JP2005527076A - 有機電気光学素子の気密封止 - Google Patents
有機電気光学素子の気密封止 Download PDFInfo
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- JP2005527076A JP2005527076A JP2003585192A JP2003585192A JP2005527076A JP 2005527076 A JP2005527076 A JP 2005527076A JP 2003585192 A JP2003585192 A JP 2003585192A JP 2003585192 A JP2003585192 A JP 2003585192A JP 2005527076 A JP2005527076 A JP 2005527076A
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Abstract
Description
この目的は、独立請求項において請求される、有機電気光学素子を製造する方法および有機電気光学素子によって、非常に驚くほど単純な方法で達成される。いずれの場合も、有利な改良点は従属請求項に記載されている。
さらに、一例を挙げると、予備封止を適切に行えば、PVDまたはCVDにより付与している間にガラス質構造体を有する層が別の層に貫通するか、あるいはそれを化学的に変成することを防ぐことができる。これは、例えば、別の層が例えばカルシウムなどの非常に軟質の金属または反応しやすい金属から製造されている場合には、第2の導電層に当てはまるかもしれない。
したがって、本発明の素子は、基板と、第1の導電層と、少なくとも1つの有機電気光学材料を含む少なくとも1つの層と、第2の導電層と、さらにガラス質構造体を有する堆積層とからなる。
発光素子の場合、電圧が導電層に印加されると、電子はより低い仕事関数を有する層から非占有エネルギー状態に注入される。次に、より高い仕事関数を有する層から注入される欠陥電子との再結合が、放射される光量子を発生させる。
さらに、OLEDは断熱コーティングとして機能することができ、かつガラス質構造体を有する層を用いたコーティング中にOLED上の熱負荷を低減させる少なくとも1つの予備封止層を含んでもよい。さらに、予備封止コーティングはガラス質構造体を有する層のために安定したベースを形成するように機能し得る。
また、OLEDは有利には、少なくとも1つのガラス質構造体を有する層に好ましくは隣接する少なくとも1つの結合層を含んでもよい。このタイプの結合層によって、ガラス質構造体を有する層の結合の改善が得られる。この結果、比較的高い成長率および比較的により滑らかな層が堆積中に達成され得る。さらに、このタイプの結合層を用いて層の固有の応力を低減させることができる。
本発明を好適な実施形態に基づきかつ添付図面を参照してより詳細に記載する。添付図面中の同一の参照番号は、同一または類似する部分を示す。
わかりやすくするために、有機電気光学材料を含む層15を以下では有機発光素子と呼ぶ。しかし、この層は光起電力素子用の光吸収光起電力層として設計されてもよい。
誘電率εは約4.7(25℃、1MHz)、tanδは約45×10−4(25℃、1MHz)である。蒸着コーティング方法およびこのシステムの構成要素の異なる揮発性によって、結果としてターゲット材料と蒸着コーティングによって付与された層との間にわずかに異なる化学量論が得られる。蒸着コーティングによって付与された層のずれが括弧内に示されている。
成分: ガラス2
SiO2 71%
B2O3 26%
Na2O 0.5%
Li2O 0.5%
K2O 1.0%
Al2O3 1.0%
特に使用されるのが好ましいこれら2つのホウケイ酸ガラスは、以下の表に記載の特性を有している。
この実施形態においては、第1の導電層13は光を透過させるために、例えば、インジウムスズ酸化物などの透過性導電材料からなる。
結合層10はガラス質構造体を有する層7に隣接しており、基板3と層7との間に設けられている。結合層10はガラス質構造体を有する層7と基板3との間で固定的かつ永久的な接合を形成するので、特にOLEDが曲げられた場合に、柔軟性のある基板3からの層7の分離を妨げることができる。当然、上記実施形態および以下に記載の実施形態がこのタイプの結合層を含むことも可能である。
図6に示した実施形態と同様に、図7はガラス質構造体を有する層71、72...、7Nおよびさらなる層81、82...、8Nからなる多層27を備えた本発明のOLEDを示している。しかし、図6に示した実施形態とは異なり、この場合、層は、OLED層構造体5が付与された基板3の側9の反対側11に付与されている。ガラス質構造体を有する層7による図1〜4に関して示した実施形態と同様のOLED層構造体5の封止がさらに示されている。
一定の動作電流2mAにてOLEDの明るさを測定した。
Claims (58)
- 有機電気光学素子(1)を製造する方法であって、
基板(3)を用意する工程と、
第1の導電層(13、17)を付与する工程と、
少なくとも1つの有機電気光学材料を含む少なくとも1つの層(15)を付与する工程と、
第2の導電層(13、17)を付与する工程と、
ガラス質構造体を有する少なくとも1つの層(7、71、72、...、7N)を堆積させる工程と
からなる方法。 - ガラス質構造体を有する層(7、71、72、...、7N)を堆積させる前記工程が、前記層を真空または低圧で堆積させる工程からなる請求項1に記載の方法。
- ガラス質構造体を有する少なくとも1つの層を堆積させる前記工程が、無機ガラスを堆積させる工程からなる請求項1または2に記載の方法。
- ガラス質構造体を有する少なくとも1つの層を堆積させる前記工程が、アルカリ金属含有ガラスを堆積させる工程からなる前記請求項のいずれか1項に記載の方法。
- ガラス質構造体を有する少なくとも1つの層を堆積させる前記工程が、ホウケイ酸ガラスを堆積させる工程からなる前記請求項のいずれか1項に記載の方法。
- ガラス質構造体を有する少なくとも1つの層を堆積させる前記工程が、蒸着コーティングガラスを堆積させる工程からなる前記請求項のいずれか1項に記載の方法。
- ガラス質構造体を有する少なくとも1つの層(7、71、72、...、7N)を堆積させる前記工程が、物理的および/または化学的蒸着法を用いてガラス質構造体を有する少なくとも1つの層(7、71、72、...、7N)を堆積させる工程からなる前記請求項のいずれか1項に記載の方法。
- ガラス質構造体を有する少なくとも1つの層(7、71、72、...、7N)を堆積させる前記工程が、ガラス質構造体を有する層(7、71、72、...、7N)を形成する蒸着コーティング工程からなる前記請求項のいずれか1項に記載の方法。
- ガラス質構造体を有する層(7、71、72、...、7N)を形成する前記蒸着コーティング工程が、電子ビーム蒸着工程からなる請求項8に記載の方法。
- ガラス質構造体を有する層(7、71、72、...、7N)を形成する前記蒸着コーティング工程が、少なくとも2つの蒸着源から共蒸着する工程からなる請求項8または9に記載の方法。
- 前記共蒸着工程が、前記少なくとも2つの蒸着源の少なくとも1つの蒸着速度を変動させる、特に周期的に変動させる工程からなる請求項10に記載の方法。
- 蒸着コーティングによる層の前記堆積が、プラズマイオン支援堆積工程からなる請求項8〜11のいずれか1項に記載の方法。
- ガラス質構造体を有する層(7、71、72、...、7N)を堆積させる前記工程が、プラズマ増強化学蒸着(PECVD)により堆積させる工程、特に、プラズマインパルス化学蒸着(PICVD)により堆積させる工程、および/またはガラス質構造体を有する層(7、71、72、...、7N)上にスパッタリングする工程からなる前記請求項のいずれか1項に記載の方法。
- ガラス質構造体を有する層を堆積せさる前記工程が、有機材料を共蒸着させる工程からなる前記請求項のいずれか1項に記載の方法。
- 前記導電層(13、17)の一方が、他方の導電層(13)に比べてより低い仕事関数を有する前記請求項のいずれか1項に記載の方法。
- 少なくとも1つの正孔注入層および/またはポテンシャル整合層および/または電子阻止層および/または正孔阻止層および/または電子伝導層および/または正孔伝導層および/または電子注入層を付与する工程を含む前記請求項のいずれか1項に記載の方法。
- 前記導電層(13、17)の少なくとも1つが、少なくとも1つの有機電気光学材料を含む層(15)から放出された光に対して少なくとも部分的に透過性である前記請求項のいずれか1項に記載の方法。
- 前記層(13、17)がインジウムスズ酸化物および/またはフッ素ドープ酸化スズを含む請求項17に記載の方法。
- ガラス質構造体を有する前記少なくとも1つの層(7、71、72、...、7N)が、少なくとも1つの有機電気光学材料を含む前記層を付与した後に堆積される請求項17または18に記載の方法。
- 前記第1および/または第2の導電層および/または少なくとも1つの有機電気光学材料を含む前記少なくとも1つの層が構造化された形態で付与される前記請求項のいずれか1項に記載の方法。
- 前記第1の導電層(13)および/または前記第2の導電層(15)が、櫛型に構造化されるように付与される請求項20に記載の方法。
- ガラス質構造体を有する前記層(7、71、72、...、7N)が、少なくとも二成分系の材料からなる前記請求項のいずれか1項に記載の方法。
- ガラス質構造体を有する前記少なくとも1つの層(7、71、72、...、7N)を堆積させる前記工程が、前記第1の導電層(13)および前記第2の導電層(17)ならびに少なくとも1つの有機電気光学材料を含む前記少なくとも1つの層(15)を付与した後に行われる前記請求項のいずれか1項に記載の方法。
- ガラス質構造体を有する前記少なくとも1つの層(7、71、72、...、7N)を堆積させる前記工程が、前記導電層(13、17)を付与する前に行われる前記請求項のいずれか1項に記載の方法。
- ガラス質構造体を有する層(7、71、72、...、7N)を堆積させる前記工程が、少なくとも1つの有機電気光学材料を含む前記層(15)が付与される側(11)から、前記基板の反対側(9)上にガラス質構造体を有する層(7、71、72、...、7N)を堆積させる工程からなる前記請求項のいずれか1項に記載の方法。
- ガラス質構造体を有する層(7、71、72、...、7N)を堆積させる前記工程が、前記第1の導電層(13)および前記第2の導電層(17)ならびに少なくとも1つの有機電気光学材料を含む前記層(15)を付与する前に行われる前記請求項のいずれか1項に記載の方法。
- ガラス質構造体を有する層(7、71、72、...、7N)を堆積させる前記工程が、多層(27)を付与する工程からなる前記請求項のいずれか1項に記載の方法。
- 多層を付与する前記工程が、前記個々の層(71、72、...、7N、81、82、...、8N)の少なくとも2つにおいて異なる化学組成および/または異なる機械的特性を有する多層を付与する工程からなる請求項27に記載の方法。
- 前記多層(27)の前記個々の層(71、72、...、7N、81、82、...、8N)が、異なる屈折率を有する請求項28に記載の方法。
- 予備封止層(21)を付与する工程を含む前記請求項のいずれか1項に記載の方法。
- カバー(23)を付与する工程を含む前記請求項のいずれか1項に記載の方法。
- ガラス質構造体を有する少なくとも1つの層を堆積させる前記工程が、ガラス質構造体を有する少なくとも1つの層で前記カバーの座面の境界端部を被覆する工程からなる請求項31に記載の方法。
- 少なくとも1つの結合層(10)、特に、ガラス質構造体を有する少なくとも1つの層(7、71、72、...、7N)が付与される結合層(10)を付与する工程を含む前記請求項のいずれか1項に記載の方法。
- 特に前記請求項のいずれか1項に記載の方法を用いて製造可能な有機電気光学素子(1)であって、
基板(3)と、
第1の導電層(13)と、
少なくとも1つの有機電気光学材料を含む少なくとも1つの層(15)と、
第2の導電層(17)と、
ガラス質構造体を有する少なくとも1つの堆積された層(7、71、72、...、7N)と
からなる有機電気光学素子。 - ガラス質構造体を有する前記少なくとも1つの堆積された層(7、71、72、...、7N)が、無機ガラス層からなる請求項34に記載の素子。
- ガラス質構造体を有する前記少なくとも1つの堆積された層(7、71、72、...、7N)が、アルカリ金属含有ガラスからなる前記請求項のいずれか1項に記載の素子。
- ガラス質構造体を有する前記少なくとも1つの堆積された層(7、71、72、...、7N)が、ホウケイ酸ガラスからなる前記請求項のいずれか1項に記載の素子。
- ガラス質構造体を有する前記少なくとも1つの堆積された層(7、71、72、...、7N)が、蒸着コーティングガラスからなる前記請求項のいずれか1項に記載の素子。
- ガラス質構造体を有する少なくとも1つの層が、化学的および/または物理的蒸着により堆積される請求項38に記載の素子。
- ガラス質構造体を有する前記少なくとも1つの堆積された層(7、71、72、...、7N)が、蒸着コーティングによって付与される前記請求項のいずれか1項に記載の素子。
- ガラス質構造体を有する前記少なくとも1つの堆積された層(7、71、72、...、7N)が、スパッタリングによって付与される前記請求項のいずれか1項に記載の素子。
- 前記導電層(13、17)の少なくとも一方が、前記導電層(17、13)の他方に比べてより低い仕事関数を有する前記請求項のいずれか1項に記載の素子。
- 前記導電層(13、17)の少なくとも1つが、少なくとも1つの有機電気光学材料を含む層(15)から放出された光に対して少なくとも部分的に透過性である前記請求項のいずれか1項に記載の素子。
- 前記少なくとも部分的に透明な導電層(13)が、インジウムスズ酸化物および/またはフッ素ドープ酸化スズを含む前記請求項のいずれか1項に記載の素子。
- ガラス質構造体を有する前記少なくとも1つの層(7、71、72、...、7N)が、前記基板(3)と第1の導電層(13)または第2の導電層(15)の間に配置された前記請求項のいずれか1項に記載の素子。
- ガラス質構造体を有する前記少なくとも1つの層(7、71、72、...、7N)が、少なくとも1つの有機電気光学材料を含む前記層(15)が設けられた側(9)から前記基板の反対側(11)に設けられる前記請求項のいずれか1項に記載の素子。
- ガラス質構造体を有する前記少なくとも1つの層(7、71、72、...、7N)が、前記被覆された表面に対して垂直方向に沿って変動する組成および/またはこの方向に沿って変動する屈折率を有する前記請求項のいずれか1項に記載の素子。
- ガラス質構造体を有する前記少なくとも1つの層(7、71、72、...、7N)の組成および/または屈折率が、前記被覆された表面に対して垂直方向に周期的に変動する請求項47に記載の素子。
- ガラス質構造体を有する少なくとも1つの層(7、71、72、...、7N)からなる多層(27)を含む前記請求項のいずれか1項に記載の素子。
- 前記多層(27)の個々の層(71、72、...、7N、81、82、...、8N)が異なる屈折率を有する請求項49に記載の素子。
- 少なくとも1つの前封止層(21)を含む前記請求項のいずれか1項に記載の素子。
- 少なくとも1つの正孔注入層および/または少なくとも1つのポテンシャル整合層および/または少なくとも1つの電子阻止層および/または少なくとも1つの正孔阻止層および/または少なくとも1つの電子伝導層および/または少なくとも1つの正孔伝導層および/または少なくとも1つの電子注入層を含む前記請求項のいずれか1項に記載の素子。
- カバー(23)を含む前記請求項のいずれか1項に記載の素子。
- 前記カバー(23)の座面の境界端部がガラス質構造体を有する少なくとも1つの層(7)で被覆される請求項53に記載の素子。
- 結合層(10)、特に、ガラス質構造体を有する前記少なくとも1つの層(7、71、72、...、7N)に隣接する結合層(10)を含む前記請求項のいずれか1項に記載の素子。
- 前記第1および/または前記第2の導電層および/または少なくとも1つの有機電気光学材料を含む前記少なくとも1つの層が構造化される前記請求項のいずれか1項に記載の素子。
- 前記第1の導電層(13)および/または前記第2の導電層(15)が櫛型に構造化される請求項56に記載の素子。
- 前記請求項のいずれか1項に記載された方法を実行しかつ/または前記請求項のいずれか1項に記載された有機電気光学素子(1)を製造する装置であって、該装置がガラス質構造体を有する少なくとも1つの層(7、71、72、...、7N)を堆積させる手段を含む装置。
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DE10222964A DE10222964B4 (de) | 2002-04-15 | 2002-05-23 | Verfahren zur Gehäusebildung bei elektronischen Bauteilen sowie so hermetisch verkapselte elektronische Bauteile |
DE10222958A DE10222958B4 (de) | 2002-04-15 | 2002-05-23 | Verfahren zur Herstellung eines organischen elektro-optischen Elements und organisches elektro-optisches Element |
DE10222609A DE10222609B4 (de) | 2002-04-15 | 2002-05-23 | Verfahren zur Herstellung strukturierter Schichten auf Substraten und verfahrensgemäß beschichtetes Substrat |
DE10252787A DE10252787A1 (de) | 2002-04-15 | 2002-11-13 | Verfahren zur Herstellung eines Kopierschutzes für eine elektronische Schaltung |
DE10301559A DE10301559A1 (de) | 2002-04-15 | 2003-01-16 | Verfahren zur Herstellung eines Erzeugnisses mit einer strukturierten Oberfläche |
PCT/EP2003/003883 WO2003088370A2 (de) | 2002-04-15 | 2003-04-15 | Hermetische verkapselung von organischen elektro-optischen elementen |
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Also Published As
Publication number | Publication date |
---|---|
AU2003233974A1 (en) | 2003-10-27 |
CA2505014A1 (en) | 2003-10-23 |
WO2003088370A2 (de) | 2003-10-23 |
CN1659720A (zh) | 2005-08-24 |
DE10222958A1 (de) | 2003-10-30 |
EP1495501A2 (de) | 2005-01-12 |
DE10222958B4 (de) | 2007-08-16 |
WO2003088370A3 (de) | 2004-06-17 |
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