JP2006509952A - 真空ポンプ排出装置 - Google Patents

真空ポンプ排出装置 Download PDF

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Publication number
JP2006509952A
JP2006509952A JP2004559873A JP2004559873A JP2006509952A JP 2006509952 A JP2006509952 A JP 2006509952A JP 2004559873 A JP2004559873 A JP 2004559873A JP 2004559873 A JP2004559873 A JP 2004559873A JP 2006509952 A JP2006509952 A JP 2006509952A
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JP
Japan
Prior art keywords
pump discharge
discharge mechanism
drive shaft
lubricating oil
bearing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004559873A
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English (en)
Japanese (ja)
Inventor
ナイジェル ポール スコーフィールド
Original Assignee
ザ ビーオーシー グループ ピーエルシー
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=9949817&utm_source=***_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=JP2006509952(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by ザ ビーオーシー グループ ピーエルシー filed Critical ザ ビーオーシー グループ ピーエルシー
Publication of JP2006509952A publication Critical patent/JP2006509952A/ja
Pending legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/058—Bearings magnetic; electromagnetic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Jet Pumps And Other Pumps (AREA)
  • Electrophonic Musical Instruments (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
JP2004559873A 2002-12-17 2003-12-09 真空ポンプ排出装置 Pending JP2006509952A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB0229356.1A GB0229356D0 (en) 2002-12-17 2002-12-17 Vacuum pumping arrangement
PCT/GB2003/005375 WO2004055376A2 (en) 2002-12-17 2003-12-09 Vacuum pumping arrangement

Publications (1)

Publication Number Publication Date
JP2006509952A true JP2006509952A (ja) 2006-03-23

Family

ID=9949817

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004559873A Pending JP2006509952A (ja) 2002-12-17 2003-12-09 真空ポンプ排出装置

Country Status (9)

Country Link
US (1) US20060140794A1 (de)
EP (1) EP1576292B1 (de)
JP (1) JP2006509952A (de)
AT (1) ATE388328T1 (de)
AU (1) AU2003295101A1 (de)
DE (1) DE60319585T2 (de)
GB (1) GB0229356D0 (de)
TW (1) TW200417690A (de)
WO (1) WO2004055376A2 (de)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011112048A (ja) * 2009-11-26 2011-06-09 Oerlikon Leybold Vacuum Gmbh 真空ポンプ
JP2011521161A (ja) * 2008-05-23 2011-07-21 オーリコン レイボルド バキューム ゲーエムベーハー 多段真空ポンプ
JP2019502048A (ja) * 2015-11-19 2019-01-24 レイボルド ゲーエムベーハー 運動エネルギーを貯蔵するための装置

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0409139D0 (en) * 2003-09-30 2004-05-26 Boc Group Plc Vacuum pump
DE102008035891A1 (de) * 2008-07-31 2010-02-04 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
DE102009021620B4 (de) 2009-05-16 2021-07-29 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102009021642B4 (de) 2009-05-16 2021-07-22 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102010019940B4 (de) 2010-05-08 2021-09-23 Pfeiffer Vacuum Gmbh Vakuumpumpstufe
US9790946B2 (en) * 2010-09-28 2017-10-17 Edwards Japan Limited Exhaust pump
DE102011112691A1 (de) * 2011-09-05 2013-03-07 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102012003680A1 (de) 2012-02-23 2013-08-29 Pfeiffer Vacuum Gmbh Vakuumpumpe
US11519419B2 (en) * 2020-04-15 2022-12-06 Kin-Chung Ray Chiu Non-sealed vacuum pump with supersonically rotatable bladeless gas impingement surface

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2349033C3 (de) * 1973-09-29 1984-08-30 Leybold-Heraeus Gmbh, 5000 Koeln Turbomolekularpumpe
JPH0646036B2 (ja) * 1982-11-19 1994-06-15 セイコー電子工業株式会社 軸流分子ポンプ
US4767265A (en) * 1983-10-07 1988-08-30 Sargent-Welch Scientific Co. Turbomolecular pump with improved bearing assembly
DE4427154A1 (de) * 1994-08-01 1996-02-08 Balzers Pfeiffer Gmbh Reibungspumpe mit Magnetlagerung
GB9609281D0 (en) * 1996-05-03 1996-07-10 Boc Group Plc Improved vacuum pumps
GB9810872D0 (en) * 1998-05-20 1998-07-22 Boc Group Plc Improved vacuum pump
FR2783883B1 (fr) * 1998-09-10 2000-11-10 Cit Alcatel Procede et dispositif pour eviter les depots dans une pompe turbomoleculaire a palier magnetique ou gazeux
DE19913593B4 (de) * 1999-03-24 2004-09-23 Ilmvac Gmbh Gesteuerter Pumpstand
DE19915983A1 (de) * 1999-04-09 2000-10-12 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Gaslagerung
DE19929519A1 (de) * 1999-06-28 2001-01-04 Pfeiffer Vacuum Gmbh Verfahren zum Betrieb einer Mehrkammer-Vakuumanlage
DE10043783A1 (de) * 2000-09-06 2002-03-14 Leybold Vakuum Gmbh Verfahren und Vorrichtung zur Regelung des Vakuums in einer Kammer
EP1234982B1 (de) * 2001-02-22 2003-12-03 VARIAN S.p.A. Vakuumpumpe
GB0114417D0 (en) * 2001-06-13 2001-08-08 Boc Group Plc Lubricating systems for regenerative vacuum pumps
FR2859250B1 (fr) * 2003-08-29 2005-11-11 Cit Alcatel Pompe a vide

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011521161A (ja) * 2008-05-23 2011-07-21 オーリコン レイボルド バキューム ゲーエムベーハー 多段真空ポンプ
JP2011112048A (ja) * 2009-11-26 2011-06-09 Oerlikon Leybold Vacuum Gmbh 真空ポンプ
JP2019502048A (ja) * 2015-11-19 2019-01-24 レイボルド ゲーエムベーハー 運動エネルギーを貯蔵するための装置
US10944308B2 (en) 2015-11-19 2021-03-09 Leybold Gmbh Device for storing kinetic energy

Also Published As

Publication number Publication date
US20060140794A1 (en) 2006-06-29
TW200417690A (en) 2004-09-16
WO2004055376A2 (en) 2004-07-01
ATE388328T1 (de) 2008-03-15
EP1576292A2 (de) 2005-09-21
DE60319585T2 (de) 2009-03-26
EP1576292B1 (de) 2008-03-05
DE60319585D1 (de) 2008-04-17
GB0229356D0 (en) 2003-01-22
AU2003295101A1 (en) 2004-07-09
WO2004055376A3 (en) 2004-08-05

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