JP2006066522A - 半導体装置およびその製造方法 - Google Patents
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Abstract
【解決手段】支持基板11と、支持基板11の第1面11a側に設けられた多層配線層12と、支持基板11の第2面11b側に設けられた多層絶縁層13と、支持基板11と多層絶縁層13とを連通する開口部11−1、13−1に装着された半導体チップ14と、半導体チップ14を覆い開口部11−1、13−1を充填する樹脂部15と、多層配線層12の表面に設けられた電極パッド16に接続されたデカップリングキャパシタ18等から構成される。デカップリングキャパシタ18を半導体チップ14に近接して設けると共に支持基板11の多層配線層12の反対側に多層絶縁層13を設けて、熱膨張係数差による反りや歪みを抑制する。
【選択図】図3
Description
図3は、本発明の第1の実施の形態に係る半導体装置の概略断面図である。
図10は、第2の実施の形態に係る半導体装置の断面図である。図中、先に説明した部分に対応する部分には同一の参照符号を付し、説明を省略する。
(付記1) 支持体と、
前記支持体の一方の面に配設された第1の基板と、
前記支持体の他方の面に配設された第2の基板と、
前記支持体および第2の基板を貫通する開口部に露出する第1の基板上に配設された半導体チップと、を備え、
前記第1の基板は、
第1の絶縁層と配線層を含み、
前記開口部内に露出する第1の面に、前記半導体チップと接続される複数の第1の電極を有し、
前記第2の基板は、第1の絶縁層と略同一の材料からなる第2の絶縁層を含むことを特徴とする半導体装置。
(付記2) 前記第2の基板は、前記第2の絶縁層を積層してなることを特徴とする付記1記載の半導体装置。
(付記3) 前記第1の基板の第1の絶縁層の層数と、前記第2の基板の第2の絶縁層の層数は同一であることを特徴とする付記1または2記載の半導体装置。
(付記4) 前記半導体チップと第1の電極とは、はんだバンプを介して接続されてなることを特徴とする付記1〜3のうち、いずれか一項記載の半導体装置。
(付記5) 前記支持体は、Cu、Cu合金、Fe、Ni、FeNi合金、Mo、およびWからなる群のうち、いずれか1種からなる金属基板であることを特徴とする付記1〜4のうち、いずれか一項記載の半導体装置。
(付記6) 前記第1の基板は、第1の面とは反対側の第2の面に、前記第1の電極と配線を介して接続される複数の第2の電極とを有し、
前記第2の電極に接続されてなるデカップリングコンデンサをさらに備えることを特徴とする付記1〜5のうち、いずれか一項記載の半導体装置。
(付記7) 前記半導体チップの表面に配設されたヒートシンクと、前記第2の基板の表面に配設されたスティフナと、前記開口部と半導体チップおよびヒートシンクとの空隙を充填してなる樹脂部をさらに備えることを特徴とする付記1〜6のうち、いずれか一項記載の半導体装置。
(付記8) 支持体の第1の面に第1の基板を形成する工程と、
前記第1の面とは反対側の第2の面に第2の基板を形成する工程と、
前記第2の基板を貫通し、支持体の表面を露出する第1の開口部を形成する工程と、
前記第2の基板をマスクとして、第1の開口部に連通すると共に支持体を貫通する第2の開口部を形成する工程と、
前記第2の開口部内の第1の基板の表面に半導体チップをはんだ接合する工程と、を備え、
前記第1の基板の形成は、
前記支持体の第1の面に半導体チップが接続される第1の電極を形成する処理と、
前記第1の電極を覆う第1の絶縁層および配線層を交互に積層する処理と、
前記第1の基板の表面に第2の電極パターンを形成する処理とを含み、
前記第2の基板の形成は、前記第2の面に第2の絶縁層を積層する処理を含むことを特徴とする半導体装置の製造方法。
(付記9) 前記支持体に第2の開口部を形成する工程はウエットエッチング法を用いることを特徴とする付記8記載の半導体装置の製造方法。
(付記10) 前記第1の電極は、第1の面側に前記ウエットエッチングのエッチングストッパ膜が形成されてなり、
前記第2の開口部を形成する工程において、前記エッチングストッパ膜によりウエットエッチングの終点とすることを特徴とする付記8または9記載の半導体装置の製造方法。
(付記11) 前記支持体に第2の開口部を形成する工程は、支持体の一部を機械的に研削し、次いでウエットエッチング法を用いることを特徴とする付記8〜10のうち、いずれか一項記載の半導体装置の製造方法。
(付記12) 前記第1の基板および第2の基板の形成は、第1の基板の第1の絶縁層とそれに対応する第2の基板の第2の絶縁層を同時に形成することを特徴とする付記8〜11のうち、いずれか一項記載の半導体装置の製造方法。
(付記13) 前記第2の基板の形成は、第1の基板の配線層とほぼ同等の配線層を第2の絶縁層と交互に積層する処理とを含むことを特徴とする付記8〜12のうち、いずれか一項記載の半導体装置の製造方法。
(付記14) 前記第1の基板および第2の基板の形成は、第1の基板の配線層と対応する第2の基板の配線層を同時に形成することを特徴とする付記13記載の半導体装置の製造方法。
(付記15) 支持体と、
前記支持体の一方の面に配設された第1の基板と、
前記支持体の他方の面に配設された第2の基板と、
前記支持体と第2の基板を貫通すると共に、第1の基板を露出する開口部と、を備え、
前記第1の基板は、
第1の絶縁層と配線層を含み、
前記開口部内に露出する第1の面に半導体チップが接続される複数の第1の電極を有し、
前記第2の基板は、第1の絶縁層と略同一の材料からなる第2の絶縁層を含むことを特徴とする半導体搭載用基板。
11 支持基板
11−1、13−1 開口部
12 多層配線層
13 多層絶縁層
14 半導体チップ
15 樹脂部
16 電極パッド
18 デカップリングキャパシタ
19 接続用パッド
20 はんだバンプ
21、23 絶縁層
22 配線層
31 フォトレジスト膜
32 積層体
33 めっきシード層
34 ドライフィルムフォトレジスト
35 ドライフィルムフォトレジスト
36 多層積層基板
40 半導体装置
41 ヒートシンク
42 スティフナ
Claims (10)
- 支持体と、
前記支持体の一方の面に配設された第1の基板と、
前記支持体の他方の面に配設された第2の基板と、
前記支持体および第2の基板を貫通する開口部に露出する第1の基板上に配設された半導体チップと、を備え、
前記第1の基板は、
第1の絶縁層と配線層を含み、
前記開口部内に露出する第1の面に、前記半導体チップと接続される複数の第1の電極を有し、
前記第2の基板は、第1の絶縁層と略同一の材料からなる第2の絶縁層を含むことを特徴とする半導体装置。 - 前記第2の基板は、前記第2の絶縁層を積層してなることを特徴とする請求項1記載の半導体装置。
- 前記半導体チップと第1の電極とは、はんだバンプを介して接続されてなることを特徴とする請求項1または2記載の半導体装置。
- 前記半導体チップの表面に配設されたヒートシンクと、前記第2の基板の表面に配設されたスティフナと、前記開口部と半導体チップおよびヒートシンクとの空隙を充填してなる樹脂部をさらに備えることを特徴とする請求項1〜3のうち、いずれか一項記載の半導体装置。
- 支持体の第1の面に第1の基板を形成する工程と、
前記第1の面とは反対側の第2の面に第2の基板を形成する工程と、
前記第2の基板を貫通し、支持体の表面を露出する第1の開口部を形成する工程と、
前記第2の基板をマスクとして、第1の開口部に連通すると共に支持体を貫通する第2の開口部を形成する工程と、
前記第2の開口部内の第1の基板の表面に半導体チップをはんだ接合する工程と、を備え、
前記第1の基板の形成は、
前記支持体の第1の面に半導体チップが接続される第1の電極を形成する処理と、
前記第1の電極を覆う第1の絶縁層および配線層を交互に積層する処理と、
前記第1の基板の表面に第2の電極パターンを形成する処理とを含み、
前記第2の基板の形成は、前記第2の面に第2の絶縁層を積層する処理を含むことを特徴とする半導体装置の製造方法。 - 前記支持体に第2の開口部を形成する工程はウエットエッチング法を用いることを特徴とする請求項5記載の半導体装置の製造方法。
- 前記支持体に第2の開口部を形成する工程は、支持体の一部を機械的に研削し、次いでウエットエッチング法を用いることを特徴とする請求項5または6記載の半導体装置の製造方法。
- 前記第1の基板および第2の基板の形成は、第1の絶縁層と、それに対応する第2の絶縁層を同時に形成することを特徴とする請求項5〜7のうち、いずれか一項記載の半導体装置の製造方法。
- 前記第2の基板の形成は、第1の基板の配線層とほぼ同等の配線層を第2の絶縁層と交互に積層する処理とを含むことを特徴とする請求項5〜8のうち、いずれか一項記載の半導体装置の製造方法。
- 前記第1の基板および第2の基板の形成は、第1の基板の配線層と対応する第2の基板の配線層を同時に形成することを特徴とする請求項9記載の半導体装置の製造方法。
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US11/023,044 US7400035B2 (en) | 2004-08-25 | 2004-12-28 | Semiconductor device having multilayer printed wiring board |
US11/822,084 US7799604B2 (en) | 2004-08-25 | 2007-07-02 | Semiconductor device having multilayer printed wiring board and manufacturing method of the same |
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WO2004064150A1 (ja) * | 2003-01-16 | 2004-07-29 | Fujitsu Limited | 電子部品搭載基板の製造方法およびその方法により製造された電子部品搭載基板 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2013243387A (ja) * | 2011-04-25 | 2013-12-05 | Samsung Electro-Mechanics Co Ltd | パッケージ基板及びその製造方法 |
US8822841B2 (en) | 2011-04-25 | 2014-09-02 | Samsung Electro-Mechanics Co., Ltd. | Package substrate and fabricating method thereof |
Also Published As
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US20060043568A1 (en) | 2006-03-02 |
US7799604B2 (en) | 2010-09-21 |
US7400035B2 (en) | 2008-07-15 |
JP4528062B2 (ja) | 2010-08-18 |
US20070257356A1 (en) | 2007-11-08 |
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