JP2007111845A - シート切断用テーブル - Google Patents
シート切断用テーブル Download PDFInfo
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- JP2007111845A JP2007111845A JP2005308272A JP2005308272A JP2007111845A JP 2007111845 A JP2007111845 A JP 2007111845A JP 2005308272 A JP2005308272 A JP 2005308272A JP 2005308272 A JP2005308272 A JP 2005308272A JP 2007111845 A JP2007111845 A JP 2007111845A
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- adhesive sheet
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B26—HAND CUTTING TOOLS; CUTTING; SEVERING
- B26D—CUTTING; DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING, CUTTING-OUT, STAMPING-OUT OR SEVERING
- B26D3/00—Cutting work characterised by the nature of the cut made; Apparatus therefor
- B26D3/10—Making cuts of other than simple rectilinear form
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B26—HAND CUTTING TOOLS; CUTTING; SEVERING
- B26D—CUTTING; DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING, CUTTING-OUT, STAMPING-OUT OR SEVERING
- B26D3/00—Cutting work characterised by the nature of the cut made; Apparatus therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B26—HAND CUTTING TOOLS; CUTTING; SEVERING
- B26F—PERFORATING; PUNCHING; CUTTING-OUT; STAMPING-OUT; SEVERING BY MEANS OTHER THAN CUTTING
- B26F1/00—Perforating; Punching; Cutting-out; Stamping-out; Apparatus therefor
- B26F1/38—Cutting-out; Stamping-out
- B26F1/3846—Cutting-out; Stamping-out cutting out discs or the like
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67132—Apparatus for placing on an insulating substrate, e.g. tape
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
- Y10T156/10—Methods of surface bonding and/or assembly therefor
- Y10T156/1052—Methods of surface bonding and/or assembly therefor with cutting, punching, tearing or severing
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
- Y10T156/12—Surface bonding means and/or assembly means with cutting, punching, piercing, severing or tearing
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T83/00—Cutting
- Y10T83/768—Rotatable disc tool pair or tool and carrier
- Y10T83/7684—With means to support work relative to tool[s]
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T83/00—Cutting
- Y10T83/768—Rotatable disc tool pair or tool and carrier
- Y10T83/7684—With means to support work relative to tool[s]
- Y10T83/7688—Plural tool elements successively actuated at same station
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T83/00—Cutting
- Y10T83/768—Rotatable disc tool pair or tool and carrier
- Y10T83/7684—With means to support work relative to tool[s]
- Y10T83/7693—Tool moved relative to work-support during cutting
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T83/00—Cutting
- Y10T83/768—Rotatable disc tool pair or tool and carrier
- Y10T83/7684—With means to support work relative to tool[s]
- Y10T83/7693—Tool moved relative to work-support during cutting
- Y10T83/7697—Tool angularly adjustable relative to work-support
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T83/00—Cutting
- Y10T83/768—Rotatable disc tool pair or tool and carrier
- Y10T83/7684—With means to support work relative to tool[s]
- Y10T83/7701—Supporting surface and tool axis angularly related
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T83/00—Cutting
- Y10T83/768—Rotatable disc tool pair or tool and carrier
- Y10T83/7684—With means to support work relative to tool[s]
- Y10T83/7701—Supporting surface and tool axis angularly related
- Y10T83/7705—Adjustable angular relationship
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T83/00—Cutting
- Y10T83/768—Rotatable disc tool pair or tool and carrier
- Y10T83/7684—With means to support work relative to tool[s]
- Y10T83/7709—Unidirectionally movable work support
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T83/00—Cutting
- Y10T83/768—Rotatable disc tool pair or tool and carrier
- Y10T83/7684—With means to support work relative to tool[s]
- Y10T83/7709—Unidirectionally movable work support
- Y10T83/7713—With opposed work-presser
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T83/00—Cutting
- Y10T83/768—Rotatable disc tool pair or tool and carrier
- Y10T83/7684—With means to support work relative to tool[s]
- Y10T83/7709—Unidirectionally movable work support
- Y10T83/7713—With opposed work-presser
- Y10T83/7718—Presser co-axial with tool
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T83/00—Cutting
- Y10T83/768—Rotatable disc tool pair or tool and carrier
- Y10T83/7684—With means to support work relative to tool[s]
- Y10T83/7722—Support and tool relatively adjustable
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T83/00—Cutting
- Y10T83/768—Rotatable disc tool pair or tool and carrier
- Y10T83/7684—With means to support work relative to tool[s]
- Y10T83/7722—Support and tool relatively adjustable
- Y10T83/7726—By movement of the tool
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T83/00—Cutting
- Y10T83/768—Rotatable disc tool pair or tool and carrier
- Y10T83/7684—With means to support work relative to tool[s]
- Y10T83/773—Work-support includes passageway for tool [e.g., slotted table]
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- Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Forests & Forestry (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
【解決手段】半導体ウエハWに接着シートSを貼付した後、半導体ウエハWの外周からはみ出した不要接着シート領域を不要接着シートS1として切断装置15で切断するためのシート切断用のテーブル13であり、当該テーブル13は、半導体ウエハWを支持する内側テーブル52と、半導体ウエハWの外側にはみ出した不要接着シートS1に相対する外側テーブル51とを備える。この外側テーブル51の上面は非接着処理面51Aと、接着シートSを接着させるリング部材53若しくは板材63からなる接着部材を備えている。
【選択図】図4
Description
しかしながら、このような非接着処理面がウエハ回りのテーブルの上面全域に施されていると、カッター刃での切断の際に、接着シートが引っ張られ移動してしまうことによって皺が発生し、ウエハW側にまで皺が混入してしまい、ウエハ外周に沿って接着シートが綺麗に切断できなくなる、という不都合を招来する。このような不具合はカッター刃の磨耗が進むにつれより顕著に現れる。
本発明は、このような不都合に着目して案出されたものであり、その目的は、切断を行う際に、接着シートに皺が発生することを防止して当該接着シートを精度よく切断することのできるシート切断用テーブルを提供することにある。
前記板状部材の載置面となる内側テーブルと、この内側テーブルの外側に位置して前記不要接着シート領域に相対する外側テーブルとを含み、
前記外側テーブルの上面は非接着処理面として構成されているとともに、その一部領域に前記不要接着シート領域が接着可能な接着部材が設けられる、という構成を採っている。
すなわち、本発明は、主に特定の実施形態に関して特に図示、説明されているが、本発明の技術的思想及び目的の範囲から逸脱することなく、以上説明した実施形態に対し、形状、位置若しくは配置等に関し、必要に応じて当業者が様々な変更を加えることができるものである。
51 外側テーブル
51A 非接着処理面
53 リング部材(接着部材)
63 板材(接着部材)
52 内側テーブル
W ウエハ(板状部材)
S 接着シート
S1 不要接着シート
Claims (6)
- 板状部材の平面積よりも大きい平面積を備えた接着シートを前記板状部材に貼付した後、当該板状部材の外周からはみ出した領域を不要接着シートとして切断装置によって切断するためのシート切断用テーブルにおいて、
前記板状部材の載置面となる内側テーブルと、この内側テーブルの外側に位置して前記不要接着シート領域に相対する外側テーブルとを含み、
前記外側テーブルの上面は非接着処理面として構成されているとともに、その一部領域に前記不要接着シート領域が接着可能な接着部材が設けられていることを特徴とするシート切断用テーブル。 - 前記接着部材は前記シート切断用テーブルに着脱可能であって、前記接着シートの接着力に応じてその接着面積を増減可能に設けられていることを特徴とする請求項1記載のシート切断用テーブル。
- 前記接着部材は1または複数によって構成され、前記シート切断用テーブルに着脱可能であって、前記接着シートの接着力に応じてその数量を増減可能に設けられていることを特徴とする請求項1記載のシート切断用テーブル。
- 前記接着部材は前記板状部材の外周を囲む閉ループ状に設けられていることを特徴とする請求項1ないし3の何れかに記載のシート切断用テーブル。
- 前記接着部材は前記板状部材の外周側で断続的に設けられていることを特徴とする請求項1ないし3の何れかに記載のシート切断用テーブル。
- 前記接着部材は熱伝導または、ヒータによって加温可能であることを特徴とする請求項1ないし5の何れかに記載のシート切断用テーブル。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005308272A JP4795772B2 (ja) | 2005-10-24 | 2005-10-24 | シート切断用テーブル及びシート貼付装置 |
US12/067,280 US7954533B2 (en) | 2005-10-24 | 2006-10-05 | Sheet cutting table |
PCT/JP2006/319931 WO2007049441A1 (ja) | 2005-10-24 | 2006-10-05 | シート切断用テーブル |
KR1020087007199A KR101278463B1 (ko) | 2005-10-24 | 2006-10-05 | 시트 절단용 테이블 |
CN2006800384490A CN101291785B (zh) | 2005-10-24 | 2006-10-05 | 薄片切断用工作台 |
DE200611002689 DE112006002689T5 (de) | 2005-10-24 | 2006-10-05 | Folienschneidetisch |
TW95138239A TWI391982B (zh) | 2005-10-24 | 2006-10-17 | Sheet cutting table and sheet attachment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005308272A JP4795772B2 (ja) | 2005-10-24 | 2005-10-24 | シート切断用テーブル及びシート貼付装置 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010177001A Division JP5054169B2 (ja) | 2010-08-06 | 2010-08-06 | シート切断用テーブル |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2007111845A true JP2007111845A (ja) | 2007-05-10 |
JP2007111845A5 JP2007111845A5 (ja) | 2008-08-28 |
JP4795772B2 JP4795772B2 (ja) | 2011-10-19 |
Family
ID=37967559
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005308272A Active JP4795772B2 (ja) | 2005-10-24 | 2005-10-24 | シート切断用テーブル及びシート貼付装置 |
Country Status (7)
Country | Link |
---|---|
US (1) | US7954533B2 (ja) |
JP (1) | JP4795772B2 (ja) |
KR (1) | KR101278463B1 (ja) |
CN (1) | CN101291785B (ja) |
DE (1) | DE112006002689T5 (ja) |
TW (1) | TWI391982B (ja) |
WO (1) | WO2007049441A1 (ja) |
Cited By (1)
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TWI423311B (zh) * | 2007-11-27 | 2014-01-11 | Nitto Denko Corp | 半導體晶圓之保護帶切斷方法及其裝置 |
Families Citing this family (9)
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JP5015857B2 (ja) * | 2008-05-02 | 2012-08-29 | 日東電工株式会社 | 保護テープ貼付け装置 |
JP5327261B2 (ja) * | 2011-03-30 | 2013-10-30 | ブラザー工業株式会社 | 切断装置 |
JP5112534B2 (ja) | 2011-04-26 | 2013-01-09 | 株式会社東芝 | 磁気記録媒体、その製造方法、及び磁気記録再生装置 |
US8261804B1 (en) * | 2011-10-28 | 2012-09-11 | Meicer Semiconductor Inc. | IC layers separator |
CN103302697B (zh) * | 2013-05-23 | 2015-07-29 | 亚洲新能源(中国)有限公司 | 黏贴橡胶胎架 |
CN103521542B (zh) * | 2013-09-26 | 2016-03-30 | 芜湖环球汽车配件有限公司 | 一种钣金件挤压成型机的自动升降机构 |
US10674928B2 (en) | 2014-07-17 | 2020-06-09 | Medtronic, Inc. | Leadless pacing system including sensing extension |
CN104191044B (zh) * | 2014-08-14 | 2016-08-31 | 浙江德清森朗装饰材料有限公司 | 一种铝板开槽切割机 |
CN105437280B (zh) * | 2015-12-16 | 2017-09-15 | 重庆嘉威特节能玻璃有限公司 | 一种切割效果好的可移动玻璃制造拉伸成型设备 |
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- 2006-10-05 WO PCT/JP2006/319931 patent/WO2007049441A1/ja active Application Filing
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Publication number | Publication date |
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TWI391982B (zh) | 2013-04-01 |
CN101291785A (zh) | 2008-10-22 |
DE112006002689T5 (de) | 2008-10-23 |
TW200746235A (en) | 2007-12-16 |
KR20080049065A (ko) | 2008-06-03 |
CN101291785B (zh) | 2012-04-25 |
WO2007049441A1 (ja) | 2007-05-03 |
JP4795772B2 (ja) | 2011-10-19 |
US7954533B2 (en) | 2011-06-07 |
KR101278463B1 (ko) | 2013-07-02 |
US20090151875A1 (en) | 2009-06-18 |
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