JP2007074889A - 駆動装置 - Google Patents
駆動装置 Download PDFInfo
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- JP2007074889A JP2007074889A JP2006026247A JP2006026247A JP2007074889A JP 2007074889 A JP2007074889 A JP 2007074889A JP 2006026247 A JP2006026247 A JP 2006026247A JP 2006026247 A JP2006026247 A JP 2006026247A JP 2007074889 A JP2007074889 A JP 2007074889A
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
- H02N2/025—Inertial sliding motors
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
- G02B7/023—Mountings, adjusting means, or light-tight connections, for optical elements for lenses permitting adjustment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67766—Mechanical parts of transfer devices
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Robotics (AREA)
- Optics & Photonics (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Vehicle Body Suspensions (AREA)
- Vending Machines For Individual Products (AREA)
- Steering Control In Accordance With Driving Conditions (AREA)
- Control Of Position Or Direction (AREA)
- Automatic Disk Changers (AREA)
Abstract
【解決手段】駆動装置100は、電気信号の入力により伸縮可能な電気機械変換素子12と、この電気機械変換素子12の伸縮方向の一方側の端部に取り付けられた駆動部材14と、この駆動部材14に摩擦係合される被駆動部材16と、を備え、駆動部材14を、例えばカーボングラファイト等の黒鉛複合体によって形成する。
【選択図】図1
Description
この式から明らかなように、錘部材18のヤング率Eを小さくすると、等価1自由系の共振周波数f0は小さくなる。本実施の形態では、錘部材18のヤング率を1GPa以下としたことによって、共振周波数f0を約70kHz以下にすることができる。また、本実施の形態において、錘部材18のヤング率を300MPa以下とすれば、共振周波数f0を35kHz以下にすることができる。さらに、本実施の形態において、錘部材18をヤング率が60MPa程度のウレタンゴムにタングステン粉末を混合したものを使用した場合は、共振周波数f0は15kHz程度となる。(図16中の番号1参照。但し、E+07は×107を意味する)。
但し、
λ :等価1自由系の振動伝達率、
f :使用される駆動周波数、
f0:等価1自由系の共振周波数、
ζ :等価1自由系の減衰比
Claims (13)
- 電気機械変換素子と、この電気機械変換素子の伸縮に応じて動く駆動部材とから成り、前記駆動部材に摩擦係合された被駆動部材を前記駆動部材に沿って移動させるアクチュエータを備え、
前記駆動部材は黒鉛複合体であることを特徴とする駆動装置。 - 前記黒鉛複合体は、カーボングラファイトであることを特徴とする請求項1に記載の駆動装置。
- 前記電気機械変換素子に対して前記駆動部材と反対側に前記駆動部材よりも質量の大ききい錘部材を設けたことを特徴とする請求項1又は2に記載の駆動装置。
- 前記錘部材は共振周波数低減部材であることを特徴とする請求項1〜3の何れか一項に記載の駆動装置。
- 前記アクチュエータを駆動するための駆動回路を有し、この前記駆動回路は、前記電気機械変換素子と前記駆動部材とを質量として、前記錘部材をばねとした1自由系の共振周波数をf0、前記電気機械変換素子の駆動周波数をfとした際、
f≧21/2・f0、
となる駆動周波数fで前記電気機械変換素子を駆動することを特徴とする請求項3又は4に記載の駆動装置。 - 前記駆動部材は、先端側及び/又は基端側で前記電気機械変換素子の伸縮方向に移動可能に支持されていることを特徴とする請求項1〜5の何れか一項に記載の駆動装置。
- 前記アクチュエータは、前記電気機械変換素子の伸縮方向に対して側方から筐体に支持されていることを特徴とする請求項1〜6の何れか一項に記載の駆動装置。
- 前記電気機械変換素子を駆動するために伸びと縮み方向において非対称の信号を発生させる駆動手段を有していることを特徴とする請求項1〜7の何れか一項に記載の駆動装置。
- 前記被駆動部材は、前記駆動部材に対し面接触していることを特徴とする請求項1〜8の何れか一項に記載の駆動装置。
- 前記被駆動部材の移動位置を検出する検出手段を備えたことを特徴とする請求項1〜9の何れか一項に記載の駆動装置。
- 前記電気機械変換素子は可聴周波数を超える駆動周波数で駆動されることを特徴とする請求項1〜10の何れか一項に記載の駆動装置。
- 前記被駆動部材は光学部材に連結されており、撮影光学系に用いられることを特徴とする請求項1〜11の何れか一項に記載の駆動装置。
- 前記アクチュエータは携帯電話に搭載される撮影光学系に用いられることを特徴とする請求項1〜12の何れか一項に記載の駆動装置。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006026247A JP4931425B2 (ja) | 2005-03-31 | 2006-02-02 | 駆動装置 |
TW95109986A TWI315932B (en) | 2005-03-31 | 2006-03-23 | Driving mechanism |
KR20060026870A KR100777634B1 (ko) | 2005-03-31 | 2006-03-24 | 구동장치 |
US11/387,702 US20060238074A1 (en) | 2005-03-31 | 2006-03-24 | Driving mechanism |
EP20060006174 EP1708287B1 (en) | 2005-03-31 | 2006-03-24 | Driving mechanism |
DE200660014317 DE602006014317D1 (de) | 2005-03-31 | 2006-03-24 | Antriebsmechanismus |
AT06006174T ATE468547T1 (de) | 2005-03-31 | 2006-03-24 | Antriebsmechanismus |
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005103065 | 2005-03-31 | ||
JP2005103065 | 2005-03-31 | ||
JP2005234518 | 2005-08-12 | ||
JP2005234518 | 2005-08-12 | ||
JP2006026247A JP4931425B2 (ja) | 2005-03-31 | 2006-02-02 | 駆動装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007074889A true JP2007074889A (ja) | 2007-03-22 |
JP4931425B2 JP4931425B2 (ja) | 2012-05-16 |
Family
ID=36603684
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006026247A Expired - Fee Related JP4931425B2 (ja) | 2005-03-31 | 2006-02-02 | 駆動装置 |
Country Status (7)
Country | Link |
---|---|
US (1) | US20060238074A1 (ja) |
EP (1) | EP1708287B1 (ja) |
JP (1) | JP4931425B2 (ja) |
KR (1) | KR100777634B1 (ja) |
AT (1) | ATE468547T1 (ja) |
DE (1) | DE602006014317D1 (ja) |
TW (1) | TWI315932B (ja) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008245467A (ja) * | 2007-03-28 | 2008-10-09 | Fujinon Corp | 駆動装置 |
JP2008253021A (ja) * | 2007-03-29 | 2008-10-16 | Fujinon Corp | 駆動装置 |
US7692359B2 (en) | 2007-07-17 | 2010-04-06 | Fujinon Corporation | Driving apparatus |
US7944120B2 (en) | 2007-07-17 | 2011-05-17 | Fujifilm Corporation | Driving apparatus, and manufacturing method of the same |
US8044555B2 (en) | 2007-07-17 | 2011-10-25 | Fujinon Corporation | Driving apparatus |
US9083870B2 (en) | 2008-07-25 | 2015-07-14 | Hitachi Maxell, Ltd. | Drive device, image acquisition device, and electronic apparatus |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4931425B2 (ja) * | 2005-03-31 | 2012-05-16 | 富士フイルム株式会社 | 駆動装置 |
JP2007049874A (ja) * | 2005-08-12 | 2007-02-22 | Fujinon Corp | アクチュエータ |
JP2007049878A (ja) * | 2005-08-12 | 2007-02-22 | Fujinon Corp | アクチュエータ |
JP2007104761A (ja) * | 2005-09-30 | 2007-04-19 | Fujinon Corp | アクチュエータ |
JP2007267488A (ja) * | 2006-03-28 | 2007-10-11 | Fujinon Corp | 駆動装置、それに用いられる電気機械変換素子、撮像装置、及び携帯電話 |
KR20080093882A (ko) * | 2007-04-17 | 2008-10-22 | 미쓰미덴기가부시기가이샤 | 구동 장치 |
US20090072664A1 (en) * | 2007-09-14 | 2009-03-19 | Kazuaki Nagata | Driving apparatus |
EP2233740A4 (en) * | 2008-01-23 | 2013-05-22 | Konica Minolta Opto Inc | DRIVE MECHANISM AND DRIVE DEVICE |
KR102481180B1 (ko) * | 2020-09-21 | 2022-12-23 | 포항공과대학교 산학협력단 | 나노미터 수준의 분해능을 가지는 압전모터 |
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JP4931425B2 (ja) * | 2005-03-31 | 2012-05-16 | 富士フイルム株式会社 | 駆動装置 |
-
2006
- 2006-02-02 JP JP2006026247A patent/JP4931425B2/ja not_active Expired - Fee Related
- 2006-03-23 TW TW95109986A patent/TWI315932B/zh not_active IP Right Cessation
- 2006-03-24 KR KR20060026870A patent/KR100777634B1/ko not_active IP Right Cessation
- 2006-03-24 DE DE200660014317 patent/DE602006014317D1/de active Active
- 2006-03-24 EP EP20060006174 patent/EP1708287B1/en not_active Not-in-force
- 2006-03-24 US US11/387,702 patent/US20060238074A1/en not_active Abandoned
- 2006-03-24 AT AT06006174T patent/ATE468547T1/de not_active IP Right Cessation
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Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008245467A (ja) * | 2007-03-28 | 2008-10-09 | Fujinon Corp | 駆動装置 |
JP2008253021A (ja) * | 2007-03-29 | 2008-10-16 | Fujinon Corp | 駆動装置 |
US7692359B2 (en) | 2007-07-17 | 2010-04-06 | Fujinon Corporation | Driving apparatus |
US7944120B2 (en) | 2007-07-17 | 2011-05-17 | Fujifilm Corporation | Driving apparatus, and manufacturing method of the same |
US7990021B2 (en) | 2007-07-17 | 2011-08-02 | Fujinon Corporation | Driving apparatus, and manufacturing method of the same |
US8044555B2 (en) | 2007-07-17 | 2011-10-25 | Fujinon Corporation | Driving apparatus |
US9083870B2 (en) | 2008-07-25 | 2015-07-14 | Hitachi Maxell, Ltd. | Drive device, image acquisition device, and electronic apparatus |
Also Published As
Publication number | Publication date |
---|---|
KR100777634B1 (ko) | 2007-11-21 |
EP1708287A3 (en) | 2007-02-28 |
EP1708287B1 (en) | 2010-05-19 |
TWI315932B (en) | 2009-10-11 |
US20060238074A1 (en) | 2006-10-26 |
TW200644398A (en) | 2006-12-16 |
JP4931425B2 (ja) | 2012-05-16 |
ATE468547T1 (de) | 2010-06-15 |
EP1708287A2 (en) | 2006-10-04 |
DE602006014317D1 (de) | 2010-07-01 |
KR20060106702A (ko) | 2006-10-12 |
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