤカメラを移動したり、ある
いは撮影する角度を変えて撮影するよりも、効率的に検
出が行える。The defect and dirt images obtained by the illuminator a and the dirt-only image obtained by the illuminator b can also be obtained by changing the location illuminated by the illuminator a and the location illuminated by the illuminator b. You can also. In this case, it is better to set up a CCD camera at each of the lighting locations of the illuminators a and b to take a picture. The detection can be performed more efficiently than when shooting at different angles.
【００２９】欠点の検出は、透明板状体を水平に置き、
ＣＣＤカメラ、遮光板および照明器を鉛直に配置する
か、または透明板状体を鉛直に立て、ＣＣＤカメラ、遮
光板および照明器を水平に配置して行ってもよい。To detect a defect, the transparent plate is placed horizontally,
The CCD camera, the shading plate and the illuminator may be arranged vertically, or the transparent plate may be set upright, and the CCD camera, the shading plate and the illuminator may be arranged horizontally.
【００３０】また、透明板状体の全体を検査するため
に、透明板状体を固定して、光源、遮光板およびＣＣＤ
カメラを移動するか、あるいは光源、遮光板およびＣＣ
Ｄカメラを固定して、透明板状体を移動する。Further, in order to inspect the entire transparent plate, the transparent plate is fixed, and a light source, a light shielding plate and a CCD are fixed.
Move the camera or light source, douser and CC
With the D camera fixed, the transparent plate is moved.
【００３１】ＣＣＤカメラは通常のカメラでも良いが、
スリットを通して見る透明板状体のみの画像を取り扱う
ので、１本の走査線のみを撮影するようにしたラインカ
メラを用いることが望ましい。The CCD camera may be an ordinary camera,
Since an image of only the transparent plate-like body viewed through the slit is handled, it is desirable to use a line camera that captures only one scanning line.
【００３２】また、光源発光部分以外のカメラ視野の背
景となる部分は無反射の黒色塗装等を行い、余分な反射
光がカメラに入光しないことが望ましい。In addition, it is desirable that a non-reflective black paint or the like be applied to the background portion of the camera's field of view other than the light source light emitting portion, so that extra reflected light does not enter the camera.
【００３３】ＣＣＤカメラで撮影された透明板状体の像
は、照度調整処理を行った後に、像の明るさをＣＣＤカ
メラの分解能に対応させて、明と暗との２値化処理す
る。さらに、２値化処理されたデータの明の部分を幅と
長さに形状処理して、欠点の認識処理を行う。After the illuminance adjustment process is performed on the image of the transparent plate-like object photographed by the CCD camera, the brightness of the image is binarized into light and dark in accordance with the resolution of the CCD camera. Further, the bright portion of the binarized data is shaped into a width and a length, and a defect recognition process is performed.
【００３４】ＣＣＤカメラで撮影された画像は、ＣＣＤ
カメラからのデータをそのまま画像データとして小型の
パーソナルコンピュータあるいは中型のワークステーシ
ョンなどのコンピュータに取り込み、コンピュータに予
め組み込まれたプログラムで画像処理をしてもよく、あ
るいはＣＣＤカメラとコンピュータの間に画像処理機を
設け、照度調整から２値化までを画像処理機で行い、形
状による欠点としての認識処理をコンピュータに組み込
まれた手順で行ってもよい。An image taken by a CCD camera is a CCD camera.
The data from the camera can be directly taken as image data into a computer such as a small personal computer or a medium-sized workstation, and image processing can be performed using a program pre-installed in the computer, or image processing can be performed between the CCD camera and the computer. An image processor may be used to perform the process from illumination adjustment to binarization, and recognition processing as a defect due to shape may be performed by a procedure incorporated in a computer.
【００３５】[0035]
【実施例】以下、図面を参照しながら本発明を詳細に説
明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in detail with reference to the drawings.
【００３６】実施例１ 図１および図２は、実施例１の光学系の概略側面図と概
略平面図である。Embodiment 1 FIGS. 1 and 2 are a schematic side view and a schematic plan view of an optical system according to Embodiment 1. FIG.
【００３７】厚み５ｍｍのフロート板ガラスの透明板状
体３を下方から照明器ａ６で照明した。さらに照明器ａ
６で照明した同じ透明板状体３の箇所を、照明器ｂ６’
で、透明板状体３の表裏両側から、図２の照明範囲５の
ように、帯状に照明した。The transparent plate 3 made of float glass having a thickness of 5 mm was illuminated from below with an illuminator a6. Further lighting equipment a
6. The same place of the transparent plate 3 illuminated by 6
Thus, the light was illuminated in a strip shape from both the front and back sides of the transparent plate-like body 3 as in the illumination range 5 in FIG.
【００３８】照明器ａ６にはハロゲンライトに緑色透過
フィルタを用い、照明器ｂ６’には照明器ａと同じハロ
ゲンライトに赤色透過フィルタ用いた。The illuminator a6 used a green transmission filter for halogen light, and the illuminator b6 'used a red transmission filter for the same halogen light as the illuminator a.
【００３９】遮光板４は、スリットを形成する隙間が２
ｍｍとなるように配置した。The light-shielding plate 4 has two gaps forming slits.
mm.
【００４０】なお、照明器ａ６に用いたハロゲンライト
は、支持具１３を用いて支持し、支持具１３により、照
明範囲５を得るとともに、照明器ａ６による迷光を少な
くなるようにした。また照明器ｂ６’にも図示しない支
持具を設け、照明器６と同様に、照明範囲５を得るとと
もに、迷光を減少させた。The halogen light used for the illuminator a6 was supported by using the support 13 so that the illumination range 5 was obtained by the support 13 and the stray light by the illuminator a6 was reduced. The illuminator b6 'was also provided with a support (not shown) to obtain the illumination range 5 and reduce the stray light similarly to the illuminator 6.
【００４１】ＣＣＤカメラ１には、ライン２状に走査す
るラインカメラを用い、ＣＣＤカメラ１による撮影を透
明板状体３を移動させながら行った。ＣＣＤカメラ１の
視野には、図３に示すように、欠点７、汚れ７’、透明
板状体３のエッジ９および遮光板４の陰影８が観察され
た。As the CCD camera 1, a line camera that scans in the form of a line 2 was used, and photographing was performed by the CCD camera 1 while moving the transparent plate 3. In the field of view of the CCD camera 1, as shown in FIG. 3, a defect 7, a stain 7 ', an edge 9 of the transparent plate 3 and a shadow 8 of the light shielding plate 4 were observed.
【００４２】ＣＣＤカメラ１による撮影は、絞りをＦ＝
１．２の開放に近い状態で行い、欠点の微細な散乱光を
取り込むことができた。また、ＣＣＤカメラ１による撮
影は、緑色透過フィルターを用いて緑色光のみの画像
と、赤色透過フィルタを用いて赤色光のみの画像を得
た。When shooting with the CCD camera 1, set the aperture to F =
The operation was performed in a state close to the opening of 1.2, and fine scattered light having a defect could be taken in. In the photographing by the CCD camera 1, an image of only green light was obtained using a green transmission filter, and an image of only red light was obtained using a red transmission filter.
【００４３】ＣＣＤカメラ１で撮影した画像は、図４の
画像処理装置で画像処理した。画像処理機１０により、
照度調整処理および２値化処理を行った。画像処理機１
０で画像処理されたライン状の画像をパーソナルコンピ
ュータ１１に取り込み、透明板状体全体につなぎ合わ
せ、緑色透過フィルターを用いた画像から、図５に示す
合成画像１２を作成し、赤色透過フィルターを用いた画
像から、図６に示すような合成画像１２’を作成した。The image photographed by the CCD camera 1 was processed by the image processing apparatus shown in FIG. By the image processing machine 10,
Illuminance adjustment processing and binarization processing were performed. Image processing machine 1
The linear image processed in step 0 is taken into the personal computer 11, connected to the entire transparent plate, and a composite image 12 shown in FIG. 5 is created from the image using the green transmission filter. A composite image 12 ′ as shown in FIG. 6 was created from the used images.
【００４４】図５に示す合成画像１２には、透明板状体
の、欠点の像１４と汚れの像１５とがともに存在した。In the composite image 12 shown in FIG. 5, both the defect image 14 and the stain image 15 of the transparent plate were present.
【００４５】図６に示す合成画像１２’には、透明板状
体の表面の汚れの像１５のみが存在し、図６から得られ
た汚れ像または汚れのデータを、図５から得られる欠点
と汚れの像またはデータから除外して、欠点のみの画像
またはデータにした。In the composite image 12 'shown in FIG. 6, only the image 15 of the dirt on the surface of the transparent plate is present, and the dirt image or the dirt data obtained from FIG. And the image or data of only the defect was excluded from the image or data of the stain.
【００４６】さらにパーソナルコンピュータ１１を用い
て、欠点の像１４の幅と長さについて形状解析を行い、
欠点としての確認を行った。Further, using the personal computer 11, shape analysis is performed on the width and length of the defect image 14, and
Confirmed as a disadvantage.
【００４７】本実施例により、幅が５０μｍ程度のキズ
が検出されるとともに、汚れを欠点として認識すること
がなくなり、生産歩留まりを向上させた。According to the present embodiment, a flaw having a width of about 50 μm is detected, and dirt is not recognized as a defect, thereby improving the production yield.
【００４８】実施例２ 本実施例の側面図を図７に、平面図を図８に示す。本実
施例では、照明器ａ６の照明箇所と、照明器ｂ６’の照
明箇所を別にし、それぞれの照明場所に対して遮光板４
を設けた。照明器ａ６と照明器ｂ６’には、同じハロゲ
ンライトを用いた。Embodiment 2 FIG. 7 shows a side view and FIG. 8 shows a plan view of this embodiment. In the present embodiment, the illumination location of the illuminator a6 and the illumination location of the illuminator b6 'are separated, and the light shielding plate 4 is provided for each illumination location.
Was provided. The same halogen light was used for the illuminator a6 and the illuminator b6 '.
【００４９】ＣＣＤカメラ１には、実施例１と同様のも
のを２台用いて、照明器ａ６の照明に対して得られる像
と、照明器ｂ６’の照明に対して得られる像を、実施例
１と同様に、図４の画像処理装置により画像処理を行
い、照明器ａ６の照明に対しては、図５に示す合成像１
２を、照明器ｂ６’の照明に対しては、図６に示す合成
像１２’を得た。Using two CCD cameras 1 similar to those in the first embodiment, an image obtained by illumination of the illuminator a6 and an image obtained by illumination of the illuminator b6 'are used. Image processing is performed by the image processing apparatus of FIG. 4 in the same manner as in Example 1, and the combined image 1 shown in FIG.
2 for the illumination of the illuminator b6 ', a composite image 12' shown in FIG. 6 was obtained.
【００５０】図５および図６に示す合成像を得た後は、
実施例１と同様にし、欠点の検出を行った。After obtaining the composite images shown in FIGS. 5 and 6,
A defect was detected in the same manner as in Example 1.
【００５１】[0051]
【発明の効果】本発明の欠点検出方法および検出装置
は、従来困難とされてきた透明板状体のヘアラインのよ
うな微細な欠点の検出と汚れの検出を可能にするもので
ある。The method and apparatus for detecting a defect according to the present invention make it possible to detect a minute defect such as a hairline of a transparent plate-like body, which has been conventionally difficult, and to detect a stain.
【図１】実施例１の光学系の概略側面図。FIG. 1 is a schematic side view of an optical system according to a first embodiment.
【図２】実施例１の光学系の概略平面図。FIG. 2 is a schematic plan view of the optical system according to the first embodiment.
【図３】ＣＣＤカメラの視野を概念的に示した図FIG. 3 is a diagram conceptually showing a field of view of a CCD camera.
【図４】ＣＣＤカメラで撮影した画像を解析する装置の
構成図。FIG. 4 is a configuration diagram of an apparatus that analyzes an image captured by a CCD camera.
【図５】実施例１の照明器ａと照明器ｂによる合成画
像。FIG. 5 is a composite image of the illuminator a and the illuminator b according to the first embodiment.
【図６】照明器ｂの照明光のみによる合成画像。FIG. 6 is a composite image using only illumination light from an illuminator b.
【図７】実施例２の光学系の概略側面図。FIG. 7 is a schematic side view of an optical system according to a second embodiment.
【図８】実施例２の光学系の概略平面図。FIG. 8 is a schematic plan view of an optical system according to a second embodiment.
【図９】従来技術の光学系の概略側面図。FIG. 9 is a schematic side view of a conventional optical system.
１ ＣＣＤカメラ ２ 撮影範囲 ２’ 撮影方向 ３ 透明板状体 ４ 遮光板 ５ 照明範囲 ５’ 照明光 ６ 照明器ａ ６’ 照明器ｂ ７ 欠点 ７’ 汚れ ８ 遮光板の陰影 ９ 透明板状体のエッジ １０ 画像処理装置 １１ パーソナルコンピュータ １２ 合成画像 １３ 支持具 １４ 欠点の像 １５ 汚れの像 １６ 透明板状体のエッジ像 DESCRIPTION OF SYMBOLS 1 CCD camera 2 Imaging range 2 'Imaging direction 3 Transparent plate 4 Light shield 5 Illumination range 5' Illumination light 6 Illuminator a 6 'Illuminator b 7 Defect 7' Dirt 8 Shading of light shield 9 Transparent plate Edge 10 Image processing device 11 Personal computer 12 Synthetic image 13 Support 14 Image of defect 15 Image of dirt 16 Edge image of transparent plate
Claims (7)
検知して、透明板状体の欠点を検出する方法において、
透明板状体の面に対し、垂直に近い角度で照明する照明
器ａと平行に近い角度で照明する照明器ｂとで、透明板
状体に散乱光を帯状に当て、照明器ｂによる照明は、透
明板状体の表裏両側あるいは片側のみで行い、透明板状
体に対して照明器ａとは反対側にＣＣＤカメラが配置さ
れ、該ＣＣＤカメラで散乱光を帯状に当てられた透明板
状体を撮影し、照明器ａで得られた画像から照明器ｂで
得られた画像を画像処理技術によって削除することを特
徴とする欠点検出方法。A method for detecting a defect in a transparent plate by irradiating light on the transparent plate and detecting scattered light at the defect.
An illuminator a that illuminates the surface of the transparent plate at an angle close to vertical and an illuminator b that illuminates at an angle close to parallel apply scattered light to the transparent plate in a strip shape, and illumination by the illuminator b Is performed on both sides or only one side of the transparent plate, a CCD camera is arranged on the opposite side of the transparent plate from the illuminator a, and the scattered light is applied in a strip shape by the CCD camera. A defect detection method characterized by taking an image of a body and deleting an image obtained by an illuminator b from an image obtained by an illuminator a by an image processing technique.
入射角度を３０度以下にし、照明器ｂの照明光の入射角
度を４０度から８５度とすることを特徴とする請求項１
に記載の欠点検出方法。2. The method according to claim 1, wherein the angle of incidence of the illumination light of the illuminator a on the transparent plate is 30 degrees or less, and the angle of incidence of the illumination light of the illuminator b is 40 to 85 degrees. 1
4. The defect detection method according to 1.
を設けて、照明器ａの照明光が、直接ＣＣＤカメラに入
射しないようにすることを特徴とする請求項１または請
求項２に記載の欠点検出方法。3. A light shielding plate is provided between the transparent plate and the CCD camera so that illumination light from the illuminator a does not directly enter the CCD camera. 3. The defect detection method according to item 2.
とが異なることを特徴とする請求項１乃至請求項３に記
載の欠点検出方法。4. The defect detecting method according to claim 1, wherein the center wavelength of the illuminator a and the center wavelength of the illuminator b are different.
度分布補正処理、２値化処理、形状処理を行って、透明
板状体の欠点を検知することを特徴とする請求項１乃至
請求項４に記載の欠点検出方法。5. An image captured by a CCD camera, wherein illuminance distribution correction processing, binarization processing, and shape processing are performed to detect a defect of the transparent plate-shaped body. 4. The defect detection method according to 1.
場所を照明し、照明器ａと照明器ｂとは、中心波長が異
なっていることを特徴とする請求項１乃至請求項５に記
載の欠点検出方法に用いる検出装置。6. The illuminator a and the illuminator b illuminate the same place on the transparent plate, and the illuminators a and b have different center wavelengths. A detection device used in the defect detection method according to claim 5.
る場所を照明し、照明器ａで得られる画像と、照明器ｂ
で得られる画像とを用いることを特徴とする請求項１乃
至請求項５に記載の欠点検出方法に用いる検出装置。7. An illuminator a and an illuminator b illuminate different places of the transparent plate-like body, and an image obtained by the illuminator a and an illuminator b
6. A detection apparatus used in the defect detection method according to claim 1, wherein an image obtained by the method is used.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001011724A JP2002214158A (en) | 2001-01-19 | 2001-01-19 | Defect detecting method and detecting device for transparent plate-like body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001011724A JP2002214158A (en) | 2001-01-19 | 2001-01-19 | Defect detecting method and detecting device for transparent plate-like body |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2002214158A true JP2002214158A (en) | 2002-07-31 |
Family
ID=18878827
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001011724A Pending JP2002214158A (en) | 2001-01-19 | 2001-01-19 | Defect detecting method and detecting device for transparent plate-like body |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002214158A (en) |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006047078A (en) * | 2004-08-04 | 2006-02-16 | Central Glass Co Ltd | Method for inspecting printing defect and/or printing contamination of transparent plate body |
| JP2007303829A (en) * | 2006-05-08 | 2007-11-22 | Mitsubishi Electric Corp | Image inspection device, and image inspection method using the image inspection device |
| JP2008051764A (en) * | 2006-08-28 | 2008-03-06 | Sharp Corp | Range finding sensor, and electronic device having sensor mounted |
| JP2009276165A (en) * | 2008-05-14 | 2009-11-26 | Panasonic Corp | Substrate inspection device |
| JP2010519515A (en) * | 2007-02-16 | 2010-06-03 | スリーエム イノベイティブ プロパティズ カンパニー | Method and apparatus for illuminating materials for automatic inspection |
| JP2010520845A (en) * | 2007-02-15 | 2010-06-17 | ピルキントン グループ リミテッド | Sheet glass inspection |
| JP2010175281A (en) * | 2009-01-27 | 2010-08-12 | Kokusai Gijutsu Kaihatsu Co Ltd | Apparatus for forming image of appearance surface |
| US7894053B2 (en) | 2007-09-28 | 2011-02-22 | Panasonic Corporation | Inspection apparatus |
| JP2014178134A (en) * | 2013-03-13 | 2014-09-25 | Kurabo Ind Ltd | Device for crack inspection and visual inspection and method for crack inspection and visual inspection |
| EP2798337A4 (en) * | 2011-12-31 | 2015-11-04 | Saint Gobain | An illumination system for detecting the defect in a transparent substrate and a detection system including the same |
| JP2016038362A (en) * | 2014-08-11 | 2016-03-22 | 株式会社 東京ウエルズ | Visual inspection device and visual inspection method for transparent substrate |
| JP2016125968A (en) * | 2015-01-07 | 2016-07-11 | 旭硝子株式会社 | Check device and method for checking |
| JP2017125805A (en) * | 2016-01-15 | 2017-07-20 | 東レ株式会社 | Flaw defect checking device for sheet |
-
2001
- 2001-01-19 JP JP2001011724A patent/JP2002214158A/en active Pending
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006047078A (en) * | 2004-08-04 | 2006-02-16 | Central Glass Co Ltd | Method for inspecting printing defect and/or printing contamination of transparent plate body |
| JP2007303829A (en) * | 2006-05-08 | 2007-11-22 | Mitsubishi Electric Corp | Image inspection device, and image inspection method using the image inspection device |
| JP2008051764A (en) * | 2006-08-28 | 2008-03-06 | Sharp Corp | Range finding sensor, and electronic device having sensor mounted |
| JP2010520845A (en) * | 2007-02-15 | 2010-06-17 | ピルキントン グループ リミテッド | Sheet glass inspection |
| JP2010519515A (en) * | 2007-02-16 | 2010-06-03 | スリーエム イノベイティブ プロパティズ カンパニー | Method and apparatus for illuminating materials for automatic inspection |
| US7894053B2 (en) | 2007-09-28 | 2011-02-22 | Panasonic Corporation | Inspection apparatus |
| JP2009276165A (en) * | 2008-05-14 | 2009-11-26 | Panasonic Corp | Substrate inspection device |
| JP2010175281A (en) * | 2009-01-27 | 2010-08-12 | Kokusai Gijutsu Kaihatsu Co Ltd | Apparatus for forming image of appearance surface |
| EP2798337A4 (en) * | 2011-12-31 | 2015-11-04 | Saint Gobain | An illumination system for detecting the defect in a transparent substrate and a detection system including the same |
| JP2014178134A (en) * | 2013-03-13 | 2014-09-25 | Kurabo Ind Ltd | Device for crack inspection and visual inspection and method for crack inspection and visual inspection |
| JP2016038362A (en) * | 2014-08-11 | 2016-03-22 | 株式会社 東京ウエルズ | Visual inspection device and visual inspection method for transparent substrate |
| TWI553307B (en) * | 2014-08-11 | 2016-10-11 | Tokyo Weld Co Ltd | Transparent substrate for visual inspection device and appearance inspection method |
| JP2016125968A (en) * | 2015-01-07 | 2016-07-11 | 旭硝子株式会社 | Check device and method for checking |
| JP2017125805A (en) * | 2016-01-15 | 2017-07-20 | 東レ株式会社 | Flaw defect checking device for sheet |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US10184858B2 (en) | Visually inspecting optical fibers | |
| JP5410092B2 (en) | Apparatus and method for inspecting composite structures for inconsistencies | |
| JP4511978B2 (en) | Surface flaw inspection device | |
| JP4847128B2 (en) | Surface defect inspection equipment | |
| TW201616123A (en) | System and method for defect detection | |
| JP2002214158A (en) | Defect detecting method and detecting device for transparent plate-like body | |
| KR20060053847A (en) | Method for inspecting defects of glass plate and apparatus thereof | |
| JP2004037248A (en) | Inspection device and inspection method for through hole | |
| JP2001141662A (en) | Method and apparatus for detecting flaw of transparent plate-shaped object | |
| JPS63165738A (en) | Flaw inspection apparatus for transparent substrate | |
| KR20110125906A (en) | Reticle inspection method and the apparatus | |
| JP2003075367A (en) | Defect detector for transparent sheet-like member | |
| JPH07104290B2 (en) | Bottle inspection equipment | |
| KR101745764B1 (en) | Apparatus and Method for Optically Inspecting Surface of Plate Member | |
| KR20190001789A (en) | Multi optic display inspecting device | |
| JP7011348B2 (en) | Foreign matter inspection device and foreign matter inspection method | |
| KR20160032576A (en) | System and Method for Analyzing Image Using High-Speed Camera and Infrared Optical System | |
| JP2002014058A (en) | Method and apparatus for checking | |
| JPH1164240A (en) | Bubble detecting device for transparent plate | |
| JP2002131242A (en) | Image for surface inspection | |
| JP2003083904A (en) | Method and device for detecting defect of transparent plate-shaped body | |
| JP2002148206A (en) | Method and apparatus for detecting defect of transparent sheet-shaped body | |
| JPH05322780A (en) | Inspecting method for light transmitting molding | |
| JP7126011B2 (en) | Transmission optical system inspection device | |
| JP6980241B2 (en) | Foreign matter inspection device and foreign matter inspection method |