JP2005279624A5 - - Google Patents

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Publication number
JP2005279624A5
JP2005279624A5 JP2004127395A JP2004127395A JP2005279624A5 JP 2005279624 A5 JP2005279624 A5 JP 2005279624A5 JP 2004127395 A JP2004127395 A JP 2004127395A JP 2004127395 A JP2004127395 A JP 2004127395A JP 2005279624 A5 JP2005279624 A5 JP 2005279624A5
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Japan
Prior art keywords
catalyst
carbon nanotubes
producing carbon
reaction chamber
preheating
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Pending
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JP2004127395A
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Japanese (ja)
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JP2005279624A (en
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Priority to JP2004127395A priority Critical patent/JP2005279624A/en
Priority claimed from JP2004127395A external-priority patent/JP2005279624A/en
Publication of JP2005279624A publication Critical patent/JP2005279624A/en
Publication of JP2005279624A5 publication Critical patent/JP2005279624A5/ja
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Claims (9)

Ｃｏ元素とＴｉ元素を含有することを特徴とするカーボンナノナノチューブ製造用触媒。 A catalyst for producing carbon nano-nanotubes comprising Co element and Ti element. 前記各元素の純金属膜が積層された請求項１に記載のカーボンナノナノチューブ製造用触媒。 The catalyst for producing carbon nano-tubes according to claim 1 , wherein pure metal films of the respective elements are laminated. 前記元素が合金として含有される請求項１に記載のカーボンナノナノチューブ製造用触媒。 The catalyst for producing carbon nano-tubes according to claim 1 , wherein the element is contained as an alloy. 前記各元素が金属化合物として含有される請求項１に記載のカーボンナノナノチューブ製造用触媒。 The catalyst for producing carbon nano-tubes according to claim 1 , wherein each of the elements is contained as a metal compound. 前記触媒を炭化した請求項１〜４のいずれかに記載のカーボンナノナノチューブ製造用触媒。 The catalyst for producing carbon nanotubes according to any one of claims 1 to 4 , wherein the catalyst is carbonized. 請求項１〜５のいずれかに記載のカーボンナノチューブ製造用触媒を炉壁温度で５５０℃以下に加熱された反応室に配置し、この反応室に予熱された原料ガスを供給して、前記触媒にカーボンナノチューブを成長させることを特徴とするカーボンナノチューブの製造方法。 The catalyst for producing carbon nanotubes according to any one of claims 1 to 5 is disposed in a reaction chamber heated to a furnace wall temperature of 550 ° C or lower, and a preheated raw material gas is supplied to the reaction chamber, and the catalyst A method for producing carbon nanotubes, comprising growing carbon nanotubes on a substrate. 前記原料ガスの予熱温度が１００℃以上のガス温度に設定される請求項６に記載のカーボンナノチューブの製造方法。 The method for producing carbon nanotubes according to claim 6 , wherein a preheating temperature of the source gas is set to a gas temperature of 100 ° C. or higher. 成長したカーボンナノチューブを酸化雰囲気で加熱してカーボンナノチューブの純度を向上させる請求項６又は７に記載のカーボンナノチューブの製造方法。 The method for producing carbon nanotubes according to claim 6 or 7 , wherein the grown carbon nanotubes are heated in an oxidizing atmosphere to improve the purity of the carbon nanotubes. 請求項１〜５のいずれかに記載のカーボンナノチューブ製造用触媒が配置された反応室と、反応室の前段に設けられた予熱室と、予熱室を加熱する予熱ヒータと、反応室を炉壁温度で５５０℃以下に加熱する反応ヒータと、原料ガスを予熱室で予熱した後に反応室に供給してカーボンナノチューブを成長させることを特徴とするカーボンナノチューブ製造装置。 A reaction chamber in which the catalyst for producing carbon nanotubes according to any one of claims 1 to 5 is disposed, a preheating chamber provided in a front stage of the reaction chamber, a preheating heater for heating the preheating chamber, and the reaction chamber as a furnace wall A reaction heater for heating to a temperature of 550 ° C. or lower, and a carbon nanotube production apparatus characterized in that a raw material gas is preheated in a preheating chamber and then supplied to the reaction chamber to grow carbon nanotubes.
JP2004127395A 2004-03-27 2004-03-27 Catalyst, method and apparatus for producing carbon nanotube Pending JP2005279624A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004127395A JP2005279624A (en) 2004-03-27 2004-03-27 Catalyst, method and apparatus for producing carbon nanotube

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004127395A JP2005279624A (en) 2004-03-27 2004-03-27 Catalyst, method and apparatus for producing carbon nanotube

Publications (2)

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JP2005279624A JP2005279624A (en) 2005-10-13
JP2005279624A5 true JP2005279624A5 (en) 2007-06-14

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JP2004127395A Pending JP2005279624A (en) 2004-03-27 2004-03-27 Catalyst, method and apparatus for producing carbon nanotube

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Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100745735B1 (en) * 2005-12-13 2007-08-02 삼성에스디아이 주식회사 Method for growing carbon nanotubes and manufacturing method of field emission device therewith
JP5187193B2 (en) * 2006-03-16 2013-04-24 富士通株式会社 Carbon nanotube structure, carbon nanotube production method, electrical functional device, carbon nanotube growth catalyst fine particles
JP4523562B2 (en) * 2006-03-23 2010-08-11 株式会社ノリタケカンパニーリミテド Electron emission source and manufacturing method thereof
JP4706852B2 (en) * 2006-03-27 2011-06-22 株式会社豊田中央研究所 Method for producing carbon nanotube
JP5218958B2 (en) * 2008-01-25 2013-06-26 国立大学法人三重大学 Carbon nanotube synthesis using quasicrystalline catalyst
BR112012002233A2 (en) 2009-07-31 2019-09-24 Massachustts Institute Of Tech systems and methods related to the formation of carbon based nanostructures.
US9663368B2 (en) * 2010-10-28 2017-05-30 Massachusetts Institute Of Technology Carbon-based nanostructure formation using large scale active growth structures
WO2014134484A1 (en) 2013-02-28 2014-09-04 N12 Technologies, Inc. Cartridge-based dispensing of nanostructure films
JP6212598B2 (en) * 2016-05-30 2017-10-11 ニッタ株式会社 Method for forming Fe fine particles for carbon fiber growth

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