JP2006321575A - Device and method for manufacturing display panel - Google Patents

Device and method for manufacturing display panel Download PDF

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JP2006321575A
JP2006321575A JP2005143779A JP2005143779A JP2006321575A JP 2006321575 A JP2006321575 A JP 2006321575A JP 2005143779 A JP2005143779 A JP 2005143779A JP 2005143779 A JP2005143779 A JP 2005143779A JP 2006321575 A JP2006321575 A JP 2006321575A
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substrate
holding
display panel
holding means
bent
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Michihiko Takase
道彦 高瀬
Seiji Imanaka
誠二 今中
Toshiyuki Watanabe
利幸 渡辺
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Panasonic Holdings Corp
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Matsushita Electric Industrial Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a substrate conveying and holding device and a method therefor capable of reducing the deflection to generate stresses in an enlarged substrate, and preventing any breakage of the substrate by suppressing any change of a deflected state of the substrate, and reliably conveying and holding the substrate. <P>SOLUTION: The substrate conveying and holding device comprises a conveying and holding means 3 to hold a rectangular and thin film-shaped substrate 1 and convey it to the predetermined position, and a substrate holding means 2 to hold the substrate 1. The substrate conveying and holding means 3 changes the substrate 1 in a predetermined deflected shape. The substrate holding means 2 has inner angular parts 21a, 21b, 21c, 21d to hold and fix four corner parts which are diagonally located on the substrate 1 to each other, and the diagonal distance of the inner angular parts 21a, 21b, 21c, 21d is set to be shorter than the diagonal length of the substrate 1. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、ディスプレイパネルの製造装置および製造方法に関し、特にディスプレイパネルの製造にあたって、ディスプレイパネル用の基板に所用の処理を施す際に基板を搬送し、保持する搬送保持装置および搬送保持方法に関する。   The present invention relates to a display panel manufacturing apparatus and a manufacturing method, and more particularly to a transport holding device and a transport holding method for transporting and holding a substrate when performing a desired process on the display panel substrate in manufacturing the display panel.

近年、ＥＬ装置、ＳＥＤ装置、液晶表示装置やプラズマディスプレイパネル（以下、ＰＤＰとも記す）装置等ディスプレイパネルを用いるフラットパネルディスプレイ装置は薄型軽量化が可能で低消費電力であることから、大型のテレビジョン受像機や公衆表示用モニタとしての社会的要望が増大し、注目を集めている。特に、希ガス放電による紫外線で蛍光体を励起発光させて画像・映像表示に利用し、視認性に優れるとされるＰＤＰでは、最近、表示領域のサイズが５０インチを超えて８０インチもある大画面のＰＤＰを用いた製品が登場し、将来的に表示領域のサイズが１００インチを超えるさらに大画面のＰＤＰ装置も計画されている。   In recent years, flat panel display devices using display panels such as EL devices, SED devices, liquid crystal display devices, and plasma display panel (hereinafter also referred to as PDP) devices can be reduced in thickness and weight, and have low power consumption. Social demands for John receivers and public display monitors have increased and are attracting attention. In particular, in a PDP that is excellent in visibility by exciting and emitting phosphors with ultraviolet light generated by rare gas discharge and used for image / video display, the size of the display area has recently increased from 50 inches to 80 inches. A product using a screen PDP has appeared, and a PDP apparatus having a larger screen whose display area size exceeds 100 inches is planned in the future.

そして、大表示画面化に伴って、フラットパネルディスプレイ装置に用いられる基板の面積も大型化するが、軽量化の要望のため面積に比例させて基板の厚みを増加させることが難しく、現行の基板の厚み自体はそれ程厚くなっていない。それ故、大型化した基板を搬送あるいは保持する際に基板の両端だけで支持しようとすると基板の中央部分に自重による撓み（たわみ）が発生し、所定の工程における処理に影響して工程トラブルを発生させたり製品精度を低下させたりするばかりでなく、撓みにより基板の投影サイズの縮小が生じ、基板の端部にある保持・支持部から基板が外れて落下し、基板を破損するおそれもある。例えば、液晶表示装置に用いるガラス基板の場合、縦９６０ｍｍ×横１１００ｍｍの大きさであっても厚みは１ｍｍ程度であり、両端で支持すると基板の自重により中央部が撓みにより約８０ｍｍ下がるという実測例もある。   And with the increase in the display screen, the area of the substrate used in the flat panel display device also becomes larger, but it is difficult to increase the thickness of the substrate in proportion to the area because of the demand for weight reduction. The thickness itself is not so thick. Therefore, if you try to support only the both ends of the substrate when transporting or holding a large substrate, the center portion of the substrate will bend (deflection) due to its own weight, affecting the processing in a given process and causing process troubles. In addition to generating or reducing product accuracy, the projection size of the substrate may be reduced due to bending, and the substrate may fall off the holding / supporting portion at the end of the substrate, causing damage to the substrate. . For example, in the case of a glass substrate used for a liquid crystal display device, even if it is 960 mm long × 1100 mm wide, the thickness is about 1 mm, and when supported at both ends, the center part is lowered by about 80 mm due to the weight of the substrate due to the weight of the substrate. There is also.

そこで、大型基板を搬送あるいは保持する際の撓みの影響を避けるための各種の提案がなされている。例をいくつか示すと、まず、基板の長手方向の中心線に平行な側の両方の端部とともに基板が撓む中央部に支持ピンを設けた搬送装置や同様な基板固定台を設置した基板積載用ケースが、最も簡単な方法として挙げられる（例えば、特許文献１、特許文献２参照）。次に、コロやローラを用いる搬送装置において、コロやローラを基板の長手方向の中心線に平行な側の両方の端部だけでなく基板が撓む中央部にも配置して基板表面を水平に保持したり、流動性のある材料を塗布する場合に中央部のコロやローラの径を端部よりも大きくして、破損しない程度に中央部を逆の上側の方向に基板を撓ませて中央部に材料が流れて溜まることを防止したりする方法が考えられている（例えば、特許文献３、特許文献４参照）。また、基板の長手方向の中心線に平行な側の両端部を可動性のない支持・保持部あるいは可動性のあるコロやローラに載置し、撓みの生ずる中央部に液体や気体を下側から噴出または吹き出させて基板を平坦な状態で支持・保持する搬送方法も提案されている（例えば、特許文献５、特許文献６参照）。   Thus, various proposals have been made to avoid the influence of bending when a large substrate is transported or held. To give some examples, first, a substrate with a support device provided in the center where the substrate bends together with both ends parallel to the longitudinal center line of the substrate, and a substrate with a similar substrate fixing base installed A loading case is mentioned as the simplest method (see, for example, Patent Document 1 and Patent Document 2). Next, in a transfer device using rollers and rollers, the rollers and rollers are arranged not only at both ends parallel to the center line in the longitudinal direction of the substrate but also at the central portion where the substrate bends to horizontally level the substrate surface. When applying a fluid material, the diameter of the roller or roller at the center is larger than the end, and the substrate is bent in the opposite upper direction to the extent that it does not break. A method of preventing the material from flowing and collecting in the central portion has been considered (see, for example, Patent Document 3 and Patent Document 4). In addition, both ends on the side parallel to the longitudinal center line of the substrate are placed on a non-movable support / holding unit or a movable roller or roller, and liquid or gas is placed on the lower side where bending occurs. A transport method for supporting and holding the substrate in a flat state by ejecting or blowing from the substrate has also been proposed (see, for example, Patent Document 5 and Patent Document 6).

さらに、基板自体の撓みの影響を防ぐ方法ではないが、所定の工程における処理の際に基板が熱応力で破損することを防止するために、４枚以上の可撓性を有する帯状板を個別独立に枠状に組み合わせて基板を支持し、帯状板が撓むことで処理における熱応力を吸収する方法も提案されている（例えば、特許文献７参照）。
特開平１１−１６５８１３号公報 特開２００４−１０７００６号公報 特開平９−２０８０７８号公報 特開２００３−１００５８１号公報 特開平９−２７８１８１号公報 特開２０００−５３２４７号公報 特開平１１−６１３７９号公報 Furthermore, although it is not a method for preventing the influence of the bending of the substrate itself, in order to prevent the substrate from being damaged by thermal stress during processing in a predetermined process, four or more flexible strip-like plates are individually provided. There has also been proposed a method in which a substrate is supported by being combined in a frame shape independently, and a belt-like plate is bent to absorb thermal stress in processing (for example, see Patent Document 7).
Japanese Patent Laid-Open No. 11-165813 JP 2004-107006 A Japanese Patent Laid-Open No. 9-208078 JP 2003-100581 A JP-A-9-278181 JP 2000-53247 A JP 11-61379 A

しかしながら、上述した基板が撓む中央部に支持ピンや基板固定台を設置したり、コロやローラを用いて搬送保持したりする等の支持・保持部材を用いる方法においては、基板表面と支持・保持部材が接触することにより傷や汚れが発生し、また、微細なゴミ等の塵埃（ダスト）が付着して表示不良を発生させる原因になって表示画面の品質低下に直接影響するおそれがあるばかりでなく、発生した傷等により基板の破損の可能性が非常に高くなる。これらの問題点に加えて、支持ピン、基板固定台、コロ、ローラ等の支持・保持部材を設けた治具を別に準備作成する必要がある。また、基板を保持するケース等も保持搬送手段を設けることにより、容積が大きくなり、新たな場所の確保も必要になるという問題も生じる。   However, in the above-described method using a support / holding member such as a support pin or a substrate fixing base installed in the central portion where the substrate bends or transported and held using rollers or rollers, the substrate surface and the Contact with the holding member may cause scratches or dirt, and may cause a display defect due to adhesion of dust such as fine dust, which may directly affect the quality of the display screen. In addition, the possibility of breakage of the substrate due to the generated scratches is very high. In addition to these problems, it is necessary to separately prepare a jig provided with support / holding members such as a support pin, a substrate fixing base, a roller, and a roller. In addition, since the case for holding the substrate is also provided with holding and conveying means, there arises a problem that the volume becomes large and it is necessary to secure a new place.

一方、コロやローラによって基板を搬送する場合は、コロやローラが基板に接触して走行するという根本的な問題、すなわち、コロやローラはコンベアに所定間隔で配置されているため、基板が次のローラに乗り移るときに、ガラス基板のエッジとローラ表面とが擦れてガラス基板の一部が欠けたり、塵埃や静電気が発生したりする等の問題がある。また、所定間隔で配置されたコロやローラにより基板を水平に支持・保持して搬送する場合は、搬送方向対して垂直な方向に基板が凹凸状態に波打って撓むことがある。この撓みにより、基板の端部が垂れ下がって、コロやローラと基板の端面とが衝突することが繰り返され、コロやローラが摩耗してダストを発生させるだけでなく、コロやローラの交換を頻繁に行わなければならないという問題もある。   On the other hand, when a substrate is transported by a roller or roller, the fundamental problem that the roller or roller travels in contact with the substrate, that is, the roller or roller is arranged on the conveyor at a predetermined interval. When transferring to the roller, there is a problem that the edge of the glass substrate and the roller surface are rubbed and a part of the glass substrate is chipped or dust or static electricity is generated. In addition, when a substrate is horizontally supported and held by rollers or rollers arranged at a predetermined interval, the substrate may wave and bend in an uneven state in a direction perpendicular to the conveyance direction. Due to this bending, the end of the substrate hangs down, and the roller and roller and the end surface of the substrate repeatedly collide, and the roller and roller wear and generate dust, and the roller and roller are frequently replaced. There is also a problem that must be done.

また、撓みが生ずる基板の中央部に下側から液体や気体（ガス）を吹き出させたり、噴出させたりして支持・保持する方法では、基板に塵埃が付着しないように清浄度の高い液体やガスを使用しなければならないし、液体の場合は基板に付着した液体を洗浄除去する必要もある。したがって、この方法の場合は処理装置の構成が複雑で大がかりになるという問題が生じる。また、基板を非接触で搬送したとしても、基板を常時非接触の状態で支持・保持することはできず、何らかの支持・保持が必要になり、その際に支持部材が直に基板に接触することになるので、上述した内容と同様の問題が生じる。   In addition, in the method of supporting and holding liquid or gas (gas) from the lower side to the center of the substrate where bending occurs, or by supporting and holding the liquid, a highly clean liquid or Gas must be used, and in the case of liquid, it is necessary to wash away the liquid adhering to the substrate. Therefore, in the case of this method, there arises a problem that the configuration of the processing apparatus is complicated and large. Also, even if the substrate is transported in a non-contact manner, the substrate cannot be supported / held in a non-contact state at all times, and some support / holding is required. At that time, the support member directly contacts the substrate. As a result, the same problem as described above occurs.

さらに、上述したような、大型化した基板を搬送保持する際の問題に加えて、基板の撓みに起因する応力の問題がある。以下に基板の撓みについて図９を用いて簡単に説明する。図９は大型基板を保持するときの基板の状態の変化を説明する斜視図である。図９において、基板１を所定の手段、方法により搬送、移送して、基板１の短辺側端部を支持手段２ａ、２ｂ上に載置すると、載置直後の基板１は図９（ａ）に示すような状態にある。このとき、基板の長辺側長さＬ１は支持手段２ａ、２ｂ間のギャップ長Ｌ２に比べて十分大きく（Ｌ１＞Ｌ２）、基板１は支持手段２ａ、２ｂ上で安定的に保持される。しかしながら、大型化した基板１の短辺側端部を支持手段２ａ、２ｂ上に載置し続けると、基板１の自重により、図９（ｂ）に示すように基板１の中央部において矢印Ａで示す方向に撓み始める。この結果、基板１の投影長Ｌ３はＬ１から縮小してゆき、Ｌ１＞Ｌ３＞Ｌ２では、支持手段２ａ、２ｂのエッジ部と基板１の面とが接触して、基板１の面に傷がついたり、汚れが付着したりするといった上述と同様な問題に加えて、撓みにより基板１に応力が発生して基板が割れるおそれがある。撓みがさらに進めば応力も比例して大きくなり、基板１はより割れやすくなる。Ｌ３＜Ｌ２にいたると基板１の端部が支持手段２ａ、２ｂから外れて落下して破損等の問題が発生することは、既に背景技術で説明した。 Furthermore, in addition to the problem in transporting and holding a large-sized substrate as described above, there is a problem of stress due to the bending of the substrate. Hereinafter, the bending of the substrate will be briefly described with reference to FIG. FIG. 9 is a perspective view for explaining changes in the state of the substrate when holding a large substrate. In FIG. 9, when the substrate 1 is transported and transferred by a predetermined means and method and the short side end of the substrate 1 is placed on the support means 2a and 2b, the substrate 1 immediately after placement is shown in FIG. ). At this time, the long side length L 1 of the substrate support means 2a, sufficiently large compared to the gap length L 2 between 2b (L 1> L 2), the substrate 1 is a support means 2a, stably over 2b Retained. However, if the short-side end of the enlarged substrate 1 continues to be placed on the support means 2a and 2b, the arrow A appears at the center of the substrate 1 as shown in FIG. Begins to bend in the direction indicated by. As a result, the projection length L 3 of the substrate 1 is reduced from L 1 , and when L 1 > L 3 > L 2 , the edge portions of the support means 2 a and 2 b and the surface of the substrate 1 come into contact with each other. In addition to the same problems as described above, such as the surface of the substrate being scratched or contaminated, there is a possibility that stress is generated in the substrate 1 due to bending and the substrate is cracked. As the bending further proceeds, the stress increases proportionally, and the substrate 1 becomes more easily broken. It has already been described in the background art that when L 3 <L 2 , the edge of the substrate 1 falls off the support means 2a, 2b and falls to cause problems such as breakage.

なお、図９においては、基板１の短辺側端部を支持手段２ａ、２ｂ上に載置する例で示したが、基板１の長辺側端部を支持手段２ａ、２ｂ上に載置する場合でも同様である。ただ、基板１の耐応力性は、短辺側端部を支持手段２ａ、２ｂ上に載置する場合に比べて長辺側端部を載置する方が優れている。また、耐応力性は基板１の厚みに依存しており、ＰＤＰにおいては大型化による重量増加を基板の厚みを薄くすることで対応する方向にあるので、基板の厚みを薄くして大型化を図る場合、このような撓みに起因する応力で基板１が破損する問題は重大である。   Although FIG. 9 shows an example in which the short side end of the substrate 1 is placed on the support means 2a, 2b, the long side end of the substrate 1 is placed on the support means 2a, 2b. It is the same even when doing. However, the stress resistance of the substrate 1 is better when the long side end is placed than when the short side end is placed on the support means 2a, 2b. In addition, the stress resistance depends on the thickness of the substrate 1, and in the PDP, the increase in weight due to the increase in size is in a direction corresponding to the reduction in the thickness of the substrate. When trying, the problem that the board | substrate 1 is damaged with the stress resulting from such bending is serious.

本発明は、上記課題を解決するためになされたものであり、大型化した基板の搬送保持するときに発生するダストの発生や汚れの付着を抑制し、また基板に応力を生じさせる撓みを低減するとともに、処理中の基板の撓み状態の変化を抑制することができ、製品に悪影響を及ぼさずに確実に搬送保持して基板を破損から防止して安定かつ確実に所要の処理を施すことができるような良好な搬送保持性を有し、かつ、装置を簡素化して高価な構成にすることなく歩留りや品質をより向上できる基板の搬送保持装置およびその搬送保持方法を提供することを目的とする。   The present invention has been made to solve the above-mentioned problems, and suppresses the generation of dust and dirt generated when transporting and holding a large-sized substrate, and reduces the bending that causes stress on the substrate. In addition, the change in the bending state of the substrate during processing can be suppressed, and the substrate can be reliably transported and held without adversely affecting the product to prevent the substrate from being damaged, and the required processing can be performed stably and reliably. An object of the present invention is to provide a substrate transport and holding device and a method for transporting and holding the same that have good transport and holdability, and that can further improve yield and quality without simplifying the device and making it expensive. To do.

上記の目的を達成するために、本発明のディスプレイパネルの製造装置は、矩形薄板状の基板を保持して所定の位置に搬送する搬送保持手段と、基板を端部において保持する基板保持手段とを備え、搬送保持手段が基板を所定の撓んだ形状に変化させる構成を有している。この構成に加えて、基板保持手段が基板の対角状に４箇所あるコーナ部をそれぞれ保持固定する内側角部を有し、かつ、内側角部の対角距離は基板の対角長よりも短く形成された構成、基板保持手段が基板の長辺側または短辺側のいずれかの端部において基板を載置支持したときに基板が所定の撓んだ形状の曲面を有した基板載置部と、基板が所定の位置から外れることを防止するストッパと、を備え、基板載置部の長手方向の投影長は基板の撓んだ側の投影長よりも長いか、または等しく形成されている構成、また、矩形薄板状の基板を保持して所定の位置に搬送する搬送保持手段は基板の構成要素を形成しない側の面を吸着保持する保持治具を有し、基板保持手段が基板の構成要素を形成する側の面と対向するように配置された構成、また、搬送保持手段に備わる保持治具は、アームを固定保持する状態と、可動自在の状態との切り換えが可能な連結部材を有する構成、また、搬送保持手段に備わる保持治具は、基板の高さ位置を可変にする複数の高さ位置調整治具を有する構成、また、基板載置部が複数個に分割された部材が基板の撓んだ側に平行に配置されている構成、また、基板載置部が、複数個に分割された部材が交叉して配置されている構成を有することもできる。   In order to achieve the above object, a display panel manufacturing apparatus of the present invention includes a conveyance holding unit that holds a rectangular thin plate-like substrate and conveys the substrate to a predetermined position, and a substrate holding unit that holds the substrate at an end portion. The conveyance holding means changes the substrate into a predetermined bent shape. In addition to this configuration, the substrate holding means has inner corner portions for holding and fixing the four corner portions diagonally of the substrate, and the diagonal distance of the inner corner portions is longer than the diagonal length of the substrate. Substrate mounting having a curved surface with a predetermined bent shape when the substrate holding means places and supports the substrate at the end of either the long side or the short side of the substrate. And a stopper that prevents the substrate from moving out of a predetermined position, and the projection length in the longitudinal direction of the substrate mounting portion is longer than or equal to the projection length on the side where the substrate is bent. The conveyance holding means for holding the rectangular thin plate-like substrate and conveying it to a predetermined position has a holding jig that holds and holds the surface of the substrate on which the component is not formed, and the substrate holding means is the substrate. Arranged to face the surface on which the component is formed, The holding jig provided in the conveyance holding means has a connecting member capable of switching between a state in which the arm is fixedly held and a state in which the arm is movable, and the holding jig provided in the conveyance holding means has a height of the substrate. A configuration having a plurality of height position adjustment jigs that can change the position, a configuration in which a substrate mounting portion is divided into a plurality of members, and is arranged in parallel on the side on which the substrate is bent, The substrate mounting portion may have a configuration in which members divided into a plurality are arranged so as to cross each other.

また、本発明のディスプレイパネルの製造装置は、矩形薄板状の基板を支持して所定の位置に搬送する基板支持部材と、基板を固定保持する基板保持手段とを備え、基板支持部材が基板を所定の撓んだ形状に変化させる構成を有している。この構成のみならず、基板保持手段は基板の対角状に４箇所あるコーナ部をそれぞれ保持固定する内部角部を有し、かつ、内部角部の対角距離は基板の対角長よりも短く形成された構成とともに、基板支持部材が基板の構成要素を形成する側の面を載置支持するように配置された構成、また基板支持部材が基板の長辺側または短辺側のいずれかに平行な中心線において基板の構成要素を形成する側の面を載置支持したときに基板が撓んだ状態と略等しい曲面を有する構成、また、基板支持部材の複数個に分割された部材が基板の撓んだ側に平行に配置されている構成、さらに、基板支持部材が複数個に分割された部材が交叉して配置されている構成であってもよい。   The display panel manufacturing apparatus of the present invention includes a substrate support member that supports a rectangular thin plate-shaped substrate and conveys the substrate to a predetermined position, and substrate holding means that fixes and holds the substrate, and the substrate support member holds the substrate. It has a configuration for changing to a predetermined bent shape. In addition to this configuration, the substrate holding means has internal corner portions for holding and fixing the four corner portions diagonally of the substrate, and the diagonal distance of the internal corner portions is larger than the diagonal length of the substrate. A configuration in which the substrate support member is placed and supported on the surface on which the component of the substrate is formed together with the short configuration, and the substrate support member is either on the long side or the short side of the substrate A substrate having a curved surface substantially equal to a bent state when a surface on which a component of the substrate is formed is placed and supported on a center line parallel to the substrate, and a member divided into a plurality of substrate support members May be arranged in parallel to the side on which the substrate is bent, or may be arranged in such a manner that members obtained by dividing the substrate supporting member into a plurality of portions are crossed.

これらの構成により、大型化した基板の搬送保持するときに、基板に応力を生じさせる撓みを低減するとともに、処理中の基板の撓み状態の変化を抑制することができるので、製品に悪影響を及ぼさずに確実に搬送保持して基板を破損から防止して安定かつ確実に所要の処理を施すことができて、簡素な構成の基板の搬送保持装置を提供することが可能になる。   With these configurations, when transporting and holding a large-sized substrate, it is possible to reduce the bending that causes stress on the substrate and to suppress changes in the bending state of the substrate during processing, thereby adversely affecting the product. Therefore, it is possible to reliably carry and hold the substrate to prevent the substrate from being damaged, and to stably and surely perform the required processing, and to provide a substrate carrying and holding device having a simple configuration.

また、上記の目的を達成するために、本発明のディスプレイパネルの製造方法は、搬送保持手段により矩形薄板状の基板を保持して、基板を固定保持する基板保持手段の上方に搬送するステップと、基板の構成要素を形成する側の面を基板保持手段に備わるベース部材と対向させて基板を降下させるステップと、基板を所定の撓んだ形状に変化させるステップと、撓んだ基板を基板保持手段に載置して保持するステップとを備えている。   In order to achieve the above object, the display panel manufacturing method of the present invention includes a step of holding a rectangular thin plate-like substrate by a transfer holding unit and transferring the substrate above the substrate holding unit for fixing and holding the substrate. A step of lowering the substrate with a surface on which a component of the substrate is formed facing a base member provided in the substrate holding means, a step of changing the substrate into a predetermined bent shape, and a step of bending the bent substrate And a step of placing and holding the holding means.

また、本発明のディスプレイパネルの製造方法は、矩形薄板状の基板の構成要素を形成する側の面を基板支持部材に載置支持して基板を自重により撓ませつつ、基板保持手段の上方に搬送するステップと、基板の構成要素を形成する側の面を基板保持手段に備わるベース部材と対向させて基板を降下させるステップと、基板が撓んだ基板を基板保持手段に載置して保持するステップとを備えているとともに、さらに、本発明の基板の搬送保持方法は、基板に４箇所あるコーナ部に対応し、かつ、対角距離が基板の対角長よりも短く設定して配置された内部角部を有する基板保持手段により基板を保持することや、基板の長辺側または短辺側のいずれかに平行な中心線において基板の構成要素を形成する側の面を載置支持したときに基板が撓んだ状態と略等しい曲面を有する基板支持部材により基板を保持する手順を備えていてもよい。   In the display panel manufacturing method of the present invention, the surface on which the components of the rectangular thin plate-like substrate are formed is placed and supported on the substrate support member, and the substrate is bent by its own weight, and above the substrate holding means. A step of transporting, a step of lowering the substrate with a surface on which a component of the substrate is formed facing a base member provided on the substrate holding means, and a substrate on which the substrate is bent is placed and held on the substrate holding means In addition, the method for transporting and holding a substrate according to the present invention corresponds to four corner portions on the substrate, and the diagonal distance is set shorter than the diagonal length of the substrate. The substrate is held by the substrate holding means having the internal corners formed, and the surface on the side forming the component of the substrate is placed and supported on the center line parallel to either the long side or the short side of the substrate When the board is bent The substrate support member having a substantially equal curved state may comprise the steps of holding the substrate.

これらの方法により、大型化した基板の搬送保持するときに発生するダストの発生や汚れの付着を抑制し、また基板に応力を生じさせる撓みを低減し、処理中の基板の撓み状態の変化を抑制することができ、製品に悪影響を及ぼさずに確実に搬送保持して基板を破損から防止して安定かつ確実に所要の処理を施すことができるような良好な搬送保持性を有しているので、装置を簡素化して高価な構成にすることなく歩留りや品質をより向上できる基板の搬送保持方法を提供することができるようになる。   By these methods, the generation of dust and dirt generated when transporting and holding a large-sized substrate is suppressed, the bending that causes stress on the substrate is reduced, and the bending state of the substrate during processing is changed. It has good transport and holding properties that can be controlled and reliably transported and held without adversely affecting the product to prevent the substrate from being damaged and perform the required processing stably and reliably. Therefore, it is possible to provide a method for transporting and holding a substrate that can improve the yield and quality without simplifying the apparatus and making it expensive.

以上のように、本発明のディスプレイパネルの製造装置および製造方法によれば、基板を搬送し、支持手段または基板保持手段に安定的に保持・支持することが可能になり、基板の撓みにより発生する応力に起因する破損等の問題も解消できることになって、表示装置の製造に際し、基板に電極等の構成要素を蒸着や吹きつけ塗布により形成するとき基板を保持・支持したまま工程処理を行うことも可能である。   As described above, according to the display panel manufacturing apparatus and method of the present invention, it is possible to transport the substrate and stably hold and support it on the support means or the substrate holding means, which occurs due to the bending of the substrate. It is possible to eliminate problems such as breakage due to the stress that occurs, and when manufacturing display devices, when forming components such as electrodes on the substrate by vapor deposition or spray coating, the process is performed while holding and supporting the substrate It is also possible.

以下、本発明の実施の形態について、図面を参照しながら説明する。   Hereinafter, embodiments of the present invention will be described with reference to the drawings.

（実施の形態１）
最初に、本発明の実施の形態１におけるフラットパネルディスプレイ用基板の搬送保持装置および搬送保持方法について図１、図２を用いて説明する。図１は本発明の実施の形態１における基板保持方法を説明する図であり、図２は本発明の実施の形態１における基板保持部材の形状および配置のほかの例を示す斜視図である。 (Embodiment 1)
First, a flat panel display substrate transfer holding device and a transfer holding method according to Embodiment 1 of the present invention will be described with reference to FIGS. FIG. 1 is a diagram for explaining a substrate holding method according to Embodiment 1 of the present invention, and FIG. 2 is a perspective view showing another example of the shape and arrangement of the substrate holding member according to Embodiment 1 of the present invention.

図１（ａ）には基板１を搬送保持手段３により基板保持手段２の上方に移送し、基板保持手段２に載置する前の状態を斜視図で示している。図１（ａ）において、表示装置の製造に用いる基板１の電極等の構成要素を形成しない側の面を搬送保持手段３に備わる吸板等の吸着保持具３０で吸着して保持し、保持・支持する基板保持手段２の上方に基板１を搬送する。このとき基板１は水平に保たれている。搬送保持手段３は図１に６個の吸着保持具３０が基板１を保持するのに十分な剛性備えたアーム５で接続された構成の例を示しているが、本発明の実施の形態１における搬送保持装置の構成はこの例に限定されるものではない。基板保持手段２には直法立体アングル状に形成された少なくとも４個の基板保持・支持部材２０ａ、２０ｂ、２０ｃ、２０ｄがそれぞれの内側角部２１ａ、２１ｂ、２１ｃ、２１ｄを同一平面上で対角状に対向させ、対角間距離が基板１の対角長さよりも短くなるように配置、固定されている。そして、基板保持・支持部材２０ａ、２０ｂ、２０ｃ、２０ｄは図１（ａ）に示すような開口部２３を有するベース部材２２に載置・固定されている。   FIG. 1A is a perspective view showing a state before the substrate 1 is transferred above the substrate holding means 2 by the transfer holding means 3 and placed on the substrate holding means 2. In FIG. 1A, the surface of the substrate 1 that is not used to form components such as electrodes used for manufacturing the display device is sucked and held by a suction holder 30 such as a suction plate provided in the transport holding means 3 and held. The substrate 1 is transported above the supporting substrate holding means 2. At this time, the substrate 1 is kept horizontal. Although the conveyance holding means 3 shows an example in which six suction holders 30 are connected by the arm 5 having sufficient rigidity to hold the substrate 1 in FIG. 1, Embodiment 1 of the present invention. The configuration of the transport and holding device is not limited to this example. The substrate holding means 2 includes at least four substrate holding / supporting members 20a, 20b, 20c, and 20d formed in a rectangular solid angle shape so that the inner corners 21a, 21b, 21c, and 21d face each other on the same plane. It is arranged and fixed so that the diagonal distance is shorter than the diagonal length of the substrate 1. The substrate holding / supporting members 20a, 20b, 20c, and 20d are placed and fixed on a base member 22 having an opening 23 as shown in FIG.

この状態で基板１を図１（ａ）中に矢印Ａで示した方向に降下させると基板保持・支持部材２０ａ、２０ｂ、２０ｃ、２０ｄの上部端面上に基板１が載置されるが、基板１の保持はできていない状態にある。基板１を降下させる前に、基板保持・支持部材２０ａ、２０ｂ、２０ｃ、２０ｄの上部端面よりも高い位置で基板１の長辺を二等分して短辺側に平行になるような位置に丸棒状の基板支持部材４を配置しておき、基板１を降下させていくと、ＢＢ部断面図として図１（ｂ）に示した状態を経て、基板支持部材４は基板１と接触し、基板１を支持するようになる。このとき、搬送保持手段３の吸着保持具３０の吸着を解除すると、基板１は自重により短辺側が下がるように撓み始め、基板１の長辺側の投影サイズが徐々に縮小していく。基板１の投影された対角長が基板保持・支持部材の内側角部における対角間距離よりも短くなると、図１（ｃ）に示すように基板１の各コーナ部が対応する基板保持・支持部材２０ａ、２０ｂ、２０ｃ、２０ｄの内側角部２１ａ、２１ｂ、２１ｃ、２１ｄに収まるようになる。そして、基板保持・支持部材の内側角部の対角間距離の設定を変更することにより、基板１の中央部を下方に撓ませ始めた状態にしたり、逆に上方に撓ませてそのまま安定に保持したりするといった制御が可能である。上方に撓ませる場合、撓み量が大きくなり過ぎると基板１を破損させてしまうことがあるので注意が必要になる。   In this state, when the substrate 1 is lowered in the direction indicated by the arrow A in FIG. 1A, the substrate 1 is placed on the upper end surfaces of the substrate holding / supporting members 20a, 20b, 20c, and 20d. 1 is not held. Before lowering the substrate 1, the long side of the substrate 1 is divided into two equal parts and parallel to the short side at a position higher than the upper end surfaces of the substrate holding / supporting members 20a, 20b, 20c, 20d. When the substrate support member 4 having a round bar shape is arranged and the substrate 1 is lowered, the substrate support member 4 comes into contact with the substrate 1 through the state shown in FIG. The substrate 1 is supported. At this time, when the suction of the suction holder 30 of the transport holding means 3 is released, the substrate 1 starts to bend so that the short side is lowered by its own weight, and the projected size of the long side of the substrate 1 is gradually reduced. When the projected diagonal length of the substrate 1 becomes shorter than the diagonal distance at the inner corner of the substrate holding / supporting member, each corner portion of the substrate 1 corresponds to the substrate holding / supporting as shown in FIG. The members 20a, 20b, 20c, and 20d are accommodated in the inner corners 21a, 21b, 21c, and 21d. Then, by changing the setting of the diagonal distance between the inner corners of the substrate holding / supporting member, the central portion of the substrate 1 starts to bend downward or conversely bends upward to hold it stably. Can be controlled. When bending upward, it is necessary to be careful because the substrate 1 may be damaged if the amount of bending becomes too large.

基板保持・支持部材はベース部材２２に固定されていて、基板１の各コーナ部は基板保持・支持部材の内側角部に規制されて動かないので、基板１が図１（ｃ）に示した上側に撓んだ状態を保持して逆方向の下側に撓まないように基板保持・支持部材の内側角部の対角間距離を設定しておいて、このとき基板支持部材４を取り外せば、基板１は図１（ｄ）に示すように、上側に撓んだ状態で静止して保持されることになる。基板１が上側に撓んだ状態で静止して保持されるときの基板保持・支持部材の内側角部の対角間距離は、基板１の基板サイズ、厚み、および密度、ヤング率、引っ張り強さ等の材料に固有の物理量を用いて、数値計算に基づくシミュレーションが可能であるが、ここでは実際に製造に用いる基板１を用いて実測により求めて設定した。   Since the substrate holding / supporting member is fixed to the base member 22 and each corner portion of the substrate 1 is restricted by the inner corners of the substrate holding / supporting member and does not move, the substrate 1 is shown in FIG. If the distance between the diagonal corners of the inner corners of the substrate holding / supporting member is set so as to keep it bent upward and not bent downward in the opposite direction, the substrate supporting member 4 can be removed at this time. As shown in FIG. 1D, the substrate 1 is held stationary while being bent upward. The diagonal distance between the inner corners of the substrate holding / supporting member when the substrate 1 is held stationary with the substrate bent upward is the substrate size, thickness and density, Young's modulus, and tensile strength of the substrate 1. Although simulation based on numerical calculation is possible using physical quantities unique to the materials such as the above, here, it is obtained and set by actual measurement using the substrate 1 actually used for manufacturing.

上述した方法により、基板１を搬送し、基板保持・支持部材に安定的に保持・支持することが可能になり、基板１の撓みにより発生する応力に起因する破損等の問題も解消できることになる。また表示装置の製造に際し、基板１に電極等の構成要素を蒸着や吹きつけ塗布により形成するとき、図１に示すベース部材２２の中央部に設けた開口部２３を通して、図１（ｄ）に示した状態で支持したまま工程処理を行うことも可能である。   By the method described above, the substrate 1 can be transported and stably held and supported by the substrate holding / supporting member, and problems such as breakage due to stress generated by the bending of the substrate 1 can be solved. . Further, in manufacturing the display device, when components such as electrodes are formed on the substrate 1 by vapor deposition or spray coating, the opening 23 provided in the central portion of the base member 22 shown in FIG. It is also possible to perform the process while supporting in the state shown.

なお、上述した本発明の実施の形態１における基板の搬送保持方法においては、基板１の長辺を二等分して短辺側に平行になるような位置に基板支持部材４を配置する例で説明したが、基板支持部材４を基板１の短辺を二等分して長辺側に平行になるような位置に配置する方法も可能である。   In the substrate transport and holding method according to Embodiment 1 of the present invention described above, an example in which the substrate support member 4 is arranged at a position where the long side of the substrate 1 is divided into two equal parts and parallel to the short side. As described above, it is possible to arrange the substrate supporting member 4 at a position where the short side of the substrate 1 is divided into two equal parts and parallel to the long side.

また、基板保持手段２を構成する基板保持・支持部材の数量、形状および配置の方法については、図１に示す例に限定されるものではなく、例えば、図２（ａ）、（ｂ）、（ｃ）、（ｄ）に示したような数量、形状および配置も可能である。なお、図２（ａ）に示したのは、直法立体アングル状に形成された４個の基板保持・支持部材２０ａ、２０ｂ、２０ｃ、２０ｄのそれぞれの内側角部２１ａ、２１ｂ、２１ｃ、２１ｄを切り欠いた形状であって、それぞれの側辺部で基板１が保持されることになる。また、図２（ｂ）、（ｃ）、（ｄ）に示した基板保持手段２を構成する基板保持・支持部材においても、それぞれの内側角部を切り欠いた形状とし、側辺部で基板１を保持するようにした構成も可能である。また、図示はしていないが、基板保持・支持部材を５個以上用いることも可能である。さらに、基板支持部材４の形状は図示した丸棒に限定されることはなく、角棒や帯状の平板を用いることもできる。   Further, the number, shape, and arrangement method of the substrate holding / supporting members constituting the substrate holding means 2 are not limited to the example shown in FIG. 1, and for example, FIG. 2 (a), (b), The quantity, shape and arrangement as shown in (c) and (d) are also possible. FIG. 2A shows the inner corners 21a, 21b, 21c, 21d of the four substrate holding / supporting members 20a, 20b, 20c, 20d formed in a straight three-dimensional angle. The substrate 1 is held at each side portion. Further, the substrate holding / supporting members constituting the substrate holding means 2 shown in FIGS. 2B, 2C, and 2D are also formed by notching the respective inner corners, and the substrate is formed at the side portion. A configuration in which 1 is held is also possible. Although not shown, it is possible to use five or more substrate holding / supporting members. Furthermore, the shape of the substrate support member 4 is not limited to the illustrated round bar, and a square bar or a strip-shaped flat plate can also be used.

（実施の形態２）
次に、本発明の実施の形態２におけるフラットパネルディスプレイ用基板の搬送保持装置および搬送保持方法について図３を用いて説明する。図３は本発明の実施の形態２における基板保持方法を説明する図である。本発明の実施の形態２における基板の搬送保持方法は図１に示した本発明の実施の形態１における基板の搬送保持方法と類似するところがあり、図３中の同じ部材要素には同じ符号を付している。 (Embodiment 2)
Next, a transport and holding device and a transport and holding method for a flat panel display substrate in Embodiment 2 of the present invention will be described with reference to FIG. FIG. 3 is a diagram for explaining a substrate holding method according to Embodiment 2 of the present invention. The substrate transport and holding method in the second embodiment of the present invention is similar to the substrate transport and holding method in the first embodiment of the present invention shown in FIG. 1, and the same reference numerals are used for the same member elements in FIG. It is attached.

図３において、図１（ａ）に示した本発明の実施の形態１における基板の搬送保持装置と異なるところは、搬送保持手段３１の構成と基板支持部材４を用いないところである。図１に示した本発明の実施の形態１における基板の搬送保持装置の搬送保持手段３は６個の吸着保持具３０が基板１を保持するのに十分な剛性備えた複数のアーム５で直結接続された構成を有していたが、図３に示した本発明の実施の形態１における基板の搬送保持装置の搬送保持手段３１は、アームが１本のメインアーム５１とメインアーム５１から連結部材６を介して分岐する２本ずつのサブアーム５２、５３からなり、連結部材６はサブアーム５２、５３を固定保持する状態と可動自在の状態への切り換えが可能になって、後述するように搬送保持手段３１に基板支持部材の機能を持たせているところが大きく異なっている。そして、それぞれのアームに接続された吸着保持具３０、および直法立体アングル状に形成された少なくとも４個の基板保持・支持部材２０ａ、２０ｂ、２０ｃ、２０ｄがそれぞれの内側角部２１ａ、２１ｂ、２１ｃ、２１ｄを同一平面上で対角状に対向させて、対角間距離が基板１の対角長さよりも短くなるように開口部２３を有するベース部材２２に配置、固定されている基板保持手段２の構成については、図１に示した本発明の実施の形態１における基板の搬送保持装置と同じである。   In FIG. 3, the difference from the substrate transport and holding apparatus in the first embodiment of the present invention shown in FIG. 1A is that the configuration of the transport and holding means 31 and the substrate support member 4 are not used. The conveyance holding means 3 of the substrate conveyance holding apparatus in Embodiment 1 of the present invention shown in FIG. 1 is directly connected by a plurality of arms 5 having sufficient rigidity for the six suction holders 30 to hold the substrate 1. The transfer holding means 31 of the substrate transfer holding apparatus according to the first embodiment of the present invention shown in FIG. 3 is connected to the main arm 51 and the main arm 51 with one arm. It consists of two sub-arms 52 and 53 that diverge through the member 6, and the connecting member 6 can be switched between a state in which the sub-arms 52 and 53 are fixedly held and a state in which the sub-arms 52 and 53 are movable. The place where the holding means 31 is given the function of a substrate support member is greatly different. The suction holding tool 30 connected to each arm and at least four substrate holding / supporting members 20a, 20b, 20c, 20d formed in a straight three-dimensional angle form inner corners 21a, 21b, Substrate holding means arranged and fixed on the base member 22 having the opening 23 so that the diagonal distances on the same plane are diagonally opposed to each other and the diagonal distance is shorter than the diagonal length of the substrate 1. The configuration of 2 is the same as that of the substrate transfer and holding device in the first embodiment of the present invention shown in FIG.

図３（ａ）には基板１を搬送保持手段３１により基板保持手段２の上方に移送し、基板保持手段２に載置する前の状態を斜視図で示している。図３（ａ）において、表示装置の製造に用いる基板１の電極等の構成要素を形成しない側の面を搬送保持手段３１に備わる吸盤等の吸着保持具３０で吸着して保持し、保持・支持する基板保持手段２の上方に基板１を搬送する。このとき連結部材６はサブアーム５２、５３を固定保持する状態にあり、基板１は水平に保たれている。   FIG. 3A is a perspective view showing a state before the substrate 1 is transferred above the substrate holding means 2 by the transfer holding means 31 and placed on the substrate holding means 2. In FIG. 3A, the surface of the substrate 1 used for manufacturing the display device on which the components such as electrodes are not formed is sucked and held by a suction holder 30 such as a suction cup provided in the transport holding means 31. The substrate 1 is transported above the substrate holding means 2 to be supported. At this time, the connecting member 6 is in a state of fixing and holding the sub-arms 52 and 53, and the substrate 1 is kept horizontal.

この状態で基板１を図３（ａ）中に矢印Ｃで示した方向に降下させると基板保持・支持部材２０ａ、２０ｂ、２０ｃ、２０ｄの上部端面上に基板１が載置されるが、基板１の保持はできていない状態にある。基板１を降下させる前に、サブアーム５２、５３を固定保持している連結部材６の状態を可動自在の状態へ切り換えると、ＢＢ部断面図として図３（ｂ）に示した状態を経て、基板１は自重により短辺側が下がるように矢印Ｃで示す方向に撓み始め、基板１の長辺側の投影サイズが徐々に縮小していく。したがって、本発明の実施の形態２における搬送保持手段３１は前述した実施の形態１における基板支持部材の機能を有しているといえる。このようにして、基板１の投影された対角長が基板保持・支持部材の内側角部における対角間距離よりも短くなると、図３（ｃ）に示すように基板１の各コーナ部が対応する基板保持・支持部材２０ａ、２０ｂ、２０ｃ、２０ｄの内側角部２１ａ、２１ｂ、２１ｃ、２１ｄに収まるようになる。ここで、基板１を降下させると、基板支持部材４は基板１と接触し、基板１を支持するようになる。そして、基板保持・支持部材の内側角部の対角間距離の設定を変更することにより、基板１の中央部を下方に撓ませ始めた状態にしたり、逆に上方に撓ませてそのまま安定に保持したりするといった制御が可能である。上方に撓ませる場合、撓み量が大きくなり過ぎると基板１を破損させてしまうことがあるので注意が必要になる。   In this state, when the substrate 1 is lowered in the direction indicated by the arrow C in FIG. 3A, the substrate 1 is placed on the upper end surfaces of the substrate holding / supporting members 20a, 20b, 20c, and 20d. 1 is not held. When the state of the connecting member 6 that holds and holds the sub arms 52 and 53 is switched to a movable state before the substrate 1 is lowered, the substrate is subjected to the state shown in FIG. 1 begins to bend in the direction indicated by the arrow C so that the short side is lowered by its own weight, and the projection size on the long side of the substrate 1 is gradually reduced. Therefore, it can be said that the conveyance holding means 31 in Embodiment 2 of the present invention has the function of the substrate support member in Embodiment 1 described above. In this way, when the projected diagonal length of the substrate 1 becomes shorter than the diagonal distance at the inner corner portion of the substrate holding / supporting member, each corner portion of the substrate 1 corresponds as shown in FIG. The substrate holding / supporting members 20a, 20b, 20c, and 20d are accommodated in the inner corners 21a, 21b, 21c, and 21d. Here, when the substrate 1 is lowered, the substrate support member 4 comes into contact with the substrate 1 and supports the substrate 1. Then, by changing the setting of the diagonal distance between the inner corners of the substrate holding / supporting member, the central portion of the substrate 1 starts to bend downward or conversely bends upward to hold it stably. Can be controlled. When bending upward, it is necessary to be careful because the substrate 1 may be damaged if the amount of bending becomes too large.

基板保持・支持部材はベース部材２２に固定されていて、基板１の各コーナ部は基板保持・支持部材の内側角部に規制されて動かないので、基板１が図３（ｃ）に示した上側に撓んだ状態を保持して逆方向の下側に撓まないように基板保持・支持部材の内側角部の対角間距離を設定しておいて、このとき搬送保持手段３１を取り外せば、基板１は図３（ｄ）に示すように、上側に撓んだ状態で静止して保持されることになる。基板１が上側に撓んだ状態で静止して保持されるときの基板保持・支持部材の内側角部の対角間距離は、基板１の基板サイズ、厚み、および密度、ヤング率、引っ張り強さ等の材料に固有の物理量を用いて、数値計算に基づくシミュレーションが可能であるが、ここでは実際に製造に用いる基板１を用いて実測により求めて設定した。   Since the substrate holding / supporting member is fixed to the base member 22 and each corner portion of the substrate 1 is restricted by the inner corners of the substrate holding / supporting member, the substrate 1 is shown in FIG. If the distance between the diagonal corners of the inner corners of the substrate holding / supporting member is set so that the upper side is bent and the lower side is not bent downward, the conveyance holding means 31 can be removed at this time. As shown in FIG. 3D, the substrate 1 is held stationary while being bent upward. The diagonal distance between the inner corners of the substrate holding / supporting member when the substrate 1 is held stationary with the substrate bent upward is the substrate size, thickness and density, Young's modulus, and tensile strength of the substrate 1. Although simulation based on numerical calculation is possible using physical quantities unique to the materials such as the above, here, it is obtained and set by actual measurement using the substrate 1 actually used for manufacturing.

上述した方法により、基板１を搬送し、基板保持・支持部材に安定的に保持・支持することが可能になり、基板１の撓みにより発生する応力に起因する破損等の問題も解消できることになる。また表示装置の製造に際し、基板１に電極等の構成要素を蒸着や吹きつけ塗布により形成するとき、図１に示すベース部材２２の中央部に設けた開口部２３を通して、図３（ｄ）に示した状態で支持したまま工程処理を行うことも可能である。   By the method described above, the substrate 1 can be transported and stably held and supported by the substrate holding / supporting member, and problems such as breakage due to stress generated by the bending of the substrate 1 can be solved. . Further, in manufacturing the display device, when components such as electrodes are formed on the substrate 1 by vapor deposition or spray coating, the opening 23 provided in the central portion of the base member 22 shown in FIG. It is also possible to perform the process while supporting in the state shown.

なお、上述した本発明の実施の形態２における基板の搬送保持方法においては、基板１の長辺に平行な辺側が撓む例で説明したが、短辺側に平行な辺側が撓むように搬送保持手段３１の吸着保持具３０を配置する構成も可能である。   In the substrate transport and holding method according to the second embodiment of the present invention described above, the example in which the side parallel to the long side of the substrate 1 bends has been described, but the substrate is transported and held so that the side parallel to the short side bends. The structure which arrange | positions the adsorption | suction holder 30 of the means 31 is also possible.

また、基板保持手段２を構成する基板保持・支持部材の数量、形状および配置の方法については、図３に示す例に限定されるものではなく、例えば、実施の形態１の説明において図２（ａ）、（ｂ）、（ｃ）、（ｄ）に示したような数量、形状および配置が可能であることは、本発明の実施の形態２におけるフラットパネルディスプレイ用基板の搬送保持装置および搬送保持方法においても同じである。   Further, the number, shape, and arrangement method of the substrate holding / supporting members constituting the substrate holding means 2 are not limited to the example shown in FIG. 3. For example, in the description of the first embodiment, FIG. The quantity, shape and arrangement as shown in a), (b), (c) and (d) are possible because the flat panel display substrate carrying and holding device and carrying in the second embodiment of the present invention are as follows. The same applies to the holding method.

（実施の形態３）
続いて、本発明の実施の形態３におけるフラットパネルディスプレイ用基板の搬送保持装置および搬送保持方法について図４、図５を用いて説明する。図４は本発明の実施の形態３における基板保持方法を説明する図、図５は本発明の実施の形態３における別の基板保持方法を説明する図である。本発明の実施の形態３における基板の搬送保持方法は図３に示した本発明の実施の形態２における基板の搬送保持方法と類似するところがあり、図４、図５中の同じ部材要素には同じ符号を付している。 (Embodiment 3)
Next, a flat panel display substrate transfer holding apparatus and transfer holding method according to Embodiment 3 of the present invention will be described with reference to FIGS. FIG. 4 is a diagram for explaining a substrate holding method according to the third embodiment of the present invention, and FIG. 5 is a diagram for explaining another substrate holding method according to the third embodiment of the present invention. The substrate transport and holding method in the third embodiment of the present invention is similar to the substrate transport and holding method in the second embodiment of the present invention shown in FIG. 3, and the same member elements in FIGS. The same reference numerals are attached.

図４において、図３（ａ）に示した本発明の実施の形態２における基板の搬送保持装置と異なるところは、搬送保持手段３２の構成である。図４に示した本発明の実施の形態３における基板の搬送保持装置の搬送保持手段３２は、アームが剛性を有する１本のメインアーム５１とメインアーム５１から分岐する２本ずつの可撓性を有するサブアーム５４、５５からなり、吸着保持具３０とのアームとの接続部付近に固定された６個の高さ位置調整治具７を備え、高さ位置調整治具７は矢印Ｄで示した方向に吸着保持具３０、すなわち基板１の高さ位置が可変になっているところが異なっている。しかし、搬送保持手段３２に基板支持部材の機能を持たせているところは同じであり、直法立体アングル状に形成された少なくとも４個の基板保持・支持部材２０ａ、２０ｂ、２０ｃ、２０ｄがそれぞれの内側角部２１ａ、２１ｂ、２１ｃ、２１ｄを同一平面上で対角状に対向させて、対角間距離が基板１の対角長さよりも短くなるように開口部２３を有するベース部材２２に配置、固定されている基板保持手段２の構成については、図３に示した本発明の実施の形態２における基板の搬送保持装置と同じである。   In FIG. 4, the difference from the substrate transport and holding device in the second embodiment of the present invention shown in FIG. The transfer holding means 32 of the substrate transfer holding apparatus according to the third embodiment of the present invention shown in FIG. 4 has one main arm 51 having a rigid arm and two flexible arms branched from the main arm 51. Are provided with six height position adjusting jigs 7 fixed in the vicinity of the connection portion between the suction holding tool 30 and the arm, and the height position adjusting jig 7 is indicated by an arrow D. The difference is that the height position of the suction holder 30, that is, the substrate 1 is variable. However, the place where the transport holding means 32 has the function of a substrate support member is the same, and at least four substrate holding / support members 20a, 20b, 20c, and 20d formed in a straight three-dimensional angle form are respectively provided. The inner corners 21a, 21b, 21c, and 21d are opposed to each other diagonally on the same plane, and are arranged on the base member 22 having the opening 23 so that the distance between the diagonals is shorter than the diagonal length of the substrate 1. The configuration of the fixed substrate holding means 2 is the same as that of the substrate transfer and holding device in the second embodiment of the present invention shown in FIG.

図４（ａ）には基板１を搬送保持手段３２により基板保持手段２の上方に移送し、基板保持手段２に載置する前の状態を斜視図で示している。図４（ａ）において、表示装置の製造に用いる基板１の電極等の構成要素を形成しない側の面を搬送保持手段３２に備わる吸盤等の吸着保持具３０で吸着して保持し、保持・支持する基板保持手段２の上方に基板１を搬送する。このとき６個の高さ位置調整治具７は吸着保持具３０を同じ高さ位置に設定された状態にあり、基板１は水平に保たれている。   FIG. 4A is a perspective view showing a state before the substrate 1 is transferred above the substrate holding means 2 by the transfer holding means 32 and placed on the substrate holding means 2. In FIG. 4A, the surface of the substrate 1 used for manufacturing the display device on which the components such as electrodes are not formed is sucked and held by a suction holder 30 such as a suction cup provided in the transport holding means 32. The substrate 1 is transported above the substrate holding means 2 to be supported. At this time, the six height position adjusting jigs 7 are in a state in which the suction holder 30 is set at the same height position, and the substrate 1 is kept horizontal.

この状態で基板１を図４（ａ）中に矢印Ａで示した方向に降下させると基板保持・支持部材２０ａ、２０ｂ、２０ｃ、２０ｄの上部端面上に基板１が載置されるが、基板１の保持はできていない状態にある。基板１を降下させる前に、基板１のコーナ部４箇所にある高さ位置調整治具７の固定状態を解除すると、ＢＢ部断面図として図４（ｂ）に示した状態を経て、基板１は自重により短辺側が下がるように矢印Ｃで示す方向に撓み始め、基板１の長辺側の投影サイズが徐々に縮小していく。したがって、本発明の実施の形態３における搬送保持手段３２の高さ位置調整治具７は前述した実施の形態２における連結部材６、すなわち実施の形態１における基板支持部材の機能を有しているといえる。基板１の投影された対角長が基板保持・支持部材の内側角部における対角間距離よりも短くなると、図４（ｃ）に示すように基板１の各コーナ部が対応する基板保持・支持部材２０ａ、２０ｂ、２０ｃ、２０ｄの内側角部２１ａ、２１ｂ、２１ｃ、２１ｄに収まるようになる。ここで、基板１を降下させると、基板支持部材４は基板１と接触し、基板１を支持するようになる。そして、基板保持・支持部材の内側角部の対角間距離の設定を変更することにより、基板１の中央部を下方に撓ませ始めた状態にしたり、逆に上方に撓ませてそのまま安定に保持したりするといった制御が可能である。上方に撓ませる場合、撓み量が大きくなり過ぎると基板１を破損させてしまうことがあるので注意が必要になる。   In this state, when the substrate 1 is lowered in the direction indicated by the arrow A in FIG. 4A, the substrate 1 is placed on the upper end surfaces of the substrate holding / supporting members 20a, 20b, 20c, and 20d. 1 is not held. Before the substrate 1 is lowered, when the fixed state of the height position adjusting jig 7 at the four corners of the substrate 1 is released, the substrate 1 passes through the state shown in FIG. Begins to bend in the direction indicated by the arrow C so that the short side is lowered by its own weight, and the projection size on the long side of the substrate 1 is gradually reduced. Therefore, the height position adjusting jig 7 of the conveyance holding means 32 in the third embodiment of the present invention has the function of the connecting member 6 in the second embodiment, that is, the substrate support member in the first embodiment. It can be said. When the projected diagonal length of the substrate 1 becomes shorter than the diagonal distance at the inner corner of the substrate holding / supporting member, each corner portion of the substrate 1 corresponds to the substrate holding / supporting as shown in FIG. The members 20a, 20b, 20c, and 20d are accommodated in the inner corners 21a, 21b, 21c, and 21d. Here, when the substrate 1 is lowered, the substrate support member 4 comes into contact with the substrate 1 and supports the substrate 1. Then, by changing the setting of the diagonal distance between the inner corners of the substrate holding / supporting member, the central portion of the substrate 1 starts to bend downward or conversely bends upward to hold it stably. Can be controlled. When bending upward, it is necessary to be careful because the substrate 1 may be damaged if the amount of bending becomes too large.

基板保持・支持部材はベース部材２２に固定されていて、基板１の各コーナ部は基板保持・支持部材の内側角部に規制されて動かないので、基板１が図４（ｃ）に示した上側に撓んだ状態を保持して逆方向の下側に撓まないように基板保持・支持部材の内側角部の対角間距離を設定しておいて、このとき搬送保持手段３２を取り外せば、基板１は図４（ｄ）に示すように、上側に撓んだ状態で静止して保持されることになる。基板１が上側に撓んだ状態で静止して保持されるときの基板保持・支持部材の内側角部の対角間距離は、基板１の基板サイズ、厚み、および密度、ヤング率、引っ張り強さ等の材料に固有の物理量を用いて、数値計算に基づくシミュレーションが可能であるが、ここでは実際に製造に用いる基板１を用いて実測により求めて設定した。   Since the substrate holding / supporting member is fixed to the base member 22 and each corner portion of the substrate 1 is restricted by the inner corners of the substrate holding / supporting member, the substrate 1 is shown in FIG. If the distance between the diagonal corners of the inner corners of the substrate holding / supporting member is set so as to keep it bent upward and not bent downward in the opposite direction, the conveyance holding means 32 can be removed at this time. As shown in FIG. 4D, the substrate 1 is held stationary while being bent upward. The diagonal distance between the inner corners of the substrate holding / supporting member when the substrate 1 is held stationary with the substrate bent upward is the substrate size, thickness and density, Young's modulus, and tensile strength of the substrate 1. Although simulation based on numerical calculation is possible using physical quantities unique to the materials such as the above, here, it is obtained and set by actual measurement using the substrate 1 actually used for manufacturing.

なお、上記説明では図４（ｃ）において、基板１のコーナ部４箇所にある高さ位置調整治具７の固定状態を解除し、基板１の自重で高さ位置調整治具７を伸長させ矢印Ｃ方向に撓ませるとして説明したが、側縁部付近の２箇所に設置された高さ位置調整治具７の固定状態を解除して、側縁部付近の２箇所の高さ位置調整治具７を矢印Ｃとは逆方向に伸長させて、基板１を同様な形状に撓ませることもできる。   In the above description, in FIG. 4C, the fixed state of the height position adjusting jig 7 at the four corners of the substrate 1 is released, and the height position adjusting jig 7 is extended by its own weight. Although it demonstrated that it bent in the direction of arrow C, the fixed state of the height position adjustment jig 7 installed in two places near a side edge part is cancelled | released, and two height position adjustment treatments near a side edge part are carried out. The tool 7 can be extended in the opposite direction to the arrow C to bend the substrate 1 into a similar shape.

また、本発明の実施の形態３におけるフラットパネルディスプレイ用基板の搬送保持装置の図４に示した搬送保持手段３２の構成において、高さ位置調整治具７を図５に示すような、基板１のコーナ部付近の４箇所に設置された治具を、例えばばねのような弾性部材を備える高さ位置調整治具７２と側縁部付近の２箇所に設置された治具を非伸縮性材料からなる高さ固定治具７１にと置き換えることも可能である。この構成の搬送保持手段３２であっても、基板１のコーナ部４箇所にある高さ位置調整治具７２の固定状態を解除して、ＢＢ部断面図として図５（ｂ）に示した状態を経て、基板１を自重により短辺側が下がるように矢印Ｃで示す方向に撓ませ、基板１の投影された対角長が基板保持・支持部材の内側角部における対角間距離よりも短くなった段階で、図４（ｃ）に示すように基板１の各コーナ部を対応する基板保持・支持部材２０ａ、２０ｂ、２０ｃ、２０ｄの内側角部２１ａ、２１ｂ、２１ｃ、２１ｄに収め、基板１を支持させることができる。そして、図５に示した構成において、基板１のコーナ部４箇所を高さ固定治具７１とし、基板１の側縁部付近の２箇所を高さ位置調整治具７２とし、側縁部付近の２箇所に設置された高さ位置調整治具７２の固定状態を解除して、側縁部付近の２箇所の高さ位置調整治具７１を矢印Ｃとは逆方向に伸長させて、基板１を同様な形状に撓ませることも可能である。   Further, in the configuration of the conveyance holding means 32 shown in FIG. 4 of the flat panel display substrate conveyance holding apparatus according to the third embodiment of the present invention, the height position adjusting jig 7 is the substrate 1 as shown in FIG. The jigs installed at four locations in the vicinity of the corner portion are made of, for example, a height position adjusting jig 72 having an elastic member such as a spring and the jigs installed at two locations in the vicinity of the side edge portion. It can be replaced with a height fixing jig 71 made of Even in the conveyance holding means 32 of this configuration, the fixed state of the height position adjusting jig 72 at the four corner portions of the substrate 1 is released, and the state shown in FIG. Then, the substrate 1 is bent in the direction indicated by the arrow C so that the short side is lowered by its own weight, and the projected diagonal length of the substrate 1 becomes shorter than the diagonal distance at the inner corner of the substrate holding / supporting member. At this stage, as shown in FIG. 4C, each corner portion of the substrate 1 is accommodated in the inner corner portions 21a, 21b, 21c, 21d of the corresponding substrate holding / supporting members 20a, 20b, 20c, 20d. Can be supported. In the configuration shown in FIG. 5, four corner portions of the substrate 1 are used as the height fixing jig 71, and two locations near the side edge portion of the substrate 1 are used as the height position adjusting jig 72, and the vicinity of the side edge portion. The height position adjusting jigs 72 installed at the two positions are released from the fixed state, and the two height position adjusting jigs 71 near the side edges are extended in the direction opposite to the arrow C, and the substrate is It is also possible to bend 1 into a similar shape.

上述した方法により、基板１を搬送し、基板保持・支持部材に安定的に保持・支持することが可能になり、基板１の撓みにより発生する応力に起因する破損等の問題も解消できることになる。また表示装置の製造に際し、基板１に電極等の構成要素を蒸着や吹きつけ塗布により形成するとき、図１に示すベース部材２２の中央部に設けた開口部２３を通して、図４（ｄ）に示した状態で支持したまま工程処理を行うことも可能である。   By the method described above, the substrate 1 can be transported and stably held and supported by the substrate holding / supporting member, and problems such as breakage due to stress generated by the bending of the substrate 1 can be solved. . Further, in manufacturing the display device, when components such as electrodes are formed on the substrate 1 by vapor deposition or spray coating, the opening 23 provided in the central portion of the base member 22 shown in FIG. It is also possible to perform the process while supporting in the state shown.

なお、上述した本発明の実施の形態２における基板の搬送保持方法においては、基板１の長辺に平行な辺側が撓む例で説明したが、短辺側に平行な辺側が撓むように搬送保持手段３２の吸着保持具３０を配置する構成も可能である。   In the substrate transport and holding method according to the second embodiment of the present invention described above, the example in which the side parallel to the long side of the substrate 1 bends has been described, but the substrate is transported and held so that the side parallel to the short side bends. A configuration in which the suction holder 30 of the means 32 is arranged is also possible.

また、基板保持手段２を構成する基板保持・支持部材の数量、形状および配置の方法については、図４および図５に示す例に限定されるものではなく、例えば、実施の形態１の説明において図２（ａ）、（ｂ）、（ｃ）、（ｄ）に示したような数量、形状および配置が可能であることは、本発明の実施の形態３におけるフラットパネルディスプレイ用基板の搬送保持装置および搬送保持方法においても同じである。   Further, the number, shape, and arrangement method of the substrate holding / supporting members constituting the substrate holding means 2 are not limited to the examples shown in FIGS. 4 and 5, for example, in the description of the first embodiment. The quantity, shape, and arrangement as shown in FIGS. 2 (a), (b), (c), and (d) are possible because the flat panel display substrate according to the third embodiment of the present invention is transported and held. The same applies to the apparatus and the conveyance holding method.

（実施の形態４）
続いて、本発明の実施の形態４におけるフラットパネルディスプレイ用基板の搬送保持装置および搬送保持方法について図６を用いて説明する。図６は本発明の実施の形態４における基板保持方法を説明する図である。本発明の実施の形態４における基板の搬送保持方法は図１に示した本発明の実施の形態１における基板の搬送保持方法と類似するところがあり、図６中の同じ部材要素には同じ符号を付している。 (Embodiment 4)
Next, a flat panel display substrate transfer holding device and transfer holding method according to Embodiment 4 of the present invention will be described with reference to FIG. FIG. 6 is a diagram for explaining a substrate holding method according to Embodiment 4 of the present invention. The substrate transport and holding method in the fourth embodiment of the present invention is similar to the substrate transport and holding method in the first embodiment of the present invention shown in FIG. 1, and the same member elements in FIG. It is attached.

図６（ａ）は基板１を基板保持手段２の上方に移送し、基板保持手段２に載置する前の状態を斜視図で示し、図６（ｂ）は側面図で示している。本発明の実施の形態４における基板１の搬送保持方法では、基板１の電極等の構成要素を形成しない側の面を、基板１が保持・支持されるときの撓んだ状態と略等しい曲面を有する基板支持部材４０を用いて基板保持手段２上に移送（搬送）移送するところが図１に示した実施の形態１における基板の搬送保持方法とは異なっている。なお、基板支持部材４０の基板１が撓む側の投影長さは基板１の撓んだ側の投影長さより小さくなるよう形成されている。また、基板保持手段２には直法立体アングル状に形成された少なくとも４個の基板保持・支持部材２０ａ、２０ｂ、２０ｃ、２０ｄがそれぞれの内側角部２１ａ、２１ｂ、２１ｃ、２１ｄを同一平面上で対角状に対向させ、対角間距離が基板１の対角長さよりも短くなるように配置、固定され、そして、基板保持・支持部材２０ａ、２０ｂ、２０ｃ、２０ｄは図６（ａ）に示すような開口部２３を有するベース部材２２に載置・固定されているところは実施の形態１と同じである。   FIG. 6A is a perspective view showing a state before the substrate 1 is transferred above the substrate holding means 2 and placed on the substrate holding means 2, and FIG. 6B is a side view. In the method for transporting and holding the substrate 1 according to the fourth embodiment of the present invention, the surface of the substrate 1 on which the components such as electrodes are not formed is a curved surface that is substantially equal to the bent state when the substrate 1 is held and supported. Transferring (transferring) the substrate onto the substrate holding means 2 using the substrate support member 40 having a difference from the substrate transfer and holding method in the first embodiment shown in FIG. The projected length of the substrate support member 40 on the side where the substrate 1 is bent is formed to be smaller than the projected length of the substrate 1 on the bent side. Further, the substrate holding means 2 includes at least four substrate holding / supporting members 20a, 20b, 20c, and 20d formed in a straight three-dimensional angle so that the inner corner portions 21a, 21b, 21c, and 21d are on the same plane. The substrate holding and supporting members 20a, 20b, 20c, and 20d are arranged and fixed so that the diagonal distance is shorter than the diagonal length of the substrate 1, and the substrate holding / supporting members 20a, 20b, 20c, and 20d are shown in FIG. The place where it is placed and fixed on the base member 22 having the opening 23 as shown is the same as in the first embodiment.

図６（ａ）、図６（ｂ）に示した状態で基板１を矢印Ａで示した方向に降下させていくが、基板１は保持・支持されるときの撓んだ状態と略等しい曲面を有する基板支持部材４０で支持されており、基板１の投影された対角長が基板保持・支持部材の内側角部における対角間距離よりも短く、図６（ｃ）に示すように基板１の各コーナ部が対応する基板保持・支持部材２０ａ、２０ｂ、２０ｃ、２０ｄの内側角部に収まるようになっているので、基板保持・支持部材の内側角部に基板１の各コーナ部を載置させることができる。基板保持・支持部材２０ａ、２０ｂ、２０ｃ、２０ｄはベース部材２２に固定されていて、基板保持手段２に載置された基板１の各コーナ部は基板保持・支持部材の内側角部に規制されて動かない。   In the state shown in FIGS. 6A and 6B, the substrate 1 is lowered in the direction indicated by the arrow A, but the curved surface is substantially equal to the bent state when the substrate 1 is held and supported. The projected diagonal length of the substrate 1 is shorter than the diagonal distance at the inner corner of the substrate holding / supporting member, as shown in FIG. 6 (c). The corners of the substrate 1 are accommodated in the inner corners of the corresponding substrate holding / supporting members 20a, 20b, 20c, and 20d, so that the corners of the substrate 1 are mounted on the inner corners of the substrate holding / supporting member. Can be placed. The substrate holding / supporting members 20a, 20b, 20c, and 20d are fixed to the base member 22, and each corner portion of the substrate 1 placed on the substrate holding means 2 is regulated by the inner corner of the substrate holding / supporting member. Does not move.

このとき、実施の形態１の基板保持方法の説明と同様に、基板１が図６（ｃ）に示した上側に撓んだ状態を保持して逆方向の下側に撓まないように、基板保持・支持部材の内側角部の対角間距離を設定しておいて、基板支持部材４０を取り外すと、基板１は図６（ｄ）に示すように、上側に撓んだ状態で静止して保持されることになる。基板１が上側に撓んだ状態で静止して保持されるときの基板保持・支持部材の内側角部の対角間距離は実際に製造に用いる基板１を用いて実測により求めて設定しているところは、実施の形態１における搬送保持方法の場合と同様である。   At this time, similarly to the description of the substrate holding method of the first embodiment, the substrate 1 keeps the state of being bent upward as shown in FIG. 6C and is not bent downward in the reverse direction. When the diagonal distance between the inner corners of the substrate holding / supporting member is set and the substrate supporting member 40 is removed, the substrate 1 is stationary while being bent upward as shown in FIG. 6 (d). Will be held. The diagonal distance between the inner corners of the substrate holding / supporting member when the substrate 1 is held stationary in a state of being bent upward is obtained and set by actual measurement using the substrate 1 actually used for manufacturing. However, this is the same as in the case of the conveyance holding method in the first embodiment.

上述した方法により、基板１を搬送し、基板保持・支持部材に安定的に保持・支持することが可能になり、基板１の撓みにより発生する応力に起因する破損等の問題も解消できることになる。また表示装置の製造に際し、基板１に電極等の構成要素を蒸着や吹きつけ塗布により形成するとき、図６に示すベース部材２２の中央部に設けた開口部２３を通して、図６（ｄ）に示した状態で支持したまま工程処理を行うことも可能である。   By the method described above, the substrate 1 can be transported and stably held and supported by the substrate holding / supporting member, and problems such as breakage due to stress generated by the bending of the substrate 1 can be solved. . Further, in manufacturing the display device, when components such as electrodes are formed on the substrate 1 by vapor deposition or spray coating, the opening 23 provided in the central portion of the base member 22 shown in FIG. It is also possible to perform the process while supporting in the state shown.

基板支持部材４０は基板１を保持・支持するときの撓んだ状態と略等しい曲面を有するとしたが、この曲面は前述したように基板１の基板サイズ、厚み、および密度、ヤング率、引っ張り強さ等の材料に固有の物理量を用いて、理論計算あるいはシミュレーションにより求めることも可能であるが、本発明の実施の形態４における基板保持方法では、実際に製造に用いる基板１を撓ませて保持支持した状態で実測により求めて略等しい曲面を有する基板支持部材４０を形成した。そして、基板支持部材４０は、例えば樹脂、金属やセラミック等の材料を用いて形成することができる。   The substrate support member 40 has a curved surface substantially equal to the bent state when the substrate 1 is held and supported. As described above, the curved surface has the substrate size, thickness and density, Young's modulus, and tension of the substrate 1. Although it is possible to obtain by physical calculation or simulation using a physical quantity unique to the material such as strength, in the substrate holding method according to the fourth embodiment of the present invention, the substrate 1 actually used for manufacturing is bent. The substrate support member 40 having a substantially equal curved surface obtained by actual measurement in the state of being held and supported was formed. The substrate support member 40 can be formed using a material such as resin, metal, or ceramic.

基板１を保持支持するのに最適な撓み状態の曲面を有する基板支持部材４０を用いるので、基板支持部材４０の上に基板１を載置して基板保持手段２の上に搬送し、保持支持までの手順を進めることが可能になる。このため、基板の搬送や支持の時間が長くなっても基板１が余分に撓むことがなく、基板１が大きく撓むことにより生ずる悪影響を抑えることができる。   Since the substrate support member 40 having a curved surface that is optimal for holding and supporting the substrate 1 is used, the substrate 1 is placed on the substrate support member 40 and conveyed onto the substrate holding means 2 for holding and supporting. The procedure up to can be advanced. For this reason, even if the time for carrying and supporting the substrate becomes long, the substrate 1 does not bend excessively, and adverse effects caused by the substrate 1 being largely bent can be suppressed.

また、図６（ａ）には基板支持部材４０を１個の部材として示しているが、本発明の実施の形態４においてはこれに限定されるものではなく、基板支持部材４０を複数の部材に分割して用いることができる。例えば、撓んで曲がった２個の細長い部材に分割した基板支持部材４０とし、それぞれ両端部側に配置して用いてもよい。   6A shows the substrate support member 40 as a single member. However, in the fourth embodiment of the present invention, the substrate support member 40 is not limited to this, and the substrate support member 40 is composed of a plurality of members. It can be divided and used. For example, the substrate support member 40 divided into two elongated members bent and bent may be used by being arranged on both ends.

以上説明したように、本発明の実施の形態４における基板保持方法により、基板１を搬送し、基板保持・支持部材に安定的に保持・支持することが可能になり、基板１の撓みにより発生する応力に起因する破損等の問題も解消できることになる。また表示装置の製造に際し、基板１に電極等の構成要素を蒸着や吹きつけ塗布により形成するとき、図６に示すベース部材２２の中央部に設けた開口部２３を通して、図６（ｄ）に示した状態で支持したまま各工程の処理を行うことも可能である。   As described above, the substrate holding method according to the fourth embodiment of the present invention enables the substrate 1 to be transported and stably held and supported on the substrate holding / supporting member, and is generated by the bending of the substrate 1. Problems such as breakage due to the stress to be applied can also be solved. Further, in manufacturing the display device, when components such as electrodes are formed on the substrate 1 by vapor deposition or spray coating, the opening 23 provided in the central portion of the base member 22 shown in FIG. It is also possible to perform each process while supporting in the state shown.

なお、上述した本発明の実施の形態４における基板の搬送保持方法においては、基板１の長辺側に平行になるような位置に基板支持部材４０を配置する例で説明したが、基板支持部材４０を基板１の短辺側に平行になるような位置に配置する方法も可能である。ただし、いずれの場合でも、基板支持部材４０の基板１が撓む側の投影長さは基板１の撓んだ側の投影長さより小さくなるように形成されている必要がある。   In the above-described method for transporting and holding a substrate according to the fourth embodiment of the present invention, the substrate support member 40 is described as an example in which the substrate support member 40 is disposed at a position parallel to the long side of the substrate 1. It is also possible to arrange 40 at a position parallel to the short side of the substrate 1. However, in any case, the projected length of the substrate support member 40 on the side where the substrate 1 bends needs to be smaller than the projected length of the substrate 1 on the deflected side.

また、基板保持手段２を構成する基板保持・支持部材の数量、形状および配置の方法については、図６に示す例に限定されるものではなく、例えば、図２（ａ）、（ｂ）、（ｃ）、（ｄ）に示したような数量、形状および配置も可能である。また、図示していないが、基板保持・支持部材を５個以上用いることも可能である。   Further, the number, shape, and arrangement method of the substrate holding / supporting members constituting the substrate holding means 2 are not limited to the example shown in FIG. 6, and for example, FIG. 2 (a), (b), The quantity, shape and arrangement as shown in (c) and (d) are also possible. Although not shown, it is possible to use five or more substrate holding / supporting members.

さらに、上記説明においては吸盤等の吸着保持具を備えた搬送保持手段を使用せず、最初から基板１の電極等の構成要素を形成しない側の面を保持・支持するときの基板１が撓んだ状態と略等しい曲面を有する基板支持部材４０で支持して基板保持手段２上に移送（搬送）するとしたが、図１に示したような搬送保持手段３の吸着保持具３０を用いて基板１を基板保持手段２上に移送（搬送）し、基板支持部材４０の上に載置し、直ちに吸着保持具３０を取り外して、図６を用いて説明した手順で基板１を基板保持・支持部材に保持・支持することも可能である。   Furthermore, in the above description, the substrate 1 is not bent when holding and supporting the surface of the substrate 1 on which the components such as the electrodes are not formed from the beginning without using the conveyance holding means such as a suction cup. The substrate support member 40 having a curved surface substantially equal to the bent state is supported and transferred (conveyed) onto the substrate holding means 2. However, the suction holder 30 of the conveyance holding means 3 as shown in FIG. 1 is used. The substrate 1 is transferred (conveyed) onto the substrate holding means 2, placed on the substrate support member 40, the suction holder 30 is immediately removed, and the substrate 1 is held and held by the procedure described with reference to FIG. It is also possible to hold and support the support member.

（実施の形態５）
引き続き、本発明の実施の形態５におけるフラットパネルディスプレイ用基板の保持装置および保持方法について図７、図８を用いて説明する。これまで実施の形態１〜実施の形態４では基板を搬送した上で、基板保持手段２に基板１を保持支持する装置と方法を説明したが、本発明の実施の形態５においては搬送装置、搬送方法については、本発明の実施の形態１〜実施の形態４において説明した基板支持部材４および搬送保持手段３、３１、３２を同様に利用することができるので、重複を避けるため説明を省略し、基板１を保持装置を用いて保持する方法についてのみ説明する。ここで、図７は本発明の実施の形態５における基板保持方法を説明する図であり、図８は本発明の実施の形態５における別の基板保持方法を説明する図である。 (Embodiment 5)
Next, a flat panel display substrate holding apparatus and holding method according to Embodiment 5 of the present invention will be described with reference to FIGS. In the first to fourth embodiments, the apparatus and method for holding and supporting the substrate 1 on the substrate holding means 2 after conveying the substrate have been described. However, in the fifth embodiment of the present invention, the conveying apparatus, Regarding the transport method, since the substrate support member 4 and the transport holding means 3, 31, 32 described in the first to fourth embodiments of the present invention can be used in the same manner, the description is omitted to avoid duplication. Only the method for holding the substrate 1 using the holding device will be described. Here, FIG. 7 is a diagram for explaining a substrate holding method in the fifth embodiment of the present invention, and FIG. 8 is a diagram for explaining another substrate holding method in the fifth embodiment of the present invention.

本発明の実施の形態５における保持装置となる基板保持手段２に基板１を載置して基板を保持・支持する状態を斜視図で示した図７（ａ）、および側面図で示した図７（ｂ）において、基板保持手段２はベース部材に相当する下部部材８２、ストッパ５０ａ、５０ｂ、５０ｃ、５０ｄおよび基板載置部４１ａ、４１ｂが一体に形成されている。下部部材８２は基板保持手段２に必要なストッパ５０ａ、５０ｂ、５０ｃ、５０ｄおよび基板載置部４１ａ、４１ｂを積載形成するためのベース部材であり、平板状あるいは、開口部２３となる角状の内孔を抜いて枠状または額縁状（ベゼル状）に形成されている。そして、下部部材８２で基板１が載置される部分の面積は基板１の表面積より大きく設定している。ストッパ５０ａ、５０ｂ、５０ｃ、５０ｄは外観的に図１、図２、図３、図４、図５、図６に示した基板保持・支持部材２０ａ、２０ｂ、２０ｃ、２０ｄに相当するが、その内側角部５１ａ、５１ｂ、５１ｃ、５１ｄは基板１のコーナ部を規制保持するためではなく、基板１が基板保持手段２から外れて落下しないようにするための単なるストッパの機能を有している。また、基板載置部４１は実施の形態４で説明した基板支持部材４０と外観的に似た形状を有している。すなわち、基板１を保持・支持する部分の形状が、実際に基板１を保持・支持するときの撓んだ状態と略等しい曲面を有している。ただし、実施の形態４で説明した基板支持部材４０の基板１が撓む側の投影長さは基板１の撓んだ側の投影長さより小さく設定していたのに対し、基板載置部４１ａ、４１ｂでは基板１が撓む側の投影長さを基板１の撓んだ側の投影長さと等しいか、または大きくなるように形成している。   FIG. 7A is a perspective view showing a state in which the substrate 1 is placed on the substrate holding means 2 serving as a holding device in Embodiment 5 of the present invention, and the substrate is held and supported, and a side view. 7 (b), the substrate holding means 2 is integrally formed with a lower member 82 corresponding to a base member, stoppers 50a, 50b, 50c, 50d and substrate mounting portions 41a, 41b. The lower member 82 is a base member for stacking and forming the stoppers 50 a, 50 b, 50 c, 50 d and the substrate mounting portions 41 a, 41 b necessary for the substrate holding means 2, and has a flat plate shape or a square shape that becomes the opening 23. The inner hole is removed to form a frame shape or a frame shape (bezel shape). The area of the lower member 82 where the substrate 1 is placed is set larger than the surface area of the substrate 1. The stoppers 50a, 50b, 50c, and 50d are externally equivalent to the substrate holding / supporting members 20a, 20b, 20c, and 20d shown in FIGS. 1, 2, 3, 4, 5, and 6. The inner corners 51a, 51b, 51c, 51d do not restrict and hold the corners of the substrate 1, but have a simple stopper function for preventing the substrate 1 from falling off the substrate holding means 2. . In addition, the substrate platform 41 has a shape that is similar in appearance to the substrate support member 40 described in the fourth embodiment. That is, the shape of the portion that holds and supports the substrate 1 has a curved surface that is substantially equal to the bent state when the substrate 1 is actually held and supported. However, the projection length of the substrate support member 40 described in the fourth embodiment on the side where the substrate 1 is bent is set to be smaller than the projection length on the side where the substrate 1 is bent, whereas the substrate mounting portion 41a. 41b, the projection length on the side on which the substrate 1 is bent is formed to be equal to or larger than the projection length on the side on which the substrate 1 is bent.

上述した本発明の実施の形態５における保持装置となる基板保持手段２では、基板１が載置される部分の面積を基板１の表面積より大きく設定した下部部材８２に、基板１が撓む側の投影長さを基板１の撓んだ側の投影長さと等しいか、または大きく形成した基板載置部４１ａ、４１ｂを配置しているので、基板１が基板１の撓みにより発生する応力に起因する破損等が生ずることのない最適な撓み状態で基板載置部４１ａ、４１ｂに載置されて、下部部材８２や、ストッパ５０ａ、５０ｂ、５０ｃ、５０ｄに接触することなく安定に保持・支持されることになる。   In the substrate holding means 2 serving as the holding device in the fifth embodiment of the present invention described above, the substrate 1 is bent on the lower member 82 in which the area of the portion on which the substrate 1 is placed is set larger than the surface area of the substrate 1. Since the substrate mounting portions 41a and 41b formed so as to be equal to or larger than the projection length of the bent side of the substrate 1 are disposed, the substrate 1 is caused by the stress generated by the bending of the substrate 1. Placed on the substrate placement portions 41a and 41b in an optimal bending state without causing damage or the like, and stably held and supported without contacting the lower member 82 or the stoppers 50a, 50b, 50c, and 50d. Will be.

また、本発明の実施の形態５における保持装置となる基板保持手段２に備わる基板載置部４１ａ、４１ｂの形状は図７に示した形状に限定されるものではなく、別の形状も可能である。図８（ａ）に斜視図で示したように、板状ではなくブロック状の形状に形成した基板載置部４１、４２ａを用いることが可能である。このとき、基板１を保持・支持する部分の形状が、実際に基板１を保持・支持するときの撓んだ状態と略等しい曲面を有し、基板１が撓む側の投影長さを基板１の撓んだ側の投影長さと等しいか、または大きくなるように形成しているところは図７における基板載置部４１ａ、４１ｂと同様である。   Further, the shape of the substrate mounting portions 41a and 41b provided in the substrate holding means 2 serving as the holding device in the fifth embodiment of the present invention is not limited to the shape shown in FIG. 7, and other shapes are possible. is there. As shown in the perspective view of FIG. 8A, it is possible to use the substrate mounting portions 41 and 42a formed in a block shape instead of a plate shape. At this time, the shape of the portion that holds and supports the substrate 1 has a curved surface that is substantially the same as the bent state when the substrate 1 is actually held and supported, and the projected length of the side on which the substrate 1 is bent is the substrate. 7 is the same as the substrate mounting portions 41a and 41b in FIG.

さらに、図８（ｂ）、図８（ｃ）にそれぞれ斜視図、側面図で示すように、基板載置部４２ａ、４２ｂを細かいブロックに分割してその一部のみを用いて複数個で構成することも可能である。図８（ｂ）、図８（ｃ）では、基板載置部４１、基板載置部４２ａをそれぞれ５個ずつの基板載置部ブロック４３ａ、４３ｂ、４３ｃ、４３ｄ、４３ｅおよび基板載置部ブロック４３ｆ、４３ｇ、４３ｈ、４３ｉ、４３ｊで構成している。このとき、それぞれのブロックの頂部は基板１を保持・支持するときの撓んだ状態と略等しい曲面に対応しており、図８（ａ）に示した基板載置部４２ａ、４２ｂと同等の機能を有している。なお、図８（ｂ）、図８（ｃ）では、５個の基板載置部ブロックを用いた例を示しているが、５個に限定されるものではない。   Further, as shown in the perspective view and the side view in FIGS. 8B and 8C, respectively, the substrate mounting portions 42a and 42b are divided into fine blocks and configured by using only a part thereof. It is also possible to do. In FIG. 8B and FIG. 8C, the substrate platform 41 and the substrate platform 42a each include five substrate platform blocks 43a, 43b, 43c, 43d, and 43e, and the substrate platform block. 43f, 43g, 43h, 43i, 43j. At this time, the top of each block corresponds to a curved surface that is substantially equal to the bent state when the substrate 1 is held and supported, and is equivalent to the substrate placement portions 42a and 42b shown in FIG. It has a function. 8B and 8C show an example in which five substrate placement unit blocks are used, but the number is not limited to five.

以上説明したように、本発明の実施の形態５における基板保持方法により、基板を基板保持手段が備える基板載置部に安定的に保持・支持することが可能になり、基板の撓みにより発生する応力に起因する破損等の問題も解消できることになる。   As described above, the substrate holding method according to the fifth embodiment of the present invention makes it possible to stably hold and support the substrate on the substrate mounting portion provided in the substrate holding means, which occurs due to the bending of the substrate. Problems such as breakage due to stress can also be solved.

なお、本発明の実施の形態５における保持装置となる基板保持手段に備わる基板載置部は撓んで曲がった両端部側に２個または２群の部材に分割した構成の例を図７に示して説明したが、３個または３群以上からなる部材に分割した構成も可能であるし、逆に２個または２つの群の部材を大きい１個または１群の部材にまとめた構成も可能である。   FIG. 7 shows an example of the configuration in which the substrate mounting portion provided in the substrate holding means serving as the holding device in Embodiment 5 of the present invention is divided into two or two groups of members on both sides bent and bent. However, it is possible to divide into three or more groups of members, or conversely, to assemble two or two groups of members into one large or one group of members. is there.

また、上述した本発明の実施の形態５における基板の保持・支持方法においては、基板載置部を基板１の長辺側に平行になるような位置に配置する例で説明したが、基板載置部を基板の短側に平行になるような位置に配置する方法も可能である。   Further, in the above-described substrate holding / supporting method according to the fifth embodiment of the present invention, the substrate mounting portion has been described as an example in which the substrate mounting portion is disposed at a position parallel to the long side of the substrate 1. A method is also possible in which the placing portion is arranged at a position parallel to the short side of the substrate.

本発明にかかるフラットパネルディスプレイ用基板の搬送保持装置および搬送保持方法は、大型化した基板の搬送保持するときに発生するダストの発生および汚れの付着を抑制し、また基板に応力を生じさせる撓みを低減するとともに、処理中の基板の撓み状態の変化を抑制することができ、製品に悪影響を及ぼさずに確実に搬送保持して基板を破損を防止して安定かつ確実に所要の処理を施すことができるので、液晶、ＰＤＰ、ＥＬ等のフラットパネルディスプレイの製造装置等の用途に有用である。   The flat panel display substrate transfer holding device and transfer holding method according to the present invention suppresses the generation of dust and dirt that occur when a large-sized substrate is transferred and held, and also causes bending of the substrate. In addition, the change in the bending state of the substrate during processing can be suppressed, and the substrate can be reliably transported and held without adversely affecting the product to prevent the substrate from being damaged, and the required processing can be performed stably and reliably. Therefore, it is useful for applications such as liquid crystal, PDP, EL and other flat panel display manufacturing apparatuses.

本発明の実施の形態１における基板保持方法を説明する図The figure explaining the board | substrate holding method in Embodiment 1 of this invention 本発明の実施の形態１における基板保持部材の形状および配置のほかの例を示す斜視図The perspective view which shows the other example of the shape and arrangement | positioning of the board | substrate holding member in Embodiment 1 of this invention. 本発明の実施の形態２における基板保持方法を説明する図The figure explaining the board | substrate holding method in Embodiment 2 of this invention 本発明の実施の形態３における基板保持方法を説明する図The figure explaining the substrate holding method in Embodiment 3 of this invention 本発明の実施の形態３における別の基板保持方法を説明する図The figure explaining another board | substrate holding | maintenance method in Embodiment 3 of this invention. 本発明の実施の形態４における基板保持方法を説明する図The figure explaining the board | substrate holding method in Embodiment 4 of this invention 本発明の実施の形態５における基板保持方法を説明する図The figure explaining the substrate holding method in Embodiment 5 of this invention 本発明の実施の形態５における別の基板保持方法を説明する図The figure explaining another board | substrate holding | maintenance method in Embodiment 5 of this invention. 大型基板を保持するときの基板の状態の変化を説明する斜視図The perspective view explaining the change of the state of a board | substrate when holding a large sized board | substrate

符号の説明Explanation of symbols

１ 基板
２ 基板保持手段
２ａ，２ｂ 支持手段
３，３１，３２ 搬送保持手段
４，４０ 基板支持部材
５ アーム
６ 連結部材
７，７２ 高さ位置調整治具
２０ａ，２０ｂ，２０ｃ，２０ｄ 基板保持・支持部材
２１ａ，２１ｂ，２１ｃ，２１ｄ，５１ａ，５１ｂ，５１ｃ，５１ｄ 内側角部
２２ ベース部材
２３ 開口部
３０ 吸着保持具
４１ａ，４１ｂ，４２ａ，４２ｂ 基板載置部
４３ａ，４３ｂ，４３ｃ，４３ｄ，４３ｅ、４３ｆ，４３ｇ，４３ｈ，４３ｉ，４３ｊ 基板載置部ブロック
５０ａ，５０ｂ，５０ｃ，５０ｄ ストッパ
５１ メインアーム
５２，５３，５４，５５ サブアーム
７１ 高さ固定治具
８２ 下部部材 DESCRIPTION OF SYMBOLS 1 Substrate 2 Substrate holding means 2a, 2b Support means 3, 31, 32 Transport holding means 4, 40 Substrate support member 5 Arm 6 Connecting member 7, 72 Height position adjustment jig 20a, 20b, 20c, 20d Substrate holding / support Member 21a, 21b, 21c, 21d, 51a, 51b, 51c, 51d Inner corner 22 Base member 23 Opening 30 Adsorption holder 41a, 41b, 42a, 42b Substrate mounting part 43a, 43b, 43c, 43d, 43e, 43f, 43g, 43h, 43i, 43j Substrate placement block 50a, 50b, 50c, 50d Stopper 51 Main arm 52, 53, 54, 55 Sub arm 71 Height fixing jig 82 Lower member

Claims (18)

矩形薄板状の基板を保持して所定の位置に搬送する搬送保持手段と、
前記基板を端部において保持する基板保持手段と、
を備え、
前記搬送保持手段が前記基板を所定の撓んだ形状に変化させることを特徴とするディスプレイパネルの製造装置。 Transport holding means for holding a rectangular thin plate-shaped substrate and transporting it to a predetermined position;
Substrate holding means for holding the substrate at an end;
With
The apparatus for manufacturing a display panel, wherein the conveyance holding means changes the substrate into a predetermined bent shape. 前記基板保持手段は、前記基板の対角状に４箇所あるコーナ部をそれぞれ保持固定する内側角部を有し、かつ、前記内側角部の対角距離は前記基板の対角長よりも短く形成されていることを特徴とする請求項１に記載のディスプレイパネルの製造装置。 The substrate holding means has inner corner portions for holding and fixing four corner portions diagonally of the substrate, and the diagonal distance of the inner corner portions is shorter than the diagonal length of the substrate. The display panel manufacturing apparatus according to claim 1, wherein the display panel manufacturing apparatus is formed. 前記基板保持手段は、前記基板の長辺側または短辺側のいずれかの端部において前記基板を載置支持したときに前記基板が所定の撓んだ形状の曲面を有した基板載置部と、
前記基板が所定の位置から外れることを防止するストッパと、
を備え、
前記基板載置部の長手方向の投影長は前記基板の撓んだ側の投影長よりも長いか、または等しく形成されていることを特徴とする請求項１に記載のディスプレイパネルの製造装置。 The substrate holding means has a curved surface with a predetermined bent shape when the substrate is placed and supported at an end of either the long side or the short side of the substrate. When,
A stopper for preventing the substrate from coming off a predetermined position;
With
2. The display panel manufacturing apparatus according to claim 1, wherein a projection length in a longitudinal direction of the substrate mounting portion is longer than or equal to a projection length of the substrate on a bent side. 矩形薄板状の基板を保持して所定の位置に搬送する前記搬送保持手段は、前記基板の構成要素を形成しない側の面を吸着保持する保持治具を有し、
前記基板保持手段が前記基板の構成要素を形成する側の面と対向するように配置されていることを特徴とする請求項２または請求項３に記載のディスプレイパネルの製造装置。 The transport holding means for holding a rectangular thin plate-shaped substrate and transporting it to a predetermined position has a holding jig for sucking and holding the surface of the substrate on which the component is not formed,
4. The display panel manufacturing apparatus according to claim 2, wherein the substrate holding unit is disposed so as to face a surface of the substrate on which a component is formed. 5. 前記搬送保持手段に備わる前記保持治具は、アームを固定保持する状態と、可動自在の状態との切り換えが可能な連結部材を有することを特徴とする請求項４に記載のディスプレイパネルの製造装置。 The display panel manufacturing apparatus according to claim 4, wherein the holding jig provided in the conveyance holding unit includes a connecting member capable of switching between a state in which the arm is fixedly held and a state in which the arm is movable. . 前記搬送保持手段に備わる前記保持治具は、前記基板の高さ位置を可変にする複数の高さ位置調整治具を有することを特徴とする請求項４に記載のディスプレイパネルの製造装置。 The display panel manufacturing apparatus according to claim 4, wherein the holding jig provided in the conveyance holding unit includes a plurality of height position adjusting jigs that can change a height position of the substrate. 前記基板載置部は、複数個に分割された部材が前記基板の撓んだ側に平行に配置されていることを特徴とする請求項３に記載のディスプレイパネルの製造装置。 The apparatus for manufacturing a display panel according to claim 3, wherein the substrate placement unit includes a plurality of divided members arranged in parallel to a side of the substrate bent. 前記基板載置部は、複数個に分割された部材が交叉して配置されていることを特徴とする請求項３に記載のディスプレイパネルの製造装置。 The apparatus for manufacturing a display panel according to claim 3, wherein the substrate mounting portion is formed by crossing a plurality of divided members. 矩形薄板状の基板を支持して所定の位置に搬送する基板支持部材と、
前記基板を保持する基板保持手段と、
を備え、
前記基板支持部材が前記基板を所定の撓んだ形状に変化させることを特徴とするディスプレイパネルの製造装置。 A substrate support member that supports a rectangular thin plate-shaped substrate and conveys the substrate to a predetermined position;
Substrate holding means for holding the substrate;
With
The display panel manufacturing apparatus, wherein the substrate support member changes the substrate into a predetermined bent shape. 前記基板保持手段は前記基板の対角状に４箇所あるコーナ部をそれぞれ保持固定する内部角部を有し、かつ、前記内部角部の対角距離は前記基板の対角長よりも短く形成されていることを特徴とする請求項９に記載のディスプレイパネルの製造装置。 The substrate holding means has internal corner portions for holding and fixing the four corner portions diagonally of the substrate, and the diagonal distance between the internal corner portions is shorter than the diagonal length of the substrate. The display panel manufacturing apparatus according to claim 9, wherein the display panel manufacturing apparatus is a display panel. 前記基板支持部材は、前記基板の構成要素を形成する側の面を載置支持するように配置されていることを特徴とする請求項９に記載のディスプレイパネルの製造装置。 10. The display panel manufacturing apparatus according to claim 9, wherein the substrate support member is disposed so as to place and support a surface of the substrate on which a component is formed. 前記基板支持部材は、前記基板の長辺側または短辺側のいずれかに平行な中心線において前記基板の構成要素を形成する側の面を載置支持したときに前記基板が撓んだ状態と略等しい曲面を有していることを特徴とする請求項９に記載のディスプレイパネルの製造装置。 The substrate support member is in a state in which the substrate is bent when a surface on which the component of the substrate is formed is placed and supported on a center line parallel to either the long side or the short side of the substrate. The display panel manufacturing apparatus according to claim 9, wherein the display panel has a curved surface substantially equal to the curved surface. 前記基板支持部材は、複数個に分割された部材が前記基板の撓んだ側に平行に配置されていることを特徴とする請求項１２に記載のディスプレイパネルの製造装置。 The display panel manufacturing apparatus according to claim 12, wherein the substrate support member includes a plurality of divided members arranged in parallel with the bent side of the substrate. 前記基板支持部材は、複数個に分割された部材が交叉して配置されていることを特徴とする請求項１２に記載のディスプレイパネルの製造装置。 13. The display panel manufacturing apparatus according to claim 12, wherein the substrate support member is formed by crossing a plurality of divided members. 搬送保持手段により矩形薄板状の基板を保持して、前記基板を固定保持する基板保持手段の上方に搬送するステップと、
前記基板の構成要素を形成する側の面を前記基板保持手段に備わるベース部材と対向させて前記基板を降下させるステップと、
前記基板を所定の撓んだ形状に変化させるステップと、
撓んだ前記基板を前記基板保持手段に載置して保持するステップと、
を備えることを特徴とするディスプレイパネルの製造方法。 Holding a rectangular thin plate-shaped substrate by a conveyance holding means, and conveying the substrate above the substrate holding means for fixing and holding the substrate;
Lowering the substrate with a surface on which the component of the substrate is formed facing a base member provided in the substrate holding means;
Changing the substrate to a predetermined bent shape;
Placing and holding the bent substrate on the substrate holding means;
A method for producing a display panel, comprising: 矩形薄板状の基板の構成要素を形成する側の面を基板支持部材に載置支持して前記基板を自重により撓ませつつ、基板保持手段の上方に搬送するステップと、
前記基板の構成要素を形成する側の面を前記基板保持手段に備わるベース部材と対向させて前記基板を降下させるステップと、
撓んだ前記基板を前記基板保持手段に載置して保持するステップと、
を備えることを特徴とするディスプレイパネルの製造方法。 Transporting the substrate on the side that forms the components of the rectangular thin plate-like substrate on the substrate support member and bending the substrate by its own weight, and transporting it above the substrate holding means;
Lowering the substrate with a surface on which the component of the substrate is formed facing a base member provided in the substrate holding means;
Placing and holding the bent substrate on the substrate holding means;
A method for producing a display panel, comprising: 前記基板に４箇所あるコーナ部に対応し、かつ、対角距離が前記基板の対角長よりも短く設定して配置された内部角部を有する前記基板保持手段により前記基板を保持することを特徴とする請求項１５または請求項１６に記載のディスプレイパネルの製造方法。 The substrate is held by the substrate holding means corresponding to the corner portions at four locations on the substrate and having internal corner portions arranged with a diagonal distance set shorter than the diagonal length of the substrate. The method of manufacturing a display panel according to claim 15 or 16, 前記基板の長辺側または短辺側のいずれかに平行な中心線において前記基板の構成要素を形成する側の面を載置支持したときに前記基板が撓んだ状態と略等しい曲面を有する前記基板支持部材により前記基板を保持することを特徴とする請求項１５または請求項１６に記載のディスプレイパネルの製造方法。 The substrate has a curved surface that is substantially equal to a bent state when a surface on which the component of the substrate is formed is placed and supported at a center line parallel to either the long side or the short side of the substrate. The display panel manufacturing method according to claim 15, wherein the substrate is held by the substrate support member.
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