JP2006509952A - 真空ポンプ排出装置 - Google Patents
真空ポンプ排出装置 Download PDFInfo
- Publication number
- JP2006509952A JP2006509952A JP2004559873A JP2004559873A JP2006509952A JP 2006509952 A JP2006509952 A JP 2006509952A JP 2004559873 A JP2004559873 A JP 2004559873A JP 2004559873 A JP2004559873 A JP 2004559873A JP 2006509952 A JP2006509952 A JP 2006509952A
- Authority
- JP
- Japan
- Prior art keywords
- pump discharge
- discharge mechanism
- drive shaft
- lubricating oil
- bearing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
- F04D29/056—Bearings
- F04D29/058—Bearings magnetic; electromagnetic
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D23/00—Other rotary non-positive-displacement pumps
- F04D23/008—Regenerative pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Jet Pumps And Other Pumps (AREA)
- Electrophonic Musical Instruments (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB0229356.1A GB0229356D0 (en) | 2002-12-17 | 2002-12-17 | Vacuum pumping arrangement |
PCT/GB2003/005375 WO2004055376A2 (en) | 2002-12-17 | 2003-12-09 | Vacuum pumping arrangement |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2006509952A true JP2006509952A (ja) | 2006-03-23 |
Family
ID=9949817
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004559873A Pending JP2006509952A (ja) | 2002-12-17 | 2003-12-09 | 真空ポンプ排出装置 |
Country Status (9)
Country | Link |
---|---|
US (1) | US20060140794A1 (de) |
EP (1) | EP1576292B1 (de) |
JP (1) | JP2006509952A (de) |
AT (1) | ATE388328T1 (de) |
AU (1) | AU2003295101A1 (de) |
DE (1) | DE60319585T2 (de) |
GB (1) | GB0229356D0 (de) |
TW (1) | TW200417690A (de) |
WO (1) | WO2004055376A2 (de) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011112048A (ja) * | 2009-11-26 | 2011-06-09 | Oerlikon Leybold Vacuum Gmbh | 真空ポンプ |
JP2011521161A (ja) * | 2008-05-23 | 2011-07-21 | オーリコン レイボルド バキューム ゲーエムベーハー | 多段真空ポンプ |
JP2019502048A (ja) * | 2015-11-19 | 2019-01-24 | レイボルド ゲーエムベーハー | 運動エネルギーを貯蔵するための装置 |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB0409139D0 (en) * | 2003-09-30 | 2004-05-26 | Boc Group Plc | Vacuum pump |
DE102008035891A1 (de) * | 2008-07-31 | 2010-02-04 | Oerlikon Leybold Vacuum Gmbh | Vakuumpumpe |
DE102009021620B4 (de) | 2009-05-16 | 2021-07-29 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
DE102009021642B4 (de) | 2009-05-16 | 2021-07-22 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
DE102010019940B4 (de) | 2010-05-08 | 2021-09-23 | Pfeiffer Vacuum Gmbh | Vakuumpumpstufe |
US9790946B2 (en) * | 2010-09-28 | 2017-10-17 | Edwards Japan Limited | Exhaust pump |
DE102011112691A1 (de) * | 2011-09-05 | 2013-03-07 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
DE102012003680A1 (de) | 2012-02-23 | 2013-08-29 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
US11519419B2 (en) * | 2020-04-15 | 2022-12-06 | Kin-Chung Ray Chiu | Non-sealed vacuum pump with supersonically rotatable bladeless gas impingement surface |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2349033C3 (de) * | 1973-09-29 | 1984-08-30 | Leybold-Heraeus Gmbh, 5000 Koeln | Turbomolekularpumpe |
JPH0646036B2 (ja) * | 1982-11-19 | 1994-06-15 | セイコー電子工業株式会社 | 軸流分子ポンプ |
US4767265A (en) * | 1983-10-07 | 1988-08-30 | Sargent-Welch Scientific Co. | Turbomolecular pump with improved bearing assembly |
DE4427154A1 (de) * | 1994-08-01 | 1996-02-08 | Balzers Pfeiffer Gmbh | Reibungspumpe mit Magnetlagerung |
GB9609281D0 (en) * | 1996-05-03 | 1996-07-10 | Boc Group Plc | Improved vacuum pumps |
GB9810872D0 (en) * | 1998-05-20 | 1998-07-22 | Boc Group Plc | Improved vacuum pump |
FR2783883B1 (fr) * | 1998-09-10 | 2000-11-10 | Cit Alcatel | Procede et dispositif pour eviter les depots dans une pompe turbomoleculaire a palier magnetique ou gazeux |
DE19913593B4 (de) * | 1999-03-24 | 2004-09-23 | Ilmvac Gmbh | Gesteuerter Pumpstand |
DE19915983A1 (de) * | 1999-04-09 | 2000-10-12 | Pfeiffer Vacuum Gmbh | Vakuumpumpe mit Gaslagerung |
DE19929519A1 (de) * | 1999-06-28 | 2001-01-04 | Pfeiffer Vacuum Gmbh | Verfahren zum Betrieb einer Mehrkammer-Vakuumanlage |
DE10043783A1 (de) * | 2000-09-06 | 2002-03-14 | Leybold Vakuum Gmbh | Verfahren und Vorrichtung zur Regelung des Vakuums in einer Kammer |
EP1234982B1 (de) * | 2001-02-22 | 2003-12-03 | VARIAN S.p.A. | Vakuumpumpe |
GB0114417D0 (en) * | 2001-06-13 | 2001-08-08 | Boc Group Plc | Lubricating systems for regenerative vacuum pumps |
FR2859250B1 (fr) * | 2003-08-29 | 2005-11-11 | Cit Alcatel | Pompe a vide |
-
2002
- 2002-12-17 GB GBGB0229356.1A patent/GB0229356D0/en not_active Ceased
-
2003
- 2003-12-09 AT AT03786101T patent/ATE388328T1/de not_active IP Right Cessation
- 2003-12-09 WO PCT/GB2003/005375 patent/WO2004055376A2/en active IP Right Grant
- 2003-12-09 DE DE60319585T patent/DE60319585T2/de not_active Expired - Lifetime
- 2003-12-09 JP JP2004559873A patent/JP2006509952A/ja active Pending
- 2003-12-09 US US10/536,779 patent/US20060140794A1/en not_active Abandoned
- 2003-12-09 EP EP03786101A patent/EP1576292B1/de not_active Revoked
- 2003-12-09 AU AU2003295101A patent/AU2003295101A1/en not_active Abandoned
- 2003-12-17 TW TW092135769A patent/TW200417690A/zh unknown
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011521161A (ja) * | 2008-05-23 | 2011-07-21 | オーリコン レイボルド バキューム ゲーエムベーハー | 多段真空ポンプ |
JP2011112048A (ja) * | 2009-11-26 | 2011-06-09 | Oerlikon Leybold Vacuum Gmbh | 真空ポンプ |
JP2019502048A (ja) * | 2015-11-19 | 2019-01-24 | レイボルド ゲーエムベーハー | 運動エネルギーを貯蔵するための装置 |
US10944308B2 (en) | 2015-11-19 | 2021-03-09 | Leybold Gmbh | Device for storing kinetic energy |
Also Published As
Publication number | Publication date |
---|---|
US20060140794A1 (en) | 2006-06-29 |
TW200417690A (en) | 2004-09-16 |
WO2004055376A2 (en) | 2004-07-01 |
ATE388328T1 (de) | 2008-03-15 |
EP1576292A2 (de) | 2005-09-21 |
DE60319585T2 (de) | 2009-03-26 |
EP1576292B1 (de) | 2008-03-05 |
DE60319585D1 (de) | 2008-04-17 |
GB0229356D0 (en) | 2003-01-22 |
AU2003295101A1 (en) | 2004-07-09 |
WO2004055376A3 (en) | 2004-08-05 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20060928 |
|
A711 | Notification of change in applicant |
Free format text: JAPANESE INTERMEDIATE CODE: A711 Effective date: 20071119 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20080220 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20090316 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20090611 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20090618 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20091207 |