JP2006307247A - 成膜装置 - Google Patents
成膜装置 Download PDFInfo
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- JP2006307247A JP2006307247A JP2005127842A JP2005127842A JP2006307247A JP 2006307247 A JP2006307247 A JP 2006307247A JP 2005127842 A JP2005127842 A JP 2005127842A JP 2005127842 A JP2005127842 A JP 2005127842A JP 2006307247 A JP2006307247 A JP 2006307247A
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- 230000008021 deposition Effects 0.000 title abstract description 6
- 239000000758 substrate Substances 0.000 claims abstract description 112
- 230000008020 evaporation Effects 0.000 claims abstract description 16
- 238000001704 evaporation Methods 0.000 claims abstract description 16
- 239000000463 material Substances 0.000 claims abstract description 15
- 230000015572 biosynthetic process Effects 0.000 claims description 41
- 238000004544 sputter deposition Methods 0.000 claims description 24
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 239000010408 film Substances 0.000 description 66
- 238000003860 storage Methods 0.000 description 10
- 238000000034 method Methods 0.000 description 8
- 230000002093 peripheral effect Effects 0.000 description 8
- 238000010438 heat treatment Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000005401 electroluminescence Methods 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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Abstract
【解決手段】 成膜室12内に、蒸発源4と、同一円周上で所定の間隔を置いて相互にパターンが同一または異なるマスクの配置を可能とした回転自在なステージ2と、基板の搬送を可能とする搬送手段6とを設ける。搬送手段によって、いずれかのマスク上にこのマスクに対し位置決めして基板を設置した後、ステージを回転させて蒸発源に対向した位置に搬送し、マスクを通して基板への成膜を行う。
【選択図】 図1
Description
2 ステージ
23 開口部
24 回転軸
27 駆動手段
4 蒸発源(スパッタリングカソード)
7 基板ホルダー
8 マスクホルダー
H 基板保持具
Claims (8)
- 成膜室内に、蒸発源と、同一円周上で所定の間隔を置いて相互にパターンが同一または異なるマスクの配置を可能とした回転自在なステージと、基板の搬送を可能とする搬送手段とを備え、この搬送手段によって、いずれかのマスク上にこのマスクに対し位置決めして基板を設置した後、ステージを回転させて蒸発源に対向した位置に搬送し、マスクを通して基板への成膜を可能としたことを特徴とする成膜装置。
- 前記マスクは、前記ステージに載置され、基板が臨む開口部に有するマスクホルダーにセットしたものであることを特徴とする請求項1記載の成膜装置。
- 前記基板は、前記マスクホルダーとの嵌合により組付自在な基板ホルダーにセットしたものであることを特徴とする請求項2記載の成膜装置。
- 前記搬送手段を前記成膜室内に設け、同一の成膜室においてマスク相互の間で基板の載せかえを可能としたことを特徴とする請求項1乃至請求項3のいずれかに記載の成膜装置。
- 前記成膜室に、所定の真空度に保持可能なロードロックチャンバをゲートバルブを介して接続したことを特徴とする請求項1乃至請求項4のいずれかに記載の成膜装置。
- 前記蒸発源を、前記ステージと同心である円周上に複数配置し、同一または相互に異なる材料の複数の基板への同時成膜を可能としたことを特徴とする請求項1乃至請求項5のいずれかに記載の成膜装置。
- 前記ステージに駆動手段を設け、前記ステージの回転方向に対し直角な方向に移動自在としたことを特徴とする請求項1乃至請求項6のいずれかに記載の成膜装置。
- 前記蒸発源は、スパッタリング法による成膜を可能とするスパッタカソードであることを特徴とする請求項1乃至請求項7のいずれかに記載の成膜装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005127842A JP4701815B2 (ja) | 2005-04-26 | 2005-04-26 | 成膜装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005127842A JP4701815B2 (ja) | 2005-04-26 | 2005-04-26 | 成膜装置 |
Publications (2)
Publication Number | Publication Date |
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JP2006307247A true JP2006307247A (ja) | 2006-11-09 |
JP4701815B2 JP4701815B2 (ja) | 2011-06-15 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2005127842A Active JP4701815B2 (ja) | 2005-04-26 | 2005-04-26 | 成膜装置 |
Country Status (1)
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JP (1) | JP4701815B2 (ja) |
Cited By (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008119616A (ja) * | 2006-11-13 | 2008-05-29 | Yamashin-Filter Corp | 濾過装置、濾過構造 |
US8137466B2 (en) | 2009-08-24 | 2012-03-20 | Samsung Mobile Display Co., Ltd. | Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same |
JP2013249545A (ja) * | 2013-09-02 | 2013-12-12 | Hitachi High-Technologies Corp | 成膜装置 |
US8852687B2 (en) | 2010-12-13 | 2014-10-07 | Samsung Display Co., Ltd. | Organic layer deposition apparatus |
US8859325B2 (en) | 2010-01-14 | 2014-10-14 | Samsung Display Co., Ltd. | Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method |
US8859043B2 (en) | 2011-05-25 | 2014-10-14 | Samsung Display Co., Ltd. | Organic layer deposition apparatus and method of manufacturing organic light-emitting display device by using the same |
US8865252B2 (en) | 2010-04-06 | 2014-10-21 | Samsung Display Co., Ltd. | Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same |
US8871542B2 (en) | 2010-10-22 | 2014-10-28 | Samsung Display Co., Ltd. | Method of manufacturing organic light emitting display apparatus, and organic light emitting display apparatus manufactured by using the method |
US8876975B2 (en) | 2009-10-19 | 2014-11-04 | Samsung Display Co., Ltd. | Thin film deposition apparatus |
US8882922B2 (en) | 2010-11-01 | 2014-11-11 | Samsung Display Co., Ltd. | Organic layer deposition apparatus |
US8882556B2 (en) | 2010-02-01 | 2014-11-11 | Samsung Display Co., Ltd. | Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method |
US8894458B2 (en) | 2010-04-28 | 2014-11-25 | Samsung Display Co., Ltd. | Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method |
US8906731B2 (en) | 2011-05-27 | 2014-12-09 | Samsung Display Co., Ltd. | Patterning slit sheet assembly, organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus, and the organic light-emitting display apparatus |
US8945974B2 (en) | 2012-09-20 | 2015-02-03 | Samsung Display Co., Ltd. | Method of manufacturing organic light-emitting display device using an organic layer deposition apparatus |
US8951610B2 (en) | 2011-07-04 | 2015-02-10 | Samsung Display Co., Ltd. | Organic layer deposition apparatus |
US8968829B2 (en) | 2009-08-25 | 2015-03-03 | Samsung Display Co., Ltd. | Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same |
US8973525B2 (en) | 2010-03-11 | 2015-03-10 | Samsung Display Co., Ltd. | Thin film deposition apparatus |
US9018647B2 (en) | 2010-09-16 | 2015-04-28 | Samsung Display Co., Ltd. | Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method |
US9051636B2 (en) | 2011-12-16 | 2015-06-09 | Samsung Display Co., Ltd. | Organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus using the same, and organic light-emitting display apparatus |
US9234270B2 (en) | 2011-05-11 | 2016-01-12 | Samsung Display Co., Ltd. | Electrostatic chuck, thin film deposition apparatus including the electrostatic chuck, and method of manufacturing organic light emitting display apparatus by using the thin film deposition apparatus |
US9249493B2 (en) | 2011-05-25 | 2016-02-02 | Samsung Display Co., Ltd. | Organic layer deposition apparatus and method of manufacturing organic light-emitting display apparatus by using the same |
US9257649B2 (en) | 2012-07-10 | 2016-02-09 | Samsung Display Co., Ltd. | Method of manufacturing organic layer on a substrate while fixed to electrostatic chuck and charging carrier using contactless power supply module |
US9279177B2 (en) | 2010-07-07 | 2016-03-08 | Samsung Display Co., Ltd. | Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method |
US9347886B2 (en) | 2013-06-24 | 2016-05-24 | Samsung Display Co., Ltd. | Apparatus for monitoring deposition rate, apparatus provided with the same for depositing organic layer, method of monitoring deposition rate, and method of manufacturing organic light emitting display apparatus using the same |
US9388488B2 (en) | 2010-10-22 | 2016-07-12 | Samsung Display Co., Ltd. | Organic film deposition apparatus and method of manufacturing organic light-emitting display device by using the same |
US9450140B2 (en) | 2009-08-27 | 2016-09-20 | Samsung Display Co., Ltd. | Thin film deposition apparatus and method of manufacturing organic light-emitting display apparatus using the same |
WO2016147710A1 (ja) * | 2015-03-13 | 2016-09-22 | 株式会社アルバック | 薄膜形成装置 |
US9496524B2 (en) | 2012-07-10 | 2016-11-15 | Samsung Display Co., Ltd. | Organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus using the same, and organic light-emitting display apparatus manufactured using the method |
US9496317B2 (en) | 2013-12-23 | 2016-11-15 | Samsung Display Co., Ltd. | Method of manufacturing organic light emitting display apparatus |
US9512515B2 (en) | 2011-07-04 | 2016-12-06 | Samsung Display Co., Ltd. | Organic layer deposition apparatus and method of manufacturing organic light-emitting display device by using the same |
US9748483B2 (en) | 2011-01-12 | 2017-08-29 | Samsung Display Co., Ltd. | Deposition source and organic layer deposition apparatus including the same |
US10246769B2 (en) | 2010-01-11 | 2019-04-02 | Samsung Display Co., Ltd. | Thin film deposition apparatus |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09111453A (ja) * | 1995-10-13 | 1997-04-28 | Shin Etsu Chem Co Ltd | 真空基板搬送装置及び真空基板搬送方法 |
JP2002033283A (ja) * | 2000-07-13 | 2002-01-31 | Japan Science & Technology Corp | コンビナトリアルデバイス作製装置 |
JP2003306761A (ja) * | 2002-04-17 | 2003-10-31 | Ulvac Japan Ltd | マスク位置合せ機構付き成膜装置 |
-
2005
- 2005-04-26 JP JP2005127842A patent/JP4701815B2/ja active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09111453A (ja) * | 1995-10-13 | 1997-04-28 | Shin Etsu Chem Co Ltd | 真空基板搬送装置及び真空基板搬送方法 |
JP2002033283A (ja) * | 2000-07-13 | 2002-01-31 | Japan Science & Technology Corp | コンビナトリアルデバイス作製装置 |
JP2003306761A (ja) * | 2002-04-17 | 2003-10-31 | Ulvac Japan Ltd | マスク位置合せ機構付き成膜装置 |
Cited By (40)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008119616A (ja) * | 2006-11-13 | 2008-05-29 | Yamashin-Filter Corp | 濾過装置、濾過構造 |
US8137466B2 (en) | 2009-08-24 | 2012-03-20 | Samsung Mobile Display Co., Ltd. | Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same |
US8193011B2 (en) | 2009-08-24 | 2012-06-05 | Samsung Mobile Display Co., Ltd. | Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same |
US8968829B2 (en) | 2009-08-25 | 2015-03-03 | Samsung Display Co., Ltd. | Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same |
US9450140B2 (en) | 2009-08-27 | 2016-09-20 | Samsung Display Co., Ltd. | Thin film deposition apparatus and method of manufacturing organic light-emitting display apparatus using the same |
US9224591B2 (en) | 2009-10-19 | 2015-12-29 | Samsung Display Co., Ltd. | Method of depositing a thin film |
US8876975B2 (en) | 2009-10-19 | 2014-11-04 | Samsung Display Co., Ltd. | Thin film deposition apparatus |
US10287671B2 (en) | 2010-01-11 | 2019-05-14 | Samsung Display Co., Ltd. | Thin film deposition apparatus |
US10246769B2 (en) | 2010-01-11 | 2019-04-02 | Samsung Display Co., Ltd. | Thin film deposition apparatus |
US8859325B2 (en) | 2010-01-14 | 2014-10-14 | Samsung Display Co., Ltd. | Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method |
US8882556B2 (en) | 2010-02-01 | 2014-11-11 | Samsung Display Co., Ltd. | Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method |
US9453282B2 (en) | 2010-03-11 | 2016-09-27 | Samsung Display Co., Ltd. | Thin film deposition apparatus |
US8973525B2 (en) | 2010-03-11 | 2015-03-10 | Samsung Display Co., Ltd. | Thin film deposition apparatus |
US8865252B2 (en) | 2010-04-06 | 2014-10-21 | Samsung Display Co., Ltd. | Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same |
US9136310B2 (en) | 2010-04-28 | 2015-09-15 | Samsung Display Co., Ltd. | Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method |
US8894458B2 (en) | 2010-04-28 | 2014-11-25 | Samsung Display Co., Ltd. | Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method |
US9279177B2 (en) | 2010-07-07 | 2016-03-08 | Samsung Display Co., Ltd. | Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method |
US9018647B2 (en) | 2010-09-16 | 2015-04-28 | Samsung Display Co., Ltd. | Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method |
US8871542B2 (en) | 2010-10-22 | 2014-10-28 | Samsung Display Co., Ltd. | Method of manufacturing organic light emitting display apparatus, and organic light emitting display apparatus manufactured by using the method |
US9388488B2 (en) | 2010-10-22 | 2016-07-12 | Samsung Display Co., Ltd. | Organic film deposition apparatus and method of manufacturing organic light-emitting display device by using the same |
US8882922B2 (en) | 2010-11-01 | 2014-11-11 | Samsung Display Co., Ltd. | Organic layer deposition apparatus |
US8852687B2 (en) | 2010-12-13 | 2014-10-07 | Samsung Display Co., Ltd. | Organic layer deposition apparatus |
US9748483B2 (en) | 2011-01-12 | 2017-08-29 | Samsung Display Co., Ltd. | Deposition source and organic layer deposition apparatus including the same |
US9234270B2 (en) | 2011-05-11 | 2016-01-12 | Samsung Display Co., Ltd. | Electrostatic chuck, thin film deposition apparatus including the electrostatic chuck, and method of manufacturing organic light emitting display apparatus by using the thin film deposition apparatus |
US8859043B2 (en) | 2011-05-25 | 2014-10-14 | Samsung Display Co., Ltd. | Organic layer deposition apparatus and method of manufacturing organic light-emitting display device by using the same |
US9249493B2 (en) | 2011-05-25 | 2016-02-02 | Samsung Display Co., Ltd. | Organic layer deposition apparatus and method of manufacturing organic light-emitting display apparatus by using the same |
US8906731B2 (en) | 2011-05-27 | 2014-12-09 | Samsung Display Co., Ltd. | Patterning slit sheet assembly, organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus, and the organic light-emitting display apparatus |
US8951610B2 (en) | 2011-07-04 | 2015-02-10 | Samsung Display Co., Ltd. | Organic layer deposition apparatus |
US9777364B2 (en) | 2011-07-04 | 2017-10-03 | Samsung Display Co., Ltd. | Organic layer deposition apparatus and method of manufacturing organic light-emitting display device by using the same |
US9512515B2 (en) | 2011-07-04 | 2016-12-06 | Samsung Display Co., Ltd. | Organic layer deposition apparatus and method of manufacturing organic light-emitting display device by using the same |
US9051636B2 (en) | 2011-12-16 | 2015-06-09 | Samsung Display Co., Ltd. | Organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus using the same, and organic light-emitting display apparatus |
US9496524B2 (en) | 2012-07-10 | 2016-11-15 | Samsung Display Co., Ltd. | Organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus using the same, and organic light-emitting display apparatus manufactured using the method |
US9257649B2 (en) | 2012-07-10 | 2016-02-09 | Samsung Display Co., Ltd. | Method of manufacturing organic layer on a substrate while fixed to electrostatic chuck and charging carrier using contactless power supply module |
US10431779B2 (en) | 2012-07-10 | 2019-10-01 | Samsung Display Co., Ltd. | Organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus using the same, and organic light-emitting display apparatus manufactured using the method |
US8945974B2 (en) | 2012-09-20 | 2015-02-03 | Samsung Display Co., Ltd. | Method of manufacturing organic light-emitting display device using an organic layer deposition apparatus |
US9347886B2 (en) | 2013-06-24 | 2016-05-24 | Samsung Display Co., Ltd. | Apparatus for monitoring deposition rate, apparatus provided with the same for depositing organic layer, method of monitoring deposition rate, and method of manufacturing organic light emitting display apparatus using the same |
JP2013249545A (ja) * | 2013-09-02 | 2013-12-12 | Hitachi High-Technologies Corp | 成膜装置 |
US9496317B2 (en) | 2013-12-23 | 2016-11-15 | Samsung Display Co., Ltd. | Method of manufacturing organic light emitting display apparatus |
WO2016147710A1 (ja) * | 2015-03-13 | 2016-09-22 | 株式会社アルバック | 薄膜形成装置 |
JPWO2016147710A1 (ja) * | 2015-03-13 | 2017-11-24 | 株式会社アルバック | 薄膜形成装置 |
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